Zeiss Crossbeam 350 Instruction Manual
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Zeiss Crossbeam 350 Instruction Manual

Focused ion beam - scanning electron microscope (fib-sem)
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Instruction Manual
ZEISS Crossbeam 350
Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)

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Summary of Contents for Zeiss Crossbeam 350

  • Page 1 Instruction Manual ZEISS Crossbeam 350 Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)
  • Page 2 Effective from: 06/2020 © 2020 Without the prior written consent of ZEISS, this document or any part of it must neither be translated nor reproduced or transmitted in any form or by any means - including electronic or mechanic methods, by photocopying, recording or by any in- formation or filing system.

  • Page 3: Table Of Contents

    Detectors ....................34 3.2.5 Specimen Stage ..................39 3.2.6 Dual Joystick .................... 40 Optional Components and Accessories ..............41 3.3.1 Optional Detectors................... 41 3.3.2 Control Panel ................... 50 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 4 Returning to HV Mode ................89 Shutting down the System..................90 6.7.1 Finishing the Work Session............... 90 6.7.2 De-energizing the Microscope..............91 6.7.3 Performing a Lockout/Tagout..............91 Performing an Emergency Shutdown..............92 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 5 10.2.2 System Layout..................118 10.3 Declaration of Conformity ..................120 11 Parts and Tools .....................121 11.1 Consumables......................121 11.2 Spare Parts ......................121 11.3 Tools and Accessories................... 122 Index ........................123 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 6: Glossary

    SESI Condenser Secondary Electron Secondary Ion Device that collects and focuses the elec- tron beam onto the specimen. STEM Scanning Transmission Electron Micro- EBSD scope Electron Backscatter Diffraction Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 7 Suppressor Electrode (anode) that suppresses un- wanted thermionic emission from the shank of the Schottky field emitter. Voltage Variable Pressure Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000Instruction Manual...

  • Page 8: General Information

    The manual is designed for operators who have been trained to operate the microscope by a ZEISS service representative. Basic operator training and safety instructions will be provided within the scope of initial start-up by ZEISS. Operators of the microscope must not deviate from the in- structions provided in this manual.

  • Page 9: Text Conventions And Link Types

    DANGER indicates an imminently hazardous situation which, if not avoided, will result in death or serious injury. WARNING Type and source of danger WARNING indicates a potentially hazardous situation which, if not avoided, may result in death or serious injury. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 10: Further Applicable Documents

    Material Safety Data Sheets Material safety data sheets (MSDS) of chemicals used in combination with the microscope are contained in the document folder delivered with the microscope. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 11: Contact

    ZEISS 1 General Information | 1.4 Contact 1.4 Contact If you have any questions or problems, please contact your local ZEISS Sales & Service Partner or one of the following addresses: Headquarter Phone: +49 1803 33 63 34 Fax: +49 3641 64 3439 Email: info.microscopy.de@zeiss.com...

  • Page 12: Safety

    SmartSEM Software The SmartSEM software is intended for the operation of scanning electron microscopes (SEMs). The SmartSEM software has to be run exclusively on a personal computer delivered by ZEISS. Any other applications are not allowed. Regarding the operation of the microscope, the following regulations must be met: §...

  • Page 13: Safety Procedures

    2 Safety | 2.2 Safety Procedures § The microscope is only to be used by operators who have been trained by a ZEISS service rep- resentative. Basic operator training and safety instructions will be provided within the scope of the initial start-up by ZEISS. Make sure that everyone who operates the microscope only performs the tasks for which he/she is trained.

  • Page 14: Preventive Maintenance

    Moreover, it is recommended that you conclude a service contract with your local ZEISS service representative or organization. 2.2.4 Safe Handling of Spare Parts Using spare parts that are not provided by ZEISS can be hazardous or can lead to property dam- age: §...

  • Page 15: Electrical Hazards

    § Keep a distance of at least 1 m from the ion getter pumps. § Follow the safety instructions provided by the pump manufacturer. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 16: Mechanical Hazards

    Outside the EU, the user of the microscope has to comply with the local regulations of the coun- try where the microscope is operated. Radiation Protection For questions regarding radiation protection, contact the ZEISS Radiation Safety Officer, Carl Zeiss AG, 73447 Oberkochen, Germany phone: +49 (0) 7364 20 0 2.3.9 Suffocation Hazards...

  • Page 17: Safety Equipment

    Fig. 1: Protective cover panels Electron optical column protective cover panels Specimen chamber protective cover panels Plinth protective cover panels Operation of the microscope is only allowed with attached protective cover panels. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 18: Main Switch

    AC Unit. The EMO button must always be readily accessible and operable. Up to three additional EMO buttons may be connected. Fig. 3: EMO button Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 19: Locking Devices

    The EHT (Extra high tension) is off. § The column chamber valve is closed. This is to prevent any risk of damaging the airlock rod or the gate valve. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 20: Lockout/Tagout Equipment

    Appropriate safety labels on the microscope warn operators of hazards. Each safety label is af- fixed close to the point where a particular hazard exists. Several labels also provide legal informa- tion. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 21 The safety labels always need to be attached to the correct spots at the microscope. If a safety la- bel is lost or unreadable, it needs to be reordered via the following reorder numbers: Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 22 Ensure that the area around the electron micro- The specimen chamber is ventilated with gaseous nitrogen. scope is sufficiently ventilated. Ensure that the area around the electron microscope is sufficiently ventilated. Reorder no. 347800-0033-000-08en 347800-0033-000-08en Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 23 Reorder no. 347800-0033-000-09en Underneath the cover panels of the microscope, there are some more safety labels, which are ad- dressed to authorized ZEISS service representatives. These safety labels are described in the docu- ments for ZEISS service representatives. Position and Figure of the Type Plate...

  • Page 24: Product And Functional Description

    Refer to Ion-sculptor Focused Ion Beam (FIB) Column (Optional) [  32] Specimen chamber with door handle Plinth with ON/STANDBY/OFF buttons Monitor Work desk Dual joystick Refer to Dual Joystick [  40] Personal Computer (PC) Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 25 Refer to Control Panel [  50] § Plasma Cleaner Refer to instruction manual Plasma Cleaner § Energy-dispersive X-ray spectrometer (EDS) for chemical analysis § EBSD for crystallographic mapping Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 26: Main Components

    The vacuum is essential to operate the gun and to prevent collisions of electrons with gas molecules. Fig. 8: Schematics of the vacuum system Gun with filament Gun head Multihole aperture Column chamber valve Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 27 HV mode is the standard mode of the micro- scope. HV mode offers the possibility of analyz- ing and mapping conducting specimens. In HV mode, the pressure in the specimen chamber is less than 10 mbar. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 28 For switching between HV mode and VP mode see Changing to VP Mode [  89] and Returning to HV Mode [  89]. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 29 EHT can be switched on. Quiet Mode The automatically controlled Quiet Mode is optionally available. This option allows switching off the pre-vacuum pump after specimen exchange when the vacuum threshold is achieved. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 30: Electron Optical Column | Gemini I

    Scanning coils Deflect the beam across the specimen surface in what is usually referred to as a raster scan. Specimen Suppressor voltage Extractor voltage Acceleration voltage Liner tube voltage Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 31 Before the electron beam exits the objective lens, the electrostatic lens creates an opposing field which reduces the potential of the electrons by +8 kV. The energy of the electrons reaching the specimen surface therefore corresponds to the set acceleration voltage (EHT). Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 32: Ion-Sculptor Focused Ion Beam (Fib) Column (Optional)

    Purpose The Ion-sculptor Focused Ion Beam (FIB) column is the part of the microscope, where ions are emitted, accelerated, focused, and deflected. Fig. 10: Schematics of the ion optics Ion source Liquid metal ion source of gallium (Ga⁺). Variable apertures Ion beam Objective lens Specimen Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 33 Setting the coincidence point. Crossbeam FIB components. operation § § Mill No image. Ion beam milling or ion beam deposition. § Mills with the milling parame- ters set (milling current). Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 34: Detectors

    STEM detector and produce dark field images. Cathodoluminescence (CL) Electrons impacting on luminescent materials cause the emission of photons which may have wavelengths in the visible spectrum and can be imaged by specialized detectors. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 35 Material contrast aBSD Detector [  44] Angular resolved BSE imag- Compositional contrast aSTEM Detector [  47] Transmitted electrons Diffraction contrast Compositional contrast CL Detector [  49] Light photons Mineralogy Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 36 Without the field of the electrostatic lens, which attracts the secondary electrons, the effi- ciency of the InLens SE detector is reduced. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 37 A positive collector voltage generates an electrical field in front of the detector, thus directing the low energy SEs towards the scintillator. Info For all standard applications, the collector bias should be set to +300 V. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 38 It is highly recommended that the CCD illumination control is set to Auto Detect. This avoids any problems by the user forgetting to switch the illumination back for a different detector. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 39: Specimen Stage

    Movement of the specimen surface into the tilt axis at various working distances Rotation Stage rotation parallel to the X-Y plane Tilt Stage tilt about an axis parallel to the X axis Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 40: Dual Joystick

    At higher magnifications the stage movement is slower. The stage is moving with its maximum speed when viewing the specimen with the CCD (Charge Coupled De- vice) camera. The different axes can also be moved simultaneously. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 41: Optional Components And Accessories

    The degree of amplification is depending on the photomultiplier voltage, which regulates the contrast. The preamplifier amplifies the signal and regulates the brightness. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 42 +300 V Ion mode Secondary ions Crystal orientation contrast, ma- terial contrast e.g. imaging of typical collector voltage −4 kV corrosion/oxidation caused by FIB processes in metals Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 43 BSEs to enhance contrast and resolution. The combination of InLens SE detector and EsB detector allows simultaneous imaging and mixing of a high contrast topography (SE) and a compositional contrast (BSE). Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 44 This results in four images from four different directions. With the BSD4 detector you can acquire these four images all at once. An algorithm then calculates the topographic surface. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 45 Segments S3 to S6: Pure topography (bottom left). For comparison: Surface contrast seen with the InLens SE detector (bottom right) At small magnifications, the field of view is limited by the hole inside the aBSD detector: Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 46 1.5 mm, then you damage the aBSD detector. Do not move the specimen to working distances below 2 mm. Be careful when you tilt the specimen. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 47 (S4), and one high angle annular dark field segment (S5). Two different models are available: § The aSTEM4 allows detection of four channels in parallel. § The aSTEM1 only collects one signal at a time. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 48 Risk of property damage: Motorized specimen stage Risk of damaging the detector when operating the motorized specimen stage. Retract the detector head completely after you have finished the work with the detector. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 49 The detector can be used during energy-dispersive X-ray spectrometer (EDS) measurements and wavelength-dispersive spectrometer (WDS) measurements at any valid magnification. Fig. 27: CL image of sandstone Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 50: Control Panel

    Adjusts the magnification of the system. § Reduced Changes the scan field to a reduced area. The size of the area is determined by the current sub scan area settings. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 51 Changes the focal point of the column by adjusting the magnitude of the objective lens. § Scan Speed +/− Increases (+) or decreases (−) the scan speed by doubling or halving the beam dwell time with each click step. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 52: Software Description

    Image Area with Data Zone FIB Toolbar Displays image information and acquisition param- Contains the controls to configure the FIB column. eters from the microscope. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 53: Graphical Control Elements

    Readout Displays the status of a system entity. Enables you to select an action or a value by opening a dialog with an input field. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 54: User Access Levels And User Privileges

    Change User Direc- Enables the user to change the location where all user specific param- tory eters and configurations are saved. Extractor Enables the user to change the extractor voltage. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 55: Smartsem Program Suite

    Enables you to inspect the dimensions of all possible specimen holders Gallery as well as to set the dimensions of the custom specimen holders. Enables you to activate the available specimen holders for SmartSEM. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 56 Service activities, for ZEISS service representatives only Database Merlin Alignment Service activities, for ZEISS service representatives only Wizard Merlin Database Service activities, for ZEISS service representatives only Wizard Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 57: Smartfib

    Right hand side: enables you to control some exclusive properties of the Working Area. Tools Toolbar Contains tools for the Working Area. The range of visible tools depends on the selected mode. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 58: Graphical Control Elements

    The main purpose of the SmartFIB program suite is to transfer geometric elements to a specimen with the help of a particle beam. This process is referred to as "exposure". Access: Windows Start Menu > Programs > SmartSEM Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 59 – EPD Mode: Used for thickness determination of a TEM lamella § Designer Offline creation of layouts: Arrangement of elements in the scan- ning area § Interaction with Sample Mode: Used as a drawing tool for Sample Mode Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 60: Installation

    5 Installation​ ZEISS 5 Installation Unpacking, installation, and first start-up are carried out by an authorized ZEISS service represen- tative. An excerpt of the installation requirements can be found under Installation Requirements [  114]. For more details refer to the document Installation Requirements.

  • Page 61: Operation

    3. Set the MAIN switch to the position. 4. If the Emergency Off (EMO) option is installed, press the green button to confirm the set- ting of the MAIN switch. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 62: Starting The Microscope

    6.1.3 Starting SmartSEM 1. Power up the computer and log in. 2. Start the SmartSEM user interface via the ZEISS SmartSEM icon on the desktop. Alternatively, select Windows start menu > SmartSEM > SmartSEM User Interface. à...
  • Page 63 Switches to Annotation and inserts Point to Point Marker <CTRL + ALT + M> Enable/Disable the Movable Crosshairs Marker <CTRL + ALT + F> Enable/Disable Mouse Following for Movable Crosshairs Marker Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 64: Obtaining A First Image

    Switching on the Gun [  69] § Switching on the EHT [  70] § Acquiring an Image [  70] § Optimizing the Image [  72] § Saving the Image [  74] Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 65: Preparing The Specimen Holder

    3. To fix the stub to the specimen holder, tighten the location screw with the hex key. 4. Note down which fix position is occupied by the specimen. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 66: Loading The Specimen Chamber

    3. To start venting, click Yes. INFO: If the Stage is not initialized system message is displayed, refer to Initializing the Stage [  98]. à The specimen chamber is purged with gaseous nitrogen. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 67 Risk of property damage: Contamination caused by fingerprints Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping times. Always wear lint-free gloves when touching the specimen, specimen holder, or stage. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 68: Locating The Specimen

    The Sample Holder Gallery dialog is displayed. 4. In the Sample Holder Gallery dialog, click the specimen holder you are using. 5. Activate the Is Available checkbox. 6. Close the Sample Holder Gallery dialog. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 69: Switching On The Gun

    à The pop-up menu for vacuum, gun, and EHT activation is displayed. 5. Click Gun On. à The gun runs up. à This may take up to 5 minutes. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 70: Switching On The Eht

    2. In the Detector / Active Channel section, select Signal A = SE2 from the Signal A drop- down list. INFO: We recommend using the SE detector to obtain the first image. This detector pro- vides a good signal-to-noise ratio even at long working distances. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 71 4. To adjust the focus, change the working distance. Hold down the mouse wheel and drag the mouse within the Image Area in left/right direction. à The current working distance is indicated in the Status Bar. 5. Adjust contrast and brightness again. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 72: Optimizing The Image

    A small scan frame is displayed. This frame defines the specimen area to be scanned by the electron beam. à The image outside the scan frame is frozen. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 73 The specimen detail should just be pulsating without shifting. INFO: To obtain optimum results, alternately correct focus and astigmatism. 6. To deactivate the reduced raster, in the Toolbar, click the Reduced Raster/Apertures icon. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 74: Saving The Image

    Switching from Normal gun mode to Imaging gun mode is useful for reducing the probe current without any need for beam adjustments. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 75: Measuring The Probe Current

    10. Grab the crosshairs and move them into the hole of the Faraday cup. à The probe current is measured continuously. à The measured probe current is displayed in the Specimen I readout. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 76: Changing The Extractor Voltage

    ZEISS 6.3.3 Changing the Extractor Voltage The Extractor voltage is preset by the factory or by the ZEISS service representative. Within certain limits, the operator may carefully increase the extractor voltage in order to optimize the probe current for particular applications.

  • Page 77: Selecting The Aperture

    6 Operation | 6.4 Working with Different Aperture Configurations and Beam Modes Info If you wish to change the installed configuration of your microscope, contact your local ZEISS service representative. 1. From the Menu Bar, select View > SEM Status.

  • Page 78: Finding Appropriate Detector Settings

    6.5.2 Setting up the InLens SE Detector The InLens SE detector collects the SE signal, acquiring mainly information about surface topogra- phy. Fig. 30: Silver nanoparticles embedded in zeolite, imaged at 1.5 kV. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 79: Setting Up The Se Detector

    2. From the Signal A drop-down list, select SE2. 3. Adjust the EHT, working distance (WD), and collector voltage according to the suggestions in the table in order to optimize the image. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 80: Setting Up The Vpse Detector

    3. Adjust the EHT and the working distance (WD) according to the suggestions in the table. à First adjust the collector bias voltage until the image appears white. à Then slightly reduce the collector bias voltage to optimize the image. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 81: Setting Up The Esb Detector

    2. From the Signal A drop-down list, select ESB. 3. Adjust the EHT, working distance (WD), and EsB Grid according to the suggestions in the table in order to optimize the image. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 82: Setting Up The Sesi Detector

    4. In order to detect secondary ions, in the Imaging tab, activate the SESI Mode checkbox. 5. Adjust the EHT, working distance (WD), and collector voltage according to the suggestions in the table in order to optimize the image. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 83: Setting Up The Absd/Bsd Detector

    Use high or very high detector gain for low accelerating voltage and/or low beam current The EHT should be bigger than 2 kV to achieve a significant detection efficiency. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 84 Since the detector has a limited speed, it is recommended to use scan speed 6 or higher (slower), especially at small magnifications. The lower the gain is, the faster is the detector. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 85: Setting Up The Astem/Stem Detector

    S1 - S2 + S3 BF + DF All on User defined name Custom combination of segments Active segments with +/- Custom combination of signs segments. "+" on, "-" inverted Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 86 HAADF Middle HAADF outer HAADF S4 + S5 User defined name Custom combination of segments Active segments with +/- Custom combination of signs segments. "+" on, "-" inverted Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 87 Select between Low, Medium, High, or Very High. 7. For displaying several channels of a aSTEM/STEM detector simultaneously, repeat steps 3 to 6 for the other display zones. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 88: Setting Up The Cl Detector

    VP mode offers the possibility of analyzing and mapping non-conducting, strongly gassing or moist specimens without any need for specimen preparation. The partial pressure in the specimen chamber can be set in the range 0.1–0.6 mbar. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 89: Changing To Vp Mode

    The pre-vaccum pump pumps the specimen chamber to the lowest possible pressure. à The turbo isolation valve opens and the roughing backing valve connects the pre-vacuum pump and the turbo pump. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 90: Shutting Down The System

    1. From the Menu Bar, select File > Exit. à A system message is displayed. 2. Click Yes. 3. Close the EM Server. à A system message is displayed. 4. Click Yes. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 91: Energizing The Microscope

    ü Prerequisite The microscope has been de-energized. 1. Verify that the microscope has been de-energized properly. 2. To secure the microscope against accidental re-activation, lock the energy-isolating devices. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 92: Performing An Emergency Shutdown

    If the EMO option is not installed, set the MAIN switch at the rear side of the plinth to the OFF position. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 93: Maintenance And Repair

    ZEISS 7 Maintenance and Repair | 7.1 Maintenance Work 7 Maintenance and Repair 7.1 Maintenance Work The preventive maintenance is performed by the ZEISS service representative and includes the fol- lowing items: § Inspection § Preventive maintenance work § Change of consumables and chemicals §...

  • Page 94: Change Of Consumables And Chemicals

    7 Maintenance and Repair | 7.3 Change of Consumables and Chemicals ZEISS 7.3 Change of Consumables and Chemicals The change of consumables and chemicals has to be performed by a ZEISS service representative at mandatory intervals. The times scheduled are designed for the maximum equipment performance level (i.e. 24 h per day of permanent operation).

  • Page 95: Troubleshooting

    8 Troubleshooting | 8.1 Overview 8 Troubleshooting 8.1 Overview The following table provides hints for solving common problems. If you cannot solve the problem or if you are unsure about a certain technical difficulty, contact your local ZEISS service represen- tative. Symptom Cause Measure §...
  • Page 96 Working distance is too short. Enlarge working distance to about 5 mm or more. Stage does not move. Stage needs to be initialized. Refer to Initializing the Stage  98]. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 97 Refer to Baking out the Gun than 8 to 9 × 10⁻⁹ mbar. ion getter pump decreases in Head [  101]. the course of time, thus deteri- orating the gun vacuum. Tab. 4: Troubleshooting Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 98: Overall System

    à The stage initialization process takes a few minutes. à INFO: If initialization of the stage does not solve the stage problem, contact your local ZEISS service representative. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 99: Defining The Post Initialization Position Of The Stage

    If the CCD camera is installed at the back, enter 180°. 90° If the CCD camera is installed at the front, enter 0°. If the CCD camera is installed at the side, enter chamber door 90°. 0° Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 100: Replacing The Chamber Door Seal

    The EM Server shows the message WARNING Stage Touching. 1. To accept the warning, click OK. 2. Move the stage in the reverse direction away from the touch. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 101: Checking The Water Flow And Temperature

    3. Wait until the gun has ramped down. à This may take up to 5 minutes. 8.4.1.2 Starting the Bakeout Info You cannot work with the microscope while the bakeout procedure runs. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 102: Calibrating The Probe Current

    The Probe Current Calibration window is displayed. 6. Activate the Spot checkbox. 7. Click Cal I Probe. 8. To confirm, click Yes. 9. To store the calibration, click Save. 10. Deactivate the Spot checkbox. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 103: Power Circuit

    In case of contact with the eyes, rinse immediately with plenty of water and seek medical advice. After contact with the skin, wash immediately with plenty of water and soap. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 104: Focused Ion Beam

    In order to keep track of the ion supply, the ion source lifetime needs to be checked regularly. Info When the lifetime of the ion source approaches 3000 μAh, contact the ZEISS service represen- tative to have the ion source replaced.

  • Page 105: Regenerating The Ion Source By Heating

    The FIB gun is set to Standby mode. 3. To disable the suppressor regulation, deactivate the Regulate checkbox. 4. Set the FIB Suppressor Target to 1200 V. 5. Select the Options tab. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 106 13. To enable the suppressor regulation, activate the Regulate checkbox. Info During the process of finding a new extractor target, the FIB gun will be automatically switched to the On state. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 107: Shutdown And Disposal

    If a gas injection system (GIS) is used, the precursors may be explosive, reactive, toxic or irritant when they come into contact with the environment or a person. Do not remove or install a GIS reservoir. Contact your local ZEISS service representative to have a reservoir removed or installed.
  • Page 108 A hand pallet truck has to be used to move the microscope: § Ensure all hallways and corners are wide enough to be passed with the hand pallet truck. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 109: Disposal

    § Materials: e.g. metals, non-metals, composite materials, process materials § Electronic scrap material: e.g. transformers, circuit boards, cables Comply with national and regional waste disposal regulations. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 110: Technical Data And Conformity

    Objective lens Patented GEMINI I electromagnetic/electrostatic objective lens system (68º conical final-lens) with water cooling for best thermal stability and reproducibility Hysteresis correction: Built-in, for the removal of lens hysteresis Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 111 120 nm at 1 kV 330 nm at 500 V Probe current 1 pA to 100 nA Magnification 300x to 500,000x Acceleration volt- Range: 0.5 to 30 kV Adjustment: Continuously variable in 10 Volt steps Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 112 Mounting: Drawer-type door Movements: § X/Y = 100 mm § Z = 50 mm § M = 13 mm § Tilt = −4 to 70° § Rotation = 360° continuous Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 113 Combined Secondary Electron Secondary Ion (SESI) detector based on a scintillator photomultiplier system; easy change between secondary ion and secondary electron mode by converting the electrode voltage aSTEM detector (optional): Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 114: Installation Requirements

    Floor stability > 1000 kg/m Exhaust Line An exhaust line is required to remove the waste gas of the pre-vacuum pump and to transmit it to the outside. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 115 Water flow rate 60–70 l/h Pressure Adjustable up to 3 bar Water tempera- 20–22 °C ture Stability 0.5 °C/10 min Heat dissipation 1 kW Connection hose 6 mm inside diameter. Two pieces 10 m each are delivered. Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 116 RF transmitters such as mobile phones or DECT phones must not be used in close proximity. Vibrations Up to 10 Hz: less than 5 μm/s 10–60 Hz: less than 10 μm/s Above 60 Hz: less than 14 μm/s Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 117: Layout And Connections

      Pre-vacuum pump Pressure reducer (water, nitrogen,   Computer workplace compressed air) Main shut-off valves   Emergency Off (EMO) button (optional) Water supply Water runback Nitrogen supply Compressed air supply Exhaust line Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 118: System Layout

    4 × Ø 80 mm + 200 mm airlock Table + PC 1650 × 1000 × 838 4 × 24.3 4 × Ø 50 mm 1100 × 1000 × 838 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 119 530 × 640 × 740 4 × 22.5 on wheels Compressor* 281 × 139 × 239 1 × 25.0 281 mm × 139 mm *Actual measurements are country dependent (different manufacturers). Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 120: Declaration Of Conformity

    CE Marking The CE conformity marking is located on the type plate of the machinery or the optional acces- sory, respectively. Unauthorized modifications of the machinery or the optional accessory will cancel this declara- tion. For Korea only EMC user notice Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 121: Parts And Tools

    NOTICE Risk of property damage: Spare parts and consumables Using spare parts or consumables that are not provided by ZEISS can lead to property damage. Only genuine spare parts and consumables supplied by ZEISS are to be used in servicing the microscope.

  • Page 122: Tools And Accessories

    3 mm Allen key 000000-0015-247 1.5 mm Allen key 000000-0151-883 Small pliers – Specimen holders Refer to specimen holder catalog. Stubs – Tweezers – Lint-free cloth – Lint-free gloves – Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...

  • Page 123: Index

    SESI  42, 82 Imaging mode  33 STEM  85 Imaging gun mode  74 VPSE  41, 80, 103 Initializing the stage  98 Detector mechanics InLens SE detector  36, 78 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000Instruction Manual...
  • Page 124 Switching on Prevention of hazards  14  70 Preventive maintenance  14  69 Primary electron  34 Microscope  61, 62 Probe current  75 Calibration  102 Temperature  101 Tool  122 Quiet Mode  29 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000...
  • Page 125  52 User privilege  54 Vacuum mode  88 High Vacuum (HV)  89 Variable Pressure (VP)  88, 89 Vacuum system  26 Variable pressure  88 VPSE detector  41, 80, 103 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000Instruction Manual...
  • Page 126 Carl Zeiss Microscopy GmbH Carl-Zeiss-Promenade 10 phone: +49 1803 33 63 34 07745 Jena fax: +49 3641 64 3439 Germany info.microscopy.de@zeiss.com www.zeiss.com/microscopy...

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