Single On-Board Cryopump Connections - HELIX 9600 Installation, Operation And Maintenance Instructions

Single On-Board Cryopump Connections

HOLD WITH 1 1/8 INCH WRENCH
TURN WITH 1 3/16 INCH WRENCH
TO LOOSEN
Figure 3-3: Connecting/Disconnecting Helium Flex Line Couplings
Single On-Board Cryopump Connections
Make sure the Compressor power is OFF before making any
connections to the rear panel.
3-8 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068
This 1 1/8 (or 1) in. wrench
holds the coupling in a sta-
tionary position.
CAUTION
1. Connect the Supply and Return lines to the 9600 Compressor as
described in "Connecting/Disconnecting Helium Flex Lines"
this section.
2. Connect one end of the Cryopump cold head cable to the
CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor as shown in
3. Connect the opposite end of the cold head cable to the cryopump
This 1 3/16 in. wrench
is used to turn the self
sealing coupling con-
nector.
TO TIGHTEN
TURN WITH 1 3/16 INCH WRENCH
HOLD WITH 1 INCH WRENCH
Figure 3-4.
©2007 Helix Technology Corporation
in