Component Description - HELIX 9600 Installation, Operation And Maintenance Instructions

Component Description

Component Description
Elapsed Time
Meter
Control Circuit
Breaker
Gas Charge
Flared Fitting
Helium
Pressure Gauge
Gas Charge
Control Valve
Return Gas
Coupling
Power Inlet
Cooling Water
IN
Cooling Water
OUT
Figure 1-4: 9600 Compressor Rear View Component Locations
1-8 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068
The components of the 9600 Compressor that are accessible from the rear
panel are shown in Figure 1-4
System Circuit
Power ON
Breaker
Indicator
and described in the following paragraphs.
Cryopump Electrical Outlet
©2007 Helix Technology Corporation
Compressor
Remote
Connector
Supply Gas
Coupling
Rear Panel