HELIX 9600 Installation, Operation And Maintenance Instructions
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HELIX 9600 Installation, Operation And Maintenance Instructions

HELIX 9600 Installation, Operation And Maintenance Instructions

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9600 (High Voltage) Compressor Installation,
Operation, and Maintenance Instructions
©2007 Helix Technology Corporation
Pub. No. 8040437, Rev. 104, 06/12/2007
ECO No.18068
Printed in USA
HELIX TECHNOLOGY CORPORATION
http://www.helixtechnology.com

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  • Page 1 9600 (High Voltage) Compressor Installation, Operation, and Maintenance Instructions ©2007 Helix Technology Corporation Pub. No. 8040437, Rev. 104, 06/12/2007 ECO No.18068 Printed in USA HELIX TECHNOLOGY CORPORATION http://www.helixtechnology.com...
  • Page 3 No warranties are granted or extended by this document. Helix Technology Corporation reserves the right to change any or all information contained herein without prior written notice. Revisions may be issued at the time of such changes and/or deletions.

  • Page 5: Table Of Contents

    References ............S-2 Section 1 - 9600 Compressor Description General .
  • Page 6 Adjusting System Helium Pressure ........5-5 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 7 Introduction ............D-1 Index ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...
  • Page 8 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 9 Figure 1-1: 9600 Compressor ........
  • Page 10 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 11 Table 1-6:Compressor Remote Connector Pin Assignments ..1-11 Table 4-1:9600 Compressor Helium ("OFF" Condition) Charge..4-1 Table 5-1:Suggested Maintenance Equipment ..... . 5-1 Table C-1:Compressor Troubleshooting Procedures .
  • Page 12 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 13: Safety Conventions

    A signal word accompanied by a safety shape that indicates indicates a potentially hazardous situation. WARNING If not avoided, the action may result in serious injury or death. A WARNING is highlighted in orange. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...

  • Page 14: Safety Shape Descriptions

    - Safety signs used in workplaces and public areas • ISO 3864-1: 2002(E), Graphic symbols - Safety colours and safety signs - Part 1: Design principles for safety signs in workplaces and public areas Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 15: Section 1 - 9600 Compressor Description

    CTI-CRYOGENICS 9600 Compressor. NOTE: All personnel with installation, operation, and maintenance responsibilities should become familiar with the contents of both the 9600 Compressor Installation, Operation, Maintenance, and appropriate cryopump manuals to ensure safe, high quality, and reliable system performance.
  • Page 16 Compressor. Helium purification takes place via several stages of oil removal. The final stage of purification is performed with a replaceable adsorber cartridge. In order to maintain peak efficiency, the adsorber must be replaced every three years. The 9600 Compressor is shown in Figure 1-1.
  • Page 17 Figure 1-1: 9600 Compressor ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...

  • Page 18: Specifications

    (593 mm) 14.4 in. 3.18 in. (366 mm) (81 mm) Figure 1-2: 9600 Compressor Dimensions CAUTION Do not place a weight greater than 75 lbs. (34Kg) on top of the Compressor. Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...

  • Page 19: Weight

    90°F (32°C) Minimum Inlet Temperature 50°F (10°C) Flow Rate 2.75 ±1.25 gpm (10.4 ± 4.7 lpm) NOTE: Water conditioning may be required for applications not meeting these requirements. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...

  • Page 20: General

    Figure 1-3: Water Flow Rate versus Pressure Drop General The information in Table 1-4 provides general Compressor operating specifications. Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 21 Adsorber Service Schedule 3 Years * Supplied by CTI-CRYOGENICS NOTE: The 9600 Compressor is designed for continuous operation and should remain ON when the cryopumps are in a regeneration cycle. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...

  • Page 22: Component Description

    Component Description Component Description The components of the 9600 Compressor that are accessible from the rear panel are shown in Figure 1-4 and described in the following paragraphs. Elapsed Time System Circuit Power ON Breaker Meter Indicator Cryopump Electrical Outlet...

  • Page 23: System Circuit Breaker

    Compressor when helium charging is required. The fitting has a 45 º flare and 7/16 in. x 20 threads/inch. Refer to “Section 5 - Maintenance” for information on adding helium to the Compressor. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...

  • Page 24: Helium Pressure Gauge

    The Compressor requires the use of an On-Board Splitter Box or Cryo-Torr Interface for multiple cryopump system connections. Refer to Table 1-5 connector pin identification. Refer to “Multiple On-Board Cryopump Connections” “Multiple Cryo-Torr Cryopump Connections” in this 1-10 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 25: Compressor Remote Connector

    The Supply Gas Coupling provides a connection for high pressure compressed helium to the cryopump cold head. Refer to “CTI- CRYOGENICS Helium Refrigeration System” in this section for more information. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 1-11...

  • Page 26: Multiple On-Board Cryopump Connections

    Multiple On-Board Cryopump Connections Multiple On-Board Cryopump Connections The On-Board Splitter Box permits the connection of multiple On-Board Cryopumps or Waterpumps to one 9600 Compressor as shown in Figure 1- 5. Refer to “Section 3 - Installation” for more information on connecting single or multiple On-Board Cryopumps or Waterpumps to the Compressor.

  • Page 27: Multiple Cryo-Torr Cryopump Connections

    WATER POWER User Remote (from vacuum system) Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps NOTE: Your installation (number of pumps per compressor) will vary based upon the Cryo-Torr Cryopump models used. Refer to “Appendix A - Customer Support Information”...
  • Page 28 Multiple Cryo-Torr Cryopump Connections 1-14 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 29: Section 2 - Unpacking And Inspection

    Section 2 - Unpacking and Inspection Introduction The 9600 Compressor is shipped in a shipping carton incorporating a ramp system which makes removing the Compressor from the carton safe and easy. Shipping Carton Inspection Inspect the exterior of the shipping carton for visible signs of damage before opening the shipping carton.

  • Page 30: Compressor Inspection

    Report any damage to the shipping company at once. Helium "OFF" Condition Pressure Verification Refer to “Section 4 - Operation” for more information on the ("OFF" Condition) helium charge pressure of the 9600 Compressor. Shipping Carton Contents The shipping carton should contain the following items: • Compressor •...

  • Page 31: Section 3 - Installation

    Section 3 - Installation Introduction Section 3 provides you with the information required to install the 9600 Compressor and connect it to single or multiple On-Board or Cryo-Torr Cryopump configurations. Figure 3-1 highlights the major tasks for Compressor installation and refers to the appropriate installation procedures in this section.
  • Page 32 (page 3-7) Single or Multiple Cryopump Installation? Single Cryopump Multiple Cryopump Connections (page 3-8) Connections (page 3-11) “Section 4 - Operation” Figure 3-1: 9600 Compressor Installation Flowchart Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 33: Supply And Return Water Line Connections

    Supply and Return Water Line Connections NOTE: The water used for cooling the Compressor must meet the specifications outlined in “Section 1 - 9600 Compressor Description”. Hard Water Lines 1. Apply a light coating of standard plumbing thread sealant to the hard line pipe threads.

  • Page 34: Electrical Connections

    NOTE: Use a slotted screwdriver which is capable of holding a screw when performing steps 9 and 10. 9. Remove the screws from the Compressor circuit breaker terminals X, Y, and Z as shown in Figure 3-2. Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 35 Three Phase Power Rear Panel Detail A Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed) NOTE: The phase order in which the conductor terminal lugs are connected to circuit breaker terminals X, Y, and Z will be determined during the Phase Check Procedure.

  • Page 36: Phase Check

    Torque the circuit breaker terminal screws to 12 in.-lbs. f. Install the circuit breaker terminal cover. g. Repeat steps 1- 2 of this procedure. 4. Install the rear panel. 5. Proceed with appropriate cryopump connections. Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 37: Connecting/Disconnecting Helium Flex Lines

    Connecting/Disconnecting Helium Flex Lines CAUTION Make sure the helium flex lines are connected and disconnected from the 9600 Compressor using the following procedure and as shown in Figure 3-3. Failure to follow this procedure could damage connector O-ring seals or cause a helium circuit leak.

  • Page 38: Single On-Board Cryopump Connections

    Single On-Board Cryopump Connections CAUTION Make sure the Compressor power is OFF before making any connections to the rear panel. 1. Connect the Supply and Return lines to the 9600 Compressor as described in “Connecting/Disconnecting Helium Flex Lines” this section.
  • Page 39 Figure 3-4: Single On-Board Cryopump Connections CAUTION Make sure the Compressor power is OFF before making any connections to the rear panel. 1. Connect the Supply and Return lines to the 9600 Compressor as described in “Connecting/Disconnecting Helium Flex Lines” this section.
  • Page 40 Single On-Board Cryopump Connections SUPPLY RETURN REMOTE Cryo-Torr Power Cable WATER POWER Figure 3-5: Single Cryo-Torr Cryopump Installation 3-10 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 41: Multiple On-Board Cryopump Connections

    “Section 4 - Operation” “Section 5 - Maintenance” for more information. 1. Connect the Supply and Return lines to the 9600 Compressor as described in “Connecting/Disconnecting Helium Flex Lines” this section. 2. Connect the Gas Return Line to the customer supplied helium manifold and then to the GAS RETURN connector on the On-Board Cryopump.

  • Page 42: Power Cable Connections

    On-Board Splitter box be installed near the process tool to reduce cable requirements. NOTE: SUPPLY RETURN REMOTE WATER POWER On-Board Power Cable On-Board Splitter Box Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation 3-12 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 43 On-Board Power Cables On-Board Splitter Box WATER POWER (Splitter Box located at Process Tool) Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation (Splitter Box located at Compressor) ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 3-13...

  • Page 44: Multiple Cryo-Torr Cryopump Connections

    “Section 4 - Operation” “Section 5 - Maintenance” for more information. 1. Connect the Supply and Return lines to the 9600 Compressor as described in “Connecting/Disconnecting Helium Flex Lines” this section. 2. Connect the Gas Return Line to the customer supplied helium manifold and then to the Gas Return connector on the Cryo-Torr Cryopump.
  • Page 45 Torr Interface be installed at the process tool to reduce cable requirements. SUPPLY RETURN Cryo-Torr Interface Remote Cryopump Electrical Input WATER POWER User Remote (from vacuum system) Figure 3-8: Multiple Cryo-Torr Cryopump Installation ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 3-15...
  • Page 46 Multiple Cryo-Torr Cryopump Connections SUPPLY RETURN Cryo-Torr Interface User Remote WATER POWER (from vacuum system) Figure 3-9: Multiple Cryo-Torr Cryopump Installation 3-16 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 47: Section 4 - Operation

    After cooldown, the normal system operating pressure is recorded. NOTE: The 9600 Compressor is designed for continuous operation and should remain ON even when the cryopumps are in a regeneration cycle. "OFF" Condition Helium System Pressure Verification The proper system ("OFF"...

  • Page 48: Compressor Operation

    Maintenance”. Compressor Operation CAUTION While the 9600 Compressor is operating, the helium pressure gauge indicator should never be in the red zone. If the gauge indicator is below 65 psig, then the system must be checked for insufficient helium or helium leaks. If the gauge indicator is above 160 psig, then the system has been over pressurized.

  • Page 49: Replacement Of Helium Circuit Components

    Contact CTI-CRYOGENICS for a review of the intended installation and for specific technical instructions. The use of a 9600 compressor on a manifold with other CTI-CRYOGENICS compressor models requires a reduction of the helium charge pressure to 200--210 psig charge pressure to avoid helium safety valves from inadvertently venting.
  • Page 50 Replacement of Helium Circuit Components Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 51: Section 5 - Maintenance

    Oakite or equivalent detergent soap Denatured alcohol “Appendix A - Customer Support Information” Refer to and contact the local Customer Support Center to obtain the CTI-CRYOGENICS parts listed in this table. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...

  • Page 52: Adsorber Replacement

    Adsorber Replacement Use the following procedure to change the adsorber every three years. 1. Set the System Circuit Breaker, on the rear of the 9600 Compressor, to the OFF position. 2. Remove the 4 screws which secure the rear panel to the Compressor and remove the rear panel.
  • Page 53 10. Record the adsorber replacement date on the label as shown in Figure 5-2, and also note that the next adsorber replacement should be performed every three years. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...
  • Page 54 Scheduled Maintenance DATE Adsorber Adsorber Mounting Bolt Figure 5-2: Adsorber Location in 9600 Compressor (Rear Panel Removed) Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 55: Adjusting System Helium Pressure

    • To the appropriate value in Table 4-1 if the compressor is OFF and acclimated to a temperature between 60º F and 80º F ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...

  • Page 56: Increasing Helium Pressure

    1/4-inch female flare fitting, and a two-stage pressure regulator rated at 0-3000/0-400 psig for this operation. CAUTION Use only 99.999% pure helium gas. Helium circuit contamination may result if a lower quality of helium is used. Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 57 6. Ensure that the helium charge valve on the Compressor is tightly closed. Shut off the helium pressure regulator on the helium bottle and remove the charging line from the male flare fitting. Reinstall the flare cap. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...
  • Page 58 Adjusting System Helium Pressure Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 59: Appendix A - Customer Support Information

    Specific Problem Area • Hours of Operation • Equipment Type • Vacuum System Brand/Model/Date of Manufacture E-mail For your convenience, you may also e-mail us at: techsupport@helixtechnology.com ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...
  • Page 60 E-mail Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 61: Appendix B - Flow Diagram

    Appendix B - Flow Diagram ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...
  • Page 62 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 63: Appendix C - Troubleshooting Procedures

    Do not change or modify any compressor internal wiring circuits, this may cause failure of the compressor and cold head due to improper phasing. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...
  • Page 64 Figure 1-4 for loca- being used. “Compres- tion. Refer to sor Remote Connector” “Section 1 - 9600 Compressor Descrip- tion” for more information. 4) Improperly wired external 4) Verify correct installation of remote control circuit.
  • Page 65 2) Defective motor windings. 2) Check running current on all phases. “Appendix A - 3) Refer to Customer Support Infor- mation” to contact the local Customer Support Center. ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...
  • Page 66 Technical Inquiries Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...

  • Page 67: Appendix D - Schematic

    Appendix D - Schematic Introduction The schematic in Appendix D supports the 9600 (High Voltage) Compressor CTI-CRYOGENICS P/N 8135164P002. Table D-1: Basic Control Assembly Legend Identifier Description Compressor Motor Main Circuit Breaker (15A) Control Circuits Circuit Breaker (4A) Elapsed Time Meter...
  • Page 68 Signal Input Connector Power Input Connector Cold Head Voltage Relay Signal Voltage Relay Cryo Power Relay T1-T2 Cold Head Motor Transformers On-Board Logic Power Transformer On-Board Heater Power Transformer Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 69 Table D-3: On-Board Output Module P/N 8135148G001 Legend Identifier Description On-Board Output Receptacle Remote Control Receptacle Power Connector Signal Connector Remote Jumper ©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068...
  • Page 70 Introduction W/BK W/GY W/GY W/YEL W/ORN W/ORN W/RED Figure D-1: 9600 High Voltage Compressor Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation...
  • Page 71 OFF condition helium system pressure Elapsed time meter, 1-9 verifying, 4-1 Electrical connecting, 3-4 Phase checks performing, 3-6 Flow diagram, B-1 Power inlet, 1-10 Power ON indicator, 1-9 ©2007 Helix Technology Corporation Pub. No. 8040437, Rev. 104, 06/12/2007 ECO No. 18068 Index-1...
  • Page 72 Single On-Board Cryopumps connecting, 3-8 Specifications, 1-4 Supply and return water lines connecting, 3-3 Supply gas coupling, 1-11 System circuit breaker, 1-9 Troubleshooting, C-1–C-3 Unpacking, 2-1–2-2 ©2007 Helix Technology Corporation Pub. No. 8040437, Rev. 104, 06/12/2007 ECO No. 18068 Index-2...

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