Chapter 2: Introduction; Brief Statement; Key Feature - Delta HPH-20KA01KAT User Manual

Delta Electronics. Inc.

Chapter 2: Introduction

2.1. Brief Statement

Delta "HPH-20KA01KAT" is a high voltage DC generator that meets the exciting requirement in
sputtering system. Tight regulation, small output ripple and superior arc quenching make it very
suitable to be applied in most of plasma-based sputtering application.

2.2. Key Feature

 Excellent Accuracy, Load Regulation, and Stability
 Ultrafast Arc Suppression Detect Time
 Very Low Arc Energy (< 1 mJ per kW)
 Adjustable Ramp and Delay Time
 Convenience for Multi-parallel Application
 Remote Control Signals, User Port Analog I/O (D-sub), Host Port Digital I/O (RS-
232 and RS-485)
Figure 2.1 Delta "HPH-20KA01KAT" power supply
HPH- 20KA01KAT
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