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Delta Electronics. Inc.
1.3. Electromagnetic Compatibility Directives and Standard
Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20 kVA)
General Immunity Standard for Industry: EN 61000-6-2
Safety Requirement: IEC-61010-1 (CE and UL certification)
1.4. Industry Guideline
Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47
HPH- 20KA01KAT
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