Delta HPH-20KA01KAT User Manual
  1. Manuals
  2. Brands
  3. Delta Manuals
  4. Power Supply
  5. HPH-20KA01KAT
  6. User manual

Delta HPH-20KA01KAT User Manual

Continuous 400 – 1000 vdc
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
User Manual
DC Power Supply
Continuous 400 – 1000 VDC
Model: HPH-20KA01KAT
Version: Rev. S.00

Advertisement

Table of Contents
loading

Related Manuals for Delta HPH-20KA01KAT

Summary of Contents for Delta HPH-20KA01KAT

  • Page 1 User Manual DC Power Supply Continuous 400 – 1000 VDC Model: HPH-20KA01KAT Version: Rev. S.00...
  • Page 2 This product Delta “HPH-20KA01KAT” Model is been warranted against defect in material and workmanship for a period of “1” year after date of shipment. Delta agrees to repair or replace the fault unit free-of-charge which fails to perform with specification and under normal use during this period.

  • Page 3: Table Of Contents

    HPH- 20KA01KAT Delta Electronics. Inc. INDEX Chapter 1: Safety and Standard ······························································· 1 1.1. Important Safety Information ············································································· 1 1.2. Safety and Warning Symbols ············································································· 1 1.3. Electromagnetic Compatibility Directives and Standard ·········································· 2 1.4. Industry Guideline ··························································································· 2 Chapter 2: Introduction ··········································································· 3 2.1.
  • Page 4 HPH- 20KA01KAT Delta Electronics. Inc. Chapter 7: Operation ············································································ 30 7.1. Panel Operating Steps ··················································································· 30 7.2. D-SUB Operating Steps ················································································· 31 7.3. RS232 Operating Steps ·················································································· 31 7.4. RS485 Operating Steps ·················································································· 31 7.5. Parallel Operating Steps ················································································· 32...

  • Page 5: Chapter1: Safety And Standard

    1.1. Important Safety Information To keep your safety from hazardous and fatal circumstance, please read and realize the content of this manual before installing and operating Delta “HPH-series” power supply. 1.2. Safety and Warning Symbols The following advisory symbols as shown in Table 1.1 will be used in the manual for different level of warning.

  • Page 6: Electromagnetic Compatibility Directives And Standard

    HPH- 20KA01KAT Delta Electronics. Inc. 1.3. Electromagnetic Compatibility Directives and Standard  Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20 kVA)  General Immunity Standard for Industry: EN 61000-6-2  Safety Requirement: IEC-61010-1 (CE and UL certification) 1.4. Industry Guideline ...

  • Page 7: Chapter 2: Introduction

    Chapter 2: Introduction 2.1. Brief Statement Delta “HPH-20KA01KAT” is a high voltage DC generator that meets the exciting requirement in sputtering system. Tight regulation, small output ripple and superior arc quenching make it very suitable to be applied in most of plasma-based sputtering application.

  • Page 8: Chapter 3: Specification

    Adaptable Fan System Controller Isolation Interface Figure 3.1 System block diagram of Delta “HPH-20KA01KAT” Table 3.1 Detail description for block diagram AC line voltage is applied through the circuit breaker. The contactor, Soft Start and PFC Section when closed, delivers the line voltage to a rectifier bridge, where it is converted to DC bus.

  • Page 9: Electrical Specification

    HPH- 20KA01KAT Delta Electronics. Inc. 3.2. Electrical Specification Table 3.2 Electrical specification Item Specification Condition Input Voltage 208 V ± 10% (Three Phase) 50 / 60 Hz Input Current (Per Phase) < 80 A 208V Input voltage Maximum Output Power...
  • Page 10 HPH- 20KA01KAT Delta Electronics. Inc. 20 to 40 ˚C Temperature Coefficient < 50 ppm/˚C Variation in regulated output Regulation Mode Constant voltage, current, and power mode 1900V 1000V Voltage Limit 600V Power Limit 400V Operation Range 200V Current Limit 131V Figure 3.2 Operation curve of output V-I characteristic...
  • Page 11 HPH- 20KA01KAT Delta Electronics. Inc. For Delta “HPH-20KA01KAT” power supply, the maximum output voltage and current level are 1000 V and 50 A. The output characteristic is as the figures above. If the operation point is below 400 V, the power supply can provide at most 50 A, if the operation is more than 400 V, the maximum...

  • Page 12: Arc Suppression Specification

    HPH- 20KA01KAT Delta Electronics. Inc. 3.3. Arc Suppression Specification Figure 3.4 shows the waveforms and key parameters under arc condition, and Table 3.3 indicates the arc energy and adjustable parameters for user. Detection Delay Pause Recovery Time Time Time Time...
  • Page 13 HPH- 20KA01KAT Delta Electronics. Inc.

  • Page 14: Process And Monitor Function

    1 to 15000 kWh reaches the setting of kWh. 3.5. Mechanical Specification The outward appearance, cooling specification for minimum CFM Requirement, and I/O ports of Delta “HPH-20KA01KAT” power supply are described as below: Table 3.5 Mechanical specification Item Description 482.6 mm (W) x 132.5 mm (H) x 600 mm (L) Physical Dimension 19"...
  • Page 15 HPH- 20KA01KAT Delta Electronics. Inc.
  • Page 16 HPH- 20KA01KAT Delta Electronics. Inc. Figure 3.5 Physical dimension of HPH-20KA01KAT power supply Cooling requirement /min Minimum air flow rate: 7.36 (260 CFM) Air Out Air Out Air Out Air Out Air In Air In Figure 3.6 Air Flow directions...

  • Page 17: Environment Specification

    HPH- 20KA01KAT Delta Electronics. Inc. Delta “HPH-20KA01KAT” power supply is the forced air cooling type. Please keep enough space for air flow cooling capability when it is installing to the cabinet. Air inlet on the front panel and air outlet on the rear panel is shown in figure 3.6. Air outlet of rear panel is responsible for dissipating the heat from inside of power supply to outside by internal two fans.

  • Page 18: Chapter 4: System Protection Mechanism

    HPH- 20KA01KAT Delta Electronics. Inc. Chapter 4: System Protection Mechanism 4.1. Input Breaker The function of this switch is to prevent over current at input side from any malfunction happening and simultaneously provide a manual switch for user to turn off the power supply.
  • Page 19 HPH- 20KA01KAT Delta Electronics. Inc. Parallel Fault IP1 Fault from PSU IP 01 (showing on Master) Parallel Fault IP2 Fault from PSU IP 02 (showing on Master) Parallel Fault IP3 Fault from PSU IP 03 (showing on Master) Parallel Fault IP4...
  • Page 20 HPH- 20KA01KAT Delta Electronics. Inc. Energy Mode Monitor While output reaches setting Energy...

  • Page 21: Chapter 5: Installation

    Delta Electronics. Inc. Chapter 5: Installation Delta “HPH-20KA01KAT” power supply is a high voltage power supply. Please read this manual carefully and follow the instruction before installation and operation, otherwise an electric shock or a fatal accident might be caused.
  • Page 22 HPH- 20KA01KAT Delta Electronics. Inc.

  • Page 23: Cooling Requirements

    Delta Electronics. Inc. 5.1. Cooling Requirements For the HPH-20KA01KAT A supply to be sufficiently cooled, the cabinet must be set up to:. 1. Bring in coolant air of the correct temperature(40 ˚C maximum) 2. Distribute coolant air to the power supplies 3.

  • Page 24: Connecting For Master/Slave

    (the maximum power capability depends on the master unit’s configuration file). Any HPH-20KA01KAT A unit that features the master/slave Host card can function as either a master unit or a slave unit. HPH-20KA01KAT units without the master/slave card cannot function as a master or slave.

  • Page 25: Monitoring Your Master/Slave System

    Note:We recommend you use a ground wire that can conduct the current of one phase( for example, 40A for HPH-20KA01KAT) that is no longer than 3 feet. We recommend you connect the ground stud on the master unit to system ground. See Figure 5.3 for more information.

  • Page 26: Clearing Faults In A Master/Slave System

    HPH- 20KA01KAT Delta Electronics. Inc. Following is information on monitoring the master/slave system depending on your monitoring device: If you have a passive front panel attached to your master unit, you can view the combined output of your master/slave system (power or current). The passive front panel of each slave unit displays the individual unit’s output.

  • Page 27: Chapter 6: Interface

    HPH- 20KA01KAT Delta Electronics. Inc. Chapter 6: Interface 6.1. Front Panel The functions for several buttons on the front panel are described on Table 6.1 Table 6.1 Function description of front panel 1. Press the button to change all of adaptive parameters.

  • Page 28: Rear Panel

    HPH- 20KA01KAT Delta Electronics. Inc. Figure 6.1 Front panel 6.2. Rear Panel 1. GND terminal is for chamber grounding, and earth grounding should be performed for safety. 2. Connect output terminal to target and connect +COM to the grounding of the chamber...

  • Page 29: Main Menu Map

    HPH- 20KA01KAT Delta Electronics. Inc. 6.3. Main Menu Map Fig 6.1 Panel tree...

  • Page 30: Digital Communication Port (Host)

    HPH- 20KA01KAT Delta Electronics. Inc. Command > R E G : 2 0 . 0 k W O U T : Power On/Off Voltage/Current/Power Reader 1 0 0 0 Arc Number、Arc Density A N : D : 9 9 Master/Slave...
  • Page 31 HPH- 20KA01KAT Delta Electronics. Inc. Table 6.3 Protocol of RS232/485 definition (1) Remote to PSU Byte Command Data1 Data2 Check Sum Termination Byte H-Byte L-Byte H-Byte L-Byte H-Byte L-Byte 0x00 Byte 0x00 0x0D CV Mode 0x11 0x00/01/02 0x00 0x00 Value...
  • Page 32 HPH- 20KA01KAT Delta Electronics. Inc. Table 6.4 Protocol of RS232 definition (2) PSU to Remote Byte Command Data1 Data2 Check Sum Termination Byte H-Byte L-Byte H-Byte L-Byte H-Byte L-Byte 0x00 Byte 0x00 0x0D CV Mode 0x11 0x0A 0x00 0x00 Value...
  • Page 33 HPH- 20KA01KAT Delta Electronics. Inc. Note 6.2: Check Sum value is the summation of “1” signal calculated by byte 0 to 7. Example: “Master IP is 01, Power On”, Byte 0~7 are “0x01-0x41-0x00-0x00-0x00-0x00-0x00-0x00”. There are three “1” in this command, so checksum is 3.

  • Page 34: Analog Communication Port (User)

    HPH- 20KA01KAT Delta Electronics. Inc. 6.5. Analog Communication Port (User) The 15-pin female subminiature-D connector labeled “User Port” on the rear of the power supply lets you connect with control box to control the power supply in analog signal. Definition of 15-pin...
  • Page 35 HPH- 20KA01KAT Delta Electronics. Inc. Pin 10 is connected to the emitter of photo coupler 10 MOD GREEN for MOD GREEN function 11 INTERLOCK_D Pin 11 indicates the disconnection of interlock 12 INTLK COM_D The return pin for INTERLOCK_D Pin 13 is connected to the emitter of photo coupler...

  • Page 36: Chapter 7: Operation

    HPH- 20KA01KAT Delta Electronics. Inc. Chapter 7: Operation 7.1. Local Operating Steps Step A Import AC voltage to input connector on rear panel. The mains voltage level should be 400± 10% V Step B Turn on the breaker to start the power supply. Now, you can see “LCD Display” is working and shows the default setting of the power supply.

  • Page 37: D-Sub Operating Steps

    HPH- 20KA01KAT Delta Electronics. Inc. 7.2. D-sub Operating Steps Example : CP mode 20 kW output Operating steps: Set the front panel => Interface Setup => Communnication Setup => D-sub. Command Level: Set +10 V input to pin 5 for 20 kW Command.

  • Page 38: Chapter 8: Maintenance

    HPH- 20KA01KAT Delta Electronics. Inc. Chapter 8: Maintenance Alarm Condition Code Description Suggested Action Take all safety precaution, and then check if the mains voltage that is in specification. Turn on HW Fault M1 Hardware error from the left module...
  • Page 39 HPH- 20KA01KAT Delta Electronics. Inc. Take all safety precaution, and Bus OVP Input voltage is over operation range then check if the mains voltage that is in specification. Check if the output positive Positive output is not connected to GND Detect...
  • Page 40 HPH- 20KA01KAT Delta Electronics. Inc. Check the PSU with IP 14 Parallel Fault IP14 Fault from PSU IP 14 independently to ensure the operation is normal. Check the PSU with IP 15 Parallel Fault IP15 Fault from PSU IP 15 independently to ensure the operation is normal.
  • Page 41 HPH- 20KA01KAT Delta Electronics. Inc.

Table of Contents