Varian 948D Manuals

Manuals and User Guides for Varian 948D. We have 1 Varian 948D manual available for free PDF download: Operation And Service Manual

Varian 948D Operation And Service Manual (230 pages)

Leak Detectors

Brand: Varian | Category: Security Sensors | Size: 6.17 MB

Table of Contents
3
Declaration of Conformity
13
Warranty
15
Warranty Replacement and Adjustment
15
Warranty
16
Warranty Replacement and Adjustment
16
Factory Calibration Data
17
List of Options or Accessories Included with System
17
Hazard and Safety Information
18
Solvents
19
Equipment, General
20
Power and Static
20
Vacuum Equipment and Cleanliness
22
O-Ring Care
22
Spectrometer Tube
23
Pumps
23
Varian Services
24
Contacting Varian Vacuum Technologies
24
Hazard and Safety Information
25
Solvents
26
Equipment, General
27
Power and Static
27
Vacuum Equipment and Cleanliness
29
O-Ring Care
29
Spectrometer Tube
30
Pumps
30
Varian Services
31
Contacting Varian Vacuum Technologies
31
Platform Electronics
36
Unpacking the 947/948/960
36
Unpacking Instructions
36
Removing the 947/948/960 from the Skid
37
Removing Loose Packing from Interior of 947/948/960
38
Front Panel Controls and Indicators
38
Inner Door Instruction Label
40
Rear Panel Power Connection and Circuit Breakers
41
Service pendant
42
Installation Preparation
43
Power
43
Liquid Nitrogen (Models 948/960 Only)
44
Oil-Sealed Vacuum Pumps
44
Special Installation Requirements
44
Installation Services
44
Storage
45
Optional Rear Panel Interface Connections
45
Platform Electronics
49
Unpacking the 947/948/960
49
Unpacking Instructions
49
Removing the 947/948/960 from the Skid
50
Removing Loose Packing from Interior of 947/948/960
51
Front Panel Controls and Indicators
51
Inner Door Instruction Label
53
Rear Panel Power Connection and Circuit Breakers
54
Service pendant
55
Installation Preparation
56
Power
56
Liquid Nitrogen (Models 948/960 Only)
57
Oil-Sealed Vacuum Pumps
57
Special Installation Requirements
57
Installation Services
57
Storage
58
Optional Rear Panel Interface Connections
58
Section 2. Leak Detector Integration
59
Physical Considerations
59
Common Configuration
59
Electronic Considerations for the Optional Rear Panel Interface
67
Discrete I/O J120 Inputs
67
BCD J121 Outputs
68
Host Serial Port J123 Pinouts
69
Optional Interface Connections
70
Grounding and Isolation
70
Setup
71
Discrete I/O
71
Operation Using the Optional Rear Panel Interface
73
Parallel Enable
73
Section 3. Operation
75
Front Panel LED Indicators and Controls
75
Initial System Parameter Setup
77
Parameters and Operating Modes
77
Start-Up
82
Startup Procedure
84
Calibration and Sensitivity Checks
85
Operating Procedures
87
Auto Ranging
88
Manual Ranging
89
Standby
90
Shutdown
90
Using the pendant for Parameter Setup
91
Optional Discrete I/O
92
Operation
93
Front Panel LED Indicators and Controls
93
Initial System Parameter Setup
95
Parameters and Operating Modes
95
Start-Up
100
Startup Procedure
102
Calibration and Sensitivity Checks
103
Calibration and Sensitivity Checks
104
Operating Procedures
105
Auto Ranging
106
Manual Ranging
107
Standby
108
Shutdown
108
Using the pendant for Parameter Setup
109
Optional Discrete I/O
110
Section 4. Maintenance
111
Daily Maintenance
115
Calibration Check
115
Leak Checking
115
General Suggestions for Leak Checking
116
Yearly Maintenance
117
Replacing the Calibrated Leak
117
Re-Calibrate the Internal Calibrated Leak
117
Removing the Internal Calibrated Leak
117
Replacing the Internal Calibrated Leak
119
Liquid Nitrogen Cold Trap (Models 948/960 Only)
120
Liquid Nitrogen Cold Trap (Models 948/960 Only)
121
Spectrometer Tube Overhaul
122
Removal of the Spectrometer Tube and Preamplifier
123
Disassembly of the Spectrometer Tube and Preamplifier
125
Spectrometer Tube Cleaning
127
Reassembly of the Spectrometer Tube and Preamplifier
127
Reinstallation of the Spectrometer Tube
130
Air Filter
131
Spectrometer Tube Exchange
132
Removing and Replacing both the Spectrometer Tube Assembly and Preamplifier
132
Reinstalling the Spectrometer Tube
132
TC1 and TC2 Gauge Replacement and Calibration
134
Replacement of the TC1 Gauge in the Main Valve Block Assembly
134
Replacement of the TC2 Gauge in the Service Block Assembly
136
Thermocouple Gauge Calibration Procedures
138
System Pressure Gauge (TC2) Calibration
138
Vacuum (Low Pressure) Calibration
138
Atmospheric Calibration
139
Test Port Pressure Gauge (TC1) Calibration
140
Vacuum (Low Pressure) Calibration
140
Atmospheric Calibration
141
Rough Pump and Forepump Oil Level Check (Oil-Sealed Mechanical Pumps)
142
Condition of Oil (Oil-Sealed Mechanical Pumps)
143
Cleaning the Test Port
143
Removing the Test Port
143
Examining and Cleaning the Test Port
144
Replacing the Test Port
145
Spare Parts
145
Exchange Assemblies
145
Replacement Parts
146
Section 5. Troubleshooting
149
Error Condition Codes
150
Troubleshooting Symptoms and Solutions
151
Error Condition Codes
153
Troubleshooting Symptoms and Solutions
154
Appendix A. Service pendant Keypad Functions
157
Keypad Functions
157
Using the Service pendant
158
Glossary of Function Keys
159
Glossary of Input and Data Keys
160
Appendix B. Parts Replacement
165
Removing the Covers
165
Opening the Turret
166
Removing the Service pendant Shelf
166
Removing the Top Panel
167
Replacing All Panels and Covers
168
Replacing the Service pendant Shelf
168
Replacing the Top Panel
169
Replacing the Ion Source
170
Replacing the Turbo Pump
173
Turbo Pump
173
Removing the Turbo Pump
174
Replacing the Turbo Pump
176
Examining and Cleaning Centering Rings, O-Rings and Manifold
176
Connecting the Turbo Pump to the SVBA
177
Replacing the Rough Pump
179
Wet Systems
179
Removing the Wet System Rough Pump
180
Replacing the Wet System Rough Pump
181
Examining and Cleaning Centering Rings, O-Rings and Manifold
181
Re-Installing the Wet System Rough Pump
182
Dry Systems
184
Removing the Dry System Rough Pump
184
Replacing the Dry System Rough Pump
185
Examining and Cleaning Centering Rings, O-Rings and Manifold
185
Re-Installing the Dry System Rough Pump
185
Replacing the Forepump
186
Wet
186
Removing the Wet System Forepump
187
Replacing the Wet System Forepump
188
Examining and Cleaning Centering Rings, O-Rings and Manifold
188
Re-Installing the Wet System Forepump
188
Dry System
190
Removing the Dry System Forepump
190
Removing the Isolation Valve from the Forepump
190
Removing the Nitrogen Purge Connection from Pump
191
Removing the Exhaust Fitting
191
Removing the Pump from the Cabinet
191
Replacing the Dry System Forepump
191
Examining and Cleaning Centering Rings, O-Rings and Manifold
191
Re-Installing the Dry System Forepump
192
Connecting the Nitrogen Purge Pump
192
Replacing the Isolation Valve
192
Replacing the Exhaust Fitting
193
Completing Mounting the Pump to the Cabinet Floor
193
Appendix C. Communications Protocol
195
Protocol
195
Appendix D. Inputs and Outputs
203
Service Serial Interface (J1
203
Optional Rear Panel Interface
203
Discrete I/O Parallel Interface (J120
203
BCD Discrete Output Parallel Interface (J121
205
Interface (J122) for Optional Universal Remote Control
206
Host Serial Port (J123
206
Appendix F. Accessories
215
Appendix G. Leak Detection Theory
217
Leak Testing-Why Is It Needed
217
Classes of Leak Detection
217
Terminology
218
Various Methods of Testing for Leaks
219
Helium Mass Spectrometer Leak Detection (MSLD
220
Principles of Mass Spectrometry
220
Application as a Leak Detector
220
The Nature of Flow in a Vacuum
220
Facts about Leak Rates
221
Leak Detection Methods
221
Test Piece Evacuated
222
Test Piece Pressurized
222
Test Piece Already Sealed
223
Mass Spectrometer Leak Detector-Simplified Description
224

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