Ulvac C30PMVRT Manuals

Manuals and User Guides for Ulvac C30PMVRT. We have 1 Ulvac C30PMVRT manual available for free PDF download: Instruction Manual

Ulvac C30PMVRT Instruction Manual (98 pages)

COMPRESSOR UNIT

Brand: Ulvac | Category: Air Compressor | Size: 3 MB

Table of Contents
11
Compressor Unit Safety Instructions
15
C30Pmvrt_Compressor Description
19
Introduction
19
Terminology
19
Cryopump System Documents
19
Table 1-1 C30PMVRT Compressor Models
19
Roles of Compressor in Cryopump System
20
Compressor Specifications
20
Figure 1-1 C30PMVRT External View
20
Figure 1-2 C30PMVRT Compressor Dimensions
21
Table 1-2 Compressor Weight
21
Table 1-3 Power Supply Rating
22
Table 1-5 Installation Environment and Operation Requirements
22
Component Descriptions
23
Figure 1-3 Compressor Front View
23
Table 1-6 Electromagnetic Environment Resistance Characteristics
23
Figure 1-4 Compressor Rear View
24
Figure 1-5 Anchor Bolts Mounting Positions (Example)
25
CRYO-U ® Cryopump Multiple Installation
28
Figure 1-6 Cryopump Installation with C30PMVRT Compressor
28
Considerations before Installation
29
Combination of Cryopump and Compressor
29
Installation Environment Requirements
29
Wiring Requirements
30
Figure 2-1 Required Space for Compressor Installation (Scale: MM) and Levelness
30
Table 2-1 Input Power Cable Specifications
30
Figure 2-2 Equipment-Side Power Circuit
31
Table 2-2 Control and Signal Wire Gauges
31
Cooling Water Requirements
32
Table 1-4 Cooling Water Requirements
32
Table 2-3 Recommended Cooling Water for Compressor
32
Figure2-3 Cooling Water Flow Rate, Water Supply Temperature, and Water Pressure Loss
33
Length of Cables and Flexible Hoses
34
Remote Functions
34
Table 2-4 Standard Cables and Flexible Hoses
34
Table 2-5 Remote Interface Specifications
34
Figure 2-4 Remote Input Interface Circuit
35
Figure 2-5 Remote Output Interface Circuit
35
Table 2-6 Remote Interface Signals
36
Figure 2-6 Timing Chart for Alternate Operating Mode with Two Refrigerators
38
Figure 2-7 Timing Chart for Momentary Operating Mode with Two Refrigerators
39
Figure 2-8 Signal Delay When Powered On（In Alternate Operating Mode
39
Figure 2-9 Signal Delay When the Time Period from a Stop to a Restart Is Short
40
Figure 2-10 Timing Chart When a Short Power Interruption Occurs
41
Unpacking and Inspection
43
Compressor Carton
43
Shipping Carton Inspection
43
Figure 3-1 Appearance of Compressor Carton
43
Unpacking
44
Carton Contents
45
Figure 3-2 Remove Cardboard and Insert Forks Underneath the Compressor
45
Table 3-1 Carton Contents
45
Table 3-2 Optional Parts
45
Inspection of the Compressor and Accessories
46
Flexible Hoses and Specifications
46
Table 3-3 Flexible Hose Specifications
46
Installation, Piping, and Wiring
47
Before Installation
47
Connecting Cooling Water Piping
47
Figure 4-1 Installation Procedure
47
Connecting and Disconnecting Helium Flexible Hoses
48
Connecting Cooling Water Piping
48
Figure 4-2 Tighten with Hands First
50
Figure 4-3 Tighten with Two Spanners
50
Figure 4-4 Connecting and Disconnecting Helium Flexible Hoses to Compressor
50
Multiple Cryopump Installation
51
Electrical Connections
52
Figure 4-6 Connecting Input Power Cable Connector
53
Figure 4-7 Remote Connector Pin Assignments
54
In MOMENTARY OPERATING MODE
55
Figure 4-8 "Momentary Operating Mode" Wiring Example
55
Figure 4-9 Connector Parts Descriptions
56
Figure 4-11 Fix with Set Screw
56
Wire Rooting for Compressor and Other Equipments
57
Operation
59
Verification of Helium Static Pressure
59
Compressor Operation
61
Inspection after Replacing Helium Circulation Components
64
Precautions for When Compressor Is Not in Operation
64
Maintenance Operation for a Compressor Stopped for a Long Period
64
Wiring and Piping Removal and Storage
65
Removal of Wiring and Piping and Displacement of Compressor
65
Maintenance in Storage Site
67
Maintenance
69
Scheduled Maintenance
69
Replacement of Adsorber
69
Table 7-1 Scheduled Maintenance
69
Figure 7-2 Remove All Seven Screws from the Rear Panel
71
Figure 7-3 Remove the Rear Panel
71
Figure 7-4 Remove Self-Sealing Coupling
71
Figure 7-5 Connecting and Disconnecting Self-Sealing Coupling with Two Spanners
71
Figure 7-6 Remove Adsorber Mounting Bolt
72
Figure 7-7 Slide Adsorber Outward
72
Adjusting System Helium Pressure
73
Figure 7-8 Locations of Front Panel Screws and Components Inside the Compressor
74
Table 7-2 Preparation for Adding Helium Gas
75
Figure 7-9 Items for Adding Helium Gas to the Compressor
76
Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical
78
Wiring
78
Maintenance Parts
78
Table 7-3 Maintenance Parts
78
Troubleshooting
79
Problem Types
79
Figure 8-1 Alarm Status Table
79
Troubleshooting Procedures
80
Figure 8-2 Alarm Status Code Table
80
Table 8-1 List of Troubleshooting before Operation
80
Table 8-2 List of Troubleshooting During Operation
81
Alarm Code Descriptions
82
Disposal of Equipment and Component Parts
85
Appendix A Operating Log
87
Appendix B Combination of C30PMVRT Compressor and Cryopump
89
Table B-1 Combination of C30PMVRT Compressor and Cryopump
89
Appendix C C30PMVRT Schematic Diagram
91
Figure C-1 C30PMVRT Schematic Diagram
92
Appendix D Compressor Flow Diagram
93

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Ulvac C30PMVRT Instruction Manual (98 pages)

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