Edwards SCU-XL800 Manuals

Manuals and User Guides for Edwards SCU-XL800. We have 1 Edwards SCU-XL800 manual available for free PDF download: Instruction Manual

Edwards SCU-XL800 Instruction Manual (131 pages)

Brand: Edwards | Category: Control Unit | Size: 3 MB

Table of Contents
5
Introduction
13
Scope and Definitions
13
Applied Standards
14
Limited Warranty
14
Warranty Period
14
Item Warranted
14
Disclaimer
14
Spare Parts
15
Labels
15
High Voltage Device Caution Label
15
Voltage Caution Label
16
Safety Instruction Label
16
Connector Caution Label
16
Voltage Rating Label
17
Label Affixing Positions
18
General Description
19
Cable Sets
20
SCU-XL800 Control Unit
20
Technical Data
21
SCU-XL800 Specifications
21
Installation
25
Unpacking
25
Front Panel
25
SCU-XL800 Front Panel
25
SCU-XL800 Front Panel Functions
26
SCU-XL800 Front Panel Functions (Continued)
27
Rear Panel
28
SCU-XL800 Rear Panel
28
SCU-XL800 Rear Panel Connection
28
Precautions before Installation
29
Operating Environment
29
Insulation Test
29
Installation Area
30
Attaching the SCU-XL800 to a Rack
31
Example of Securing the SCU-XL800
31
Cable Connection
32
STP Connection Cable
33
STP Pump Connection Cable
33
TMS Connection Cable
34
TMS Connection Cable (Standard)
34
Power Cable
35
Connecting to Semiconductor Equipment
37
Connecting to Power
37
Emergency off Circuit (EMO Circuit)
37
Remote Communication
38
Parallel Communication
38
Serial Communication
38
Connector X3A, X3B, X6 (D-Sub 9)
38
Adjustment Methods
39
Tuning
39
Tuning Method
39
Change of Data after Tuning
41
Confirmation Mode
42
Confirmation Method
42
Parameter Set Mode
44
Remote Operation Setting
44
Rotational Speed Setting
44
TMS Setting
44
Rotational Inhibit Signal Setting
44
Emergency Vent Valve Setting
44
Second Damage Limit Setting
45
Pump Air-Cooling Fan Output Setting
45
Warning Function Setting
46
Serial Port COM1 Setting
47
Serial Port COM2 Setting
47
Serial Port COM3 Setting
47
Date/Time Setting
47
Factory Setting
47
Parameter Setting Procedure
48
Parameter Setting Method
49
Remote Mode
49
Parameter Setting Method (Continued)
50
Parameter Setting Method (Continued)
53
Manual Operation Mode
54
Manual Operation Method
54
Operation
55
Before Starting the STP Pump
55
Confirmation before Starting
55
Confirmation of Vacuum System
55
Powering on
56
Self Test
56
CAUTION" Message in the Self Test State
56
How to Start/Stop the STP Pump
57
Manual Start/Stop the STP Pump
57
Starting the STP Pump
57
Stopping the STP Pump
57
Starting the STP Pump after Stopping
57
Remote Operation
59
Input Signal Pins
59
REMOTE X7 Input Signal Pins
60
Output Signal Pins
61
REMOTE X7 Input Signal Pins
61
REMOTE X7 Output Signal Pins
62
REMOTE X7 Output Signal Pins
63
Remote Setting
64
Starting/Stopping the STP Pump
64
Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)
64
Rotation INHIBIT Signal
65
Rotation INHIBIT Signal Input
65
Start Operation
65
Starting the STP Pump after Stopping
66
Starting the STP Pump after a Safety Function Operates
66
Powering off
66
Operating the TMS Unit (for Use with the TMS Unit)
67
Before Starting
67
Starting/Stopping
67
Setting the TMS Unit Function
67
Temperature Control
67
Serial Communication Protocol
69
Introduction
69
Connection and Setting up
69
Signal Connection
69
Serial Communication
69
Connector X3A/X3B (D-Sub 9)
70
X6 Pin Position
70
Connecting the RS485
72
Communication Parameter Setting
73
Protocol Specifications
73
General Description
73
Communication Parameters
73
Pump Operation Commands
73
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)
74
(In the RS232/RS485 Single Point Connection)
75
Query Command
76
(In the RS232/RS485 Single Point Connection)
76
Transmission Data Format
77
Frame Control (Checksum)
78
Error Control
78
Transmission Frame in the RS485 Multi-Point Connection
78
Control Command in the RS485 Multi-Point Connection
80
Query Command in the RS485 Multi-Point Connection
81
Broadcasting Command in the RS485 Multi-Point Connection
82
Pump Operation Commands
82
Command Specifications
83
Command List
83
Readmeas
84
Command
84
Readfailmess
85
Error Message Values
87
Readmodfonct
88
Error Message Values (Continued)
88
Pump Operation Mode
89
Readversion
90
Readcounters
91
Readsetpoint
92
Readmotortemp
92
Readstatus
93
Readevents
94
Setspeedsetpoint
95
Readspeedsetpoint
96
Readmodfonctwithwarning
97
Readmeasvalue
100
Stp-Link
103
Maintenance
105
Safety Functions
105
Power Failure
105
Backup Rotational Speed
105
Operation after a Power Recovery
106
Abnormal State of Magnetic Bearing
106
States of LCD, Leds and REMOTE Output Signals
106
Excessive Vibration
107
Motor Driver Overload
107
Overheating Inside the STP Pump
107
Overheating Inside the SCU-XL800
107
Overspeed
107
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
108
Failure of the Air-Cooling Fan
108
WARNING" Message Function
109
WARNING" Message Display Function
109
WARNING" Message Description
110
Damage Point Function
110
First Damage Limit
110
Second Damage Limit
110
Imbalance X_H, X_B, Z
111
Pump Run Time over
111
Pump Overload
111
Low RTC Battery
111
WARNING" Function Setting
112
Default Setting of "WARNING" Function
112
Factory Setting and Variable Range
112
Error at Self Test State
113
Error Messages at Self Test State
113
Error after Self Test
114
Error Messages
114
Troubleshooting Immediately after Power Failure Occurs
114
Troubleshooting Immediately after Other Abnormality/Errors Occur
115
When Error Message Is Not Displayed on LCD
123
Abnormalities When Powering on
123
Abnormalities When Performing Rotational Operation
123
Troubleshooting When Powering on
123
Troubleshooting When Performing the STP Pump
123
Other Abnormalities
124
Error Record" Message Display Function
124
Troubleshooting While the STP Pump Is Rotating
124
Maintenance and Inspection
125
Replacing the Fuses
125
Cleaning
126
Overhaul
126
Storage, Transportation and Disposal
127
Storage of the SCU-XL800
127
Transporting for Repair or Overhaul
127
Power Cable
130

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Edwards SCU-XL800 Instruction Manual (131 pages)

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