Micronix PPS-28 Series Reference Manual
Precision piezo stage
Hide thumbs
Also See for PPS-28 Series:
- Reference manual (23 pages) ,
- Reference manual (25 pages) ,
- Reference manual (32 pages)
Related Manuals for Micronix PPS-28 Series
Summary of Contents for Micronix PPS-28 Series
- Page 1 PPS-28 S e r i e s Precision Piezo Stage Reference Manual (Open and Closed Loop Versions)
- Page 2 PPS-28 Piezo Motor Precision Positioner Stage Reference Manual Rev 4.0 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...
-
Page 3: Table Of Contents
Operating and Electrical Specifications ..................... 22 A.3.3 Output Signals ............................22 A.3.4 Resolution ..............................22 Using an Absolute Encoder ........................... 23 A.4.1 Operating and Electrical Specifications ..................... 23 A.4.2 Absolute Encoder Pinout ........................23 A.4.3 Absolute Encoder Setup ........................23 MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... - Page 4 Legacy Analog Encoder, Ultra High Vacuum Wiring Diagram ............28 A.5.6 Legacy PPS-28PM with UHV MII 6000V Digital Encoder Dimensions ..........29 A.5.7 Legacy Digital MII6000V Encoder, Ultra High Vacuum Wiring Diagram ......... 30 A.5.8 Legacy Using the UHV Digital Encoder Module ................. 31 MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com...
-
Page 5: Introduction
Vacuum and non-magnetic versions available Carriage Encoder Base Figure 1-A. PPS-28PM, Piezo Motor, Open Loop Version (left), Closed Loop Version (right) Recommended Controllers The following controllers are available from MICRONIX USA: • MMC-100 • MMC-110 • NanoDrive Technical Data and Ordering Information Detailed specifications and ordering information can be found on the PPS-28PM product page on the MICRONIX USA website. -
Page 6: Preparing To Install The Pps-28Pm Stage
Relative humidity between 20-80%. • Locate away from water, heat, and electrical noise. Package Contents If the product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: •... -
Page 7: Installing The Pps-28Pm Stage
Travel Figure 3-A. PPS-28PM Installation *Ensure the dowel pin holes on the mounting plate are not over-constraining the stage, i.e. one of the two holes needs to be a slot, see section 4.2 for reference. MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 8: X-Y Mounting
Reference Manual 3.1.2 X-Y Mounting An adapter plate is required to mount in XY. Contact MICRONIX USA for additional or custom mounting plates. 1. Install the bottom stage to the mounting surface as shown in Section 3.1.1. 2. Align the XY Bracket (PN: 430987) to the carriage using two M1.5 x 4 mm dowel pins and secure using four M2 x 4 mm socket head cap screws at 0.22 Nm... -
Page 9: Dimensions
* Grey parts for external closed loop only * All dimensions shown in millimeters Recommended General Mounting Pattern It is recommended to use a pin-slot hole pattern for dowel pin alignment. Travel 26mm 51mm 76mm 102mm MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 10: Stacking Configurations
PPS-28 26mm Travel Using Adapter Brackets 430987 430517 430805 XY PPS-28, 26mm x 26mm PPS-28, 26mm Travel with YZ PPS-28, 26mm x 13mm Adapter PN: 430987 Rotational Stage PR-32L Adapter PN: 430805 Adapter PN: 430517 MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 11: Accessories
Metric/English Optical Table Mounting Plate for PPS-28 (Mounting Plate PN: 431422) Accessories 430987 430805 XY-Bracket Adapter Z-Bracket Adapter Used to adapt the PPS-28 series to an Used to adapt the PPS-28 series to a assembly for a XY mounting perpendicular assembly for XZ configurations. mounting configurations. - Page 12 Precision Positioner Stage Reference Manual 431581 431591 Z-Bracket Adapter Z-Bracket Adapter Used to adapt the PPS-28 series to a Used to adapt the PPS-28 series to a perpendicular assembly for XZ perpendicular assembly for XZ mounting configurations. mounting configurations. 430517...
-
Page 13: Connecting The Pps-28Pm Stage
Piezo Motor Atmospheric Open Loop Pinout Cable A Pinout for PPS-28-1X000 Dsub9M Description Color Phase 1 Phase 2 White (Green TP) Ground Black/Green Shield Casing Limit Switch - White (Violet TP) Limit Switch + Violet White (Grey) Grey MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 14: Closed Loop (Encoder), Atmospheric Wiring Diagram
Phase 1 Cos+ Blue Phase 2 White (Green TP) Sin+ Brown Ground Black/Green Index+ Violet Shield Casing Grey White (Grey TP) Cos- White (Blue TP) Sin- White (Brown TP) Index- White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... - Page 15 Description Color Description Color Phase 1 Blue Phase 2 White (Green TP) Brown Ground Black/Green Index+ Violet Shield Casing Grey White (Grey TP) White (Blue TP) White (Brown TP) Index- White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com...
-
Page 16: Vacuum Environments
When handling the stage for vacuum environments, take the necessary precautions, such as wearing clean latex gloves, clean room, clothing, etc. Avoid any contaminants. Maximum bake-out temperature is 100°C. MICRONIX USA optionally supplies the stage with vacuum compatible connectors, see chart below. -
Page 17: Open Loop, Vacuum Wiring Diagram
Color Color Phase 1 Phase 2 White (Green TP) White (Green TP) Ground Black/Green Black/Green Limit Switch - White (Violet TP) White (Violet TP) Limit Switch + Violet Violet White (Grey) White (Grey) Grey Grey MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 18: Closed Loop (Encoder), Vacuum Wiring Diagram
Brown Index+ Violet Violet Grey Grey White (Grey TP) White (Grey TP) Cos- White (Blue TP) White (Blue TP) Sin- White (Brown TP) White (Brown TP) Index- White (Violet TP) White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... - Page 19 Blue Brown Brown Index+ Violet Violet Grey Grey White (Grey TP) White (Grey TP) White (Blue TP) White (Blue TP) White (Brown TP) White (Brown TP) Index- White (Violet TP) White (Violet TP) Shield Casing MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com...
-
Page 20: Supplementary Information
USA personnel. If the stage is not performing up to the original specifications, please contact MICRONIX USA. • The PPS-28 series of linear stages are precision mechanical devices and should be handled with care. Do not drop or mishandle the stage. •... -
Page 21: Appendix
PPS-28PM Precision Positioner Stage Reference Manual A. Appendix A.1 2 Phase Piezo Motor Wiring Diagram A.1.1 Piezo Operating and Electrical Specifications Voltage 60V maximum Capacitance 150nf ±15% A.1.2 Feedthroughs MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 22: Using An Analog Encoder
All closed loop stages are supplied with 20 µm scales. The interpolation is done in the MMC-100/MMC-110 to the resolution as specified in the order. With an analog encoder, the MMC-100/MMC-110 has an achievable resolution of 10 MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 23: Using A Digital Encoder
*Note: The index pulse may be aligned with A- or B- at some interpolation values. A.3.4 Resolution All closed loop stages are supplied with 20µm scales. With a digital encoder, an MMC controller has an achievable resolution of 2nm. MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 24: Using An Absolute Encoder
Reference Manual A.4 Using an Absolute Encoder The Micronix absolute encoder operates using standard BiSS C-mode (continuous) interface, transmitting 32-bits of position data on each request. The controller will clock position acquisitions via the MA signal. The SLO signal will transmit position data from the encoder. -
Page 25: Legacy Documentation
Description Color Brown Phase 1 Blue Phase 2 White (Green TP) Index+ Violet Ground Black/Green Grey Shield Casing White (Grey TP) White (Brown TP) White (Blue TP) Index- White (Violet TP) Shield Casing Casing Casing MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 26: Legacy Digital Encoder, Vacuum Wiring Diagram
Violet Shield Interpolator Cable E Pinout for PPS-28-1X306 Dsub15M Dsub15F Dsub9F Description Color Brown Blue Index+ Violet Grey White (Grey TP) White (Brown TP) White (Blue TP) Index- White (Violet TP) Shield Casing Casing Casing MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 27: Legacy Cabling (8 Conductor Wiring)
Blue A- / COS- Orange White (Blue TP) B+ / SIN+ Yellow Brown B- / SIN- Green White (Brown TP) Index + Violet Violet Index - Blue White (Violet TP) White (Grey TP) Black Grey MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 28: Legacy Pps-28Pm With Uhv M1000V Analog Encoder Dimensions
PPS-28PM Precision Positioner Stage Reference Manual A.5.4 Legacy PPS-28PM with M1000 Analog Encoder Dimensions * L45mm version shown * Grey parts for external closed loop only * All dimensions shown in millimeters MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 29: Legacy Analog Encoder, Ultra High Vacuum Wiring Diagram
Brown Brown White (Grey TP) Cos- Orange White (Brown TP) Sin+ Yellow Blue Sin- Green White (Blue TP) Index- Blue White (Violet TP) Index+ Violet Violet Shield Casing A.5.5.1 Legacy Straight Through 15-Pin Feed Through MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 30: Legacy Pps-28Pm With Uhv Mii 6000V Digital Encoder Dimensions
PPS-28PM Precision Positioner Stage Reference Manual A.5.6 Legacy PPS-28PM with MII 6000 Digital Encoder Dimensions MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 31: Legacy Digital Mii6000V Encoder, Ultra High Vacuum Wiring Diagram
White (Brown TP) Shield Interpolator Cable E Pinout for PPS-28-1X309 Dsub15M Dsub15F Dsub9F Description: Color Brown Blue Index+ Violet Grey White (Grey TP) White (Brown TP) White (Blue TP) Index- White (Violet TP) Shield Casing Casing Casing MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com... -
Page 32: Legacy Using The Uhv Digital Encoder Module
A Red or Yellow Signal Level LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders. - Page 33 All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder an MMC controller has an achievable resolution of 2nm. MICRONIX USA,LLC Rev: 4.0 www.micronixusa.com...
Need help?
Do you have a question about the PPS-28 Series and is the answer not in the manual?
Questions and answers