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Micronix PPS-60 Series Reference Manual

Precision positioner stage
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PPS-60
S e r i e s
Precision Positioner Stage
Reference Manual
(Open and Closed Loop Versions)

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Summary of Contents for Micronix PPS-60 Series

  • Page 1 PPS-60 S e r i e s Precision Positioner Stage Reference Manual (Open and Closed Loop Versions)
  • Page 2 PPS-60 Precision Positioner Stage Reference Manual Rev 1.04 MICRONIX USA, LLC 15375 Barranca Parkway, E-106 Irvine, CA 92618 Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...

  • Page 3: Table Of Contents

    Closed Loop/Encoder Installation & Wiring Diagram Dimensions PPS-60 Internal Motor Versions PPS-60 External Stepper Motor Versions Stacking Configurations Configuration Examples Supplementary Information Maintenance Units and Conventions Accessories Appendix Stepper Motor A.1.1 Standard Atmospheric DB-9 Male Motor Connector MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...
  • Page 4 MII 6000 Digital Wiring Diagram A.7.6 Straight Through 25-pin Feed Through Using a Micro Tape (Low Cost) Digital Encoder A.8.1 Micro Tape Encoder Overview A.8.2 Encoder Pin-out A.8.3 Operating and Electrical Specifications A.8.4 Output Signals MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 5: Introduction

    (Shown in center position) (Shown in center position) PPS-60 100mm with Piezo Motor option PPS-60 100mm with Linear Motor option (Shown in center position) (Shown in center position) Covered Versions Available Upon Request MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 6: Recommended Controllers

    PPS-60 Precision Positioner Stage Reference Manual Recommended Controllers The following controllers are available from MICRONIX USA: MMC-100 – Piezo ƒ MMC-110 – Piezo ƒ MMC-200 – Stepper ƒ Technical Data Motor option PM-003 SM-001/SM-003 LM-002 Speed, max. [mm/sec] 10 ( †...

  • Page 7: Model Configurations

    Only available with Piezo motor option or externally mounted UHV stepper motor. ‡ Not available in vacuum environments. ╝ Only available with Piezo motor. Contact MICRONIX USA for custom applications and stacking configurations. MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 8: Preparing To Install The Pps-60

    Locate away from water, heat, and electrical noise ƒ Package Contents If product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: PPS-60 Linear Stage ƒ...

  • Page 9: Installing The Pps-60

    Insert Pins and M3 SHCS as shown. Metric M3 Top Mount Mounting Pattern Š For internal motor configurations: Mounting screws must be flush with base surface. Travel [mm] 25mm 50mm 100mm 200mm 300mm MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...
  • Page 10 2 x M2 x 6mm Dowel Pins 4 x M4 Socket Head Cap Screws Insert Pins and M4 SHCS as shown. Metric M4 Bottom Mount Mounting Pattern Travel [mm] 25mm 50mm 100mm 200mm 300mm MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...
  • Page 11 Assuming 25mm optical table hole spacing. Š Check manufacturing tolerances of the optical table for precision fit. Š For internal motor configurations: Mounting screws must be flush with base surface. Travel [mm] 25mm 50mm 100mm 200mm 300mm MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...
  • Page 12 Check manufacturing tolerances of the optical table for precision fit. Š For internal motor configurations: Mounting screws must be flush with base surface. Travel mm [in] 25mm 50.8 [2] 50mm 50.8 [2] 100mm 101.6 [4] 200mm 203.2 [8] 300mm 304.8 [12] MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 13: X-Y Mounting

    Move carriage via the Requires: controller*, if necessary, to 2 x M2 x 6mm Dowel Pins access mounting holes. 4 x M3 Socket Head Cap Screws (Low Profile recommended) Direction of Travel MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 14: Connecting The Pps-60

    Please note, open loop configurations are only available for stepper or piezo motor versions (See Appendix A.1 or A.3 for pinout configurations). Internal Piezo and Stepper Versions External Version MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 15: Closed Loop/Encoder Installation & Wiring Diagram

    Using the PPS-60 stage with an encoder requires a closed loop compatible controller that recognizes the proper type of encoder feedback. Connect the stage as shown below. 5.1.2.1 Analog or Low Cost Digital Encoder Wiring Diagram Internal Piezo, Linear, and Stepper Versions External Version MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...
  • Page 16 PPS-60 Precision Positioner Stage Reference Manual 5.1.2.2 MII 6000 Digital Encoder Wiring Diagram Internal Piezo, Linear, and Stepper Versions External Version MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 17: Vacuum Environments

    (such as wearing gloves, clean room, clothing, etc.) when handling the stage as to avoid any contaminants. Maximum Bake-out temperature is 100°C. MICRONIX USA can supply the stage with vacuum compatible connectors: 9-pin female PEEK connector for open loop, 15-Pin female PEEK connector for closed loop with analog encoder, 25-pin female PEEK connector for closed loop with MII 6000 digital encoder.

  • Page 18: Closed Loop/Encoder Installation & Wiring Diagram

    The vacuum compatible PPS-60 will be supplied with wiring for a straight through feed through, not a cross over gender bender. MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow for functionality testing prior to installation in a vacuum chamber.
  • Page 19 PPS-60 Precision Positioner Stage Reference Manual 5.1.3.2 MII 6000 Digital Encoder Wiring Diagram Internal Piezo and Stepper Versions Temporary test External Version connectors are standard. Requires customer supplied feed through connector MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 20: Dimensions

    PPS-60 Precision Positioner Stage Reference Manual 6. Dimensions PPS-60 Internal Motor Versions Travel [mm] [mm] [mm] [mm] [mm] 50.8 50.8 101.6 203.2 304.8 MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 21: Pps-60 External Stepper Motor Versions

    PPS-60 Precision Positioner Stage Reference Manual PPS-60 External Stepper Motor Versions Travel [mm] [mm] [mm] [mm] 247.6 347.6 447.6 MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 22: Stacking Configurations

    ¾ Note: Stacking compatibility for all motor configurations. ¾ Positioning according to: No Adapters X-Y 50x50mm X-Y 200x50mm X-Y Off-Center 100x100mm X-Y-Z Off-Center X-Z 100x35mm X-Y-Z 100x100x35mm 50x50x35mm [with PZS-90 Elevation [with PZS-90 Elevation Stage] [with PZS-90 Elevation Stage] Stage] MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...
  • Page 23 [with PPS-28 Linear Stage [with PPS-28 Linear Stage] & PZS-90 Elevation Stage] & PZS-90 Elevation Stage] Using: Adapter Block (P/N 430141) & VT-21 Linear Stages X-Z 100x10mm X-Y-Z 100x10x10mm X-Z 100x26mm X-Y-Z 100x100x10mm X-Y-Z 100x100x26mm MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...
  • Page 24 PPS-60 Precision Positioner Stage Reference Manual Using: Z Bracket (P/N 430613) X-Y 200x100mm X-Y-Z 50x50x100mm Using: XY Bracket (P/N 430169) & VT-21 Linear Stages X-Y-Z 100x10x35mm X-Y 100x10mm [with PZS-90 Elevation Stage] MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 25: Supplementary Information

    The PPS-60 series of Linear stages utilizes a maintenance free design. Do not ƒ modify the stage or perform any maintenance unless specifically instructed to do so by MICRONIX USA personal. If the stage is not performing up to the original specifications, please contact MICRONIX USA. ƒ...

  • Page 26: Appendix

    0.24 A Max Step Angle 1.8° Step Angle 1.8° Steps Steps Coil-Resistance 1.9 Ohms Coil-Resistance 20.4 Ohms Coil-Inductance 1.7 mH Coil-Inductance 5 mH Pitch 1 mm/rev Pitch 0.5 mm/rev Resolution/Fullstep 5 m Resolution/Fullstep 2.5 m MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 27: Linear Motor

    3.2 N/Arms Back EMF (K 1.1 V/m/s Resistance 25°C 6.8 Ohms Inductance 1.0 mH Electric Time Constant 0.147ms Rated Voltage (AC) 240 V Fundamental Motor Constant (K ) 1.23 N Magnetic Pitch (North-North) 30mm MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 28: Piezo Motor

    Standard Atmospheric DB-9 Male Motor Connector Piezo Motor Function Wire Color Phase 1 Phase 2 Yellow Ground Black Green Limit Switch+ White Limit Switch- Violet Limit Switch GND Brown A.3.2 2 Phase Piezo Motor Wiring Connections MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 29: Limit Switches

    The mechanical limit switches are factory calibrated to ensure advertised travel length, and cannot be adjusted by the customer. Optical limit switches can be factory adjusted to custom, specific travel lengths. For custom travel lengths, please contact MICRONIX USA. A.4.1.1 Mechanical Limit Switches...

  • Page 30: Open Loop Vacuum Wiring Diagram

    Red & White 3 (Black) Motor Phase B- 4 (Red) Limit Ground Brown 5 (Brown) Limit Switch + Violet 6 (Violet) Limit Switch- White 7 (White - Violet TP) Shield 9 (Shield) Casing MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 31: Straight Through 9-Pin Feed Through

    Motor Phase A- Blue 2 (Black) Motor Phase B- Black 4 (White - Green TP) Limit Switch- Violet 7 (Violet) Limit Ground Brown 5 (Brown) Shield 9 (Shield) Casing A.5.1 Straight Through 9-Pin Feed Through MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 32: Using An Analog Encoder

    Power Supply 5VDC ±5% @ 330mA (60mA for sensor) Operating Temperature 0 to 70°C Humidity 10 - 90% RH non-condensing A.6.4 Analog Output (Pins 1,2,6, and 7) A.6.5 Index Window (Pins 3) A.6.6 Resolution MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 33: Analog Encoder Wiring Diagram

    14 (Yellow & Yellow Wht TP) Limit Switch- White 13 (White - Blue TP) Ground Brown Black 12 (Black/Black) Index- Blue 11 (White - Violet TP) Cos- Orange 10 (White - Brown TP) Sin+ Yellow 9 (Yellow) MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 34: Straight Through 15-Pin Feed Through

    13 (White - Blue TP) Ground Brown Black 12 (Black/Black) Index- Blue 11 (White - Violet TP) Cos- Orange 10 (White - Brown TP) Sin+ Yellow 9 (Yellow) -Encoder -Motor A.6.8 Straight Through 15-Pin Feed Through MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 35: Using The Digital Encoder Module

    LED’s indicating a power source and proper encoder alignment. A Red or Yellow Signal Level LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders.

  • Page 36: Operating And Electrical Specifications

    All closed loop stages are supplied with 20µm scales. The digital encoder module interpolates to a higher resolution as specified in the order. With a digital encoder an MMC controller has an achievable resolution of 2nm. MICRONIX USA,LLC Irvine, California Rev: 1.04...

  • Page 37: Mii 6000 Digital Wiring Diagram

    15 (White - Green TP) CLK- Brown 1 (Brown) CLK+ White - Brown TP 14 (White - Brown TP) Shield 7 (Shield) Š Note: For the pinout of cable E, refer to the appropriate MMC manual. MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 38: Straight Through 25-Pin Feed Through

    White - Brown TP 14 (White - Brown TP) Shield 7 (Shield) -Encoder -Motor Š Note: For the pinout of cable E, refer to the appropriate MMC manual. A.7.6 Straight Through 25-pin Feed Through MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 39: Using A Micro Tape (Low Cost) Digital Encoder

    Linear Tape 20 m Grating Pitch Maximum Speed 7200mm/s A.8.2 Encoder Pin-out Function Wire Color Brown Grey Index + Violet Ground Black Orange White Index - Blue Not In Use Not in Use MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

  • Page 40: Operating And Electrical Specifications

    Reference Manual A.8.3 Operating and Electrical Specifications Power Supply 5VDC ±5% @ 95mA (40mA for sensor) Operating Temperature 0 to 70°C -20 to 85°C Storage Humidity 10 - 90% RH non-condensing A.8.4 Output Signals MICRONIX USA,LLC Irvine, California Rev: 1.04 www.micronixsusa.com...

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