Edwards PRA Series Hardware Manual
  1. Manuals
  2. Brands
  3. Edwards Manuals
  4. Measuring Instruments
  5. PRA Series
  6. Hardware manual
Edwards PRA Series Hardware Manual

Edwards PRA Series Hardware Manual

Residual gas analyzer
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
edwardsvacuum.com
Residual Gas Analyzer (RGA)
HARDWARE MANUAL
D05002880_B
Original Instructions

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the PRA Series and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for Edwards PRA Series

Summary of Contents for Edwards PRA Series

  • Page 1 edwardsvacuum.com Residual Gas Analyzer (RGA) HARDWARE MANUAL D05002880_B Original Instructions...

  • Page 2: Copyright Notice

    Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. Edwards accepts no liability for any errors that may appear in this manual nor does it make any expressed or implied warranties regarding the content.

  • Page 3: Ce Declaration Of Conformity

    CE Declaration of Conformity Edwards Ltd Innovation Drive Burgess Hill West Sussex RH15 9TW The following product Residual Gas Analyser: PRA100 D05001101 PRA100S D05001102 PRA200 D05001201 PRA200S D05001202 WRA200S D05002202 WRA300S D05002302 Is in conformity with the relevant requirements of European CE legislation:...

  • Page 4: Trademark Credits

    Additional Legislation and Compliance Information EU EMC Directive: Class A/B equipment Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. EU RoHS Directive: Material Exemption Information This product is compliant with the following Annex III Exemptions: 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight •...

  • Page 5: Table Of Contents

    D05002880_B - Contents Contents Copyright notice ....................2 Trademark credits ....................2 Disclaimer ......................2 Before using this instrument Safety symbols ....................... 9 Safety precautions ......................9 Analyzer tube and sensor unit ................10 For AC adaptor ....................14 Introduction Compliance statements ....................16 Specifications and configurations Technical data and specifications ................
  • Page 6 D05002880_B - Contents Front panel operation Operating and error states ..................35 If pressure is lower than measurement range ............. 36 If filament fault has occurred ..................36 If RF fault has occurred ....................37 If secondary electron multiplier (SEM) fault has occurred .......... 37 If interlock signal is input and total pressure interlock in on ........
  • Page 7 D05002880_B - Contents Calibrate total pressure measurement .............. 68 Calibrate Faraday Cup sensitivity ..............69 Calibrate sensitivity of the SEM ................. 69 Replacing the secondary electron multiplier (SEM) ............. 71 Consumable parts list ....................71 List of Materials ......................72 Troubleshooting Return the equipment or components for service ............
  • Page 8 D05002880_B - Contents This page has been intentionally left blank. Page 6...
  • Page 9 D05002880_B - List of Figures List of Figures Figure 1: PRA dimensions ....................... 19 Figure 2: WRA dimensions ..................... 19 Figure 3: PRA100/PRA200 (with analyzer tube) dimensions ..........20 Figure 4: PRA100S/PRA200S (with analyzer tube) dimensions ..........20 Figure 5: WRA200S/WRA300S (with analyzer tube) dimensions ........... 20 Figure 6: Front panel ......................

  • Page 10: List Of Tables

    D05002880_B - List of Tables List of Tables Table 1: Consumable parts list ....................72 Table 2: Analyzer tube ......................72 Table 3: Sensor unit ........................ 73 Page 8...

  • Page 11: Before Using This Instrument

    Read this instruction manual before installing, operating, inspecting, or servicing this product to familiarize yourself with safety precautions, specifications and operations. CAUTION: No part of this manual shall be copied for a third party without consent by Edwards in writing. Safety symbols Important safety information is highlighted as WARNING and CAUTION instructions;...

  • Page 12: Analyzer Tube And Sensor Unit

    D05002880_B - Before using this instrument Analyzer tube and sensor unit WARNING: Risk of burns. Read this manual before replacing the ion source of the analyzer tube and the secondary electron multiplier (SEM) tube. Before replacement, make sure that the filament is turned off and the ion source has cooled down because the ion source is very hot immediately after use.
  • Page 13 D05002880_B - Before using this instrument WARNING: Risk of electric shock. When installing and removing this product or its parts, make sure the power to the sensor unit is off. Contact with a terminal when power is on could cause electric shock.
  • Page 14 D05002880_B - Before using this instrument CAUTION: When using an EXT I/O connector, make sure that there is no error in the wiring. If you use this product with incorrect wiring the product can be damaged. CAUTION: Before you switch on the power, make sure that the sensor unit and analyzer tube are correctly connected.
  • Page 15 D05002880_B - Before using this instrument CAUTION: Risk of damage. Sensitive equipment. Do not allow any shock impacts to this product. CAUTION: When returning the product, repack it as originally shipped from the factory. If it is shipped without packing, it could be damaged. CAUTION: When disposing of this product, dispose of it according to your local government regulations.

  • Page 16: For Ac Adaptor

    D05002880_B - Before using this instrument For AC adaptor WARNING: Do not disassemble the AC adaptor. WARNING: Do not modify the AC adaptor. If modified, any operation and performance are not guaranteed. It could be a cause of fire or electric shock. WARNING: Connect the product to A-class grounding to prevent electrical leakage.
  • Page 17 D05002880_B - Before using this instrument CAUTION: Use this AC adaptor within the scope of specifications. CAUTION: Repack this AC adaptor as originally shipped from the factory. If it is shipped without packing, it could be damaged. CAUTION: When disposing this AC adaptor, dispose it according to your local government regulations.

  • Page 18: Introduction

    D05002880_B - Introduction Introduction The Edwards range of Residual Gas Analyzers include: 1. PRA models Application: Residual gas analysis and leak test of sputtering system, vacuum evaporation system, and so forth. 2. WRA models Application: R&D, residual gas analysis and leak test of sputtering systems, vacuum coaters and others.

  • Page 19: Specifications And Configurations

    D05002880_B - Specifications and configurations Specifications and configurations Technical data and specifications Series Model PRA100 PRA100S PRA200 PRA200S WRA200S WRA300S Mass Number Range (amu) 1 - 100 1 - 200 1 - 200 1 - 300 Resolution (M/ M/ΔM=1M (10% P.H.) Δ...
  • Page 20 D05002880_B - Specifications and configurations ‡ Under standard operating condition (Temperature: 10 - 40 °C. Humidity: 15 - 80%), maximum baking temperature when the sensor unit is connected is 200 °C. For higher temperature baking between 200 and 250 °C, make sure to maintain surrounding temperature less than 25 °C and humidity at 15 - 80%.

  • Page 21: Standard Configuration

    D05002880_B - Specifications and configurations Standard configuration Item Quantity Sensor unit Sensor tube Software and instruction manual CD AC/DC adaptor LAN cable PRA models Figure 1 PRA dimensions WRA models Figure 2 WRA dimensions Page 19...

  • Page 22: Pra100/Pra200 (With Analyzer Tube)

    D05002880_B - Specifications and configurations PRA100/PRA200 (with analyzer tube) Figure 3 PRA100/PRA200 (with analyzer tube) dimensions PRA100S/PRA200S (with analyzer tube) Figure 4 PRA100S/PRA200S (with analyzer tube) dimensions WRA200S/WRA300S (with analyzer tube) Figure 5 WRA200S/WRA300S (with analyzer tube) dimensions Page 20...

  • Page 23: Buttons And Connections

    D05002880_B - Buttons and connections Buttons and connections Front panel buttons and displays Figure 6 Front panel Item Description Analyzer tube connector For connection to the analyzer tube. Measurement value/fault Shows measured partial pressure value. For faults, display displays the error code. Gas species/total pressure Displays the gas species and total pressure being display LED...

  • Page 24: Rear Panel

    D05002880_B - Buttons and connections Rear panel Figure 7 Rear panel Item Description Power fuse holder (FUSE) Over-current protection (Time lag type 6.3 A). Rotary switch for regulating Regulates RF voltage tuning with the analyzer tube. tuning voltage (TUNING) Tuning voltage check Terminal for checking RF voltage tuning with the terminal (+, -) analyzer tube.

  • Page 25: Ext-I/O Connector

    D05002880_B - Buttons and connections EXT-I/O connector Figure 8 I/O pin connector assignment Terminal Terminal Signal identification Signal identification Analogue input 1 (INPUT) A-GND (INPUT) Analogue input 2 (INPUT) A-GND (INPUT) START input ON/OFF (INPUT) Error output OK/NG (OUTPUT) Interlock ON/OFF (INPUT) Total pressure (TP) set-point INPUT COM (INPUT) output ON/OFF (OUTPUT)

  • Page 26: Dip Switch

    D05002880_B - Buttons and connections DIP switch The DIP switch configures the sensor unit. Switches 2 and 4 can be changed with the power on, after making other changes, reset the sensor unit power supply for those changes to take effect.
  • Page 27 D05002880_B - Buttons and connections The following tables show the factory default switch settings (multiple sensor unit option excluded). With SEM Without SEM Operation mode : REMOTE Address IP address : Fixed Fixed IP address of sensor unit Sensor 1 : 192.168.250.11 Sensor 9 : 192.168.250.19...

  • Page 28: Installation

    D05002880_B - Installation Installation Preparation 1. Make sure power is off. 2. Unpack the product and check quantities. 3. Check for damage. Installation Install the analyzer tube 1. Measuring position This product measures pressure by measuring the static pressure in the position ...

  • Page 29: Figure 10 Pin Assignment As Viewed From Atmospheric Side (Pra)

    D05002880_B - Installation As indicated in Front panel buttons and displays on page 21, fix the analytical tube  after paying attention to the orientation of the operation panel on the sensor unit. To assist you, a "DisplaySide" label is attached to the flange of the analyzer tube.

  • Page 30: Figure 11 Pin Assignment As Viewed From Atmospheric Side (Wra)

    D05002880_B - Installation Figure 11 Pin assignment as viewed from atmospheric side (WRA) N.C. FIL.C FOCUS N.C. FIL2 FIL1 N.C. GRID 3. Check for continuity and insulation Check the insulation and continuity between each terminal of the analyzer tube and between the terminals and earth.

  • Page 31: Install The Sensor Unit

    D05002880_B - Installation Install the sensor unit CAUTION: Ensure the sensor unit does not strike other structures. CAUTION: Attach or detach the sensor unit from the analyzer tube using the knurled ring. Do not rotate the sensor unit, this can break the connector or the wiring. CAUTION: Only ever tighten the knurled ring by hand.

  • Page 32: Connect To A Single Sensor To The Pc

    D05002880_B - Installation Figure 12 Pin assignment on power connector CAUTION: To prevent damage to the unit, make sure the power is off before making connections. 2. Plug in the power connector and tighten the screws securely so that the power connector cannot detach.

  • Page 33: Figure 14 Connection Between Pc And Multiple Sensor Units

    D05002880_B - Installation Figure 14 Connection between PC and multiple sensor units 1. PC 2. LAN connector 3. LAN cable 4. Sensor unit 5. Switching hub 6. Sensor unit (maximum 16 units) Page 31...

  • Page 34: Turning On (Supplying Power)

    D05002880_B - Turning on (supplying power) Turning on (supplying power) CAUTION: Before pressing START, use an ion gauge or other instrument to make sure that the pressure is within the operating pressure range. Always use under a pressure of 1 x 10 or less.

  • Page 35: Operation

    D05002880_B - Operation Operation Your RGA can either measure using a computer (PC) running the dedicated gas analysis software, or it can measure in local mode after you press the START button. Measurement with software (remote) Refer to the Appendix for PC network setting and refer to the software manual for operating instructions.

  • Page 36: Measurement With The Sensor Unit (Local Mode)

    D05002880_B - Operation 12.To terminate gas analysis, click MES again. 13.Click FIL to turn off the analyzer tube filament. 14.Exit the software when measurement is completed. 15.Re-enable Windows Firewall and add an exception for the RGA program. See firewall rules to allow RGA communications on page 88.

  • Page 37: Front Panel Operation

    D05002880_B - Front panel operation Front panel operation Operating and error states CAUTION: Before pressing START, use an ion gauge or other instrument to make sure that the pressure is within the operating pressure range. Always use under a pressure of 1 x 10 or less.

  • Page 38: If Pressure Is Lower Than Measurement Range

    D05002880_B - Front panel operation MESU - 3 When O is selected, the unit is changed over from Pascals (Pa) to %, displaying the ratio between O and N MESU - 4 When ANY is selected, the partial pressure of the preset measurement gas species is displayed.

  • Page 39: If Rf Fault Has Occurred

    D05002880_B - Front panel operation If RF fault has occurred Err. - 2 If any fault occurs in RF when the START button is ON, the sign "rF" is shown on the display. If secondary electron multiplier (SEM) fault has occurred Err.

  • Page 40: External Inputs And Outputs (I/O)

    D05002880_B - External inputs and outputs (I/O) External inputs and outputs (I/O) External interface signals connect to the EXT-I/O connector on the rear panel. Pressure and error outputs The outputs for total pressure set-point, partial pressure fault, partial pressure warning, and error output are provided as digital signals (negative logic).

  • Page 41: Analogue Input

    D05002880_B - External inputs and outputs (I/O) Figure 17 Interlock signal circuit Analogue input CAUTION: Observe operating conditions. The product could be damaged if a voltage of 10 V or more is applied. Used when loading the pressure on the pressure gauge or temperature from outside. Input a voltage of 0 to 10 V to the analogue input terminal (pins 1 and 2) and A-GND (pins 9 and 10).

  • Page 42: Cautions In Operation

    D05002880_B - Cautions in operation Cautions in operation Operating pressure range CAUTION: Always use under a pressure of 1 x 10 Pa or less. If the pressure is higher than 1 x 10 the filament will burn out and the life of secondary electron multiplier (SEM) will be extremely short.

  • Page 43: Figure 18 Secondary Electron Multiplier Tube (For Pra100S/Pra200S)

    D05002880_B - Cautions in operation Figure 18 Secondary electron multiplier tube (for PRA100S/PRA200S) Take the following care in using the secondary electron multiplier (SEM): Decrease the SEM voltage between -1 and -1.2 kV because gas has been adsorbed to  the dynode surface immediately after pumping down.

  • Page 44: Baking

    D05002880_B - Cautions in operation For example: Measurement value of SEM = 9.71e-5A, measurement value of FC = 6.12e-11A 9.71 x 10 A / 6.12 x 10 A = 1.59 x 10 The multiplication factor of SEM is 159000 times. Baking CAUTION: Conduct baking at a pressure of 1 x 10...

  • Page 45: Calibration

    D05002880_B - Cautions in operation 9. Upon completion of baking and after the analyzer tube has cooled down to room temperature, install the sensor unit. 10.Confirm by measuring the water content (m/z=17, 18) and hydrocarbon type gases (m/z=27, 29, 39, 41, 43, 55, 56, 57, and so forth) have decreased as compared with before baking.

  • Page 46: Faraday Cup Sensitivity Calibration

    D05002880_B - Cautions in operation You will need: A pumping system with exhaust performance that can be used with the analyzer  A vacuum gauge for measuring pressure  Gas for maintaining a constant pressure (N and general gas such as Argon) ...

  • Page 47: Storage

    D05002880_B - Cautions in operation 2. Using the total pressure measuring function Given that PT (Pa) is the value measured by the total pressure measuring function and IN (A) is the ion current value of each mass number and partial pressure is PN (Pa), pressure is converted to partial pressure (Pa) by this formula.

  • Page 48: Options

    D05002880_B - Options Options AC adaptor Standard specification Model SPU61A-108 Input voltage 90 - 264 Va.c. Input current 1.45 A at 100 Va.c. maximum Efficiency 88% at rated load Frequency 47 - 63 Hz Output voltage 24 V d.c. Output current 2.5 A Power requirement 60 W...

  • Page 49: Dimensional Drawing

    D05002880_B - Options Dimensional drawings Figure 20 Dimensional drawing Figure 21 DC output cable dimensions White Black Green F.G. Installation 1. Unpack the carton and check quantities. 2. Make sure that the AC adaptor has not been damaged in transit. CAUTION: Make connections to the correct pins when wiring the power connector.

  • Page 50: Troubleshooting

    D05002880_B - Options CAUTION: To prevent damage to the unit, make sure the power is off before making connections. 4. Plug in the power connector and tighten the screws securely so that the power connector cannot detach. 5. Plug in the power supply. Always connect it to Class A ground. Figure 22 Sensor unit power supply connectors +V (P (+) ) Positive polarity 24 V d.c.

  • Page 51: Usb 3.0 Wired Lan Adaptor

    D05002880_B - Options USB 3.0 wired LAN adaptor If you do not have a spare LAN connector for the RGA, connect a wired LAN adaptor to a USB port for communication with the unit. Switching hub When connecting multiple sensor units to a PC, use switching hub. You can connect up to 16 sensor units.

  • Page 52: 16-Port Hub

    D05002880_B - Options 16-port hub Model FL SWITCH SFN 16TX Function IEEE802.3 standard LAN Transmitted speed 100/10 Mbps Dimension (mm) 70 x 135 x 110 Weight (g) Power connection Screw type connector Rated voltage 24 V d.c. Current consumption 275 mA at 24 V d.c. Interface RJ45 female connector, 16 pieces Maximum transmission distance...

  • Page 53: Figure 24 16-Port Type Power Connection

    D05002880_B - Options 8-port power connector wiring Connect the 24 V d.c. power supply to the power supply connector of this unit  Be sure to turn off the main power supply when connecting the power supply. Figure 23 8-Port type power connection 16-port power connector wiring The suggested 16 port hub supports power supply redundancy.

  • Page 54: Maintenance

    If FIL1 has burnt out in a model having two filaments, change over the filament to FIL2. If both filaments have burnt out or if the ion source is severely contaminated, it is necessary to replace the ion source. Contact your local Edwards representative. Replace the Ion Source (PRA models) 1.
  • Page 55 D05002880_B - Maintenance 2. Loosen the M2 screw on top of the ion source to remove the FIL1, FIL2, FIL C, GAUGE and GRID wiring. 3. Loosen the M2 screw to remove the ion source. 4. Install a new ion source and fix it to the Q pole using the M2 screw. 5.

  • Page 56: Replace The Filament (Wra Models)

    D05002880_B - Maintenance Figure 25 Pin assignment as viewed from atmospheric side (PRA) FIL1 Grid FIL2 FIL.C IC (SEM/FC) IC (FC) PRA 7. Check continuity and insulation according to Install the analyzer tube on page 26. Replace the filament (WRA models) 1.
  • Page 57 D05002880_B - Maintenance 3. Remove the filament unit from the ion source. 4. Set a new filament and fix it to the ion source using the M2 screws. 5. Reattach FIL1, FIL2 and FIL.C to the terminals and reattach to the hermetic seal. Page 55...

  • Page 58: Replace The Ion Source (Wra Models)

    D05002880_B - Maintenance Figure 26 Pin assign of atmospheric side view N.C. FIL.C FOCUS N.C. FIL2 FIL1 N.C. GRID 6. Check continuity and insulation according to Install the analyzer tube on page 26. Replace the ion source (WRA models) 1. Loosen the M2 screws (A) of the FIL1, FIL2 and FIL.C joints. 2.

  • Page 59: Replace The Secondary Electron Multiplier (Sem) (Wra Models)

    D05002880_B - Maintenance 3. Remove two M2 screws to remove the ion source. See Figures (3) and (4). 4. Install a new ion source and fix it to the Q pole with the M2 screw (A). 5. Fix the FIL 1, FIL 2, FIL C, GRID, FOCUS and GAUGE wiring with M2 screws. 6.

  • Page 60: Calibrate

    D05002880_B - Maintenance 5. Remove the sockets connected to pins "l" and "m" from the analyzer tube base flange (A). Removing this pin separates the SEM from the base flange. The pin may break if a force is applied to the pin horizontally. 6.

  • Page 61: Tuning Rf Matching

    D05002880_B - Maintenance Tuning RF matching Purpose: To output the RF voltage efficiently, RF matching between the control and the sensor is needed. RF matching shifts according to ambient conditions or if the sensor is contaminated. If the shift becomes large, an RF error can occur.

  • Page 62: Resolution

    D05002880_B - Maintenance 6. Turn the Resolution adjustment potentiometers on the sensor rear-panel to minimize the DC voltage. 7. Stop measurement. Resolution Purpose: Resolution represents the degree of separation of neighbouring peaks of mass numbers. With the RGA series, M/e = M and M+1 can be discriminated because Δ...
  • Page 63 D05002880_B - Maintenance (4) Turn the Resolution adjustment potentiometers on the sensor rear-panel to adjust the resolution while confirming spectra. (L) Adjust low mass side (H) Adjust high mass side Anticlockwise: Resolution will be better (Peaks will be narrow) Clockwise: Resolution will be worse.

  • Page 64: Figure 27 Reference Spectrum (Pra100)

    D05002880_B - Maintenance Figure 27 Reference spectrum (PRA100) Figure 28 Reference spectrum (PRA100S) Figure 29 Reference spectrum (PRA200/200S or WRA200S) m/z=1-100 Page 62...

  • Page 65: Figure 30 Reference Spectrum (Pra200/200S Or Wra200S) M/Z=101-200

    D05002880_B - Maintenance Figure 30 Reference spectrum (PRA200/200S or WRA200S) m/z=101-200 Figure 31 Reference spectrum (WRA300S) m/z=1-100 Figure 32 Reference spectrum (WRA300S) m/z=101-200 Page 63...

  • Page 66: Mass Number Calibration

    D05002880_B - Maintenance Figure 33 Reference spectrum (WRA300S) m/z=201-300 Mass number calibration Purpose: Calibrate the horizontal axis of the mass spectrum. The horizontal axis can fluctuate according to ambient conditions or if the sensor is contaminated. If the fluctuations becomes large, the data can become unstable. Cycle: Calibrate when you exchange the sensor or the ion source, or if the ambient conditions (temperature, humidity) change, or during a confirmation of...

  • Page 67: Confirm The Sensitivity (Faraday Cup)

    D05002880_B - Maintenance (3) Type the correct mass number in calibration point window and click OK. (4) Set calibration points for several main peaks (m/z = 2, 18, 28, 32, 40, 44…). At least three points are required to calibrate. Mass numbers for points that you do not enter are estimated from extrapolation and interpolation.
  • Page 68 D05002880_B - Maintenance Procedure: (1) Set a Gas flow into the sensor of between 1 x 10 Pa and 1 x 10 (PRA and WRA models). We recommend Nitrogen or Argon gas. Example: Introduce Nitrogen gas up to 5 x 10 (2) Recipe settings: Mode: Trend Ionization Voltage (WR only): 70 eV.
  • Page 69 D05002880_B - Maintenance (5) Estimate the sensitivity as follows: The standard sensitivity is 1 - 7A/Pa (for example, an N gas inlet pressure of 5 x 10 Pa gives an ion current of 5 x 10 IonCurrent  Sensitivit If the sensitivity is lower than the essure specification, try degassing.

  • Page 70: Calibrate Total Pressure Measurement

    D05002880_B - Maintenance Calibrate total pressure measurement Purpose: Correct the total pressure measurement by calculating a correction coefficient using the chamber vacuum gauge. Cycle: Whenever you exchange ion source or sensor. Procedure: (1) Flow gas into the sensor until target pressure.

  • Page 71: Calibrate Faraday Cup Sensitivity

    D05002880_B - Maintenance Calibrate Faraday Cup sensitivity Purpose: Set conversion coefficient to convert the ion current to partial pressure. If you convert it by ratio you do not need to carry out this calibration. Cycle: After confirming sensitivity. Procedure: (1) From the Setting menu, select Sensitivity factor.
  • Page 72 D05002880_B - Maintenance (2) Decide your required operating sensitivity for the SEM. If you set a high sensitivity, the SEM can detect small fluctuation, but its life shortened. The standard sensitivity for each model is as follows: PRA: 5 x 10 A/Pa WRA: 12.5 x 10 A/Pa...

  • Page 73: Replacing The Secondary Electron Multiplier (Sem)

    D05002880_B - Maintenance (8) Set the Control Panel as shown. SEM: as follows Ion collector: SEM Filament: 1 or 2 Emission current: 500 uA (WRA) Operation setting of FIL: all (9) Start the calibration. Click FIL and MES. (10) The SEM voltage adjusts automatically until ion current reaches the target. If the target current is a long way from the actual current, it can take a long time to calibrate.

  • Page 74: List Of Materials

    D05002880_B - Maintenance Table 1 Consumable parts list Applicable Item Ordering No. Timing of replacement model Ion source D05001013 PRA100 Filament burnout, ion source contamination or sensitivity PRA100S decrease. PRA200 PRA200S Analyzer tube D05001016 PRA100 Analyzer tube contamination, sensitivity decrease or PRA200 abnormal waveform.
  • Page 75 D05002880_B - Maintenance Material Parts Other SUS304 Table 3 Sensor unit Material Parts Housing Al (Aluminium) Connector Brass/Teflon SUS303/POM (Polyacetal) Panel sticker PET (Polyethylene terephthalate) Screw SUS304 Other Electricity board Page 73...
  • Page 76 D05002880_B - Maintenance Page 74...

  • Page 77: Troubleshooting

    D05002880_B - Troubleshooting Troubleshooting CAUTION: Make sure the power is off. Refer to the following tables for troubleshooting. Make sure the power is off before troubleshooting. POWER LED does not light with power turned on Cause Power connector is disconnected. Remedy Check connection of the power inlet connector.
  • Page 78 D05002880_B - Troubleshooting Measurement does not start by pressing the START button (SEM error lights up) Cause Secondary electron multiplier (SEM) is in contact with earth or other electrode. Remedy Check continuity between electrodes using a circuit tester or other. If there is continuity, remove the analyzer tube and eliminate the cause of contact.
  • Page 79 Correct the wiring and check continuity using a circuit tester or other. Cause Failure of output circuit. Remedy See your closest Edwards representative for repair and inspection. No interlock signal output Cause Erroneous wiring or disconnection of EXT I/O connector.

  • Page 80: Return The Equipment Or Components For Service

    Download the latest documents from www.edwardsvacuum.com/HSForms/, follow the procedure in HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to Edwards. Note: If we do not receive a completed HS2 form, your equipment cannot be serviced.

  • Page 81: Appendix

    D05002880_B - Appendix Appendix Theory of operation The analyzer tube of the quadrupole spectrometer consists of the ion source section, filter section, and detector section. The mass of ions generated by the ion source is analysed in the filter section and the ion current is measured by the detector section. Figure 34 Structure of quadrupole spectrometer analyzer tube 1.

  • Page 82: Filter Section (Q-Pole)

    D05002880_B - Appendix Filter section (Q-pole) In the filter section, four columnar electrodes are arranged parallel to each other. This is why the filter is called quadrupole and is referred to as mass filter. As shown in Figure 36 on page 81, these opposing electrodes are connected with each other and d.c.

  • Page 83: Figure 36 Voltage Applied To Electrode

    D05002880_B - Appendix Figure 36 Voltage applied to electrode Equation (2) can be divided into stability analysis in which ions do not exceed a certain amplitude for an indefinite time and instability analysis in which amplitude increases with time. Whether Maschew's equation is stable or unstable is a function of a and q only, and it can be seen from equation (2) that the mass/charge ratio of ions with which stable oscillation can be performed for U and V voltage values.

  • Page 84: Detector Section

    D05002880_B - Appendix Figure 37 Stability diagram of (U, V) plane and mass scan lines Detector section The detector section collects and amplifies the ions that have passed through the filter section. Some simplified analyzers can directly catch ions with the Faraday cup alone to measure the ion current value.

  • Page 85: Interpretation Of Measurement Value

    D05002880_B - Appendix Interpretation of measurement value Gas composition is judged from the mass number of the spectrum and is quantitatively decided with the ion current value of the peak top of the spectrum. Since the ion current value (A) cannot be converted directly to partial pressure (Pa), find the sensitivity (A/Pa) by calibrating with an ionization gauge using nitrogen gas in order to obtain information about the pressure value.

  • Page 86: Peaks Of Major Residual Gases

    D05002880_B - Appendix Peaks of major residual gases Residual gas molecule Remark , vapour, Hydrocarbon , vapour, Hydrocarbon H dissociated from various molecules are recombined. CO, CO , Hydrocarbon ++, CO++ , CO, Hydrocarbon Hydrocarbon having methylbase ++, O+ , oxygen compound With H O ratio is 16 : 17 : 18=1 : 5 : 20...

  • Page 87: Setting The Ip Address Of The Sensor Unit

    D05002880_B - Appendix Setting the IP address of the sensor unit Make the following settings and connect the LAN cable to the RGA. Without this setting, communication with the RGA cannot be established. There are two IP address options in the RGA sensor unit, pre-set (fixed IP address) and user's setting (variable IP address).
  • Page 88 D05002880_B - Appendix 5. Turn off power to the RGA, switch DIP switch No.1 to ON, and turn on the power to the RGA. 6. Launch the software and close the sensor type screen. 7. From the Setting menu, select Communication IP address setting and check "Optional"...

  • Page 89: Set Up The Rga Pc Network

    D05002880_B - Appendix Set up the RGA PC network Set the PC IP address Requires Administrator privilege (example OS: Windows10) Select Start Control panel Device   Manager Expand Network adaptors and Right click the appropriate adaptor (network card) and select Properties In the list, select Internet protocol version4, TCP/IPv4 and click Properties...

  • Page 90: Disable The Firewall

    D05002880_B - Appendix Disable the firewall You can disable the Windows firewall to troubleshoot while you set up the network. Do not leave the firewall disabled. Leaving the firewall disabled leaves the PC vulnerable to cyber attacks. Requires Administrator privilege (example OS: Windows10) Control Panel ' Windows Firewall Turn Windows Firewall on or off Turn off Windows Firewall...
  • Page 91 D05002880_B - Appendix From Control Panel select System and Security, Windows Defender Firewall and click Advanced Settings Inbound Rules New Rule Program Next  Page 89...
  • Page 92 D05002880_B - Appendix In This program Path, click Browse and specify the RGA installation folder (by default it is installed in C:\EDWARDS\ C:\Program Files (x86)\Edwards Click Next. Allow the connection Next.  Check "Domain", "Private", "Public" Next.  Page 90...
  • Page 93 D05002880_B - Appendix Enter "RGA" and click "Finish". In Inbound Rules, make sure "RGA" has been added. Close the setting screen of Windows Firewall, start the software and check communication connection with the RGA sensor unit. Page 91...
  • Page 94 D05002880_B - Appendix This page has been intentionally left blank. Page 92...
  • Page 96 edwardsvacuum.com...

This manual is also suitable for:

Wra seriesPra100Pra1005Pra200Pra2005Wra2005 ... Show all

Table of Contents