Edwards WRA3005 Manuals

Manuals and User Guides for Edwards WRA3005. We have 1 Edwards WRA3005 manual available for free PDF download: Hardware Manual

Edwards WRA3005 Hardware Manual (96 pages)

Residual Gas Analyzer

Brand: Edwards | Category: Measuring Instruments | Size: 18 MB

Copyright Notice
2
Trademark Credits
2
Ce Declaration of Conformity
3
Trademark Credits
4
Disclaimer
4
Table of Contents
5
List of Tables
10
Before Using this Instrument
11
Safety Symbols
11
Safety Precautions
11
Analyzer Tube and Sensor Unit
12
For AC Adaptor
16
Introduction
18
Compliance Statements
18
Specifications and Configurations
19
Technical Data and Specifications
19
Standard Configuration
21
PRA Models
21
WRA Models
21
Figure 1 PRA Dimensions
21
Figure 2 WRA Dimensions
21
PRA100/PRA200 (with Analyzer Tube)
22
PRA100S/PRA200S (with Analyzer Tube)
22
WRA200S/WRA300S (with Analyzer Tube)
22
Figure 3 PRA100/PRA200 (with Analyzer Tube) Dimensions
22
Figure 4 PRA100S/PRA200S (with Analyzer Tube) Dimensions
22
Figure 5 WRA200S/WRA300S (with Analyzer Tube) Dimensions
22
Buttons and Connections
23
Front Panel Buttons and Displays
23
Figure 6 Front Panel
23
Rear Panel
24
Figure 7 Rear Panel
24
EXT-I/O Connector
25
Figure 8 I/O Pin Connector Assignment
25
DIP Switch
26
Figure 9 DIP Switch Setting
26
Installation
28
Preparation
28
Install the Analyzer Tube
28
Figure 10 Pin Assignment as Viewed from Atmospheric Side (PRA)
29
Figure 11 Pin Assignment as Viewed from Atmospheric Side (WRA)
30
Install the Sensor Unit
31
Install the Power Connector
31
Connect to a Single Sensor to the PC
32
Connect Multiple Sensors to the PC
32
Figure 12 Pin Assignment on Power Connector
32
Figure 13 Single Connection with Windows PC
32
Figure 14 Connection between PC and Multiple Sensor Units
33
Turning on (Supplying Power)
34
Operation
35
Measurement with Software (Remote)
35
Measurement with the Sensor Unit (Local Mode)
36
Front Panel Operation
37
Operating and Error States
37
Figure 15 Front Panel Operation
37
If Pressure Is Lower than Measurement Range
38
If Filament Fault Has Occurred
38
If RF Fault Has Occurred
39
If Secondary Electron Multiplier (SEM) Fault Has Occurred
39
If Interlock Signal Is Input and Total Pressure Interlock in on
39
External Inputs and Outputs (I/O)
40
Pressure and Error Outputs
40
Interlock Input
40
Figure 16 Digital Output Internal Circuit Diagram
40
Analogue Input
41
Figure 17 Interlock Signal Circuit
41
Cautions in Operation
42
Operating Pressure Range
42
Degassing
42
Secondary Electron Multiplier (SEM) Tube
42
Figure 18 Secondary Electron Multiplier Tube (for PRA100S/PRA200S)
43
Baking
44
Baking Procedure (with Removal of Sensor Unit)
44
Calibration
45
Mass Number Calibration
45
SEM Sensitivity Calibration
45
Figure 19 Mass Number Calibration Screen
45
Faraday Cup Sensitivity Calibration
46
Operating Environment Temperature and Humidity
46
Converting to Partial Pressure
46
Storage
47
Options
48
AC Adaptor
48
Standard Specification
48
Dimensional Drawing
49
Installation
49
Figure 20 Dimensional Drawing
49
Figure 21 DC Output Cable Dimensions
49
Troubleshooting
50
Figure 22 Sensor Unit Power Supply Connectors
50
USB 3.0 Wired LAN Adaptor
51
Switching Hub
51
8-Port Hub
51
16-Port Hub
52
How to Use the Hubs
52
Figure 24 16-Port Type Power Connection
53
Maintenance
54
Life Expectancy of the Ion Source
54
Replace Consumable Components
54
Replace the Ion Source (PRA Models)
54
Replace the Filament (WRA Models)
56
Figure 25 Pin Assignment as Viewed from Atmospheric Side (PRA)
56
Replace the Ion Source (WRA Models)
58
Figure 26 Pin Assign of Atmospheric Side View
58
Replace the Secondary Electron Multiplier (SEM) (WRA Models)
59
Calibrate
60
Tuning RF Matching
61
Resolution
62
Figure 27 Reference Spectrum (PRA100)
64
Figure 28 Reference Spectrum (PRA100S)
64
Figure 29 Reference Spectrum (PRA200/200S or WRA200S) M/Z=1-100
64
Figure 30 Reference Spectrum (PRA200/200S or WRA200S) M/Z=101-200
65
Figure 31 Reference Spectrum (WRA300S) M/Z=1-100
65
Mass Number Calibration
66
Figure 33 Reference Spectrum (WRA300S) M/Z=201-300
66
Confirm the Sensitivity (Faraday Cup)
67
Calibrate Total Pressure Measurement
70
Calibrate Faraday Cup Sensitivity
71
Calibrate Sensitivity of the SEM
71
Replacing the Secondary Electron Multiplier (SEM)
73
Consumable Parts List
73
List of Materials
74
Troubleshooting
77
Return the Equipment or Components for Service
80
Appendix
81
Theory of Operation
81
Principles of Operation
81
Ion Source Section
81
Figure 34 Structure of Quadrupole Spectrometer Analyzer Tube
81
Figure 35 Example Spectrum from a Quadrupole Spectrometer
81
Filter Section (Q-Pole)
82
Figure 36 Voltage Applied to Electrode
83
Detector Section
84
Handling of Quadrupole Spectrometer
84
Measurement Pressure Range
84
Deterioration
84
Figure 37 Stability Diagram of (U, V) Plane and Mass Scan Lines
84
Interpretation of Measurement Value
85
Sensitivity Factor
85
Cracking Pattern
85
Overlapping Peaks
85
Peaks of Major Residual Gases
86
Setting the IP Address of the Sensor Unit
87
Fixed IP Address Settings
87
Set up a Variable IP Address
87
Set up the RGA PC Network
89
Set the PC IP Address
89
Disable the Firewall
90
Add Firewall Rules to Allow RGA Communications
90

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