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Summary of Contents for Cosmos XPS-7II
- Page 1 Semiconductor Gas Detector XPS-7II Instruction Manual Keep this manual for easy reference. Carefully read this manual prior to use. Instruction Manual No. XPS-7IIET (04)
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Page 2: Table Of Contents
Table of Contents Introduction Safety Precautions Package Contents Sensor Unit Variations Unit Components Operation 5-1. Battery Installation 5-2. Sensor Unit Installation 5-3. Power on 5-4. Detection 5-5. Power off Data Logging Filter Element Replacement Maintenance Troubleshooting 10 Consumable and Optional Parts (separately sold) 11 Warranty 12 Disposal 13 Specifications... -
Page 3: Introduction
1 Introduction Thank you for purchasing the New Cosmos XPS-7II extractive-type portable semiconductor gas detector. To ensure safe and reliable operation, please read this instruction manual prior to use. This product is intended for use in a semiconductor-manufacturing plant for the early detection of a gas leak. - Page 4 This product is not drip-proof and should be kept away CAUTION from water. Avoid strong mechanical shock, impact or vibration to the product, e.g., dropping or bumping. Failure to do so may impair its performance. Turn on the detector in clean air. Normal gas detection is not possible, and product’s performance may be compromised if turned on in an atmosphere that may contain target or interfering gases.
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Page 5: Package Contents
250ppm 12.5ppm 25ppm XDS-7DS Disilane 25ppm 2.5ppm 5ppm XDS-7F2 Fluorine 5ppm 0.5ppm 1ppm XDS-7OZ Ozone 1ppm 0.05ppm 0.1ppm XDS-7NF Nitrogen trifloride 100ppm 5ppm 10ppm For the target gas not in the table, please consult New Cosmos or its authorized representative. -
Page 6: Unit Components
4 Unit Components Main unit Component name Description/Function Item Lit while in normal operation mode (gas-monitoring Green POWER LED mode) and flashes while in warm-up cycle Amber TROUBLE LED Flashing indicates an internal failure is present When the gas concentration level exceeds the 1 stage alarm set value, the ALARM LED starts flashing, Red ALARM LED and when it exceeds the 2... - Page 7 Operation buttons (behind the front cover) Item Component name Description/Function POWER button Press and hold to turn on/off the detector Each press cycles through “1 AL button stage alarm set value”, “2 stage alarm set value”, and current gas (to check the alarm set values) concentration value on the LCD BZ.STOP button...
- Page 8 Gas sampling tube Tube adapter Filter case (connects to the gas inlet (houses an FE-112 filter element) port of the detector) Short probe (gas suction inlet) Tube (1m) Installation: Push and insert the tube adapter of the gas sampling tube into the detector’s gas inlet port.
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Page 9: Operation
5 Operation Perform a routine check (page 14) before use. Normal gas detection may not be possible without check, which will then fail gas leak detection. Turn on the detector in clean air. Normal gas detection is CAUTION not possible, and product’s performance may be compromised if turned on in an atmosphere that may contain target or interfering gases. -
Page 10: Sensor Unit Installation
Replace the batteries when NOTE (a) only one square (battery level indicator, page 5) is left flashing, indicating empty battery, while the unit is on, (b) pressing the POWER button does not turn on the unit, (c) the red battery LED’s brightness increases, indicating empty battery like (a) above, while the unit is off. -
Page 11: Power On
Normal gas detection is not possible, if the sensor CAUTION unit is not securely connected to the detector, causing poor airtightness. Energize sensor units with an EC-7 sensor stocker (sold separately) before use. Normal gas detection is not possible if the sensor units are not sufficiently energized. -
Page 12: Detection
5-4. Detection Put the short probe to the suspected leak point. When a gas leak is detected, the gas concentration value will be displayed on the LCD. If the gas concentration level exceeds the preset level, the red ALARM LED starts flashing and the detector starts beeping as shown in the table below. -
Page 13: Data Logging
6 Data Logging The detector can log up to 22 hours of the measurement data. The log data can also be transferred to a pc by using data logger kit (sold separately, page 17). Once data logging starts, the peak concentration value is NOTE logged every 10 seconds. - Page 14 (3) Press and hold the ZERO button to start logging. “MNT1” appears on the left bottom corner of the LCD while logging is in progress. (4) To end logging, press the BZ.STOP button. “MNT1” disappears and logging ends. Normally, the battery level indicator appears on the NOTE right bottom corner of the LCD.
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Page 15: Filter Element Replacement
Ensure that the filter element is installed correctly. Any misalignment may compromise the detection and waterproof performance of the product. Contact Cosmos your Cosmos representative for repair if water is observed inside the detector. Normal gas detection is not possible if water... -
Page 16: Maintenance
Annual Inspection Contact New Cosmos or your New Cosmos representative to perform an annual inspection. Perform it at least once a year to maintain the product accuracy. The sensor unit replacement cycle is six months. - Page 17 This product is a precision instrument. It is vital to perform periodical inspections to maintain the detector’s performance and ensure safety. It is highly recommended that a maintenance contract with a local New Cosmos representative be made for the performance of scheduled annual inspections (once a year at least).
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Page 18: Troubleshooting
9 Troubleshooting Before contacting us for service repair, perform basic troubleshooting using the table below. If the detector locks up (cannot be turned off), remove all batteries. After a few minutes, put the batteries back in and turn on the detector. Symptom Cause Action... -
Page 19: Consumable And Optional Parts (Separately Sold)
Sensor cartridge Refer to 3. Sensor Unit Variations list (page 3) for Sensor unit (XDS-7 series) models Contact Cosmos or your New Cosmos representative for model selection Filter element (x 10 pcs) FE-112 Install in the filter case AC adapter * Dedicated AC adapter when ―... -
Page 20: Warranty
This warranty covers the New Cosmos product/parts only and not third-party product/parts. Warranty Exclusions The following will be repaired at the cost of customer even during the warranty period. -
Page 21: Specifications
13 Specifications Target gas Semiconductor manufacturing gases Detection principle Electrochemical Electrochemical (catalyst conversion) for XDS-7NF (NF detection) Gas sampling method Extractive type (pump) Detection range As per delivery specifications Gas concentration Four-digit on LCD display Indication accuracy ±10%F.S. except for XDS-7NF -30%F.S. - Page 22 This page is intentionally left blank.
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- Page 24 Additional copies of this instruction manual may be purchased. Contact New Cosmos or its authorized representative for ordering. The contents of this manual are subject to change without notice. Authorized representative: Manufacturer: NEW COSMOS ELECTRIC CO., LTD. 2-5-4 Mitsuya-naka, Yodogawa-ku, Osaka 532-0036, Japan www.newcosmos-global.com/...
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