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Cosmos XPS-7 Operation Manual

Semiconductor plant gas detector
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●  Store this operation manual in a convenient location, and consult it
whenever necessary.
●  Operate the product only after reading and fully understanding the
content of this manual.
 
Document No.
XPS-7ET (00)
December 2004

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Summary of Contents for Cosmos XPS-7

  • Page 1 ●  Store this operation manual in a convenient location, and consult it whenever necessary. ●  Operate the product only after reading and fully understanding the content of this manual.   Document No. XPS-7ET (00) December 2004...

  • Page 2: Table Of Contents

    TABLE OF CONTENTS 1. Introduction......................１ 2. Contents of This Package .................. ２ 3. Sensor Units....................... ３ 4. Component Names and Functions..............４ 5. Operating Procedure..................６ 5. Operating Procedure..................７ 5-1 Inserting Batteries..................７ 5-2 Installing the Sensor Unit................８ 5-2 Installing the Sensor Unit................

  • Page 3: Introduction

    1. Introduction Thank you for purchasing the XPS-7 Semiconductor Plant Gas Detector. To ensure correct operation, please read this operation manual carefully. This product is designed to detect gas leaks in semiconductor manufacturing plants. Sensor units (purchased separately) can be switched to detect a variety of gases.

  • Page 4: Contents Of This Package

    ● Observe the following precautions for the storage environment and method of storing the Gas Detector. Warning: Do not store the Gas Detector for long periods in locations with high temperatures or high humidity. Otherwise, the performance of the Detector may be impaired. Caution: Do not subject the Gas Detector to sudden changes in temperature or humidity.

  • Page 5: Sensor Units

    Disilane 25 ppm 2.5 ppm 5 ppm XDS-7F2 Fluorine 5 ppm 0.5 ppm 1 ppm XDS-7OZ Ozone 1 ppm 0.05 ppm 0.1 ppm Contact an authorized representative of New Cosmos regarding other detectable gases not listed in the table. ３...

  • Page 6: Component Names And Functions

    4. Component Names and Functions Main Unit ⑥ ⑤ ④ ③ ② ① ⑬ ⑪ ⑩ ⑦ ⑫ ⑧ ⑨ Name Function Flashes during the warm up period after the power is turned ON ① Power lamp (green) and remains lit during operation. ②...
  • Page 7 Key Switches ③ ⑤ ② ① ④ ⑦ ⑥ Name Function ① Power switch Press and hold to turn the Gas Detector ON and OFF. Used to check the alarm settings. Press the switch repeatedly to Alarm setting indicator ② display the first level alarm setting, second level alarm setting, and switch gas concentration.
  • Page 8 Gas Inlet Tube ● Filter case Contains the filter (FE-112). ● Gas sampling pipe This is the gas inlet. ● Gas inlet tube One meter tube that connects to the Gas Detector inlet Attaching and Removing the Gas Inlet Tube Note ●...

  • Page 9: Operating Procedure

    5. Operating Procedure Inspect the Gas Detector daily before using it. (Refer to page 13.) If the Detector is used without first performing the inspection, normal detection may not be possible and leaks may not be detected. ！ Caution: The Gas Detector must be turned ON in a clean-air environment. Otherwise, the performance of the Detector may be impaired and normal detection may not be possible.
  • Page 10 ！ Caution:   Always replace the batteries in the following situations. ①  The battery indicator shows a flashing box (□) when the Gas Detector is ON. (Refer to LCD display on page 5.) ②  Nothing operates when the Gas Detector is ON. ③ ...

  • Page 11: Installing The Sensor Unit

    5-2 Installing the Sensor Unit ① Lift the snap lock on the sensor cover and pull the cover toward you to open it. ② Note the position of the connector and the mounting slot as you push the sensor unit into place.

  • Page 12: Turning The Gas Detector On

    5-3 Turning the Gas Detector ON ① Press and hold the power switch. The buzzer sounds, the green power lamp flashes, and self-diagnosis begins. The diagnostic procedure lasts about 30 seconds. ② When self-diagnosis is completed, zero adjustment is performed automatically, the green power lamp lights, and the unit is ready to detect gas.

  • Page 13: Logger Function

    Note ● Date settings are not supported. ● Refer to the XPS-7 Log Data Collection Software in the XPS-7L Operation Manual for the procedure used to write log data to a personal computer. ① Press the DOWN switch (▼) once in RUN mode.

  • Page 14: Replacing The Filter

    ●  Pressing the UP (▲) or DOWN (▼) switch repeatedly in RUN mode changes the display on the bottom right corner of the LCD display as shown below. These Note are factory adjustments that are not available for user application 7.

  • Page 15: Daily And Periodic Inspections

    10. Consumable Parts and Options Part name Model number Remarks Sensor unit Contact an authorized representative of New Cosmos XDS-7□ regarding gases that can be detected. Filters (10 per set) FE-112 100-VAC /6-VDC adapter Special adapter for 100 VAC.

  • Page 16: Specifications

    11. Warranty Warranty - One (1) year from the date of purchase Thank you for purchasing our product. New Cosmos Electric Company Limited, warrants its products against any defects in materials and workmanship under normal use and operating conditions for a...
  • Page 17 Revisions XPS-7 ET(00) December 2004 Additional copies of this Operation Manual are available. Contact the following address for ordering information. Distributor: Manufacturer: New Cosmos Electric Co., Ltd. 2-5-4 Mitsuya-naka  Yodogawa-ku Osaka 532-0036, Japan Phone 81-6-6309-1505 Fax 81-6-6308-0371 e-info@new-cosmos.co.jp http://www.new-cosmos.co.jp New Cosmos Electric Co., Ltd.

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