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Cosmos XPS-7 Instruction Manual

Semiconductor plant gas detector
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Semiconductor Plant Gas Detector
Semiconductor Plant Gas Detector
XPS-7
Instruction Manual
Instruction Manual
● Store this Instruction manual in a convenient location, and consult it whenever
● Store this Instruction manual in a convenient location, and consult it whenever
necessary.
necessary.
● Operate the product only after reading and fully understanding the content of this
● Operate the product only after reading and fully understanding the content of this
manual.
manual.
XPS-7
Instruction manual No.
Instruction manual No.
XPS-7T （ 10）
XPS-7T （ 10）

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Summary of Contents for Cosmos XPS-7

  • Page 1 Semiconductor Plant Gas Detector Semiconductor Plant Gas Detector XPS-7 XPS-7 Instruction Manual Instruction Manual ● Store this Instruction manual in a convenient location, and consult it whenever ● Store this Instruction manual in a convenient location, and consult it whenever necessary.

  • Page 2: Table Of Contents

    TABLE OF CONTENTS Introduction …………………………………………………………… 1 Contents of This Package …………………………………………… 2 Sensor Units …………………………………………………………… 2 Component Names and Functions ………………………………… 3 Operating Procedure ………………………………………………… 6 5-1 　 Inserting Batteries …………………………………………………………………… 6 5-2 　 Installing the Sensor Unit …………………………………………………………… 7 5-3 　...

  • Page 3: Introduction

    1 Introduction Thank you for purchasing the XPS-7 Semiconductor Plant Gas Detector. To ensure correct operation, please read this operation manual carefully. This product is designed to detect gas leaks in semiconductor manufacturing plants. Sensor units (purchased separately) can be switched to detect a variety of gases.

  • Page 4: Contents Of This Package

    XDS-7DS Disilane 25 ppm 2.5 ppm 5 ppm XDS-7F2 Fluorine 5 ppm 0.5 ppm 1 ppm XDS-7OZ Ozone 1 ppm 0.05 ppm 0.1 ppm Contact an authorized representative of New Cosmos regarding other detectable gases not listed in the table.

  • Page 5: Component Names And Functions

    4 Component Names and Functions Main Unit ④ ⑤ ⑥ ③ ② ① ⑬ ⑪ ⑦ ⑩ ⑫ ⑧ ⑨ Name Function ① Power lamp (green) Flashes during the warm up period after the power is turned ON and remains lit during operation. ②...
  • Page 6 ①　　②　　③　　⑤ Key Switches ④ ⑦ ⑥ Name Function ① Power switch Press and hold to turn the Gas Detector ON and OFF. ② A l a r m s e t t i n g Used to check the alarm settings. Press the switch repeatedly to indicator switch display the first level alarm setting, second level alarm setting, and gas concentration.
  • Page 7 Gas Inlet Tube ●Filter case Contains the filter (FE-112). ●Tube adapter connects to the gas inlet on the main unit ●Gas sampling pipe This is the gas inlet. ●Gas inlet tube One meter tube that connects to the Gas Detector Attaching and Removing the Gas Inlet Tube Note ●Attaching...

  • Page 8: Operating Procedure

    5 Operating Procedure Inspect the Gas Detector daily before using it. (Refer to page 13.) If the Detector is used without first performing the inspection, normal detection may not be possible and leaks may not be detected. CAUTION: The Gas Detector must be turned ON in a clean-air environment. Otherwise, the performance of the Detector may be impaired and normal detection may not be possible.

  • Page 9: Installing The Sensor Unit

    5-2 　 Installing the Sensor Unit ① Lift the snap lock on the sensor cover and pull the cover toward you to open it. ② Note the position of the connector and the mounting slot as you push the sensor unit into place.

  • Page 10: Turning The Gas Detector On

    5-3 　 Turning the Gas Detector ON ① Press and hold the power switch. The buzzer sounds, the green power lamp flashes, and self-diagnosis begins. The diagnostic procedure lasts about 30 seconds. ② When self-diagnosis is completed, zero adjustment is performed automatically, the green power lamp lights, and the unit is ready to detect gas.

  • Page 11: Logger Function

    Note ● Date settings are not supported. ● Refer to the XPS-7 Log Data Download Software in the XPS-7L Instruction Manual for the procedure used to write log data to a personal computer. ① Press the DOWN switch (▼) once in RUN mode.

  • Page 12: Replacing The Filter

    ● Pressing the UP (▲) or DOWN (▼) switch repeatedly in RUN mode changes the display on Note the bottom right corner of the LCD display as shown below. These are factory adjustments that are not available for user application 7 Replacing the Filter ①...

  • Page 13: Daily And Periodic Inspections

    If the filter is dirty and discolored, replace it with a new one. Periodic Inspections To maintain accuracy, it is recommended that the Gas Detector be given periodic inspections and adjustments at least once a year by an authorized representative of New Cosmos. Replace the sensor unit every six months. Note Clean the Gas Detector by gently wiping it with a cloth dampened with water.

  • Page 14: Warranty

    This warranty is valid only if the product is maintained and used in accordance with New Cosmos's instructions and for recommendations. New Cosmos shall be released from all obligations under...

  • Page 15: Specifications

    12 Specifications Detected gases Gases found in semiconductor manufacturing plants Detection principle Electrochemical Gas sampling method Extractive Detection range As per specifications Concentration display method LCD display Detection accuracy ±10% of full scale (See note 1.) Response time Within 60 s (60% response) (See note 1.) Power supply Four AA alkaline batteries or AC adapter (optional item)
  • Page 16 Distributor: Manufacturer: New Cosmos Electric Co., Ltd. 2-5-4 Mitsuya-naka Yodogawa-ku Osaka 532-0036, Japan URL:http://www.newcosmos-global.com X PS-7 （09） ●●.●● XPS-7T （ 10） 2008.100...

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