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FLOWDATA Reference
Configuration of FLOWDATA Response
1st byte
A
8
Details of header division
Data
A
B
C
D
E
F
G
H
I
J
K
L
Data
*1 TASK No.=bit data+1
Example: bit data=10B=2 (dec)
indicates TASK3 data.
*2 The input lines are, from the lower bit, assigned to:
In case of ZS
• Input terminal 4 (Unused. Always set to 0.)
• Input terminal 3
• Input terminal 2
• Input terminal 1
• Input terminal 0 (5 inputs in total.)
ZS-Series
34
Non-procedural Communication Command Reference
1 packet of FLAWDATA
Header division
2nd byte
3rd byte
B
C
D
E
F
G
1
1
2
4
5
Name
Unused
FLOWDATA overflow bit
Decimal information
TASK No.
CH No.
Unit states (Input)
FLOWDATA stop bit
TASK judgment result bit
Disabled
Unit states (Output)
Measurement data
4th byte
H
I
J
K
L
1
2
1
1
1
5
Description
Reserved bit
Normally set to 0.Set to 1 when there is an overflow in
FLOWDATA accumulation.
Normally set to 0.0: nm order, 1: µm order
TASK1 to TASK4 (*1)
CH No. of data source
Indicates ON/OFF states of various input lines. (*2)
• All data are set to 1 if FLOWDATA does not flow over subse-
quently. (Always set to 1 for one-shot requests)
• All data are set to 0 if FLOWDATA continues to flow over.
(Until FLOWDATA is stopped after requested (in succession)
Indicates the TASK judgment result of data source. (*3)
Reserved bit
Indicates output states (states of measurement results). (*4)
Signed 32 bit data
When the decimal info division is 0, the unit of the data is nm.
When the decimal info division is 1, the unit of the data is µm
Data
division
–
Meaning of
Data
data
Number of
=Total
32
bits
64 bits
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