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Zeiss Supra 35 VP FEG Operating Instructions
Pre-Start:
1. Microscope is On and Operational (Green light on front panel)
2. Sign into log book.
Startup:
1. Login to Zeiss Computer
2 Start S
SEM U
MART
3. Login to software [User: Basic User
4. V
: and G
: are on
AC
UN
5. <CTRL + G>, goto G
6. Toggle DataZone if not visible <CTRL + D>
7. Goto Windows Desktop, start RemCon32
8. In RemCon32, left-click C
Loading/Changing Samples:
1. Scope to High Vac mode (not VP - See "VP Mode" section to change).
2. Verify that V
: and G
AC
3. Switch Signal-A to TV mode; Left-Click Signal-A select TV
4. Check sample/stage is clear of pole piece and BSD, lower stage (Z-control)
5. Withdraw EBSD detector if inserted (See EBSD Instructions)
6. Left-click V
: indicator and click V
AC
7. When vented roll out chamber door
8. Using gloves and/or forceps, Remove/Load Samples
9. Close chamber door, watch TV-Chamber scope to check samples will clear pole piece and
detectors
10. Left-click V
: indicator and click P
AC
11. Wait until V
:
AC
General Operating Parameters:
InLens Detector
SE2 Detector
VPSE
BSD
XEDS
EBSD
November, 2007 - V 1.75
I
Software
SER
NTERFACE
Password: Zeiss]
and operational, and EHT: IS OFF
tab, record Extractor Current in Log book.
UN
ö O
P
OMM
PEN
: are on
and operational, and EHT: IS OFF
UN
(Check Vent gas cylinder is open)
ENT
UMP
WD 3mm optimal
WD 6-8mm optimal, and longer
WD: Shorter the better
Min. WD 4mm, shorter the better
WD 8.5 and No Tilt
70E tilt, shorter WD
WD: 8.5, 10, 11, 14.5mm
; minimize window, return to S
ORT
(Listen)
Zeiss Supra 35VP - November 2007 - Ver1.75
SEM
MART

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Summary of Contents for Zeiss Supra 35 VP FEG

  • Page 1 Zeiss Supra 35 VP FEG Operating Instructions November, 2007 - V 1.75 Pre-Start: 1. Microscope is On and Operational (Green light on front panel) 2. Sign into log book. Startup: 1. Login to Zeiss Computer 2 Start S SEM U...
  • Page 2 , and focus image (MB Mouse) OCUS 10. Goto Stigmation if needed 11. Warning: Make sure M is selected before exiting SEM C OCUS ONTROL ANEL 12. Toggle normal scanning , and scan rate 3 Zeiss Supra 35VP - November 2007 - Ver1.75...
  • Page 3 - Collector Bias is actually sample bias (Vacuum > VP Control) NOTE: Collector Bias must be below ~325v ATHODOLUMINESCENCE – The VPSE Detector can be used to detect Cathodoluminescence – Stay in High-Vacuum mode and switch to VPSE Detector Zeiss Supra 35VP - November 2007 - Ver1.75...
  • Page 4 . Make use of line-of-sight nature ORMAL NVERTED OR of backscattered electrons to generate a “pseudo-topographic” image. - Once quadrants are set as desired, click “BSD: S TOPO” to preserve current setup as new default setting. Zeiss Supra 35VP - November 2007 - Ver1.75...
  • Page 5 L wait 15-30sec 6. Press Yellow-S TANDBY 7. Press Red O 8. Turn O power on back scope panel. 9. Breaker box to O 10. Record Shutdown event in Logbook !!!!! Zeiss Supra 35VP - November 2007 - Ver1.75...
  • Page 6: Emergency Shutdown

    1. Press RED button on Front Panel. - This will shut off scope including vacuum and gun. 2. Flip breaker switch on wall. Contact Dr. Edelmann or Matt Duley ASAP and report the emergency. Zeiss Supra 35VP - November 2007 - Ver1.75...
  • Page 7 Reduced Scan area On/Off Switch detectors: In-Lens & SE2 Switch detectors: BSD & SE2 Current Meter Button Function: - Displays the current function of the LB: Left mouse Button and the MB Middle mouse Button Zeiss Supra 35VP - November 2007 - Ver1.75...
  • Page 8 <CTRL + SHIFT + F> Starts Auto Focus coarse <CTRL + S> Performs Auto Astigmatism Correction <CTRL + SHIFT + S> Performs Auto Astigmatism Correction with Auto Focus <F9> Keys help (displays this information) Zeiss Supra 35VP - November 2007 - Ver1.75...
  • Page 9 CTRL + C > Freezes & Saves Display to temporary buffer <CTRL + V> Displays Temporary Image buffer Loads Second Image Window from display <CTRL + 2> ’ < > Performs Find Image function. Zeiss Supra 35VP - November 2007 - Ver1.75...
  • Page 10 <CTRL + SHIFT + S> Performs Auto Astigmatism Correction with Auto Focus SER DEFINED MACROS <F5>, <F5 + SHIFT> <F6>, <F6 + SHIFT> <F7>, <F7 + SHIFT> <F8>, <F8 + SHIFT> <F11>, <F11 + SHIFT> Zeiss Supra 35VP - November 2007 - Ver1.75...