Zeiss Sigma 500 VP Field Emission SEM Manuals

Manuals and User Guides for Zeiss Sigma 500 VP Field Emission SEM. We have 1 Zeiss Sigma 500 VP Field Emission SEM manual available for free PDF download: Instruction Manual

Zeiss Sigma 500 VP Instruction Manual (170 pages)

Field Emission Scanning Electron Microscope

Brand: Zeiss | Category: Microscope | Size: 5 MB

Table of Contents
3
General Information
6
Text Conventions and Link Types
6
Explanation on Warnings and Additional Information
7
Further Applicable Documents
8
Contact
8
Safety
10
Intended Use
10
General Safety Information
11
Safe Operation Conditions
11
Requirements for Personnel
11
Preventive Maintenance
12
Safe Handling of Spare Parts
12
Prevention of Hazards
12
Biological Hazards
12
Burn Hazards
12
Chemical Hazards
13
Electrical Hazards
13
High Pressure Hazards
14
Magnetic Field Hazards
14
Mechanical Hazards
15
Radiation Hazards
16
Suffocation Hazards
17
Warning Labels and Lights
18
Warning Labels
18
Safety Devices and Interlocks
22
Protective Cover Panels
23
Main Disconnect Device
23
Circuit Breaker
24
Emergency off (EMO) Option External
24
Vacuum Locking Device
26
Interlock System of Optional Airlock
27
Energy Isolating Devices
27
Product and Functional Description
28
System Overview
28
Main Components
30
Vacuum System
30
Care and Maintenance
30
Vacuum System Pressure Modes
31
Electron Optical Column | Gemini 1
32
Troubleshooting
33
Gun Modes
34
Detectors
34
Decommissioning and Disposal
43
Technical Data and Conformity
47
Specimen Stage | Sigma 300
53
Specimen Stage | Sigma 500
55
Optional Components and Accessories
56
Optional Detectors
56
Parts and Tools
62
Glossary
63
Index
67
Dual Joystick
68
Control Panel
69
Software Description
71
Smartsem User Interface
71
Graphical Control Elements
72
User Access Levels and User Privileges
73
Smartsem Program Suite
74
Installation
76
Commissioning and First Operating Steps
77
Prerequisites for Commissioning and Operation
78
Switching on the Microscope System
78
Energizing the Microscope
78
Starting the Microscope
80
Starting the Software
81
Calling up the Help
81
Keyboard Shortcuts
82
Acquiring an Image
83
Preparing the Specimen Holder
84
Loading the Specimen Chamber
85
Locating the Specimen
89
Switching on the Gun
90
Switching on the EHT
90
Acquiring an Image
91
Optimizing the Image
93
Saving the Image
96
Modifying Gun Parameters
96
Selecting the Gun Mode
96
Measuring the Probe Current
97
Setting the Probe Current
98
Continuously Modifying the Probe Current (License: OPTIPROBE)
98
Changing the Extractor Voltage
98
Finding Appropriate Detector Settings
99
Selecting a Detector
99
Setting up the Inlens SE Detector
100
Setting up the Inlensduo Detector
100
Setting up the SE Detector
101
Setting up the VPSE Detector
102
Setting up the C2D Detector
103
Setting up the Absd1-LH Detector
104
Setting up the Hdasb Detector
105
Setting up the Manually Insertable BSD Detector
107
Setting up the YAG BSD Detector
108
Setting up the CL Detector
108
Working with Variable Pressure
109
Changing to Standard VP Mode
109
Returning to HV Mode
110
Working with Optional Accessories
110
Using the Optional Airlock
110
Using the Optional Plasma Cleaner
118
Using the Optional Raman Spectroscopic Microscope
122
Shutting down the System
126
Finishing the Work Session
126
Closing the Smartsem User Interface
127
Energizing the Microscope
128
Performing an Emergency Shutdown
129
Safety During Cleaning and Maintenance
130
Maintenance Schedule
130
Maintenance Work
130
Change of Consumables and Chemicals
130
Servicing the Pre-Vacuum Pump
131
Care and Cleaning Work
131
Cleaning the Microscope
132
Chamber
134
Initializing the Stage
134
Defining the Post Initialization Position of the Stage
135
Changing the Joystick TV Angle
135
Resetting the Touch Alarm
136
Checking the Water Flow and Temperature
136
Replacing the Chamber Door Seal
137
Column
138
Baking out the Gun Head
138
Calibrating Optiprobe
140
Power Circuit
140
Checking the Position of the Circuit Breakers
140
Detectors
141
Lubricating the Rod
141
Cleaning up the PC
142
Decommissioning
143
Transport and Storage
144
Disposal
146
Decontamination
146
Performance Data and Specifications | Sigma 300 and Sigma 300 VP
147
Performance Data and Specifications | Sigma 500 and Sigma 500 VP
151
Installation Requirements
155
Layout and Connections
159
System Layout
160
Applicable Standards and Regulations
161
Tools and Accessories
162

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