Suggested Settings and Operating Parameters
Suggested Settings and Operation Parameters
•
The source should be run between 10KV and 140KV.
•
No beam current should be applied, unless the source is at 50KV or higher.
•
20uA should be the maximum current setting when below 100KV.
•
If the source has been sitting overnight, or for about 24 hours, set the "Std Ramp" to 50 for the initial start-up.
After it has been running, the "Std Ramp" can be set to 140.
•
At full output, the source should be set to 140KV and 50uA. 50uA should be the maximum current setting for the
source at any KV level.
•
Active cooling is recommended to keep the temperature down on the source.
MOXTEK
®
10
TUB-MAN-1022 Rev A
Subject to technical change without notice
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