Related Manuals for Zeiss Argon Ion Beam System
Summary of Contents for Zeiss Argon Ion Beam System
- Page 1 Carl Zeiss Microscopy - Electron and Ion Beam Microscopy Argon Ion Beam System Optional additional FIB column for NVision 40 Enabling the Nano-Age World ®...
- Page 2 Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back- up copy for safety purposes.
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Page 3: Table Of Contents
`çåíÉåíë Table of contents 1. About this manual ..................5 1.1. Definition of terms ................... 7 2. Safety summary ................... 8 2.1. Intended use ..................... 8 2.2. Prevention of accidents and of improper use ..........8 3. Description ....................9 3.1. - Page 4 `çåíÉåíë fåëíêìÅíáçå=j~åì~ä=^êÖçå=fçå=_É~ã=póëíÉã=ÉåMO...
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Page 5: About This Manual
NK=^Äçìí=íÜáë=ã~åì~ä 1. About this manual This instruction manual is considered to be part of the Argon Ion Beam System. Read the instructions carefully. Keep the instruction manual nearby the Argon Ion Beam System and hand it over to future owners of the instrument. - Page 6 NK=^Äçìí=íÜáë=ã~åì~ä Moreover you will find the following type of information: IMPORTANT This symbol and signal word draws your attention to important and useful information. For the description of software, the following typographical conventions are used: Typographical conventions Typography Meaning Push <ENTER>. Push the ENTER key on the keyboard.
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Page 7: Definition Of Terms
Specially trained operator: Electrically skilled person who has been trained to perform basic main- tenance tasks User A person or organisation that uses products of Carl Zeiss. Carl Zeiss service Specially trained service expert, either Carl Zeiss staff or engineer, authorised service partner of Carl Zeiss. -
Page 8: Safety Summary
NVision 40. With this column, the NVision becomes a triple beam system. The Argon Ion Beam System allows you to scan a focused beam of argon ions across the specimen in order to remove material from the specimen surface. -
Page 9: Description
(SEM) Argon Ion Beam System Fig. 1.1: Triple Beam System 3.1.1. Argon FIB modes With the Argon Ion Beam System installed, new imaging modes become available in the drop-down selection of the FIB toolbar. • FIB mode Argon Shows the live image of the argon beam in scan or spot mode. -
Page 10: Principle Of Operation
PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå 3.2. Principle of operation In the Triple Beam System, FIB, SEM and Argon Ion Beam System are arranged in a way that they intersect at the same point in the specimen chamber. This point is called coincidence point. -
Page 11: Fine-Polishing
PK=aÉëÅêáéíáçå mêáåÅáéäÉ=çÑ=çéÉê~íáçå 3.2.1. Fine-polishing While milling a flow of ions (1) released from the FIB milling FIB column (3) hit the surface of the TEM lamella (2). The gallium ion milling causes gallium implanted Implantation and, on crystalline samples, amorphous surface amorphisation layers that deteriorate the quality of the TEM lamella. -
Page 12: Technical Data
± 1.5 mm (at WD 29 mm) Max. scan range > 3.0 mm (at WD 29 mm) Ion irradiation angle 0 - 30 ° In situ lift-out The Argon Ion Beam System is compatible with the in-situ lift-out technique Control ® ® SmartSEM V05.04 or higher Fully integrated in the SmartSEM software. -
Page 13: Customer Service
For customer service, contact your local Carl Zeiss service engineer. A list of Carl Zeiss locations and authorised service partners can be found at: http://www.zeiss.com/microscopy 4. Installation The Argon Ion Beam System is either factory-installed or retrofitted by authorised Carl Zeiss serv- ice staff. fåëíêìÅíáçå=j~åì~ä=^êÖçå=fçå=_É~ã=póëíÉã=ÉåMOKÑã =NP=çÑ=PO... -
Page 14: Operation
The Argon Gun panel opens. Click on Standby. IMPORTANT When the Argon Ion Beam System powers on, it automatically tests if the gun can achieve a discharge current greater than 50 mA. This can take up to one minute. NQ=çÑ=PO... - Page 15 SmartSEM switches to the live argon image. IMPORTANT The Argon Ion Beam System has the ability to obtain images, but its resolution is not comparable to SEM imaging. The imaging function is mainly used to align the argon beam correctly.
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Page 16: Adjusting The Coincidence Point
RK=léÉê~íáçå dÉííáåÖ=ëí~êíÉÇ 5.1.2. Adjusting the coincidence point Check daily, if the Argon Ion Beam System is still within the coincidence point of SEM and FIB. The coincidence point is where all three beams of the Triple Beam System cross. Preconditions: ®... - Page 17 RK=léÉê~íáçå dÉííáåÖ=ëí~êíÉÇ If this detail is not centered in the argon image: Go to the Argon Gun panel. To center the detail, use the Argon Beam Shift. Now, the coincidence point is adjusted. fåëíêìÅíáçå=j~åì~ä=^êÖçå=fçå=_É~ã=póëíÉã=ÉåMOKÑã =NT=çÑ=PO...
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Page 18: Adjusting Operational Parameters
RK=léÉê~íáçå ^ÇàìëíáåÖ=çéÉê~íáçå~ä=é~ê~ãÉíÉêë 5.2. Adjusting operational parameters The following operational parameters of the Argon Ion Beam System can be adjusted to optimize milling results. IMPORTANT After changing parameters, always adjust the coincidence point as described in section 5.1.2. 5.2.1. Setting the acceleration voltage The lower the acceleration voltage, the gentler the polishing process will be, but the milling rate will also be decreased. -
Page 19: Checking The Argon Gas Flow
RK=léÉê~íáçå ^ÇàìëíáåÖ=çéÉê~íáçå~ä=é~ê~ãÉíÉêë 5.2.2. Checking the argon gas flow Check that Argon Gas Flow is set to 1.5 - 3.0 %.(Usually 2.0 - 2.3 % is optimal). The beam current decreases at higher or lower gas flow. Check that the beam current is high enough: Set Argon Energy to 1000 V with the slider. -
Page 20: Checking The Argon Discharge
RK=léÉê~íáçå ^ÇàìëíáåÖ=çéÉê~íáçå~ä=é~ê~ãÉíÉêë 5.2.3. Checking the argon discharge Check, that Argon Discharge is set to -1000 V (1). Check, that 130 µA are displayed under Argon Discharge I is (2). If the value is lower: Reduce Argon Gas Flow in 0.1 % steps. OM=çÑ=PO fåëíêìÅíáçå=j~åì~ä=^êÖçå=fçå=_É~ã=póëíÉã=ÉåMOKÑã... -
Page 21: Fine Polishing Of Tem Lamellas
Table 1.1: Argon incidence angle calculation IMPORTANT The vertical angle between FIB and argon beam (in these formulas: -2.5°) may vary slightly depending on the mechanical alignment of your Argon Ion Beam System. Change this value accordingly in the formulas. fåëíêìÅíáçå=j~åì~ä=^êÖçå=fçå=_É~ã=póëíÉã=ÉåMOKÑã... - Page 22 RK=léÉê~íáçå cáåÉ=éçäáëÜáåÖ=çÑ=qbj=ä~ãÉää~ë IMPORTANT For TEM lamella or cross-section polishing, grazing incidence angles below 10° are used. For delineation etching of a structure in a cross-section, a much steeper incidence angle, preferably perpendicular to the cross-section, is required. In order to achieve such an incidence angle, the TEM lamella may need remounting to a different orientation on the sample holder after FIB milling of the cross-section.
- Page 23 RK=léÉê~íáçå cáåÉ=éçäáëÜáåÖ=çÑ=qbj=ä~ãÉää~ë 12 Select Tools/Goto Panel..13 Select Argon Mill from the menu. The Argon Mill panel opens. 14 Enter the desired polishing time in Time to Mill. fåëíêìÅíáçå=j~åì~ä=^êÖçå=fçå=_É~ã=póëíÉã=ÉåMOKÑã =OP=çÑ=PO...
- Page 24 RK=léÉê~íáçå cáåÉ=éçäáëÜáåÖ=çÑ=qbj=ä~ãÉää~ë 15 Click on Start. The target area will now be exposed to the scanning argon beam for the selected time. The remaining polishing time is displayed in Time Left. While polishing the TEM lamella, you can monitor the progress in the SEM image: Click on Grab Sem Frame.
- Page 25 RK=léÉê~íáçå cáåÉ=éçäáëÜáåÖ=çÑ=qbj=ä~ãÉää~ë At most of the times, a small area of the TEM lamella or cross-section will be shadowed from the argon beam surrounding sample holder or trench edges. The disparity of the exposed and shadowed area can be used to assess the progress of the polishing.
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Page 26: Switching Off The Argon Beam
Go to the Argon Gun panel. Click on Standby. The imaging mode switches SEM. The Argon Ion Beam System switches to STANDBY mode. Click on Off. Now, the beam of the Argon Ion Beam System is switched off. OS=çÑ=PO fåëíêìÅíáçå=j~åì~ä=^êÖçå=fçå=_É~ã=póëíÉã=ÉåMOKÑã... -
Page 27: Maintenance And Repair
6.1. Change of consumables and chemicals 6.1.1. Replacing the argon supply After a certain time of operation, the argon supply will be used up. In this case, contact the local Carl Zeiss service engineer to hace the argon gas bottle replaced. 6.2. Repair CAUTION Risk of property damage due to improper maintenance, service or repair. -
Page 28: Troubleshooting
DANGER Danger to life: Hazardous voltage inside the workstation. Only service engineers trained and authorised by Carl Zeiss are allowed to service the Ar- gon Ion Beam System and the workstation and to perform work on the electrical system. Keyword... -
Page 29: Abbreviations
UK=^ÄÄêÉîá~íáçåë qêçìÄäÉëÜççíáåÖ 8. Abbreviations Extra high tension Electron microscope FESEM Field emission scanning electron microscope Focused ion beam High vacuum Penning ion generator Scanning electron microscope Silicon Transmission electron microscope Voltage Working distance ® CrossBeam fåëíêìÅíáçå=j~åì~ä=^êÖçå=fçå=_É~ã=póëíÉã=ÉåMOKÑã =OV=çÑ=PO... -
Page 30: Declaration Of Conformity
VK=aÉÅä~ê~íáçå=çÑ=ÅçåÑçêãáíó qêçìÄäÉëÜççíáåÖ 9. Declaration of conformity Denomination: Argon Ion Beam System Model: Argon Ion Beam System for NVision 40 SII Nano Technology Inc. 8, Nakase 1-chome, Mihama-ku Manufacturer Chiba-shi Chiba 261-8507 Japan This is to declare that the product mentioned above fulfils all the relevant provisions of the •... -
Page 31: Index
NMK=fåÇÉñ 10. Index Abbreviations 29 Safety instructions 5 Acceleration voltage 12 Safety summary 8 Amorphous surface layer 11 SmartSEM® 7 Argon discharge 20 Software Manual SmartSEM® 14 Argon imaging 21 Switching off 18 Azimuthal angle 21 Switching on 14 Change of consumables 27 Technical data 12 Checking the coincidence point 27 TEM lamella 7... - Page 32 Carl Zeiss Microscopy, LLC One Zeiss Drive Thornwood, NY 10594 microscopy@zeiss.com Plus a worldwide network of distributors www.zeiss.com/microscopy Due to a policy of continuous development, we reserve the right to change specifications without notice. © Carl Zeiss Microscopy GmbH, Oberkochen...