horiba GA-370 Instruction Manual
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horiba GA-370 Instruction Manual

Trace gas monitor
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Trace Gas Monitor
GA-370
Instruction Manual [eng]
CODE:GZ0000456936B

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  • Page 1 Trace Gas Monitor GA-370 Instruction Manual [eng] CODE:GZ0000456936B...
  • Page 2 HORIBA, Ltd. warrants that the Product shall be free from defects in material and workman- ship and agrees to repair or replace free of charge, at option of HORIBA, Ltd., any malfunc- tioned or damaged Product attributable to responsibility of HORIBA, Ltd. for a period of one (1) year from the delivery unless otherwise agreed with a written agreement.
  • Page 3 Regulations EU and UK regulations Conformable standards  This equipment conforms to the following standards: EMC: EN 61326-1 Class B, Industrial electromagnetic environment Safety: EN 61010-1 RoHS: EN IEC 63000 9. Monitoring and control instruments including industrial monitoring and control instruments EMC: BS EN 61326-1 Class B, Industrial electromagnetic environment...
  • Page 4 FCC rules Any changes or modifications not expressly approved by the party responsible for compliance shall void the user's authority to operate the equipment. Note  This equipment has been tested and found to comply with the limits for a Class B digital device, pursuant to part 15 of the FCC Rules.
  • Page 5 China regulation This marking is applied to electric and electronic products sold in the People's Republic of China. The figure at the center of the marking indicates the environmental protection use period in years. (It does not indicate a product guarantee period.) It guarantees that the product will not cause environment pollution nor serious influence on human body and property within the period of the indicated years which is counted from the date of manufacture as far as the safety and usage precautions for the product are observed.
  • Page 6 For Your Safety Warning classification and indication method Warnings are indicated in the following way in this manual and on the product. Fully understand the information and use the product correctly and safely. Meaning of warning indications  This indicates an imminently hazardous situation which, if not avoided, will result in death or serious injury.
  • Page 7 Safety precautions This section provides precautions for using the product safely and correctly and to prevent injury and damage. The terms of DANGER, WARNING, and CAUTION indicate the degree of imminency and hazardous situation. Read the precautions carefully as it contains important safety messages.

  • Page 8: Product Handling Information

    Note GA-370 does not have an explosion-proof construction. Even the special gas type specifications are not explosion-proof, but just intended to reduce the risk of gas leaks. Take special care when handling hazardous gases. We take no responsibility for any ignition, combustion, and explosion.
  • Page 9 Long-term storage When the analyzer will not be used for a long period of time (one month or longer), store it in accordance with the following. If a span gas cylinder is connected, close the valve.  When storing the analyzer in a location other than the installation site, avoid a location ...

  • Page 10: Manual Information

    Manual Information Description in this manual Note This interprets the necessary points for correct operation and notifies the important points for handling the product. Reference This indicates the part where to refer for information. This indicates reference information. About the product specifications described in this manual The descriptions in this manual are based on a two-component analyzer for CO The screen display, external inputs/outputs, etc.

  • Page 11: Table Of Contents

    Contents Regulations ........... . . Contents For Your Safety .
  • Page 12 Calibration ..........3.3.1 CALIBRATION screen .
  • Page 13 Troubleshooting ........Before troubleshooting ........Failure causes and remedial actions .

  • Page 14: Figures

    Figures Fig. 1 Front panel.................... Figures Fig. 2 Rear panel .................... Fig. 3 Operation screen (measurement value display) ........Fig. 4 Function buttons and corresponding screens ........Fig. 5 Screen flow ................... Fig. 6 Rear panel cable connectors ..............Fig. 7 Rear panel tube connectors..............
  • Page 15 Fig. 53 TIME AND DATE screen ..............Fig. 54 TIME AND DATE selection screen ............Fig. 55 DATE FORMAT selection screen ............Fig. 56 LCD screen ..................Fig. 57 DISPLAY OFF TIME setting screen............. Fig. 58 TOUCH PANEL ADJUSTMENT screen..........Fig.
  • Page 16 Tables Table 1 Names and functions of parts of front panel........Tables Table 2 Names and functions of parts of rear panel ........Table 3 Names and functions of buttons (operation screens)......Table 4 Functions of function buttons ............. Table 5 Cable connector list................

  • Page 17: Overview

    This chapter describes various parts with which you should familiarize yourself before operations. Introduction GA-370 Trace Gas Monitor is the analyzer that uses the measurement principle of the cross- flow modulation non-dispersive infrared absorption method. Specifically, this analyzer can be used to analyze the impurity gases (CO, CO...

  • Page 18: Names And Functions Of Parts

    1 Overview Names and functions of parts 1.2.1 Front panel Fig. 1 Front panel Table 1 Names and functions of parts of front panel Name Description Reference Allows you to perform various operations and checks. Note Screen The screen operation area employs a touch panel. Perform operation page 4 operations by directly touching it with a finger.

  • Page 19: Rear Panel

    1 Overview 1.2.2 Rear panel Fig. 2 Rear panel Table 2 Names and functions of parts of rear panel Name Description Reference Tubing connector Connector section of tubings. page 9 section Cable connector section Connector section of cables. page 8 Power switch Power ON/OFF switch of the analyzer.

  • Page 20: Operation Screens

    1 Overview 1.2.3 Operation screens Fig. 3 Operation screen (measurement value display) Table 3 Names and functions of buttons (operation screens) Name Description Reference Key lock set Displayed when the keys are locked. page 12 Current time Displays the current time. page 48 Display section Displays measurement values, setting items, etc.

  • Page 21: Fig. 4 Function Buttons And Corresponding Screens

    1 Overview Function buttons  Press Press Press Fig. 4 Function buttons and corresponding screens Table 4 Functions of function buttons Button Name Description Reference Pressing this displays the SYSTEM SHUTDOWN Shutdown screen. page 36 button Perform the analyzer shutdown process from this screen.

  • Page 22: Screen Flow And Key Operations

    1 Overview 1.2.4 Screen flow and key operations Power on screen MEASUREMENT SYSTEM SHUTDOWN SHUTDOWN screen Measurement Locking and Unlocking the Keys value display MENU CALIBRATION Graph display CALIBRATION RANGE CALIBRATION MENU SPAN GAS CONC. MEASUREMENT MENU RANGE CHANGE PARTS MANAGEMENT ANALOG INPUT ANALOG INPUT DATA MENU...

  • Page 23: Preparations

    This chapter specifies the installation conditions and describes the tube and cable connections. Contact for installation Manufacturer: HORIBA, Ltd. 2 Miyanohigashi, Kisshoin Minami-ku, Kyoto 601-8510 Japan Installation conditions This analyzer is designed to be used under ordinary environmental conditions so consideration has not been given to use under special conditions.

  • Page 24: Cables

    2 Preparations Cables Fig. 6 Rear panel cable connectors Table 5 Cable connector list Name Description Reference To use analog signal output, install the D-sub connector. ANALOG OUT Firmly tighten the screws that prevent the connector from page 65 connector falling off.

  • Page 25: Tubing

    2 Preparations Tubing WARNING Toxic gas Sample gas containing toxic gas is exhausted from the exhaust connector. Connect an exhaust tube to this connector and properly release the gas to a safe place other than the measuring site. 2.4.1 Tube connectors on rear panel Fig.

  • Page 26: Connections

    2 Preparations 2.4.2 Connections Connect the tubes as shown in the figure below. Reference gas Sample gas / span gas Reference gas inlet Sample gas / Exhaust outlet span gas inlet Fig. 8 Tube connection diagram 2.4.3 About reference gas If the reference gas contains impurities (in particular, measurement component gas, moisture, or large amount of interfering gas), the analyzer specifications cannot be met and correct measurement becomes impossible.

  • Page 27: Analyzer Operation Preparations

    2 Preparations Analyzer operation preparations Checking the cables Check that the cables are connected correctly. Connect external inputs and outputs if necessary. Check that the power source is in the rated capacity range. Checking the gas sampling tube, exhaust tube, etc. Recheck that the sampling tube has not become disconnected or that there are no problems such as the exhaust tube being choked.

  • Page 28: Locking And Unlocking The Keys

    Allows operation of all functions of the analyzer including measurement, calibration, changing of settings, and shutting down. SERVICE: This is for servicing by HORIBA. The analyzer is in the state with the keys locked when the power is turned on. ...

  • Page 29: How To Change The Key Lock State

    2 Preparations 2.7.2 How to change the key lock state Operating procedure 1. Press the key lock button ( ). The KEY LOCK setting screen appears. 2. Select the key lock state to set and then press [OK]. The setting is updated and the MEASUREMENT screen reappears. At that time, the PASSWORD input screen appears if you select KEY UNLOCK.

  • Page 30: Main Unit Settings

    2 Preparations Main unit settings To start using the analyzer, perform the checks and configure the settings of the system menu. Change the settings shown in the following table while the keys are in an unlocked state. Table 8 Setting Items at Initial Startup Menu name Setting item Reference...

  • Page 31: Operations

    3 Operations Operations This chapter describes the sequence of basic operations of calibration and measurement, from starting to shutting down of the analyzer. Operation flow Analyzer operation preparations page 11 Analyzer startup page 11 Locking and unlocking the keys page 12 page 14 Main unit settings Checking the flow rates...

  • Page 32: Checking The Flow Rates

    3 Operations Checking the flow rates Check the flow rates of the sample gas and reference gas that flow to the analyzer with the following procedure. 3.2.1 Checking the sample gas flow rate Operating procedure 1. Supply the sample gas (approximately 3 minutes). Note Do not apply pressure to the reference side.

  • Page 33: Calibration

    3 Operations Calibration Stop the gas flow and perform calibration from the span gas. Pressing the menu button (icon figure) in the MEASUREMENT screen displays the CALIBRATION MENU screen. The settings for calibration operation and calibration are configured from the CALIBRATION MENU screen. Fig.

  • Page 34: Calibration Screen

    3 Operations 3.3.1 CALIBRATION screen The following parameters appear on the CALIBRATION screen. CALIBRATION screen 1 (setting value display) Displays the currently set calibration ranges and span gas concentrations. CALIBRATION screen 2 (calibration execution) Execute calibration. CALIBRATION screen 3 (when calibration alarm occurrence) Displayed when a calibration alarm occurs.

  • Page 35: Table 9 Various Names And Functions (Calibration Screen)

    3 Operations Table 9 Various names and functions (CALIBRATION screen) Name Description Reference Switches between the MEASURE mode, CALIBRATION mode (ZERO, SPAN of each component) and DELAY mode. When performing calibration, switch to calibration mode and perform calibration. Switching to calibration mode allows you to switch to the page 22 [MODE] button ZERO CALIBRATION screen and SPAN CALIBRATION...

  • Page 36: Calibration Preparations

    3 Operations 3.3.2 Calibration preparations Gas connection check  Check that the calibration gas to be used for calibration is connected correctly.  Use a cylinder with a concentration of approximately 90% of the calibration range for span  gas. Check the residual pressure of the span gas cylinder, and replace the cylinder with a new ...

  • Page 37: Fig. 16 Span Gas Conc. Screen

    3 Operations Span gas concentration settings  Set the span gas concentration to use for calibration. Operating procedure 1. Press the [SPAN GAS CONC.] button in the CALIBRATION MENU screen. The SPAN GAS CONC. screen appears. 2. Press the span gas concentration button of the component to be calibrated. Fig.

  • Page 38: Switching Mode

    3 Operations 3.3.3 Switching mode The mode can be switched when performing calibration. Operating procedure 1. Press the [CALIBRATION] button in the CALIBRATION MENU screen. The CALIBRATION screen appears. 2. Press the [MODE] button. The mode selection screen appears. 3. Select the mode to which to switch and then press the [OK] button. Fig.

  • Page 39: Zero Calibration

    3 Operations The CALIBRATION screen for the selected mode appears. Fig. 19 Example after mode selected (ZERO CALIBRATION screen 1) When the mode is switched to [ZERO], [SPAN], or [DELAY] on the CALIBRATION screen, the color of the bar changes to pink. If switched to [MEASURE], the color of the bar changes from pink to blue. 3.3.4 Zero calibration Stop the gas line to perform zero calibration without using the zero gas.

  • Page 40: Span Calibration

    3 Operations If calibration fails, the calibration alarm is triggered, and the ZERO CALIBRATION screen 3 (when calibration alarm occurrence) appears. 3.3.5 Span calibration Connect the span gas to the analyzer. Before executing calibration, perform the procedures described in "Calibration range settings" (page 20) and "Span gas concentration settings"...

  • Page 41: Canceling Calibration Alarms

    3 Operations 3.3.6 Canceling calibration alarms When a calibration alarm is occurring, the calibration error can be canceled by performing this operation. Operating procedure 1. Press the calibration alarm cancel button ( ) in the CALIBRATION screen. Fig. 22 CALIBRATION screen 3 (when calibration alarm occurrence) 2.

  • Page 42: Calibration Coefficient History Check

    3 Operations 3.3.7 Calibration coefficient history check The calibration coefficient history can be checked for each component. Operating procedure 1. Press the MENU button ( ) in the MEASUREMENT screen. The CALIBRATION MENU screen appears. 2. Press a menu change button ( ) in the MENU screen to switch display to the DATA MENU screen.

  • Page 43: Fig. 26 Cal Coef. History Screen Of Selected Component

    3 Operations 5. Check the history in the CAL COEF. HISTORY screen of the selected component. Fig. 26 CAL COEF. HISTORY screen of selected component The displayed information is as follows. Table 11 Display items of CAL COEF. HISTORY screen Item Description [TIME AND DATE]...

  • Page 44: Ending Calibration

    3 Operations 3.3.8 Ending calibration Switch to the delay mode after executing calibration and replace the gas in the analyzer with the sample gas while remaining in the calibration state. Operating procedure 1. Press the [MODE] button in the CALIBRATION screen. The mode selection screen appears.

  • Page 45: Measurement

    3 Operations Measurement After calibration of the analyzer is completed, carry out measurement. 3.4.1 MEASUREMENT screen There are two display types for measurement: measurement value display and graph display. The display can be changed with the display change button. When a measurement value is outside the measurement range, the range indication flashes. <Measurement value display>...

  • Page 46: Measurement Operation

    3 Operations Name Description Reference Selecting the check box on the right side of a component Check boxes name displays a graph of the measurement values for ― that component. 3.4.2 Measurement operation Operating procedure 1. Check that the MEASUREMENT screen is displayed. Fig.

  • Page 47: Changing Display Of Measurement Screen

    3 Operations Changing display of MEASUREMENT screen The measurement range and graph scale can be changed. 3.5.1 Range settings Operating procedure 1. Press the MENU button ( ) in the MEASUREMENT screen. The CALIBRATION MENU screen appears. 2. Press a menu change button ( ) in the MENU screen to switch display to the MEASUREMENT MENU screen.

  • Page 48: Fig. 32 Range Change Screen

    3 Operations 5. Select the range to set and then press the [OK] button. The setting is updated and the RANGE CHANGE screen reappears. Fig. 32 RANGE CHANGE screen Table 13 Selection items in RANGE CHANGE screen Item Description [1ppm] button Sets the range to 1 ppm.

  • Page 49: Graph Scale Setting

    3 Operations 3.5.2 Graph scale setting Set the horizontal axis (time) of the graph. Operating procedure 1. Press the time setting ( ) button in the MEASUREMENT screen (graph display). Fig. 33 MEASUREMENT screen (graph display) 2. Select the value to set and then press the [OK] button. The setting is updated and the MEASUREMENT screen (graph display) reappears.

  • Page 50: Event Check

    3 Operations Event check If an error or something unusual condition occurs with the analyzer, the event button ( : red : black) appears in the MEASUREMENT screen. Press the event button to view information on the current event. Events are categorized into the following three types. Table 14 Classification of events Item Description...

  • Page 51: Fig. 36 Events Screen

    3 Operations The EVENTS screen appears. With regard to the event names displayed in the screen, red text indicates an alarm and text in black indicates a caution or information. Fig. 36 EVENTS screen Note When the cause of an event that occurred is resolved, the event is canceled automatically. ...

  • Page 52: Stopping The Analyzer

    3 Operations Stopping the analyzer Stop the analyzer with the following procedure. Operating procedure 1. Press the [SHUTDOWN] button ( ) in the MEASUREMENT screen. The SYSTEM SHUTDOWN screen appears. 2. Press the [SHUTDOWN] button. Fig. 37 SYSTEM SHUTDOWN screen 3.

  • Page 53: Various Functions

    4 Various Functions Various Functions The various functions can be used and set in the MENU screen. Note The various functions can be used and set while the keys are in an unlocked state. When the key lock is set, you can only check the various settings. MENU screen The MENU screen is displayed with the following procedure.

  • Page 54: Calibration Menu

    4 Various Functions The displayed MENU screens are as follows. Table 16 Menu name list Menu name Setting items Reference CALIBRATION CALIBRATION, CALIBRATION RANGE, SPAN GAS CONC. page 38 MENU MEASUREMENT RANGE CHANGE page 39 MENU PARTS MANAGEMENT, ANALOG INPUT, ANALOG OUTPUT, DATA MENU page 39 CAL COEF.

  • Page 55: Measurement Menu

    4 Various Functions MEASUREMENT MENU Fig. 41 MEASUREMENT MENU screen The settings for measurement can be configured. Table 18 Setting items of MEASUREMENT MENU screen Item Description Reference [RANGE CHANGE] Set the measurement ranges for the measurement components. page 31 DATA MENU Fig.

  • Page 56: Periodic Replacement Parts Management

    4 Various Functions 4.4.1 Periodic replacement parts management Set the replacement terms and check the current elapsed times of periodic replacement parts. Furthermore, when the passed time of a periodic replacement part exceeds the recommended limit time, you can check that replacement is necessary. For details on periodic replacement parts, refer to Replacement Parts List (page 72).

  • Page 57: Fig. 44 Each Part Management Screen

    4 Various Functions Changing recommended limit times  The recommended limit times of parts are set to the times recommended by HORIBA in advance. They can be changed to match the operating conditions with the following procedure. 1. Press the button of the item to change in the PARTS MANAGEMENT screen.

  • Page 58: Fig. 46 Reset Confirmation Screen (Example: Parts Management Screen)

    4 Various Functions An event is triggered immediately if set to 0 days. Resetting the passed times  The elapsed times can be reset when, for example, parts are replaced. 1. Press the reset button ( ) in the PARTS MANAGEMENT screen or the EACH PART MANAGEMENT screen.

  • Page 59: Analog Input Value Check

    4 Various Functions 4.4.2 Analog input value check The voltage value, each part temperature, and atmospheric pressure of analog input of the sensor mounted to the analyzer can be checked.   DATA MENU  [ANALOG INPUT] Operating procedure 1. Check each analog input value. Fig.

  • Page 60: Analog Output Value Check

    4 Various Functions 4.4.3 Analog output value check Whether the current output or voltage output from the analyzer is being performed normally can be checked.   DATA MENU  [ANALOG OUTPUT] Operating procedure 1. Press the button on the right of the channel you wish to output to switch to the output value.

  • Page 61: Calibration Coefficient History Check

    4 Various Functions 4.4.4 Calibration coefficient history check The calibration coefficient history can be checked for each component (up to 60 items per component).   DATA MENU  [CAL COEF. HISTORY] Operating procedure 1. Press the button of the component you wish to check. Fig.

  • Page 62: Event History Check

    4 Various Functions Note If more than 8 items exist, the buttons are displayed so that you can change the  page screen. Up to 60 history items can be recorded and displayed for each component. When 60 items will ...

  • Page 63: System Menu

    4 Various Functions SYSTEM MENU Fig. 52 SYSTEM MENU screen The following items can be used and set. Table 23 Setting items of SYSTEM MENU screen Item Description Reference [TIME AND DATE] Set the time and date. page 48 [LCD] Set the backlight off time and screen brightness of the LCD.

  • Page 64: Time And Date

    4 Various Functions 4.5.1 Time and date The current time and date settings and the date display format can be changed. Note This function can be used only in the state with the keys unlocked.   SYSTEM MENU  [TIME AND DATE] Fig.

  • Page 65: Fig. 55 Date Format Selection Screen

    4 Various Functions The setting ranges for the time and date are as follows. Table 25 Time and Date setting ranges Item Setting range Year 2001 to 2049 Month 1 to 12 1 to 31 Hour 0 to 23 Minute 0 to 59 3.

  • Page 66: Lcd Settings

    4 Various Functions 4.5.2 LCD settings Set the display off time and screen brightness of the LCD. Note This function can be used only in the state with the keys unlocked.   SYSTEM MENU  [LCD] Fig. 56 LCD screen Table 26 LCD items Item Description...

  • Page 67: Fig. 57 Display Off Time Setting Screen

    4 Various Functions Display off time setting  Operating procedure 1. Press the button on the right of [DISPLAY OFF TIME]. The DISPLAY OFF TIME selection screen appears. 2. Press the button of the item to set. Fig. 57 DISPLAY OFF TIME setting screen Table 27 Setting items of DISPLAY OFF TIME Item Description...

  • Page 68: Touch Panel Adjustment

    4 Various Functions 4.5.3 Touch panel adjustment If the button display positions and touch positions are offset, adjustments can be made in this screen. Note This function can be used only in the state with the keys unlocked.   SYSTEM MENU  [TOUCH PANEL ADJUSTMENT] Operating procedure 1.

  • Page 69: Password Settings

    4 Various Functions Note If adjustment fails, the following screen appears. Perform the procedure from step 1/3 again. Fig. 60 TOUCH PANEL ADJUSTMENT screen (when failed) 4.5.4 Password settings Change the password to enter when unlocking the keys. Note This function can be used only in the state with the keys unlocked. The initial password is set to "000000".

  • Page 70: Fig. 62 Current Password Input Screen

    4 Various Functions 2. Enter the currently set password in the Current PASSWORD screen and then press the [Enter] button. Fig. 62 Current PASSWORD input screen 3. Enter the new password to set in the New PASSWORD input screen and then press the [Enter] button.

  • Page 71: Analyzer Information Check

    PASSWORD (CONFIRM) screen, the following message appears and an error occurs. Configure the setting again. Fig. 65 Password input error screen If you forget the password, contact HORIBA.  4.5.5 Analyzer information check The program number and version of the software installed on the analyzer can be checked.

  • Page 72: Maintenance

    The maintenance services other than the listed ones (e.g., checking the sensitivity of the analyzer) will be carried out by HORIBA. Contact HORIBA, in principle, every year. Contact for maintenance Manufacturer: HORIBA, Ltd.

  • Page 73: Replacement Of Parts

    5 Maintenance Replacement of parts If a filter or packing event occurred, replace the part. 5.3.1 How to replace the filters and packing Note Filters are used to protect the analyzer. When used for a long period of time, the filter elements will become clogged resulting in a decrease in the flow rate of the sample gas.

  • Page 74: Troubleshooting

    This section describes trouble centering on the replacement of parts and various check items that users may perform and the remedial actions to take. If a problem is not resolved even after taking the remedial actions, be sure to contact HORIBA. 6.2.1 No sensitivity...

  • Page 75: Low Sensitivity

    ― component to be measured. Replace the joints or otherwise repair the Gas is leaking. ― piping. Others Contact HORIBA or local representative. ― 6.2.3 Noise and reading variations Cause Remedial action Reference Analysis part is not attached to the Reattach the analysis part.

  • Page 76: Significant Drift

    Span calibration was not performed span calibration. page 24 correctly. Check that the span gas concentration setting value is normal. Others Contact HORIBA or local representative. ― 6.2.6 Over range reading Cause Remedial action Reference Check the concentration of the introduced Sample gas concentration is too high.

  • Page 77: Higher Output Signal Level

    Screen is the ANALOG OUTPUT If the screen is the ANALOG OUTPUT screen, page 44 screen. switch to the MEASUREMENT screen. Others Contact HORIBA or local representative. ― 6.2.9 Reading unstable Cause Remedial action Reference Check whether the filters are dirty. If they are, Flow rate is not stable.

  • Page 78: Settings Cannot Be Changed

    In the case of symptoms for which a probable cause is not described or a problem that is not resolved even after taking the described remedial action, contact HORIBA. 6.3.1 Types of information and remedial actions...

  • Page 79: Types Of Alarms And Remedial Actions

    Table 29 Types of alarms and remedial actions Name Description Check details Remedial action Contact output OFF during normal The settings could SETTING Contact HORIBA or local operation (closed not be loaded at ― LOAD representative. during operation) startup. (page 66)

  • Page 80: Types Of Cautions And Remedial Actions

    If the problem is not CO ZERO CO zero calibration resolved with the above ― failed. actions, contact HORIBA or local representative. SPAN span If the flow rate is not the ― specified flow rate, adjust calibration failed.

  • Page 81: External Input/ Output

    7 External Input/ Output External Input/ Output This chapter describes the external input/output signals of the analyzer. Analog signal output (ANALOG OUT connector) Fig. 68 ANALOG OUT connector Table 31 ANALOG OUT connector pin assignment (analog output) Pin No. Signal name Component 1 concentration output (voltage or current output) (+) Component 2 concentration output (voltage or current output) (+) ―...

  • Page 82: Contact Output (Digital Out Connector)

    7 External Input/ Output Contact output (DIGITAL OUT connector) Fig. 69 DIGITAL OUT connector Table 32 DIGITAL OUT connector pin assignment (contact output) Pin No. Signal name Operating normally (open during operation) Operating normally COM Operating normally (closed during operation) Flow rate error (open during operation) Flow rate error COM Flow rate error (closed during operation)
  • Page 83 7 External Input/ Output The following alarms occur when operating abnormally. Contact output Alarm SETTING LOAD CAN COMM. (ID1) CAN COMM. (ID2) SV MISSING Signal OFF when operating normally CELL TEMP SAMPLE PRS. REFERENCE PRS. ADC PCB TEMP ATM. PRESSURE SAMPLE PRS.

  • Page 84: Contact Input (Digital In Connector)

    7 External Input/ Output Contact input (DIGITAL IN connector) Fig. 70 DIGITAL IN connector Table 33 DIGITAL IN connector pin assignment (contact Input) Pin No. Signal name Voltage output +24 V ― ― Component 1 range A Component 1 range B Component 2 range A Component 2 range B ―...

  • Page 85: Reference

    8 Reference Reference This chapter describes the measuring principles, specifications, etc. Measuring principles Zero drift has been improved in principle for this trace gas monitor by employing the cross-flow modulation method. Sample gas and zero gas are flowed alternately with a constant flow rate to the cell at 1 Hz intervals by using a solenoid valve as shown in Fig.

  • Page 86: Fig. 71 Configuration Diagram

    8 Reference Light source Measurement cell Solid filter MAIN detector BPA-PSD Output COMP detector BPA-PSD Solid filter BPA-PSD MAIN detector Output BPA-PSD COMP detector Sample gas Reference gas Fig. 71 Configuration diagram Note The CO and CH analyzers are not equipped with optical solid filters. ...

  • Page 87: Specifications

    8 Reference Specifications Name Trace gas monitor Model GA-370 CO, CO , and CH in bulk gases (Air, N , He, Ar, O , and H ) for semiconductor Measurement targets manufacturing processes No. of measurement 1 component or 2 components (measurement base gas specification)

  • Page 88: Replacement Parts List (Standard Accessories And Consumables)

    8 Reference Replacement parts list (standard accessories and consumables) Table 34 Replacement periods of consumables Replacement Item Illustration Part No. Required number period Packing 1 year 3200082592 Filter 1 year 3200082291...

  • Page 89: Removing And Fixing The Fixtures For Transport

    8 Reference Removing and fixing the fixtures for transport The analysis part and solenoid valve unit are fixed in place by fixtures and other parts to prevent damage and other problems during transport. Remove the screws of the analysis part and fixture of the solenoid valve unit as described in the procedure below.
  • Page 90 8 Reference How to fix the fixtures  1. Change the suspension position for the springs. Change the suspension position for the springs from the top level to the bottom level. 2. Fix the solenoid valve unit fixture. Remove the screw attached to the solenoid valve unit. Loosen the screw at the bottom of the fixture, rotate the fixture half a rotation (turn it to the opposite side) and secure with a screw.

  • Page 91: Related Diagrams

    8 Reference Related diagrams Name GA-370 External Dimensions GZ0000471868B Flow Sheet GZ0000465573...
  • Page 95 2 Miyanohigashi, Kisshoin Minami-ku, Kyoto 601-8510 Japan http://www.horiba.com...

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