Aerotech MPS75SL Hardware Manual
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Aerotech MPS75SL Hardware Manual

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MPS75SL/SLE
Hardware Manual
Revision: 1.03.00

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Summary of Contents for Aerotech MPS75SL

  • Page 1: Mps75Sl/Sle Hardware Manual

    MPS75SL/SLE Hardware Manual Revision: 1.03.00...
  • Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.

  • Page 3: Table Of Contents

    MPS75SL/SLE Hardware Manual Table of Contents Table of Contents MPS75SL/SLE Hardware Manual Table of Contents List of Figures List of Tables Safety Procedures and Warnings EU Declaration of Incorporation Chapter 1: Overview 1.1. Environmental Specifications 1.2. Accuracy and Temperature Effects 1.3.

  • Page 4: List Of Figures

    MPS75SL/SLE HDZ Angle Bracket Dimensions Figure 2-8: MPS75SL/SLE Mounting Hole Locations Figure 2-9: Access To All Mounting Holes Figure 2-10: Load Capability of MPS75SL/SLE Series Stages Figure 2-11: Stage Orientations Figure 2-12: Torque Required to Turn Ball Screw in Vertical Orientation Figure 3-1:...

  • Page 5: List Of Tables

    List of Tables Table 1-1: Model Numbers and Ordering Options Table 1-2: Environmental Specifications Table 1-3: MPS75SL Series Mechanical Specifications Table 1-4: MPS75SLE Series Mechanical Specifications Table 2-1: Stage to Mounting Surface Hardware Table 3-1: 25-Pin D Motor and Feedback Connector Pinouts (-M1 / Motor only for SLE)
  • Page 6 Table of Contents MPS75SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...

  • Page 7: Safety Procedures And Warnings

    This manual tells you how to carefully and correctly use and operate the MPS75SL/SLE. Read all parts of this manual before you install or operate the MPS75SL/SLE or before you do maintenance to your system.
  • Page 8 Electrical Safety MPS75SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...

  • Page 9: Eu Declaration Of Incorporation

    MPS75SL/SLE Hardware Manual Declaration of Conformity EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: MPS75SL/SLE Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 10 Declaration of Conformity MPS75SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...

  • Page 11: Chapter 1: Overview

    Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information.

  • Page 12: Environmental Specifications

    1.2. Accuracy and Temperature Effects The accuracy specification of MPS75SL/SLE series stages is measured 25 mm above the table with the stage in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or exceeding the specification in Section 2.3.

  • Page 13: Basic Specifications

    Anodized Aluminum Body 1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications. 2. Excessive duty cycle may impact stage accuracy.

  • Page 14: Table 1-4: Mps75Sle Series Mechanical Specifications

    Anodized Aluminum Body 1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications. 2. With Aerotech controllers. 3. Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both the rotary and linear encoders.

  • Page 15: Vacuum Operation

    Stages are packaged in a special polyethylene bag. Vacuum Guidelines To ensure that the MPS75SL/SLE will continue to perform well in the vacuum environment, follow the guidelines listed below (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
  • Page 16 Overview MPS75SL/SLE Hardware Manual This page intentionally left blank. Chapter 1 www.aerotech.com...

  • Page 17: Chapter 2: Installation

    W A R N I N G : Improper handling could adversely affect the performance of the MPS75SL/SLE. Use care when moving the MPS75SL/SLE. W A R N I N G : An unsecured MPS75SL/SLE could be dragged off of a mounting surface by its unsupported cable.

  • Page 18: Dimensions

    MPS75SL/SLE Hardware Manual 2.2. Dimensions N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www.aerotech.com.

  • Page 19: Figure 2-2: Mps75Sl/Sle With Bellows Dimensions

    MPS75SL/SLE Hardware Manual Mechanical Specifications and Installation Figure 2-2: MPS75SL/SLE with Bellows Dimensions www.aerotech.com Chapter 2...

  • Page 20: Figure 2-3: Mps75Sl/Sle-025 Mounting Plate Dimensions

    Mechanical Specifications and Installation MPS75SL/SLE Hardware Manual Figure 2-3: MPS75SL/SLE-025 Mounting Plate Dimensions Figure 2-4: MPS75SL/SLE-050 Mounting Plate Dimensions Figure 2-5: MPS75SL/SLE-075 Mounting Plate Dimensions Figure 2-6: MPS75SL/SLE-100 Mounting Plate Dimensions Chapter 2 www.aerotech.com...

  • Page 21: Figure 2-7: Mps75Sl/Sle Hdz Angle Bracket Dimensions

    MPS75SL/SLE Hardware Manual Mechanical Specifications and Installation Figure 2-7: MPS75SL/SLE HDZ Angle Bracket Dimensions www.aerotech.com Chapter 2...

  • Page 22: Securing The Stage To The Mounting Surface

    D A N G E R : To minimize the possibility of bodily injury or death, disconnect all electrical power prior to performing any maintenance or making adjustments to the equipment. W A R N I N G : An unsecured MPS75SL/SLE could be dragged off of a mounting surface by its unsupported cable.

  • Page 23: Figure 2-8: Mps75Sl/Sle Mounting Hole Locations

    MPS75SL/SLE Hardware Manual Mechanical Specifications and Installation Figure 2-8: MPS75SL/SLE Mounting Hole Locations www.aerotech.com Chapter 2...

  • Page 24: For Xy Assemblies And Special Cases

    Mechanical Specifications and Installation MPS75SL/SLE Hardware Manual 2.3.1. For XY Assemblies and Special Cases To access the inner mounting holes, the stage table must be moved. The following is the procedure for moving the table and mounting the stage (see Figure 2-9).

  • Page 25: Attaching The Payload To The Stage

    N O T E : If your MPS75SL/SLE was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the MPS75SL/SLE is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur.

  • Page 26: Figure 2-11: Stage Orientations

    Mechanical Specifications and Installation MPS75SL/SLE Hardware Manual Figure 2-11: Stage Orientations The approximate amount of torque required to turn the ball screw of an MPS75SL/SLE series stage can be found from Figure 2-12 or the following equation: Where: Lead of Screw = see Table 1-3 Efficiency = .90 for ball screws...

  • Page 27: Figure 2-12: Torque Required To Turn Ball Screw In Vertical Orientation

    MPS75SL/SLE Hardware Manual Mechanical Specifications and Installation Figure 2-12: Torque Required to Turn Ball Screw in Vertical Orientation www.aerotech.com Chapter 2...
  • Page 28 Mechanical Specifications and Installation MPS75SL/SLE Hardware Manual This page intentionally left blank. Chapter 2 www.aerotech.com...

  • Page 29: Chapter 3: Electrical Specifications And Installation

    Failure to do so may cause electric shock or damage to the equipment. W A R N I N G : The DC Power supplies for controllers must be double insulated. All Aerotech- provided power supplies are double insulated.

  • Page 30: Motor And Feedback Connectors

    The MPS75SL/SLE comes from the factory completely wired and assembled. Each MPS75SL/SLE is shipped with documentation regarding the wiring, controller interface connectors, and specifications. N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration.

  • Page 31: Table 3-1: 25-Pin D Motor And Feedback Connector Pinouts (-M1 / Motor Only For Sle)

    MPS75SL/SLE Hardware Manual Electrical Specifications and Installation N O T E : When used with the Lab controller, the 2nd encoder channel will require a second axis and an adapter cable. Table 3-1: 25-Pin D Motor and Feedback Connector Pinouts (-M1 / Motor only for SLE)

  • Page 32: Table 3-3: 25-Pin D Motor And Feedback Connector Pinouts (-M1 With -Hv Option / Sl Only)

    Electrical Specifications and Installation MPS75SL/SLE Hardware Manual Table 3-3: 25-Pin D Motor and Feedback Connector Pinouts (-M1 with -HV Option / SL Only) Description Connector Reserved Reserved Motor + Motor - Reserved Reserved Negative (CCW) hardware limit Limit Common Encoder Common...

  • Page 33: Table 3-4: 25-Pin D Motor And Feedback Connector Pinouts (-M2 / Motor Only For Sle)

    MPS75SL/SLE Hardware Manual Electrical Specifications and Installation Table 3-4: 25-Pin D Motor and Feedback Connector Pinouts (-M2 / Motor only for SLE) Description Connector Connector key (to prevent improper connection) Reserved Reserved Reserved Encoder Common Limit Common Negative (CCW) hardware limit...

  • Page 34: Table 3-6: 25-Pin D Motor And Feedback Connector Pinouts (-M2 With -Hv Option / Sl Only)

    Electrical Specifications and Installation MPS75SL/SLE Hardware Manual Table 3-6: 25-Pin D Motor and Feedback Connector Pinouts (-M2 with -HV Option / SL Only) Description Connector Reserved Motor Phase B Motor Phase A Motor Return Reserved Reserved Negative (CCW) hardware limit...

  • Page 35: Table 3-7: 15-Pin D Feedback Connector Pinouts (Mps75Sle)

    MPS75SL/SLE Hardware Manual Electrical Specifications and Installation Table 3-7: 15-Pin D Feedback Connector Pinouts (MPS75SLE) Description Connector Reserved Signal Common Reserved Marker-N Cosine-N Sine-N Encoder +5 V Encoder +5 V Signal Common CW/+LMT CCW/-LMT Marker Cosine Sine Reserved Case Signal shield connection (to case)

  • Page 36: Motor And Feedback Wiring

    Electrical Specifications and Installation MPS75SL/SLE Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: Motor and Feedback Wiring (-M1 Option) Chapter 3 www.aerotech.com...

  • Page 37: Figure 3-2: Motor And Feedback Wiring (-M2 Option)

    MPS75SL/SLE Hardware Manual Electrical Specifications and Installation Figure 3-2: Motor and Feedback Wiring (-M2 Option) www.aerotech.com Chapter 3...

  • Page 38: Motor And Feedback Specifications

    Requires external pull-up to +5 V (10 kΩ recommended) Notes: If the MPS75SL/SLE is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Chapter 3...

  • Page 39: Table 3-10: Dc Motor Specifications

    MPS75SL/SLE Hardware Manual Electrical Specifications and Installation Table 3-10: DC Motor Specifications DC Motor Stall Torque, Continuous 0.040 N·m Peak Torque 0.28 N·m Maximum Speed 5800 rpm Peak Current 8.0 A Continuous Stall Current 1.2 A Torque Constant 0.03867 N·m/A Terminal Resistance 2.98 Ohm...

  • Page 40: Table 3-12: Encoder Specifications (Mps75Sl)

    -E1 option allows for electronic resolutions below 1 nm olutions -E2 option: 20 µm fundamental 0.05 µm 1. For optimum performance, Aerotech recommends using 0.025 µm as the highest-resolution when using the linear encoder as part of the servo feedback loop (ex: dual-loop). Chapter 3...

  • Page 41: Limits, Marker, And Machine Direction

    Electrical Specifications and Installation 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5.

  • Page 42: Motor And Feedback Phasing

    Electrical Specifications and Installation MPS75SL/SLE Hardware Manual 3.5. Motor and Feedback Phasing Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) Chapter 3 www.aerotech.com...

  • Page 43: Chapter 4: Maintenance

    Failure to do so may cause electric shock or damage to the equipment. 4.1. Service and Inspection Schedule Lubricant inspection and replenishment in MPS75SL/SLE series stages depends on conditions such as duty cycle, speed, and the environment. An inspection interval of once per month is recommended until a trend develops for the application.

  • Page 44: Cleaning And Lubrication

    Cleaning Before using a cleaning solvent on any part of the MPS75SL/SLE, blow away small particles and dust with nitrogen or, less preferably, clean, dry, compressed air. Any external metal surface of the MPS75SL/SLE can be cleaned with isopropyl alcohol on a lint-free cloth.
  • Page 45 MPS75SL/SLE Hardware Manual Maintenance Lubrication Take the opportunity during the lubrication procedure to inspect the precision rail guides for any damage or signs of wear. For standard applications, use NSK LG2 grease on the precision rail guides and ball screw. For vacuum applications, refer to the vacuum guidelines in Section 1.4.

  • Page 46: Bellows Removal For Re-Lubrication

    Maintenance MPS75SL/SLE Hardware Manual 4.2.1. Bellows Removal for Re-Lubrication For stages with the -BL option, the bellows will need to be removed to gain access to the ball screw and precision rail guides. N O T E : Removing the upper axis on an XY, XZ, or YZ system will alter a precision alignment. Only remove the bellows on each axis and follow for re-lubrication.

  • Page 47: Bellows Installation

    MPS75SL/SLE Hardware Manual Maintenance 4.3. Bellows Installation D A N G E R : To minimize the possibility of bodily injury or death, disconnect all electrical power prior to performing any maintenance or making adjustments to the equipment. 1. Remove power from the stage.

  • Page 48: Figure 4-5: Secure The Bellows Support Rods

    Maintenance MPS75SL/SLE Hardware Manual 4. Use (4) M2 socket head cap screws to secure the opposite ends of the bellow support rods. Figure 4-5: Secure the Bellows Support Rods 5. Attach the bellows to the ends of the stage and to the carriage using (8) M2 socket head cap screws.

  • Page 49: Figure 4-8: Attach The Bellows Tabletop

    MPS75SL/SLE Hardware Manual Maintenance 7. Attach the bellows tabletop to the carriage using (4) M3 socket head cap screws. Figure 4-8: Attach the Bellows Tabletop 8. Re-install the motor cover (refer to Figure 4-3) ensuring that no wires are pinched or in the way. Do not over-tighten the screws that secure the motor cover because the cover is made of thin material and could become damaged.

  • Page 50: Troubleshooting

    Maintenance MPS75SL/SLE Hardware Manual 4.4. Troubleshooting Table 4-1: Troubleshooting Symptom Possible Cause and Solution Brake not released (if equipped with brake; refer to stage documentation). In Limit condition. Check limits (refer to Chapter 3) and refer to the Controller Stage will not move documentation for polarity and compatibility requirements (Example: voltage requirements).

  • Page 51: Appendix A: Warranty And Field Service

    Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s...
  • Page 52 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...

  • Page 53: Appendix B: Revision History

    MPS75SL/SLE Hardware Manual Revision History Appendix B: Revision History Revision General Information 1.03.00 Updated vacuum baking temperature: Section 1.4. General revision / Product redesign New configuration (SL and SLE) 1.02.00 Model numbers and ordering options updated: Table 1-1 Basic specifications updated: Section 1.3.
  • Page 54 Revision History MPS75SL/SLE Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...

  • Page 55: Index

    MPS75SL/SLE Hardware Manual Index Index Limit Switch Specifications lubricants 2010 vacuum operation Lubrication Accuracy and Temperature Effects Altitude Mechanical Specifications 13-14 Ambient Temperature model numbers Attaching the Payload to the Stage mounting surface cleaning Bellows Removal for Re-Lubrication securing stage Braycote®...
  • Page 56 Index MPS75SL/SLE Hardware Manual Vacuum vacuum guidelines Vibration Warranty and Field Service Index www.aerotech.com...

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