Non-Linear Analog Output - Mbar - Instrutech VGC301A User Manual

Convection vacuum gauge controller
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Instruction Manual

7.2 Non-Linear Analog Output - mbar

Non-Linear analog output for selected gases - Engineering units in mbar
True Pressure
N
2
0 mbar
0.3751
.0001 mbar
0.3759
.0003 mbar
0.3768
.0006 mbar
0.3795
.0013 mbar
0.384
.0027 mbar
0.3927
.0067 mbar
0.4174
.0133 mbar
0.4555
.0266 mbar
0.5226
.0660 mbar
0.6819
0.13 mbar
0.878
0.26 mbar
1.1552
0.66 mbar
1.6833
1.33 mbar
2.2168
2.66 mbar
2.8418
6.66 mbar
3.6753
13.3 mbar
4.2056
26.6 mbar
4.5766
66.6 mbar
4.8464
133 mbar
4.9449
266 mbar
5.019
400 mbar
5.1111
533 mbar
5.2236
666 mbar
5.3294
800 mbar
5.4194
933 mbar
5.4949
1010 mbar
5.534
1060 mbar
5.5581
1190 mbar
5.6141
1330 mbar
5.6593
Note: By design, these values are identical to the outputs from Brooks Automation, Inc. / Granville-Phillips
®
Convectron
gauges, Mini-Convectron
without affecting your process system or software.
An analog output of less than 0.01 volts to near 0 volt indicates a damaged or faulty sensor.
InstruTech, Inc.
Ar
He
O
2
0.375
0.375
0.375
0.3757
0.376
0.376
0.376
0.377
0.377
0.378
0.379
0.38
0.381
0.382
0.384
0.387
0.389
0.392
0.403
0.409
0.417
0.429
0.441
0.453
0.477
0.497
0.521
0.595
0.637
0.679
0.745
0.814
0.868
0.962
1.068
1.141
1.386
1.589
1.664
1.818
2.164
2.195
2.333
2.939
2.814
3.028
4.387
3.672
3.48
5.774
4.225
3.801
7.314
4.62
4.037
4.916
4.122
5.026
4.192
5.106
4.283
5.2
4.386
5.315
4.477
5.422
4.55
5.515
4.611
5.592
4.643
5.633
4.663
5.658
4.706
5.713
4.745
5.762
Values listed under each gas type are in volts.
®
modules and controllers so that equivalent units can be interchanged
CO
KR
Freon12
2
0.375
0.375
0.375
0.376
0.376
0.376
0.377
0.377
0.378
0.381
0.377
0.382
0.385
0.379
0.388
0.395
0.384
0.401
0.412
0.395
0.437
0.462
0.415
0.488
0.536
0.451
0.581
0.705
0.544
0.778
0.9
0.668
1.009
1.179
0.847
1.315
1.668
1.194
1.826
2.172
1.536
2.257
2.695
1.921
2.647
3.316
2.429
3.029
3.67
2.734
3.204
3.903
2.966
3.308
4.071
3.075
3.43
4.154
3.134
3.618
4.336
3.269
3.827
4.502
3.384
3.938
4.621
3.466
4.016
4.708
3.526
4.076
4.775
3.573
4.124
4.83
3.613
4.166
4.86
3.632
4.19
4.877
3.645
4.203
4.919
3.674
4.237
4.955
3.69
4.270
VGC301A Controller
Freon22
D
Ne
2
0.375
0.375
0.375
0.376
0.376
0.3757
0.378
0.377
0.3763
0.381
0.381
0.3782
0.388
0.386
0.381
0.4
0.396
0.388
0.432
0.425
0.405
0.48
0.47
0.433
0.566
0.549
0.484
0.764
0.727
0.608
0.99
0.944
0.768
1.291
1.265
1.002
1.805
1.914
1.469
2.247
2.603
1.976
2.666
3.508
2.631
3.09
5.059
3.715
3.33
6.361
4.605
3.414
5.406
3.509
6.159
3.66
6.483
3.883
6.661
4.005
6.726
4.088
6.767
4.151
6.803
4.203
6.843
4.247
6.89
4.271
6.92
4.286
6.942
4.321
7
4.354
7.056
CH
4
0.375
0.3766
0.378
0.3825
0.3896
0.403
0.438
0.492
0.584
0.796
1.053
1.392
2.014
2.632
3.313
4.699
5.172
5.583
5.72
5.86
6.103
6.342
6.519
6.642
®
Page 23

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