Non-Linear Analog Output - Torr / Mtorr - Instrutech VGC301A User Manual

Instruction Manual

7.1 Non-Linear Analog Output - Torr / mTorr

Non-Linear analog output for selected gases - Engineering units in Torr/mTorr
True Total
N
2
Pressure
0 mTorr 0.3751
0.1 mTorr 0.3759
0.2 mTorr 0.3768
0.5 mTorr 0.3795
1 mTorr 0.3840
2 mTorr 0.3927
5 mTorr 0.4174
10 mTorr 0.4555
20 mTorr 0.5226
50 mTorr 0.6819
100 mTorr 0.8780
200 mTorr 1.1552
500 mTorr 1.6833
1 Torr 2.2168
2 Torr 2.8418
5 Torr 3.6753
10 Torr 4.2056
20 Torr 4.5766
50 Torr 4.8464
100 Torr 4.9449
200 Torr 5.0190
300 Torr 5.1111
400 Torr 5.2236
500 Torr 5.3294
600 Torr 5.4194
700 Torr 5.4949
760 Torr 5.5340
800 Torr 5.5581
900 Torr 5.6141
1000 Torr 5.6593
Note: By design, these values are identical to the outputs from Brooks Automation, Inc. / Granville-Phillips
®
Convectron gauges, Mini-Convectron
without affecting your process system or software.
An analog output of less than 0.01 volts to near 0 volt indicates a damaged or faulty sensor.
InstruTech, Inc.
O
Ar He
2
0.3750 0.3750 0.3750
0.3757 0.3755 0.3760
0.3760 0.3765 0.3770
0.3780 0.3790 0.3800
0.3810 0.3820 0.3840
0.3870 0.3890 0.3920
0.4030 0.4090 0.4170
0.4290 0.4410 0.4530
0.4770 0.4970 0.5210
0.5950 0.6370 0.6790
0.7450 0.8140 0.8680
0.9620 1.0680 1.1410
1.3860 1.5890 1.6640
1.8180 2.1640 2.1950
2.3330 2.9390 2.8140
3.0280 4.3870 3.6720
3.4800 5.7740 4.2250
3.8010 7.3140 4.6200
4.0370 4.9160
4.1220 5.0260
4.1920 5.1060
4.2830 5.2000
4.3860 5.3150
4.4770 5.4220
4.5500 5.5150
4.6110 5.5920
4.6430 5.6330
4.6630 5.6580
4.7060 5.7130
4.7450 5.7620
Values listed under each gas type are in volts.
®
modules and controllers so that equivalent units can be interchanged
CO
Kr Freon12
2
0.3750 0.3750 0.3750
0.3760 0.3755 0.3760
0.3770 0.3768 0.3780
0.3810 0.3772 0.3820
0.3850 0.3790 0.3880
0.3950 0.3840 0.4010
0.4120 0.3950 0.4370
0.4620 0.4150 0.4880
0.5360 0.4510 0.5810
0.7050 0.5440 0.7780
0.9000 0.6680 1.0090
1.1790 0.8470 1.3150
1.6680 1.1940 1.8260
2.1720 1.5360 2.2570
2.6950 1.9210 2.6470
3.3160 2.4290 3.0290
3.6700 2.7340 3.2040
3.9030 2.9660 3.3080
4.0710 3.0750 3.4300
4.1540 3.1340 3.6180
4.3360 3.2690 3.8270
4.5020 3.3840 3.9380
4.6210 3.4660 4.0160
4.7080 3.5260 4.0760
4.7750 3.5730 4.1240
4.8300 3.6130 4.1660
4.8600 3.6320 4.1900
4.8770 3.6450 4.2030
4.9190 3.6740 4.2370
4.9550 3.6900 4.2700
VGC301A Controller
D
Freon22 Ne
2
0.3750 0.3750 0.3750
0.3760 0.3760 0.3757
0.3780 0.3770 0.3763
0.3810 0.3810 0.3782
0.3880 0.3860 0.3810
0.4000 0.3960 0.3880
0.4320 0.4250 0.4050
0.4800 0.4700 0.4330
0.5660 0.5490 0.4840
0.7640 0.7270 0.6080
0.9900 0.9440 0.7680
1.2910 1.2650 1.0020
1.8050 1.9140 1.4690
2.2470 2.6030 1.9760
2.6660 3.5080 2.6310
3.0900 5.0590 3.7150
3.3300 6.3610 4.6050
3.4140 5.4060
3.5090 6.1590
3.6600 6.4830
3.8830 6.6610
4.0050 6.7260
4.0880 6.7670
4.1510 6.8030
4.2030 6.8430
4.2470 6.8900
4.2710 6.9200
4.2860 6.9420
4.3210 7.0000
4.3540 7.0560
CH
4
0.3750
0.3766
0.3780
0.3825
0.3896
0.4030
0.4380
0.4920
0.5840
0.7960
1.0530
1.3920
2.0140
2.6320
3.3130
4.6990
5.1720
5.5830
5.7200
5.8600
6.1030
6.3420
6.5190
6.6420
®
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