1. Manuals
  2. Brands
  3. Instrutech Manuals
  4. Controller
  5. FlexRax 4000
  6. User manual

Instrutech FlexRax 4000 User Manual

Multi-gauge controller
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
InstruTech®, Inc.
FlexRax® 4000
Multi-Gauge Controller
User Manual
1475 S. Fordham St.
Longmont, CO 80503
USA
Phone +1-303-651-0551
Fax +1-303-678-1754
Email info@instrutechinc.com
p/n 001020-106

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the FlexRax 4000 and is the answer not in the manual?

Questions and answers

Related Manuals for Instrutech FlexRax 4000

Summary of Contents for Instrutech FlexRax 4000

  • Page 1 InstruTech®, Inc. FlexRax® 4000 Multi-Gauge Controller User Manual 1475 S. Fordham St. Longmont, CO 80503 Phone +1-303-651-0551 Fax +1-303-678-1754 Email info@instrutechinc.com p/n 001020-106...

  • Page 2: Shock Hazard

    In no event will InstruTech, Inc. be responsible or liable for indirect or consequential damages that result from the use or application of this equipment.
  • Page 3 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by InstruTech, Inc. Printed in the United States of America ®...

  • Page 4: Table Of Contents

    Mechanical Installation - Convection Gauges ................. 16 Important Safety Information ......................17 General ............................ 17 2.1.1 Service and Operation - FlexRax 4000 Multi-Gauge Controller ........18 2.1.2 Service and Operation - Vacuum Gauge Transducers ........... 19 Electrical Conditions ........................ 20 Overpressure and use with hazardous gases ................
  • Page 5 Instruction Manual FlexRax 4000 3.5.1 Enable Password – ......................37 3.5.2 Disable Password – ......................38 Operation - Connecting Options and Devices ................. 39 3.6.1 Back Panel Connections and Operation – ..............39 3.6.1.1 Connecting the IGR or IGE Options – ................ 40 3.6.1.1.1 IGR / IGE Option Cable Connector Pin Out –...
  • Page 6 Instruction Manual FlexRax 4000 3.6.1.4.10.2 Log-Linear CG 0-7 V – ..................89 3.6.1.4.10.3 Linear CG – ...................... 90 3.6.1.4.10.4 Non-Linear CG – ....................91 Effect of Different Gas Types on Displayed Pressure ..............93 Effects of different gas types on Ionization Gauge display – ..........93 4.1.1...

  • Page 7: Introduction - General Information

    R, resistive degas) – operates a resistive degas, sometimes referred to as I R degas, hot filament nude or glass-enclosed B-A Ion Gauge (IG – InstruTech Series BA602/BA603 or similar). 2) IGE option card (Ion Gauge, electron bombardment) – operates an electron bombardment or ‘EB’...

  • Page 8: Typical Flexrax To Gauge Connection Diagram

    Instruction Manual FlexRax 4000 The FlexRax 4000 will provide simultaneous operation and pressure measurement of either up to two InstruTech IGM400 Hornet miniature ionization gauge modules or CCM500 double inverted magnetron cold cathode ion gauge modules, up to two glass-enclosed or nude B-A ionization gauge transducers and four convection gauges dependent on the gauge control option cards installed.

  • Page 9: Specifications - Flexrax 4000 Multi-Gauge Controller

    Worker Bee™ CVG101 or Granville-Phillips® Convectron® convection gauge transducers capacitance diaphragm gauge (2 max) accepts analog input signals from CDGs or other InstruTech vacuum gauge modules (external power source for these type auxiliary devices will be required) IG filament/sensor control - on /off...
  • Page 10 FlexRax 4000. The FlexRax 4000 controller is provided with a NRTL approved AC power cordset suitable for use with nominal AC Mains power of 115 Vac. The controller may be powered by AC Mains from 100 to 240 Vac, nominal, provided that the user provides and uses an agency approved AC Mains power cordset suitable for use with local installation requirements at the geographic location of use.

  • Page 11: Flexrax 4000 Part Number Configuration

    Instruction Manual FlexRax 4000 FlexRax 4000 Part Number Configuration Option Card selection Complete Catalog Number: FLX4000 - # - # - # - # - # - # - # Card slot 1 IGM/CG* option (operates 2 convection and 1 IGM400/CCM500 ion gauge)

  • Page 12: Flexrax Cable Assemblies For Gauges

    Instruction Manual FlexRax 4000 FlexRax Cable Assemblies for Gauges BA601 and BA602 Nude IG Cable Cable lengths BA602 Nude IG BA601 / BA602 Nude IG Cable P/N Cable 10 Ft (3m) IRN441-1-10F 25 Ft (8m) IRN441-1-25F 50 Ft (15m) IRN441-1-50F >...

  • Page 13: Mechanical Installation - Flexrax Controller

    Instruction Manual FlexRax 4000 Mechanical Installation - FlexRax Controller When mounting multiple units in your rack mount enclosure or mounting the FlexRax below other electronic equipment in your rack, allow at least 1U of space (1.75 in., 45 mm) between the units to ensure adequate ventilation especially if operating one or more IGR/IGE option cards in your FlexRax.
  • Page 14 Instruction Manual FlexRax 4000 FlexRax 4000 - Front Panel The functions and operation of the FlexRax Multi-Gauge Controller are provided by the 10 front panel keys (push-button switches) linked to the displayed functions on the front panel LCD Display. DO NOT press the soft-keys displayed on the LCD screen.

  • Page 15: Mechanical Installation - Ionization Gauges

    Instruction Manual FlexRax 4000 Mechanical Installation - Ionization Gauges NOTICE - For more detailed information about the IGM400 Hornet™ hot cathode ionization gauge and CCM500 cold cathode ionization gauge, please refer to the User Manual for each of these products.

  • Page 16: Mechanical Installation - Convection Gauges

    Instruction Manual FlexRax 4000 Mechanical Installation - Convection Gauges NOTICE - For more detailed information about the CVG101 Worker Bee™ convection gauge, please refer to the User Manual for the CVG101. Mount the CVG101 as close as possible to the pressure you want to measure. Long or restricted, small diameter tubing will create a pressure difference between your process chamber and the gauge.

  • Page 17: Important Safety Information

    FlexRax 4000 2 Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service, provided it is installed and operated within the strict safety guidelines provided in this manual. Please read and follow all warnings and instructions.

  • Page 18: Service And Operation - Flexrax 4000 Multi-Gauge Controller

    Do not use these products if they have been damaged. Immediately contact InstruTech, Inc. to arrange return of the product if it is damaged.

  • Page 19: Service And Operation - Vacuum Gauge Transducers

    Instruction Manual FlexRax 4000 InstruTech gauges and modules are calibrated for direct readout of nitrogen or air. Do not attempt to use with other gases such as argon (Ar) or carbon dioxide (CO ) unless accurate conversion data for N to other gas is properly used.

  • Page 20: Electrical Conditions

    Instruction Manual FlexRax 4000 NOTICE - Never use an auxiliary or convection gauge to automatically turn off the Ion Gauge when the Ion Gauge filament in use is constructed of tungsten. The response time of other gauges may not allow for timely turn off of the tungsten filament possibly leading to filament damage.

  • Page 21: Overpressure And Use With Hazardous Gases

    WARNING! Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding. InstruTech gauges should not be used at pressures exceeding 1000 Torr absolute pressure.
  • Page 22 Overpressure - All types of Vacuum Measurement Devices InstruTech convection gauges and similar devices from other manufacturers are not intended for use at pressures above 20 psia (1000 torr); DO NOT exceed 35 psig (< 2 ½ bars) pressure inside the gauge tube. If your chamber goes to higher pressures, you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions.

  • Page 23: User Interface - Installation And Operation

    It is at user discretion to perform an ‘Update Memory” procedure (installs new operating software for your FlexRax 4000 controller). You may opt to ‘Update Memory’ at a future date in order that your FlexRax be updated to a software version that allows you to operate a new type of device or to obtain added capability.
  • Page 24 Instruction Manual FlexRax 4000 After turning AC Mains power to your FlexRax 4000 to ON, the operating system in the controller will initialize and the Pressure Measurement Screen similar to the following will appear. Press the Menu key. 1. Press the key on the front panel...
  • Page 25 ON) you will have loaded the new software into the operating system program memory. It will take about one minute each time you cycle AC power for the FlexRax to initialize. You will see a FlexRax 4000 startup screen followed by an InstruTech, Inc. information screen before the Pressure Measurement Screen is displayed.

  • Page 26: Update Database

    Instruction Manual FlexRax 4000 NOTICE - The following steps for Update Database and Set System Factory Defaults are not always required after performing the Update Memory (Software) procedure. If you either Update Database or set the operating system to Factory Defaults, the control of the Devices on your vacuum system will not be the same as before you perform either of these two procedures.

  • Page 27: Changing A Default Name

    Instruction Manual FlexRax 4000 3.1.4 Changing a Default Name – The factory default names and locations for the installed options and designated devices may require that you change them from the factory default settings to suit your requirements for naming conventions and documentation purposes.

  • Page 28: Logical Progression / Physical Location

    As the software executes, the program searches for physical, installed options in the FlexRax by scanning the physical locations within the FlexRax from left to right as viewed from the front panel of the controller. FlexRax 4000 Top View (top cover removed) BACK of Controller ①...
  • Page 29 Instruction Manual FlexRax 4000 Not all physical locations need to have an option card present. As the software scans the locations, the first location with an option residing in it is assigned a logically progressive address (a numeral) combined with the notation for the installed option.

  • Page 30: Upload Database

    Instruction Manual FlexRax 4000 To further illustrate the concept of how the software uses logical progression to locate and name an installed option card, consider the following example: Only three of the available option locations are used to install one each IGM/CG option card, one each AI/O-R card and one each IGR card.

  • Page 31: Getting Help - Info Screen

    CAUTION! Damage to equipment and possible injury to operator may result if the ‘Operate / Stand-by’ soft-key is left in the ‘Operate’ mode either while setting up the FlexRax 4000 or during system start up. It is recommended that the operating mode is set to ‘Stand-by’ immediately after AC Mains power cycling until operator is certain that all operating parameters of the vacuum pressure system are at a known safe / normal state.
  • Page 32 Display line (top line in the Pressure Measurement Screen example) indicating IGM [1] - IGM is the notation for either the InstruTech IGM400 Hornet Ionization Gauge Module or the CCM Cold Cathode Module that you will connect to the FlexRax. The notation [1] is the location of this option card in the FlexRax controller.
  • Page 33 Instruction Manual FlexRax 4000  Display line indicating IGR [5] – The IGR [5] display line is for a resistive degas-type Bayard-Alpert ionization gauge option that is installed in location [5] of the FlexRax.  Display line indicating Unit: Pressure is indicated in Torr units of measure or engineering units –...

  • Page 34: Operate / Stand-By

    Instruction Manual FlexRax 4000 The Messages and MENU navigation start keys allow you to move either to the start MENU for programming and setting up the devices you wish to connect to the FlexRax option cards, or to the Messages screen to view important status information regarding the options installed.

  • Page 35: Setting Up The Pressure Measurement Screen

    Instruction Manual FlexRax 4000 operation, the user may elect, at any time, to press this hardware key forcing the system to invoke the Stand- By mode. Doing this will turn the hot cathode ion gauges (IGM, IGR, IGE) and, if used, the CCM cold cathode ion gauge to the OFF condition.

  • Page 36: Scroll Rate

    Instruction Manual FlexRax 4000 will appear simultaneously on the Pressure Measurement Screen and the font size of the displayed pressures will decrease as you increase the number of pressures to be displayed on each scrolling screen. SAVE Press the key to select the desired number of pressures to be displayed. See section 5.4...

  • Page 37: Password

    Screen. Password The password may be used to protect the FlexRax 4000 setup and configuration and control access to the instrument. Most User applications will not require the use of the Password function available in the FlexRax operating system (software). Deliberate consideration must be given to programming and enabling the Password function.

  • Page 38: Disable Password

    Instruction Manual FlexRax 4000 Each available character that comprises the password is selected as you press the respective up or down arrow keys in each of the eight character spaces available. Move the cursor right  or left  to select which character you wish to edit.

  • Page 39: Operation - Connecting Options And Devices

    AI/O-R and two each IGM/CG Options. The RS232/RS485 serial communications option resides under option location. AC Power ┌ IGR/IGE ┐ ┌ IGR/IGE ┐ ┌AI/O-R┐ ┌ IGM/CG ┐ ┌ Entry Module ┐ └ ┘ Typical FlexRax 4000 Multi-Gauge Controller - Back Panel InstruTech, Inc. Page 39...

  • Page 40: Connecting The Igr Or Ige Options

    DEGAS used in various versions of the B-A ionization gauge transducer. Contact support@instrutechinc.com if you have any questions regarding the connections to be made to ionization gauge transducers that you wish to operate with the FlexRax 4000 IGE/IGR options. InstruTech, Inc. Page 40...
  • Page 41 Instruction Manual FlexRax 4000 For the glass IG, connect the IG cable (part numbers IRG-441-1… ) at the FlexRax 4000 controller as described in the previous page. After installing the glass IG transducer on your vacuum system, connect the transducer end of the IG cable as shown below.
  • Page 42 All other cables listed above are rated for 50 C ambient temperature. All IG cables provided by InstruTech can be used with either single or dual filament ion gauges and filament switching is controlled from the FlexRax controller. _________________________________________________________________________________________ When using the Bakeable IG Cable P/N IRNBD-441-1-…...

  • Page 43: Igr / Ige Option Cable Connector Pin Out

    The p When using InstruTech two-filament switch capable cables such as those for use with controllers capable of switching the filament from the control unit, e.g., the FlexRax 4000, there is an additional pin/socket connection at contact N 7 for FIL2. This type of cable and control unit will allow the user to switch filaments from the control unit –...

  • Page 44: Operation Of The Igr And Ige Options

    Instruction Manual FlexRax 4000 3.6.1.1.2 Operation of the IGR and IGE Options – BA600 series glass enclosed or nude B-A Ion gauges are powered and controlled by the FlexRax when the IGR or IGE option cards are installed. In the example configuration depicted in section 3.1.5...
  • Page 45 Instruction Manual FlexRax 4000 IGR/IGE Setup Screen To setup and operate the IGR and IGE shown in the screen above, become familiar with the topics presented in the remaining pages of this chapter then follow the sequence of key entries shown next; at the end of each sequence, a brief description of the function is given.
  • Page 46 Instruction Manual FlexRax 4000  - Default is 10 per Torr (10 Torr Sensitivity When using the resistive or I R degas nude IG (Series BA602, or equivalent) or glass enclosed IG (BA603, or equivalent) set sensitivity to 10 per Torr. Set sensitivity to 25 per Torr for the UHV EB Degas nude IG (Series BA601, or equivalent).
  • Page 47 Instruction Manual FlexRax 4000 IGR/IGE Setup Screen (more)  - Default factory setup parameters for the IGR/IGE selected are set when the front panel Set Defaults key associated with this key-indicator box is pressed.  - This function allows you to change the name of the IGR/IGE from the default Set Gauge Name notation, for example, IGR [5] to another name of your choosing.

  • Page 48: Connections To And Operation Of The Igm/Cg Option

    Connections to and Operation of the IGM/CG Option – The IGM/CG Option allows connections to either the InstruTech IGM400 or CCM500 Hornet and two Worker Bee convection gauge transducers. Refer to the User Manuals for the IGM400 and CCM500 Hornet modules for addition instructions and information related to the operation, setup and control of the IGM400 and CCM500.
  • Page 49 FlexRax to InstruTech CVG101 Worker Bee or MKS Instruments / Granville-Phillips® 275 Convectron® vacuum gauge sensor. For your reference, the wiring chart for the CVG101 cable provided by InstruTech is shown below. In addition to InstruTech provided standard cable assembly lengths, InstruTech will provide custom length cable assemblies upon request.

  • Page 50: Operation Of The Igm

    Instruction Manual FlexRax 4000 3.6.1.2.3 Operation of the IGM – Either the IGM400 or CCM500 Hornet is powered and controlled by the FlexRax when the IGM/CG option card is installed. In the example configuration depicted in section 3.1.5 above, there are two IGM/CG option cards installed in the FlexRax.

  • Page 51: Operation Of The Igm - Using The Igm400 Hot Cathode Ig Module

    Instruction Manual FlexRax 4000 Note – if the control cable for the IGM400/CCM500 Hornet is not connected, the displayed key for that IGM [n] will be shown in the display as ‘grayed-out’. The FlexRax operating system will ignore the key press associated with any key that is grayed-out.
  • Page 52 Instruction Manual FlexRax 4000  - Over Pressure shut OFF default for IGM400 is 5.00E-02 Torr with emission current (I Over Pressure Over Pressure set at 100 μA and 1.00E-03 Torr at 4 mA I allows you to set the pressure at which the IGM400 will turn OFF.
  • Page 53 Instruction Manual FlexRax 4000 CAUTION! In order that you prevent equipment damage and possible injury to personnel, you must have control safeguards to prevent the IG from accidentally turning on above the trip-point in the event the device assigned to control the IG fails or is turned off. DO NOT rely on an external device to turn the IGM ON/OFF without performing a thorough hazardous operation study of your control system design.

  • Page 54: Operation Of The Igm - Using The Ccm500 Cold Cathode Ig Module

    Instruction Manual FlexRax 4000 Pressing the key aligned with any of the key-designator boxes shown in the menu screens of the FlexRax will take you to a setup or control screen which you are now familiar with from preceding examples of operation.
  • Page 55 Instruction Manual FlexRax 4000 The following examples and user instructions in this section are for use of the CCM500 cold cathode ionization gauge module and assume that the option location ① card has been renamed to CCM [1] for operation of the CCM500 module.
  • Page 56 Instruction Manual FlexRax 4000 Once you have arrived at one of the CCM Setup Screens shown above, you may opt to select any of the available function/parameter keys to adjust or set the operation of the CCM500 module as desired.

  • Page 57: Operation Of The Cg

    Instruction Manual FlexRax 4000 the actual values provided on your CCM500 CCIG sensor mounting plate. The FlexRax operating system factory default values are set to 10. The values can be set from 1 to 99. Set Defaults This function programs all user settable values as discussed in this section to the factory default settings.

  • Page 58: Connection To Other Devices

    Instruction Manual FlexRax 4000 Note - Setting zero and atmosphere is normally required only once during the initial setup and maybe checked by the user periodically. After power has been applied to the gauge during the initial setup, allow five minutes for the gauge to stabilize (warm-up) before setting zero and atmosphere.

  • Page 59: Connecting The Com Option

    COM option. The COM option supports three serial communication protocols. 1. RS485 with address, start and stop characters and command/response syntax derived from the InstruTech IGM401 Hornet protocol. 2. RS232 with start and stop characters, but no addressing is used. The syntax is the same as the RS485 protocol.

  • Page 60: Setup Of The Flexrax Com Option

    Instruction Manual FlexRax 4000 RS485 COM PORT - CM4000 Option 9-pin (DE-9P) D-subminiature RS485 Connections DE-9P D-subminiature Connector (on CM4000 COM Option Card) Connector Pin Number Description DATA A (-) Pin 1 DATA B (+) No connection No connection No connection...

  • Page 61: Rs485 (Rs232) Interface - Device Name Conventions

    FlexRax CM4000 option sends a response to that command. This delay is dependent upon the command sent and the configuration of the FlexRax 4000. The minimum interval may be as short as 20 milliseconds with a mean delay time of 300 milliseconds. The maximum interval may be up to 1 second in duration.
  • Page 62 Instruction Manual FlexRax 4000 FlexRax Device Name (default) CM4000 (Serial Communication Name) IGM [1] – first IGM/CG option card CG [1,1] CG [1,2] IGM [2] – second IGM/CG option card CG [2,1] CG [2,2] AI [3] {assumes slot 1 and 2 are filled as shown above...

  • Page 63: Rs485/232 Serial Communication Command Protocol

    Instruction Manual FlexRax 4000 3.6.1.3.3 RS485/232 Serial Communication Command Protocol – notes after table, below, for legend/interpretation of syntax used and examples given in this table. COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ IGn Read the designated #xxRDIGn<CR> *xx_y.yyEzyy<CR> Pressure IG pressure in torr (e.g., #01RDIG1<CR>)
  • Page 64 Instruction Manual FlexRax 4000 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ one Read the current #xxRLn<CR> *xx_0_RL_OFF<CR> particular state of one of the (e.g., #01RL1<CR>) *xx_1_RL_ON_<CR> Relay state available process Response does not give name control relays (RLn) of device (Relay) queried.
  • Page 65 Instruction Manual FlexRax 4000 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ DEGAS Find out if DEGAS is #xxDGnS<CR> *xx_0_DG_OFF<CR> STATUS (ON or ON or OFF for the (e.g., #01DG1S<CR>) OFF) for designated IG designated IGn Use only the number *xx_1_DG_ON_<CR>...
  • Page 66 Instruction Manual FlexRax 4000 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE SET CGn ZERO Set the zero or #xxTZCGn_x.xxe-yy<CR> *xx_PROGM_OK<CR> vacuum calibration When measured pressure > point for CGn (e.g., #01TZCG1 0<CR>) 100mT: ?01_INVALID_<CR> When requested (SET) pressure > (e.g., #01TZCG1 1.00e- 100mT: ?01_INVALID_<CR>...

  • Page 67: G-P 307 Compatible (Rs232) Interface - Device Name Conventions

    Instruction Manual FlexRax 4000 3.6.1.3.4 G-P 307 Compatible (RS232) Interface - Device Name Conventions Please reference section 3.6.1.3.2 for information on Device Name Conventions. The information contained in that section is, also, pertinent to the naming convention used for defining the FlexRax device names and corresponding name for the Granville-Phillips Series 307 compatible RS232 serial communications interface.

  • Page 68: Rs232 (G-P Series 307 Compatible) Protocol

    Granville-Phillips (G-P) for the G-P Series 307 Vacuum Gauge Controller. The G-P RS232 communication protocol mode is not recommended by InstruTech, Inc. The interpretation of some of the Responses to Commands given in this mode is ambiguous and may lead to operational confusion. Full capability of the FlexRax installed options and devices cannot be utilized when using the GP232 communications mode.
  • Page 69 Instruction Manual FlexRax 4000 COMMAND BRIEF COMMAND SYNTAX RESPONSE DESCRIPTION IGR DEGAS ON Turn IGR Degas DG_ON<CR> <LF> OK<CR><LF> ON (first IG that (e.g., DG ON<CR><LF>) (e.g., OK<CR><LF>) is ON) When Degas is already ON: INVALID When Device does not exist: INVALID...

  • Page 70: Connections To And Operation Of The Ai/O-R Option

    Instruction Manual FlexRax 4000 3.6.1.4 Connections to and Operation of the AI/O-R Option – There are either two or three D-subminiature connectors located on the panel of the AI/O-R Option. The 9-pin connector (DE-9S) is used for the Analog Input / Output signals. The 15-pin connector (DE-15P) is used for the normally open (N.O.), normally closed (N.C.) and common (COM) connections for either the four (4 each) relays...
  • Page 71 Refer to the section of the User Manual pertaining to the types of analog outputs for the various pressure measurement devices available from SAVE InstruTech. Scroll to the choice of analog input device type you wish to use and press the key. SAVE...
  • Page 72 Instruction Manual FlexRax 4000 Connecting Capacitance Diaphragm Gauges – If you are connecting the Analog Input section of the AI/O-R Option to a Capacitance Diaphragm Gauge (CDG), you will need to connect an external (user supplied) power supply to the CDG Device. The following schematic...
  • Page 73 Instruction Manual FlexRax 4000 AI/O-R Option - Connector Pin Description 15-pin (DE-15P) D-subminiature Relay Contactor DE-15P D-Subminiature Connector Connections (on AI/O-R Option Card) Connector Pin Number Description Relay 1/5 – Common (COM) Relay 1/5 – Normally Open (N.O.) Relay 3/7 – Normally Closed Pin 1 (N.C.)

  • Page 74: Digital Input Control Of Ion Gauge On/Off State

    Instruction Manual FlexRax 4000 9-pin (DE-9S) D-subminiature Analog Input / Output DE-9S D-subminiature Connector Connections (on AI/O-R Option Card) Connector Socket Number Description Analog Output 1 Signal Analog Output Signal Return Analog Input Signal Pin 1 Analog Input Signal Return...
  • Page 75 Instruction Manual FlexRax 4000 screen will change to display the selected device. You want to ensure that the PLC digital control line will assert the ON state of the IG. By choosing the 100 mTorr CDG device as your proxy for receiving the output from your...

  • Page 76: Connecting The Analog Output

    Instruction Manual FlexRax 4000 3.6.1.4.3 Connecting the Analog Output – Several voltage signal types are available to be output from the FlexRax. The available choices, each choice shown at the top of the message dialog box, are dependent upon the type of device chosen to provide the analog output voltage.

  • Page 77: Analog Output - Log-Linear Ig 0-10V, N = 10

    Instruction Manual FlexRax 4000 3.6.1.4.4 Analog Output - Log-Linear IG 0-10V, n = 10 The analog output voltage types described below represent the pressure displayed for the selected IG option for nitrogen / air only. Refer to Section 4 if you are using a gas other than nitrogen/air.
  • Page 78 Instruction Manual FlexRax 4000 The following chart shows the graphical results of the table and formulas given above. Indicated pressure is plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.

  • Page 79: Analog Output - Log-Linear Ig 0-10V, N = 11

    Instruction Manual FlexRax 4000 3.6.1.4.5 Analog Output - Log-Linear IG 0-10V, n = 11 The analog output voltage types described below represent the pressure displayed for the selected IG option for nitrogen / air only. Refer to Section 4 if you are using a gas other than nitrogen/air.
  • Page 80 Instruction Manual FlexRax 4000 The following chart shows the graphical results of the table and formulas given above. Indicated pressure is plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.

  • Page 81: Analog Output - Log-Linear Ig 0-10V, N = 12

    Instruction Manual FlexRax 4000 3.6.1.4.6 Analog Output - Log-Linear IG 0-10V, n = 12 The analog output voltage types described below represent the pressure displayed for the selected IG option for nitrogen / air only. Refer to Section 4 if you are using a gas other than nitrogen/air.
  • Page 82 Instruction Manual FlexRax 4000 The following chart shows the graphical results of the table and formulas given above. Indicated pressure is plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.

  • Page 83: Analog Output - Log-Linear 1.8 To 8.7V, 0.8V/Decade

    Instruction Manual FlexRax 4000 3.6.1.4.7 Analog Output – Log-Linear 1.8 to 8.7V, 0.8V/decade The analog output voltage types described below represent the pressure displayed for the selected IG option for nitrogen / air only. Refer to Section 4 if you are using a gas other than nitrogen/air.
  • Page 84 Instruction Manual FlexRax 4000 The following chart shows the graphical results of the table and formulas given above. Indicated pressure is plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.

  • Page 85: Analog Output - Linear Ig

    3.6.1.4.8 Analog Output – Linear IG The FlexRax 4000 analog output may be setup to provide a signal voltage that has a direct linear relationship to the displayed pressure. When preparing to setup the analog output signal for Linear IG type output, first define the following parameters that you will program into the FlexRax: ...

  • Page 86: Analog Output - Wide Range Ig + Cg 0.5 - 7 V

    Instruction Manual FlexRax 4000 3.6.1.4.9 Analog Output - Wide Range IG + CG 0.5 - 7 V The analog output voltage type described below represents the pressure displayed for the selected IG+CG option for N / air only. Refer to...
  • Page 87 Instruction Manual FlexRax 4000 Analog output: Wide Range Log-linear 0.5 to 7 Vdc, 0.5 V per decade Table 5 - Log-Linear Analog Output Applies to Nitrogen/Air only A) The log-linear output signal and pressure are related by the Pressure (Torr)

  • Page 88: Analog Output - Convection Gauge (Cg)

    Instruction Manual FlexRax 4000 3.6.1.4.10 Analog Output - Convection Gauge (CG) – The analog output voltage type described below represent the pressure displayed for the selected CG option for N / Air only. Refer to Section 4 if you are using a gas other than N / Air.

  • Page 89: Log-Linear Cg 0-7 V

    Instruction Manual FlexRax 4000 3.6.1.4.10.2 Log-Linear CG 0-7 V – The Log-Linear CG 0-7V analog output voltage signal is defined as a voltage proportional to the displayed pressure that is linear with respect to the common logarithm of pressure. The relationship of pressure to (V –...

  • Page 90: Linear Cg

    Linear CG – The FlexRax 4000 analog output may be setup to provide a signal voltage that has a direct linear relationship to the displayed pressure. When preparing to setup the analog output signal for Linear CG type output, first define the following parameters that you will program into the FlexRax: ...

  • Page 91: Non-Linear Cg

    S-curve of 0.375 volts at pressure less than 1.00E-04 Torr to 5.659 volts at 1000 torr, nitrogen or air. Refer to the User Manuals for the InstruTech Super Bee and VGC301 Worker Bee controller for tables, charts and additional details on the use of the non-linear analog output signal. In general, one may use linear interpolation techniques to calculate the pressure using the non-linear analog output voltage measured at a specific pressure.
  • Page 92 Instruction Manual FlexRax 4000 You may also calculate the N /air pressure represented by the non-linear analog output voltage for the original “S-curve” using multi-segment, order polynomial function calculation. Contact support@instrutechinc.com for information related to the use of the n order polynomial equations for calculating nitrogen or air pressure using the non-linear analog output voltage signal.

  • Page 93: Effect Of Different Gas Types On Displayed Pressure

    FlexRax 4000 4 Effect of Different Gas Types on Displayed Pressure The FlexRax 4000 pressure display assumes that the pressure measurement device is reading nitrogen pressure. For both convection and ionization type vacuum gauges, corrections must be applied to both the display and analog outputs.

  • Page 94: Ion Gauge Display Correction Factors

    (N ) and the gas in use. The charts and tables on the following pages indicate how different gases affect the display and output from an InstruTech convection gauge.
  • Page 95 The X-axis is the pressure reading indicated by the convection gauge under test. The chart above shows readings for an InstruTech Convection Gauge (CVG) as well as for a Granville-Phillips® Convectron® gauge, to illustrate that the response of both these type of gauges is virtually the same.

  • Page 96: Convection Gauge Display Conversion For Select Gases

    Instruction Manual FlexRax 4000 4.2.1 Convection Gauge display conversion for select gases – When using gas species or mixtures of gas other than nitrogen or air, you must use a look-up table to determine the true pressure of the selected gas as measured by the convection gauge. This holds true for any manufacturer’s convection enhanced pirani type transducer where the principle of measurement is based on...
  • Page 97 Instruction Manual FlexRax 4000 The following table was carefully constructed by comparison of the Convection Gauge (CG) transducer Displayed Pressure to the displayed pressure of a gas-independent gauge such as the Capacitance Diaphragm Gauge (CDG) for several commonly used gas types:...

  • Page 98: Effect Of Different Gases On Analog Output

    Instruction Manual FlexRax 4000 Effect of different gases on Analog Output The following tables and explanation contains important information regarding the use of Ionization and Convection gauges on gases other than N / Air. For both types of gauges, corrections must be applied to the analog outputs.

  • Page 99: Ig + Cg Wide Range Analog Output Correction Factors

    Instruction Manual FlexRax 4000 4.3.2 IG + CG Wide Range Analog Output Correction Factors – When using the Wide Range IG + CG 0.5 – 7V Log-Linear output for gases other than N / Air, the analog output is interpreted differently over two different pressure ranges as discussed below: A) Pressure range from the x-ray limit of the Ion gauge to 1.0E-03 Torr - IG Range...

  • Page 100: Ig + Cg Analog Output Conversion - Cg Range

    Instruction Manual FlexRax 4000 4.3.2.2 IG + CG Analog Output Conversion - CG range When using the wide range IG + CG 0.5-7 V Log-Linear analog output for gases other than N / Air, use the following look-up table and information to convert the analog output to pressure when operating in the pressure range of 1.0E-03 Torr to 1,000 Torr.

  • Page 101: Convection Gauge Analog Output For Selected Gases

    Instruction Manual FlexRax 4000 4.3.3 Convection Gauge Analog Output for selected gases – If you have assigned any of the analog outputs to one or more Convection Gauges (CG), you must also apply corrections to the analog output. Use the following tables to determine pressure from voltage for gases other than nitrogen or air.

  • Page 102: Log-Linear Cg 0-7 V - Selected Gases Conversion

    Instruction Manual FlexRax 4000 4.3.3.2 Log-Linear CG 0-7 V - selected gases conversion When using the Log-Linear CG 0-7 V analog output, use the following look-up table and information to convert the analog output to pressure. The look-up table has been derived from the equation provided in section 3.6.1.4.10.2.

  • Page 103: Non-Linear Cg - Selected Gases Conversion

    Instruction Manual FlexRax 4000 4.3.3.3 Non-Linear CG - selected gases conversion When using the Non-Log-Linear CG analog output, use the following look-up table and information to convert the analog output to pressure. The look-up table has been derived from the equation provided in section 3.6.1.4.10.4.

  • Page 104: Troubleshooting

    Instruction Manual FlexRax 4000 5 Troubleshooting – Error Conditions Certain events can occur that will generate an error condition for either one of the option cards installed or one of the devices connected to the FlexRax. Some examples of these error conditions are presented below. If you are having trouble making one of the options or devices operate, the first step in troubleshooting the problem is to press the Messages key displayed in the Pressure Measurement Screen.

  • Page 105: Operating System Error

    “Could not capture the button press correctly”. Send this information to Support@instrutechinc.com for further action by InstruTech to remedy the conditions that cause these errors.  REMEDY: When you see an error box of the form depicted above, you will be required to cycle the AC Mains power to reset the FlexRax and resume operation.

  • Page 106: Unable To Access Setup Functions / Operate Ion Gauge Devices

    Instruction Manual FlexRax 4000 5.1.5 Unable to Access Setup Functions / Operate Ion Gauge Devices – In the event that you find you are either unable to gain access to certain setup functions or you cannot perform operation of the ion gauge devices, be certain that you have invoked the ‘Operate’ mode. In the main Pressure Measurement Screen you will see a key-designator box in the upper rightmost corner of the display.
  • Page 107 Instruction Manual FlexRax 4000 The FlexRax provides a hot-cathode ion gauge transducer diagnostic display screen that allows you to monitor the measurements of the critical electrical parameters used for measurement of very low pressures, i.e., high vacuum, made by the ionization gauge. The R&D display screen is shown below: EXAMPLE R&D Display of Critical Hot-Cathode Ion Gauge Measurement Parameters...
  • Page 108 Instruction Manual FlexRax 4000 good practice to make note of these values at initial installation and from time-to-time during the operating lifetime of the B-A IG. A new IGM Hornet may operate at 100 μA emission current with only 3 to 4 watts of power required (e.g., 1.5V @ 2.0A).
  • Page 109 Instruction Manual FlexRax 4000 R & D (Research) Ion Gauge Diagnostic Display Indication Possible Cause Possible Solution Pressure measurement is too low Sensor Contamination - Collector Determine source of contamination - (compared to known pressure for current is below the calculated Replace the Ion gauge sensor tube.

  • Page 110: Flexrax Exception Indications

    Instruction Manual FlexRax 4000 FlexRax Exception Indications An Exception happens when the FlexRax operating system issues a message to the “Messages” screen or the pressure indication is either out-of-range or indicating something other than expected pressure. Refer to the Pressure Measurement Screen Exceptions table below for possible indications you may see on the FlexRax Pressure Measurement Screen (listed under the Exception column).
  • Page 111 Instruction Manual FlexRax 4000 Pressure Measurement Screen Exceptions The Exceptions are the possible indications you may see in the displayed Pressure Measure Screen. Exception Cause Solution IGM, IGR or IGE indicates “OFF” (in An abnormal condition caused the Review ‘Messages’ screen to...
  • Page 112 Instruction Manual FlexRax 4000 Messages Screen Exceptions The Exceptions listed here are possible conditions that will generate a message in the Messages Screen. Exception Cause Solution CG [n,m] CG is not plugged into cable, cable Connect CG or cable – replace CG ‘Sensor Not Detected’...

  • Page 113: Ac Mains Fuse Replacement

    Instruction Manual FlexRax 4000 AC Mains Fuse Replacement In the unlikely event that your FlexRax AC Mains fuse(s) open due to an overload condition, you may replace one or both of the fuses located inside the power entry module on the back panel of the controller. Use care and gently open the fuse holder cover (a door that swings down as shown in the picture below) to gain access to the fuse holder.

  • Page 114: Displayed Device Name Characters Are Missing

    Instruction Manual FlexRax 4000 Displayed Device Name characters are missing As the number of displayed pressure readings is decreased, the size of the font used to display the device pressure measurement is increased. This will result in the possibility of some names/information being truncated in the display.

  • Page 115: Replacing Or Adding Option Cards In The Field

    Instruction Manual FlexRax 4000 6 Replacing or adding option cards in the field The type and number of gauges operated by the controller depends on user specified option cards installed at the factory. The user however can replace or add additional option cards in the field to expand the capabilities of the instrument.
  • Page 116 Instruction Manual FlexRax 4000 5. A typical configuration is shown below. Your 6. Remove four socket head cap screws marked with Instrument may not have all cards installed. red circles in order to add or replace a specific IC IR / IE card Locations and/or AI option card (Use a 3/32 in.

  • Page 117: Factory Service And Support

    +1-303-651-0551 or E-mail us at support@instrutechinc.com If it becomes necessary to return the controller to InstruTech for service or calibration, please call or E-mail us for a return authorization number. For the safety of our employees, you must download a material disclosure form from our website at www.instrutechinc.com Please use this form to provide a history of the gauge...
  • Page 118 Instruction Manual FlexRax 4000 have been contaminated, or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to the product including, but not limited to, accidents, transportation, neglect, misuse, use of the product for any purpose other than that for which it was designed.
  • Page 119 Instruction Manual FlexRax 4000 InstruTech, Inc. Page 119...
  • Page 120 InstruTech®, Inc. 1475 S. Fordham St Longmont, CO 80503 Phone: +1-303-651-0551 Fax: +1-303-678-1754 E-mail info@instrutechinc.com www.instrutechinc.com p/n 001020-106...

Table of Contents