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Instruction Manual
6 Display
6.1 Display - Torr / mTorr
Table below shows the displayed readings at various pressures for selected gases when engineering units
selected is in Torr/mTorr.
Displayed Pressure Readings vs. Pressure for selected gases- Engineering units in Torr / mTorr
Pressures shown in bold italic font in the shaded areas are in mTorr.
Pressures shown in normal font and in non-shaded areas are in Torr.
True Total
N
2
Pressure
0
mTorr
0.0
0.1
mTorr
0.1
0.2
mTorr
0.2
0.5
mTorr
0.5
1
mTorr
1.0
2
mTorr
2.0
5
mTorr
5.0
10
mTorr
10.0
20
mTorr
20.0
50
mTorr
50.0
100
mTorr
100
200
mTorr
200
500
mTorr
500
1
Torr
1.00
2
Torr
2.00
5
Torr
5.00
10
Torr
10.0
20
Torr
20.0
50
Torr
50.0
100
Torr
100
200
Torr
200
300
Torr
300
400
Torr
400
500
Torr
500
600
Torr
600
700
Torr
700
760
Torr
760
800
Torr
800
900
Torr
900
1000
Torr
1000
Notes:
1) OP = overpressure indication: display will read over pressure
2) Display auto-ranges between Torr and mTorr at 1 Torr
Examples
1)
Gas used is nitrogen (N
2)
Gas used is argon (Ar). Display shows pressure measurement of 600 mTorr. True pressure of argon is 1 Torr.
3)
Gas used is oxygen (O
InstruTech, Inc.
Ar
He
O
2
0.0
0.0
0.0
0.1
0.1
0.1
0.2
0.2
0.2
0.5
0.5
0.5
0.7
0.8
1.0
1.4
1.6
2.0
3.3
4.0
5.0
6.6
8.1
9.7
13.1
16.1
19.8
32.4
40.5
49.2
64.3
82.0
97.2
126
165
194
312
435
486
600
940
970
1.14
2.22
1.94
2.45
13.5
4.98
4.00
OP
10.3
5.80
OP
22.3
7.85
OP
77.6
8.83
OP
209
9.79
OP
295
11.3
OP
380
13.5
OP
485
16.1
OP
604
18.8
OP
730
21.8
OP
859
23.7
OP
941
25.1
OP
997
28.5
OP
OP
32.5
OP
OP
). Display shows pressure measurement of 10 Torr. True pressure of nitrogen is 10 Torr.
2
). Display shows pressure measurement of 486 mTorr. True pressure of oxygen is 500 mTorr.
2
CO
Kr
Freon12
2
0.0
0.0
0.0
0.1
0.1
0.1
0.2
0.2
0.2
0.5
0.3
0.5
1.1
0.4
1.5
2.3
1.0
3.1
4.4
2.3
7.6
11.0
4.8
14.7
22.2
9.5
29.9
54.9
23.5
72.5
107
46.8
143
210
91.1
275
489
217
611
950
400
1.05
1.71
700
1.62
3.34
1.28
2.45
4.97
1.78
2.96
6.59
2.29
3.32
8.22
2.57
3.79
9.25
2.74
4.68
12.3
3.32
5.99
16.9
3.59
6.89
22.4
3.94
7.63
28.7
4.21
8.28
36.4
4.44
8.86
46.1
4.65
9.42
53.9
4.75
9.76
59.4
4.84
9.95
79.5
4.99
10.5
111
5.08
11.1
VGC301A Controller
Freon22
D
Ne
2
0.0
0.0
0.0
0.1
0.1
0.1
0.2
0.2
0.2
0.5
0.5
0.5
1.5
1.3
0.7
3.1
2.4
1.5
7.0
6.0
3.5
13.5
12.1
7.1
27.2
24.3
14.1
69.0
60.0
34.8
136
121
70.0
262
250
141
594
687
359
1.04
1.55
745
1.66
4.13
1.59
2.62
246
5.24
3.39
OP
21.5
3.72
OP
584
4.14
OP
OP
4.91
OP
OP
6.42
OP
OP
7.52
OP
OP
8.42
OP
OP
9.21
OP
OP
9.95
OP
OP
10.7
OP
OP
11.1
OP
OP
11.4
OP
OP
12.0
OP
OP
12.7
OP
OP
CH
4
0.0
0.1
0.2
0.5
1.7
3.3
7.7
15.3
30.4
77.2
159
315
781
1.60
3.33
7.53
27.9
355
842
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
Page 19
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