Nonlin 6V; Non-Linear Analog Output Table - Torr - Instrutech VGC301 User Manual

Instruction Manual
7.6

NONLIN 6V; Non-Linear Analog Output Table - Torr

Non-Linear 0.375 to 5.659 V analog output for selected gases - Engineering units in Torr/mTorr
True Total
N
2
Pressure
0 mTorr 0.3751
0.1 mTorr 0.3759
0.2 mTorr 0.3768
0.5 mTorr 0.3795
1 mTorr 0.3840
2 mTorr 0.3927
5 mTorr 0.4174
10 mTorr 0.4555
20 mTorr 0.5226
50 mTorr 0.6819
100 mTorr 0.8780
200 mTorr 1.1552
500 mTorr 1.6833
1 Torr 2.2168
2 Torr 2.8418
5 Torr 3.6753
10 Torr 4.2056
20 Torr 4.5766
50 Torr 4.8464
100 Torr 4.9449
200 Torr 5.0190
300 Torr 5.1111
400 Torr 5.2236
500 Torr 5.3294
600 Torr 5.4194
700 Torr 5.4949
760 Torr 5.5340
800 Torr 5.5581
900 Torr 5.6141
1000 Torr 5.6593
Note: By design, these values are identical to the outputs from Brooks Automation, Inc. / Granville-Phillips®
Convectron® gauges, Mini-Convectron® modules and controllers so that equivalent units can be interchanged
without affecting your process system or software.
An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable.
InstruTech, Inc.
Ar He O
2
0.3750 0.3750 0.3750
0.3757 0.3755 0.3760
0.3760 0.3765 0.3770
0.3780 0.3790 0.3800
0.3810 0.3820 0.3840
0.3870 0.3890 0.3920
0.4030 0.4090 0.4170
0.4290 0.4410 0.4530
0.4770 0.4970 0.5210
0.5950 0.6370 0.6790
0.7450 0.8140 0.8680
0.9620 1.0680 1.1410
1.3860 1.5890 1.6640
1.8180 2.1640 2.1950
2.3330 2.9390 2.8140
3.0280 4.3870 3.6720
3.4800 5.7000 4.2250
3.8010 5.7000 4.6200
4.0370 5.7000 4.9160
4.1220 5.7000 5.0260
4.1920 5.7000 5.1060
4.2830 5.7000 5.2000
4.3860 5.7000 5.3150
4.4770 5.7000 5.4220
4.5500 5.7000 5.5150
4.6110 5.7000 5.5920
4.6430 5.7000 5.6330
4.6630 5.7000 5.6580
4.7060 5.7000 5.7130
4.7450 5.7000 5.7620
Values listed under each gas type are in volts.
CO Kr Freon12
2
0.3750 0.3750 0.3750
0.3760 0.3755 0.3760
0.3770 0.3768 0.3780
0.3810 0.3772 0.3820
0.3850 0.3790 0.3880
0.3950 0.3840 0.4010
0.4120 0.3950 0.4370
0.4620 0.4150 0.4880
0.5360 0.4510 0.5810
0.7050 0.5440 0.7780
0.9000 0.6680 1.0090
1.1790 0.8470 1.3150
1.6680 1.1940 1.8260
2.1720 1.5360 2.2570
2.6950 1.9210 2.6470
3.3160 2.4290 3.0290
3.6700 2.7340 3.2040
3.9030 2.9660 3.3080
4.0710 3.0750 3.4300
4.1540 3.1340 3.6180
4.3360 3.2690 3.8270
4.5020 3.3840 3.9380
4.6210 3.4660 4.0160
4.7080 3.5260 4.0760
4.7750 3.5730 4.1240
4.8300 3.6130 4.1660
4.8600 3.6320 4.1900
4.8770 3.6450 4.2030
4.9190 3.6740 4.2370
4.9550 3.6900 4.2700
VGC301 Controller
Freon22 D Ne
2
0.3750 0.3750 0.3750
0.3760 0.3760 0.3757
0.3780 0.3770 0.3763
0.3810 0.3810 0.3782
0.3880 0.3860 0.3810
0.4000 0.3960 0.3880
0.4320 0.4250 0.4050
0.4800 0.4700 0.4330
0.5660 0.5490 0.4840
0.7640 0.7270 0.6080
0.9900 0.9440 0.7680
1.2910 1.2650 1.0020
1.8050 1.9140 1.4690
2.2470 2.6030 1.9760
2.6660 3.5080 2.6310
3.0900 5.0590 3.7150
3.3300 5.7000 4.6050
3.4140 5.7000 5.4060
3.5090 5.7000 6.1590
3.6600 5.7000 6.4830
3.8830 5.7000 6.6610
4.0050 5.7000 6.7260
4.0880 5.7000 6.7670
4.1510 5.7000 6.8030
4.2030 5.7000 6.8430
4.2470 5.7000 6.8900
4.2710 5.7000 6.9200
4.2860 5.7000 6.9420
4.3210 5.7000 7.0000
4.3540 5.7000 7.0560
CH
4
0.3750
0.3766
0.3780
0.3825
0.3896
0.4030
0.4380
0.4920
0.5840
0.7960
1.0530
1.3920
2.0140
2.6320
3.3130
4.6990
5.1720
5.5830
5.7200
5.8600
6.1030
6.3420
6.5190
6.6420
Page 31