Siargo FS8000 User Manual

Siargo FS8000 User Manual

Mems mass flow sensors

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FS8000 User Manual
VC.0.1
MEMS mass flow sensors
Sold in North America by:
Servoflo Corporation
75 Allen Street
Lexington, MA 02472
www.servoflo.com/info@servoflo.com
781-862-9572
©2021 Siargo Ltd.

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Summary of Contents for Siargo FS8000

  • Page 1 FS8000 User Manual VC.0.1 MEMS mass flow sensors Sold in North America by: Servoflo Corporation 75 Allen Street Lexington, MA 02472 www.servoflo.com/info@servoflo.com 781-862-9572 ©2021 Siargo Ltd.
  • Page 2 Copyright 2021 and Liability Disclaimer Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this manual. For further information and updates, please visit www.Siargo.com.
  • Page 3 • Do not apply for any unknown or non-specified gases that may damage the product. www.Siargo.com FS800o User Manual...
  • Page 4: Table Of Contents

    8.2.2 Excessive humidity or condensation ................16 8.2.3 Metrology verification ....................17 9. Warranty and Liability ................18 10. Service contact and information ............... 20 Appendix I: Sensor evaluation kit ..............21 Appendix II: Document history ............... 22 www.Siargo.com FS800o User Manual...
  • Page 5: Overview

    1. Overview All contact information can be found at the end of this manual. This manual provides essential information for the FS8000 series of mass flow sensors. The products are designed for applications in automation, testing, leakage detection, instrumentation, and medical applications.
  • Page 6: Receipt / Unpack Of The Products

    SHR5-200 (FS8001 / FS8003P) SHR3-200 (FS8001N) Figure 2.1: FS8000 flow sensor and accessories Please check immediately for the integrity of the product and the power and data cable; if any abnormality is identified, please notify the distributor/sales representative or manufacturer as soon as you can.
  • Page 7: Knowing The Products

    Direction for flow measurement. Power and data connector. Threaded outlet, inlet at the opposite Installation hole Figure 3.1: FS8001 / FS8001N description Power and data connector. Flow direction Threaded inlet Threaded outlet Installation thread Figure 3.2: FS8003P description www.Siargo.com FS800o User Manual...
  • Page 8: Power And Data Pinout Description

    Analog output, 0.5~4.5 Vdc SDA, I C data Note: The connector on the sensor is an SM05B-SRSS-TB manufactured by JST; the cable match is SHR- 05V-S (no protrusions), also made by JST. The contact is either SH-003GA-P0.2 or SSH-003-P0.2H. www.Siargo.com FS800o User Manual...
  • Page 9: Mechanical Dimensions

    3.3 Mechanical dimensions Figure 3.3: FS8001 / FS8001N mechanical dimensions. Figure 3.4: FS8003P mechanical dimensions. www.Siargo.com FS800o User Manual...
  • Page 10: Installation

    Please make sure the electrical pins are properly engaged. It should be noted that the sensor is designed for medium to low pressure per the applications, therefore, the system design would be important for the flow stability and related flow noises. www.Siargo.com FS800o User Manual...
  • Page 11: I 2 C Digital Communication Descriptions

    Note: The I C address is set to Bit 7~Bit 1. E.g. if the I C address is 1 (0000 001x), the write address will be 0x02 (0000 0010) and the read address will be 0x03 (0000 0011). www.Siargo.com FS800o User Manual...
  • Page 12: I 2 C Interface Read/Write Sequences

    5.3 I C interface read/write sequences www.Siargo.com FS800o User Manual...
  • Page 13: Product Selection And Order Information

    For large quantities, please contact the sales office, distributors, or sales representatives. Siargo is making every effort to ensure the quality of the products. In case of questions and/or product supports, please contact the customer service listed at the end of the document.
  • Page 14: Product Performance

    Maximum flow change per second 2.5x of the full scale Storage temperature -20~70 °C Calibration Air @ 20°C, 101.325kPa Compliance RoHS IEC 61000-2;-4 Note: 1. Calibration with real gas is optional. Please contact the manufacturer for further information. www.Siargo.com FS800o User Manual...
  • Page 15: Analog 0Utput

    Figure 7.1: The typical analog output of the linearized models: FS8001 and FS8003P. Mass flow Typical analog output (sccm) (mV) 1000 2540 3460 4060 4600 5000 Figure 7.2: The typical analog output of the non-linearized model: FS8001N. www.Siargo.com FS800o User Manual...
  • Page 16: Technical Notes For The Product Performance

    This would result in a very unreliable data output. Please filter or other tools to prevent this situation to occur when using this product. www.Siargo.com FS800o User Manual...
  • Page 17: Metrology Verification

    If such cases are present, please contact the manufacturer for further solutions. For temperature and humidity measurement, because of the small package space, the response of the humidity could be slower than the specified. For additional information, please contact the manufacturer. www.Siargo.com FS800o User Manual...
  • Page 18: Warranty And Liability

    The products returned under warranty to Siargo shall be at the user or purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are deemed to have accepted this limitation of warranty and liability, which contains the complete and exclusive limited warranty of Siargo.
  • Page 19 (5) Any damages incurred by the incorrect usage of the products; (6) Siargo does not provide any warranty on finished goods manufactured by others. Only the original manufacturer's warranty applies;...
  • Page 20: Service Contact And Information

    10. Service contact and information Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions and or product supports, please contact customer service at the address listed below. We will respond to your request in a timely fashion and work with you toward your complete satisfaction.
  • Page 21: Appendix I: Sensor Evaluation Kit

    Appendix I: Sensor evaluation kit Siargo offers a sensor evaluation kit, including a digital data converter, USB data cable, and User Application software, that allows the user to evaluate the product performance on a Microsoft Windows-based computer. The user can read and visualize the flow rate of the product, obtain the totalized values, and save the data for further analysis.
  • Page 22: Appendix Ii: Document History

    Maximum pressure update. Formulated standalone manual. ➢ FS8001 Revision B.0 (November 2018): o Formulated standalone manual. ➢ FS8000 Revision A.11 (August 2018): C protocol descriptions; lifetime update. ➢ FS8000 Revision A.10 (March 2018): o Add maximum overflow rate and flow changes.

This manual is also suitable for:

Fs8001nFs8003p

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