Related Manuals for Siargo FS1015CL Series
Summary of Contents for Siargo FS1015CL Series
- Page 1 FS1015CL User Manual VB.2 MEMS mass flow sensors Sold in North America by: Servoflo Corporation 75 Allen Street Lexington, MA 02472 www.servoflo.com/info@servoflo.com 781-862-9572 ©2022 Siargo Ltd.
- Page 2 MEMS Mass Flow Sensors with thermal calorimetric sensing technology FS1015CL Series User Manual Document No. 03‐2022‐FS8 EN Issue date: 2022.03 Revision: VB.2 Siargo Ltd. 3100 De La Cruz Boulevard, Suite 210 Santa Clara, California 95054 USA Tel: +1(408)969.0368 Email: info@siargo.com © Copyright 2022 and Liability Disclaimer Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this manual. For further information and updates, please visit www.Siargo.com. ...
- Page 3 Only the trained or qualified personnel shall be allowed to perform product services. Use with caution ! Be cautious for electrical safety, and even it operates at a low voltage, any electrical shock might lead to some unexpected damages. The gas to be measured should be clean and free of particles, as even light particles may be accumulated inside the tiny pressure port that may result in inaccuracy in metrology, clogging, or other irrecoverable damage. Do not apply for any unknown or non‐specified gases that may damage the product. www.Siargo.com FS1015CL User Manual 3 ...
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Page 4: Table Of Contents
Pressure loss with ISO15 mm connector .............. 12 8. Technical notes for the product performance .......... 1 3 8.1 Measurement principles .................. 13 8.2 Precautions for the best performance of the product .......... 13 8.2.1 Altitude changes ...................... 13 8.2.2 Excessive humidity or condensation ................ 13 8.2.3 Metrology verification .................... 14 8.2.4 Cleaning and sterilization .................... 14 9. Warranty and Liability ................ 1 5 10. Service contact and information ............... 1 7 Appendix: Document history ................ 18 www.Siargo.com FS1015CL User Manual 4 ... -
Page 5: Overview
150 SLPM with a dynamic range of 100:1, and the maximum pressure rating of 2 bar (30 psi). The sensor can be sterilized via a medical cleanse agent that is compatible with the wetted materials of polycarbonate, silicon nitride, and medical‐grade epoxy LOCTITE 84‐3J. Some alcohol may react with polycarbonate and is not recommended for use. An alternative standard dry EtO sterilization process would be highly recommended. www.Siargo.com FS1015CL User Manual 5 ... -
Page 6: Receipt / Unpack Of The Products
Figure 2.1: FS1015CL Figure 2.2: Optional power and data Please check immediately for the integrity of the product and the power and data cable; if any abnormality is identified, please notify the distributor/sales representative or manufacturer as soon as you can. If any defects are confirmed, an exchange shall be arranged immediately via the original sales channel. This user manual shall also be included in the packing box or via an online link for an electronic version which should be sent by your sales agent. In most cases, this manual shall be made available to the customer before the actual order. Please note that one end of the data cable is to be plugged into the sensor and another end is colored wire terminals. Please read Sec. 3 carefully before connecting to the power and your data terminals. www.Siargo.com FS1015CL User Manual 6 ... -
Page 7: Knowing The Products
Table 3.1: FS1015CL pin assignment. PIN COLOR DEFINITION 1 Blue SDA, I C data 2 Green Analog output, 0.5~4.5 Vdc 3 Red VCC, power 8~24Vdc 4 Black GND, ground 5 Yellow SCL, I C clock Figure 3.2: FS1015CL pinout and cable Connector: AMPMODU MTE 5 position; cable length: 50 cm. Note: The product requires a power supply of 5±5% Vdc. This voltage is internally filtered and regulated. However, the analog output might be influenced if the supply voltage would have large deviations. It is advised that the power should be off when plugging in or out the cable to avoid any damages. www.Siargo.com FS1015CL User Manual 7 ... -
Page 8: Mechanical Dimensions
3.3 Mechanical dimensions Figure 3.3: FS1015CL mechanical dimensions with ISO15mm connectors. Figure 3.4: FS1015CL mechanical dimensions with ½” NPT connectors. Note: Other types of connectors could be possible upon request. www.Siargo.com FS1015CL User Manual 8 ... -
Page 9: Wetted Materials And Compatibility
One end of the cable can be directly plugged into the sensor socket while another end is the colored wire terminals which need to be connected correspondingly to the power supply and data receiving terminals. Make sure to refer to Sec 3.2 and double‐check the connection before power on. Before supplying the gas to the sensor, make sure to the mechanical leakage proof of the connections and all electrical precautions are applied. It should be noted that the sensor is designed for medium to low pressure per the applications, therefore, the system design would be important for the flow stability and related flow noises. It is advised that the products are best used for non‐explosive and non‐corrosive clean gases. The sensors cannot be used for gas metrology of fluoride or fluoride‐containing gases. The use of these gases may cause the product to malfunction or even severe damages. Don't expose the product's electronics other than the inner flow channel to any liquids, the unit does not have waterproof electronics. Don't flow gas in conditions that can cause condensing water vapor to be trapped inside the unit during operation as the accuracy could be significantly influenced. It is suggested to design your application so that the nominal flow rate is approximately 70% of the full‐scale flow rating of the sensor. Don't use a sensor with a flow range in extreme cases, for instance, don't use a 150 SLPM sensor for a 1.5 SLPM application. www.Siargo.com FS1015CL User Manual 9 ... -
Page 10: Product Selection And Order Information
please contact the manufacturer. Mechanical connector: ISO – ISO15mm; N – ½” MNPT Full scale flow rate: 100 or 150; default unit is SLPM. For other ranges, please contact the manufacturer. Note: For CO2, the maximum flow rate is 100 SLPM. 6.2 Order contact and customer support The sales offices and the sales distributors/representatives are listed at the end of this document. For small quantities, the order can be placed either through the Siargo website: www.siargo.com or the sales office. For large quantities, please contact the sales office, distributors, or sales representatives. Siargo is making every effort to ensure the quality of the products. In case of questions and/or product supports, please contact the customer service listed at the end of the document. www.Siargo.com FS1015CL User Manual 10 ... -
Page 11: Product Performance
Working current ~10 (no output load) mA Output Linear, I C Analog: 0.5 ~ 4.5 Vdc Analog output load Sourcing: 25; Sinking: 15 mA Maximum overflow 300 SLPM Maximum flow change 40 SLPM/sec Storage temperature ‐20 ~ 70 °C Weight 21.5 with ISO connector g Calibration Air @ 20 °C, 101.325 kPa Compliance RoHS; REACH CE IEC 61000‐4‐2;4;8 Note: 1. Calibration with real gas is optional. Please contact the manufacturer for further information. www.Siargo.com FS1015CL User Manual 11 ... -
Page 12: Analog Output
4.500 110 4.900 120 4.900 Figure 7.1. Typical analog output. 7.3 Pressure loss with ISO15 mm connector Flow rate Pressure loss (SLPM) (Pa) 0 0 20 55 40 170 60 250 80 400 100 600 120 840 150 1300 Figure 7.2. Typical pressure loss www.Siargo.com FS1015CL User Manual 12 ... -
Page 13: Technical Notes For The Product Performance
Therefore, the sensor is intrinsically insensitive to the altitude change‐induced errors. The specified altitude in Sec 7.1 has been fully tested. 8.2.2 Excessive humidity or condensation The humidity change will not alter the performance of the sensor. However, if excessive humidity is present resulting in condensation, the measurement port or channel could be blocked or altered. This would result in a very unreliable data output. Please filter or other tools to prevent this situation to occur when using this product. www.Siargo.com FS1015CL User Manual 13 ... -
Page 14: Metrology Verification
8.2.4 Cleaning and sterilization In case that the product is required to be sterilized, it is recommended with the standard dry EtO sterilization process. Alternatively, the product can be sterilized with medical‐grade cleanse liquid. For example, first, make sure the sensor is not powered on, and then prepare a clean medical liquid carried and immerse only the FLOW CHANNEL of the sensor into the sterilizing solution. Make sure the entire sensor body is within the solution but not the electronic cover for 30 min. Then rinse the sensor by immersing it in the DI water for 30 min. Repeat this process with clean DI water for another 30 min. Then, dry the sensor in an oven at 65 °C for 120 min, preferably with clean air or nitrogen. Avoid applying any alcohol that may interact with the polycarbonate as the reaction could damage the sensor. Be careful that this product does not have a liquid‐proof design. Avoid the liquid attack of the electronic compartment. www.Siargo.com FS1015CL User Manual 14 ... -
Page 15: Warranty And Liability
Siargo makes no warranty, representation, or guarantee and shall not assume any liability regarding the suitability of the products described in this manual for any purposes that are not specified in this manual. The users shall be held for full responsibility for validating the performance and suitability of the products for their particular design and applications. For any of the misusage of the products out of the scope described herein, the user shall indemnify and hold Siargo and its officers, employees, subsidiaries, affiliates, and sales channels harmless against all claims, costs, damages, and expense or reasonable attorney fee from direct or indirect sources. Siargo makes no other warranty, express or implied, and assumes no liability for any special or incidental damage or charges, including but not limited to any damages or charges due to installation, ... - Page 16 (2) Products that have been subject to chemical attacks, including exposure to corrosive substances or contaminants. In the case of battery usage, long term discharge or leakage induced damages; (3) Products that have been opened or dismantled for whatever reasons; (4) Products that have been subject to working conditions beyond the technical specification as described by this manual or related datasheet published by the manufacturer; (5) Any damages incurred by the incorrect usage of the products; (6) Siargo does not provide any warranty on finished goods manufactured by others. Only the original manufacturer's warranty applies; (7) Products that are re‐sold by unauthorized dealers or any third parties. ...
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Page 17: Service Contact And Information
10. Service contact and information Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions and or product supports, please contact customer service at the address listed below. We will respond to your request in a timely fashion and work with you toward your complete satisfaction. Customer service and all orders should be addressed to Siargo Ltd. 3100 De La Cruz Boulevard, Suite 210, Santa Clara, California 95054, USA Phone: +01(408)969‐0368 Email: info@Siargo.com For orders, please provide an accurate and full postal address. Siargo will not ship to P.O. Boxes or via a third party. Please contact info@siargo.com to obtain a Return Materials Authorization (RMA) before shipping the product back to the factory for returns or factory services such as calibration. Please specify as clear and detailed as possible in your email message the product's status that you intend to ship back to the factory. Be sure to write the RMA on the returned package or include a letter with the RMA information. For further information and updates, please visit www.Siargo.com. www.Siargo.com FS1015CL User Manual 17 ... -
Page 18: Appendix: Document History
Appendix: Document history Revision B.2 (March 2022) o Corrections. Revision B.1 (September 2021) o The new format, additions. Revision A.13 (October 2020): o Revised ISO 45001. Revision A.12 (December 2017): o Add mechanical dimensions for the product with NPT adapters. Revision A.11 (November 2017): o Update wetted materials information. Revision A.10 (September 2017): o Added maximum overflow and maximum flow change (Additional Specifications). o Added the revision history (Appendix). www.Siargo.com FS1015CL User Manual 18 ...
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