Contents
Contents
Machine documentation ...................................................................................................... 5
Symbols used...................................................................................................................... 6
1
Safety.................................................................................................................................. 8
1.1
1.1.1
Target group................................................................................................... 8
1.1.2
1.2
EC Conformity.......................................................................................................... 11
1.3
Intended use ............................................................................................................ 11
1.3.1
1.3.2
1.4
1.5
1.6
Residual risks........................................................................................................... 13
1.7
1.7.1
1.7.2
Monitoring obligation .................................................................................... 13
1.7.3
1.7.4
1.7.5
1.7.6
Avoiding hazards.......................................................................................... 14
1.7.7
1.7.8
Provide power supply................................................................................... 15
1.7.9
1.8
Danger zones........................................................................................................... 18
1.8.1
Chamber lid.................................................................................................. 20
1.8.2
Vacuum pump .............................................................................................. 20
1.8.3
Electrical system .......................................................................................... 20
1.9
Safety devices.......................................................................................................... 20
1.10 Machine label ........................................................................................................... 20
2
Description....................................................................................................................... 22
2.1
2.2
Optional equipment .................................................................................................. 22
2.2.1
Inert gas equipment ..................................................................................... 22
2
03.06.2014
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