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INTRODUCTION
Inline Deionized Water Heater (IDH)
Trebor's inline deionized water heater provides ultra-high purity and reliability.
The flow path is smooth, free of particle traps and constructed entirely of GE 214 quartz
and PFA, making it capable of the purest of applications. The design prevents metal ion
contamination if the external thin-film heating element should fail.
Trebor's patented sealing technology protects against liquid leaks and eliminates a
common failure associated with fragile quartz fluid connections breaking. In addition, there
are no O-rings to service or replace.
The IDH consists of multiple heating elements in a single housing. Each element can be
controlled individually or collectively.
Features
•
Quartz/PFA/PTFE liquid path
•
PFA weld-able fluid fittings
•
No metal contamination risk
•
No particle traps
•
Efficient heat transfer and small thermal
mass for fast response
•
SEMI S2 and CE compliant
Performance Summary
IDH
Voltage
Power
Max Current Draw
Maximum Pressure
Maximum Water Temperature 100 °C
Minimum Pressure
Minimum Flow Rate (series)
Minimum Flow Rate (parallel)
Environmental Temperature
Environmental Humidity
Max Altitude
MODEL INLINE DI HEATER OPERATION / MAINTENANCE MANUAL
Value
400V~
18kW
28A
0.55 MPa
0.10 MPa
2 LPM
6 LPM
5-40°C
Max 80%
2,000m
Shown with optional 3/8" Flare TC
fittings on outlet side.
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