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Alcatel Vacuum Technology Adixen ATH 1300 M User Manual

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ATH 1300/1600 M-MT
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Summary of Contents for Alcatel Vacuum Technology Adixen ATH 1300 M

  • Page 1 ATH 1300/1600 M-MT MAGLEV HYBRID TURBOMOLECULAR PUMPS User’s Manual...
  • Page 2 Alcatel Vacuum Technology, as part of the Alcatel Group, has been supplying vacuum pumps, leak detection systems, vacuum measurement and micro machining systems. Thanks to its complete range of products, the company has become an essential player in multiple applications : instrumentation, Research &...
  • Page 3 Smart and compact electronic controller - Reliability - : 105 677 ANUAL REFERENCE Maintenance free - Battery free - Easy integration. : 12 - J 2004 ANUARY DITION Alcatel Vacuum Technology France - User’s ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 4 Alcatel Vacuum Technology France. Specifications and information are subject to change without notice by from Alcatel Vacuum Technology France. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - 1600 M/MT...
  • Page 5 RS 232 or RS 485 serial link wiring ..B120 Detailed description of RS commands ..Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 6 CAUTION! instructions could result in significant damage to equipment and/or facilities. Warnings are used when failure to observe instructions could result in injury or death WARNING Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 7 Maintaining the pumps internal surface up to 75°C ATH 1600 MT to prevent the condensation effect. Temperature regulated by the ACT controller, or by the customer device. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 8 ATH 1300 MT: 200 W ATH 1600 MT: 135 W Large range of interface Dry contacts interface for status signals and optocoupled control inputs; Selectable Analog 0-10 V output. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 9 The molecular drag section provides a high compression ratio and extends forevacuum tolerance up to 1.5 mbar. Inlet Rotor Stator Dry back-up bearings Molecular drag Motor Exhaust Magnetic levitated bearings Gas purge Cooling Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 10 Electronics Bearing Position Stator detector Reference signal Signal Power Rotor processing amplifiers Electro- magnet Detector signal Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 11 When the rotation speed is lower than the minimum setpoint, the pump lands and shuts down on the back-up bearings. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 12 ATHM limit pressure is given by that of the primary pump used. INLET ATMOSPHERIC PRESSURE PRESSURE Chamber to be pumped Primary pumping Secondary pumping Primary vacuum Secondary vacuum Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 13 75°C, which is sufficient to prevent the condensation effect. This device is thermally controlled by the ACT controller, or by the customer’s external regulator. The MT version is delivered with its water valve. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 14 - a minimum speed of 15000 rpm and - a maximum speed of 34000 rpm for ATH 1300 M/MT and 39000 rpm for ATH 1600 M/MT. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 15 ENTER configuration keys FAULT Manual control keys START STOP STATUS STAND BY ACT 1300 M Pump status indicator lights Parameter and message LCD display (4 lines). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 16 Allow the fixation of a grounding cable to connect the controller at the ground and to connect the grounding cables of the accessories (water valve, air inlet valve cable). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 17 10 m 105174 15 m 105175 20 m A459362 An entire range of connection accessories is available in the Alcatel catalog (clamping ring, centering ring, etc.). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 18 20 m 110 V A328698F 20 m 230 V A328697F The thermostatic cable must be connected to a 4 A circuit breaker on the two phases. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 19 ADP / ADS ADP / ADS * Others types of housing are available (see catalog). ** The two maximum pressures cannot occur at the same time. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 20 Ambient operating temperature T ≤ 50 °C Controller dimensions 54.75 109.5 PREVIOUS ENTER FAULT START STOP STATUS STAND BY ACT 1300 M CG Centre de gravité Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 21 DN 160 ISO-K 245.2 321.6 342.1 321.1 352.7 DN 160 CF-F 22.4 257.6 334.0 354.5 333.5 365.1 ASA 6” 239.4 315.8 336.3 315.3 346.9 279.4 241.3 20.6 22.5 Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 22 199.4 285.8 306.3 311.8 317.4 DN 200 CF-F 225.9 312.3 332.8 325.3 343.9 253.2 231.9 7.5° ASA 6” 239.4 325.8 346.3 357.4 279.4 241.3 20.6 22.5° Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 23 In. 1/8 NPT female Out. 1/8 NPT female Air inlet valve dimensions 25.25 For 1/4" ext. diam. tube For 1/4" ext. diam. tube DN 16 ISO-KF 12.3 50.5 50.5 Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 25 A 70 Certificate of compliance SEMI S2-93 A Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 27 Only the authorized WARNING and trained technicians can perform intervention on the equipment. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 28 (refer to A 60 for the location of the center of gravity) for pump and controller. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 29 LEL, in addition an interlock should be provided to ensure that gas flow to the pump is stopped when nitrogen is lost. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 30 When a fault occurs, the cause must be corrected before the fault can be cleared. It is required to switch power off and on to clear the fault. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 31 It is strongly recommended to secure the maglev turbopump installation to prevent any safety WARNING hazard to the user in standard operating conditions. Refer to B30. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 33 To keep your product in the clean condition in which it left our factory, we recommend to unpack the pump only on its assembly site. Thermostatic cable Water valve Electrical cable Controller Turbomolecular pump Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 34 Controller storage The controller can be stored in its cardboard box CAUTION! at storage temperature between - 20°C and + 70°C. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 35 Installations specifications Chamber Equipment ATHM Frame Maglev pump connection Respect the item 1, 2 and 3 pump connection instructions. instructions Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 36 (item 1) Rotor Loads : Pump fixed to system : valve Bending moment (b) Pendulum plate Front view Axial load (a) Pump Torque (c) Top view Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 37 * Max. axial force occurs if the pump inlet is obstructed with high stiffness parts. There is no load if the system has low stiffness (i.e. valve). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 38 This rotation could damage the foreline and the purge gas line which would generate hazards for the user. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 39 No reducing adaptator or bellows should be installed between pump inlet flange and the chamber. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 40 B 30 Pump connections to an installation The pump can operate in any position Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 41 Position the filter (2) into the the insertable inlet flange inlet housing groove (1). Position the ring (3) and press it manually into the groove bottom all over its circumference. Inlet Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 42 If the controller stops the pump by opening the air inlet valve, the contact opens and closes the secondary isolation valve. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 43 Connect the valve to the primary pumping circuit. Primary isolation valve Customer relay Start Primary pump Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 45 1.5 bars absolute) (see B 50 for nitrogen characteristics). Connect the inert gas line with a rigid stainless stell or flexible pipe (ext. diam 1/4“). With purge device See B 50 . Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 46 ACT rear panel. instruction Air Inlet valve grounding cable See C 30 to configure the menus “Time to venting“ and “Venting time“ parameters. Air Inlet valve cable Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 47 * Different connection accessories can be found in the ALCATEL catalog. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 48 Long nipple 1/4 connector Connect the little flexible pipe between the long nipple and * 50 SCCM: standard furniture. 25 SCCM: upon request (accessory) the valve. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 49 We provide to monitor purge flow to warranty a perma- nent gas flushing for maglev back-up bearing protection. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 51 Water inlet Avoid to screw the connector on the valve inlet CAUTION port using a 13 mm flat wrench, to maintain it (water leak risk). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 52 The grounding wire of the water valve cable has to be fixed to the grounding fixation on the ACT rear panel. instruction (see B 70 - 1/3). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 53 Connect the thermostatic cable to the power line (main with ground connection). Connect to the heating band on the pump Ex: model ATH 2300 MT Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 54 75° C. Contact may cause burn. Do not WARNING touch or wear protective gloves before servicing. * External power supply in accordance with the heater band voltage. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 55 An internal input contact can be used to signal a CAUTION! roughing pump power failure (see B 91). This will stop the turbomolecular pump avoiding overpres- sure risk in the pump. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 56 Delayed fuses (x2) located below (Main with ground connection). the controller: 16A - T - 250V Connect the controller to the pump using the (see F 10). cable ordered. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 57 (feel the « click »). If it is difficult to press and rotate, remove the connector and check the pins on the pump connector (bent pins). Try again. Press Rotate Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 58 : that may cause electrical damage to the controller. Locate the male and female index screws on the connector. Male screw Female screw Female screw Male screw Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 59 Surface in contact Caution: If the two surfaces aren’t in contact, it means that the connector is not in well ins- talled, an electrical damage can occur. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 60 Index Seal Identify the main index on the female HARTING connector. Plug the female connector in accordance to the main index, and lock the connector. Lock Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 61 Legend Minimum electrical connection Thermostatic cable for ATH MT Customer supplies recommended by Alcatel Pump cable includes temperature sensor information Wiring diagram in case of temperature regulation with the controller Alcatel Vacuum Technology France - User’s Manual ATH 2300 M/MT...
  • Page 63 Depending on temperature parameter Water Depending on temperature parameter valve (1) This function is valid at 10000 rpm + setted delay when Stop or Ext. fault commands are activated. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 65 Mode input control Wiring supplied fig 2 Stand-by Start by customer Inhibit Ex. fault Stop It is necessary to read the following table for more information. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 66 Connect the (-) terminals to the dry contact and to the ground. If the equipment has only one output to stop and start the pump it is possible to order “start” and “stop” in same time. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 67 * This threshold can be set between - 3% and - 50%. It can be accessed on the front panel using the “SET UP“ and “RELAY SPEED“ menu. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 69 15000 Voltage (V) Factory configuration is setted on speed. *ATH 1600 39000 rpm (6.5 V) *ATH 1300 34000 rpm (5.66 V) *ATH 2300 31000 rpm (5.16 V) Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - 1600 M/MT...
  • Page 71 DB 9 contacts, male connector. Connection examples: RS232 type serial link PREVIOUS ENTER FAULT START STOP STATUS STAND BY with a single controller ACT 1300 M Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 72 DB 15 contacts, male connector. Multiple RS485 serial link: several units (up to 999) can be controlled on a single link. RS 485 communication box End of the line wiring Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 73 Note : it is important to note down the number allocated to each device. List the faults Syntax #adrDEF<CR> List the faults separated by the separator character. Result #adr,OK if there is no fault. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 74 (max 3599 s, that is 59 mn 59s) speed threshold for relay (3 to 50%) control temperature (30 to 75°C) lll: bearing threshold (0 to 100%) mmm: bearing current value (0 to 100%) Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 75 = 1 : on Result #adr,OK The choice of the temperature unit affects the results of the DLR and STA strings and the display (if cabinet fitted). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 76 #adr,a,u,1,b,r a: Returns choice parameters on the analog output a=0: real pump speed a=1: pump current a=2: temperature of pump body a=3: temperature of internal electronics Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 77 DLR STA and LEV commands. Default value: comma «,» ascii code = 044 If ok, the selected value is automatically stored in user memory. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 78 #adrSTA<CR> or STA<CR> Result #adr,sss, rrrrr, vvv, www, xxx, yyy, zzz, aa, bbbbb, ccc, ddd, ggggggggggggggggggggggggg<CR> adr: address order status LOCAL STOP (free) STDBY START fault Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 79 D23: pump temp. D25: temp. sensor 1 D26: no connect W28: eeprom write D30: eeprom check D29: input power D31: coding D32: no connected D33: temp. sensor 2 Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 80 Defines the operating state of the turbomolecular pump Syntax #adrTMPON<CR>[<LF>] start pump rotation #adrTMPOFF<CR>[<LF>] stop pump Result #adr,OK or #adr,Err3 if the pump is already in the state requested (context error) Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 81 • an isolation valve between the chamber to be pumped and the ATH pump; • an isolation valve between the ATH pump and the backing pump. In case of maintenance, refer to chapter D10. CAUTION! Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 83 “ and green light is ON. WAITING HEAT • pump at speed and at temperature (minus 3°C): “ “, and the green light is ON. OK FOR PROCESS Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 84 D IS P L AY S E T U P Display and/or select Access the parameter the parameters to be programming monitored (see C 30). (see C 30). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 85 Modify the bearing counter in case of BEARINGS 0 to 100% pump/controller/bearing replacement Pump running time PUMP TIME 0 to 65500 H Modify the access code NEW CODING 0 to 65535 Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 86 Number of controller in a ADDRESS multiple link ... . 0 to 255 Return to Set start delay Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 87 0 to 255 sequence in the case of the multiple link ... . Return to Set start delay Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 89 (see C 30). Stop the pump by The rotation speed monitoring indicator light goes off. pressing The pump motor is no longer powered, the pump STOP decelerates. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 90 W A R N I N G B E A R I N G B E A R I N G the alert threshold (%). ENTER The bearing life time % restant Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 91 Select the stand-by mode The pump reaches the standby speed programmed (see C 30). STAND The standby mode can be selected when pump is stopped or in rotation. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 92 XX H reached before the pump reaches 0 rpm, ....BRAKING....the controller displays: Close the valve V2 The level of vacuum in the chamber is maintained. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 93 Note: If the power is restored before this minimum speed (9000 rpm) is reached, the pump resumes its initial speed without any disturbance. The landing’s time counter doesn’t decrease. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 94 The controller screen XX H ACT XXXXX V3.XX displays “REM“. ATH XXXXXX READY TO START! The START/STOP/STANDBY commands are the same as those for the local mode. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 95 - in local mode: push the START key; - in remote control mode: open «START» contact then, close it (see B 91). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 97 “INH” mode valid The controller screen displays XX H “KEY“ or “REM“....STARTING....The controller power the motor and restore the previous memorized operating status. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 99 During exhaust maintenance, operator could be in contact with residues from the exhaust port or with contaminated oil which could cause severe injury or death. Always wear gloves, protective glasses and a breathing mask. WARNING Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 100 The internal memory of the controller informs the operator when the bearings require maintenance by displaying: D 2 4 : B E A R . C H A N G E D Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 101 If the speed is not zero, wait for not able to control the pump to stop and start the pump operating sequency. again. If the message continues, contact the Customer Service. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600/M/MT...
  • Page 102 Reduce the working pressure OVERHEAT the temperature or the flowrate; drops back below Check that the ventilation of the authorized limit. the controller is operating (air admissions not blocked). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600/M/MT...
  • Page 103 The controller stops Check the main power supply POWER main supply. the motor; it restarts if voltage; OVERCURRENT I ≥ 15A the defect disappears. Contact the Customer Service. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600/M/MT...
  • Page 104 Check that the cable is NO CONNECT pump and controller correctly locked to the pump and (connection cable). the controller; If the fault appears again, call the Customer Service. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600/M/MT...
  • Page 105 ATH 1600 M and ACT 1300 M. Pump stopped, switch off the Motor information failure. controller and start again; D 04 - D 05 Contact the Customer Service Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600/M/MT...
  • Page 106 Check that there are no vibrations on the pump frame; Check that the attachment are correctly fastened (Problem can be caused by an anti-vibration flagstone); Contact the Customer Service. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600/M/MT...
  • Page 107 Take care that the pump is not protected now. Start the pump. If the pump reaches its speed, stop it quickly and exchange the valve. If not, contact the Customer Service. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600/M/MT...
  • Page 108 Contact the Customer Service. Check that the water valve “… waiting HEAT…“ output is supplied with 12 VDC after 1 h 30 and the water valve is not opened. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600/M/MT...
  • Page 109 16 seal. P/N 068193 - Fitting 1/4 VCR female - DN 40 clamping ring. P/N 108500 P/N 083333 * Standard connection accessories available in Alcatel catalog. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 110 Sweep with dry nitrogen** for 10 minutes. Stop the nitrogen flow. * Standard connection accessories available in Alcatel catalog. ** Characteristics of dry nitrogen: see B 50. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 111 Pressurize the pump Blank the inlet port. Pressurize the pump with dry nitrogen** to an absolute pressure of 1.1 bar using the injector. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 113 “imitations”, or the misappropriation and pirating of intellectual property. AVTF supplies maintenance components, spare parts or kits to perform the maintenance of its products (see chapter F). Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 115 Electrovalve coil 12 V DC 038127 Equipped electrovalve DN 16 106866 Water valve Description Part Num. Coil 12 V DC 106077 Electrovalve 12 V DC 106054 Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 117 Inlet pressure (Pa) 1500 1400 ATH 1300 M, DN 200 1300 ATH 1600 M, DN 200 1200 1100 1000 Upper limits for continuous operation Inlet pressure (mbar) Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 118 Inlet pressure (Pa) 10000 Gas : N 1000 Upper limits for continuous operation ATH 1300 M, DN 200 ATH 1600 M, DN 200 Inlet pressure (mbar) Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 119 (or substances) that may possibly be formed inside the pump (due to a thermodynamic or chemical reaction, condensation, deposition, precipitation, etc.) (C) Precautions need to be taken before transferring contaminated pumps. Please contact customer service for recommendations. Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 120 Stamp / Seal Stamp / Seal ALCATEL Vacuum Technology France – 98, avenue de Brogny – B.P. 2069 – 74009 ANNECY CEDEX Tél. (33) 4 50 65 77 85 – Fax (33) 4 50 67 23 34 Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...
  • Page 121 G 100 Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT...

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