Summary of Contents for Alcatel Vacuum Technology Adixen ATP Series
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ATP SERIES POMPES TURBOMOLECULAIRES TURBOMOLECULAR PUMPS Manuel utilisateur User’s manual...
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Alcatel Vacuum Technology, as part of the Alcatel-Lucent Group, been supplying vacuum pumps, helium and hydrogen leak detection systems, plasma sensors, vacuum measurement for several years. Thanks to its complete range of products, the company has become an essential player in multiple applications : instrumentation, Research &...
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ARIOUS SEMICONDUCTOR PROCESSES DVANTAGES The reliable and sturdy design of ATP pumps ensures perfor- mance suited to the fields of application concerned. : 102 710 ANUAL REFERENCE : 11 - April 2007 DITION Alcatel Vacuum Technology France - ATP User’s Manual...
Board and Brick....A 100 Integrable controller technical characteristics type OEM Board ....A 110 Alcatel Vacuum Technology France - ATP User’s Manual...
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Board and Brick ....Functions of integrable controller type OEM Board ....B 140 Alcatel Vacuum Technology France- ATP User’s Manual...
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Maintenance frequency ....D 30 ATP 900 Maintenance frequency ..D 40 Alcatel Vacuum Technology France - ATP User’s Manual...
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Pumping curves....G 10 * These chapters are included into the ball bearing replacement manual delivered with the specific tool. Alcatel Vacuum Technology France- ATP User’s Manual...
- Membran keyboard; - RS 232/485 serial links; - Monitoring of testing and - Operation at all voltages troubleshooting parameters; between 85 and 264 V, - Dry contact interface for 50/60 Hz. status signals; Alcatel Vacuum Technology France - ATP User’s Manual...
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3.5 m / 5 m 3.5 m / 5 m 10 m 10 m / 20 m 10 m / 15 m / 20 m Electronic boards to be inserted in a rack Alcatel Vacuum Technology France - ATP User’s Manual...
Since the ATP compression rate is set by the design, the ATP limit pressure is given by that of the primary pump used. INLET ATMOSPHERIC PRESSURE PRESSURE Chamber to be pumped Primary pumping Secondary pumping Primary vacuum Secondary vacuum Alcatel Vacuum Technology France - ATP User’s Manual...
When used with a gas purge for high flow rate applications, the dynamic seal can, on its own, provide excellent protection for ultravacuum applications. Inlet Exhaust Purge Alcatel Vacuum Technology France - ATP User’s Manual...
- a long bearing service life in the presence of corrosive gases. The pumps can be heated by the water circuit to prevent condensation of the process gases (water circuit temperature ≤ 65°C). Inlet Water circuit Exhaust Purge Alcatel Vacuum Technology France - ATP User’s Manual...
The RS232 serial link is used to control and monitor the pump using a computer. RS 485 serial link The RS485 serial link allows many pump installation in a network. The wiring characteristics are given on B 110. Alcatel Vacuum Technology France - ATP User’s Manual...
A 40 ACT controllers control modes The ACT 600 T and ACT 1000 T controllers are 1/2 rack units PREVIOUS ENTER FAULT START STOP STATUS STAND BY ACT 600 T Alcatel Vacuum Technology France - ATP User’s Manual...
Powered by the mains and controlled by the ACT 240V 50/60Hz 063177 063478 220V 50/60Hz 056994 063191 200V 50/60Hz 063176 063480 115V 50/60Hz 063089 063099 100V 50/60Hz 063175 063479 * ATP 900 only Alcatel Vacuum Technology France - ATP User’s Manual...
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ACT 1000 T 105185 105086 105086 1.5 m A458759 A458885 A458885 3.5 m 101956 101812 101812 101957 101810 101810 10 m 101958 101811 101811 15 m 105303 20 m A458477 A458478 A458478 Alcatel Vacuum Technology France - ATP User’s Manual...
Part Number Controller ACT 200 T ACT 600 T Board 101933 102018 Brick 103517 103997 Connect the integrable controllers to the pump by ordering separately the connection cable (see A 50 page 2). Alcatel Vacuum Technology France - ATP User’s Manual...
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Some accessoiries can be connected to the OEM Board to extand some functions. OEM Board accessories Time meter 5 V 062761 Time meter 10 V 062320 Outside light kit 062939 Interface kit 062969 Alcatel Vacuum Technology France - ATP User’s Manual...
Pascal 2005 Pascal 2005 Pascal 2005 Pascal 2015 Pascal 2021 * For a water-cooled pump with CF-F flange and exhaust pressure < 1.10 mbar. ** The two maximum pressures cannot occur at the same time Alcatel Vacuum Technology France - ATP User’s Manual...
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2005 C2 2021 C2 2033 C2 2063 C2 * For a water-cooled pump with CF-F flange and exhaust pressure < 1.10 mbar. ** The two maximum pressures cannot occur at the same time Alcatel Vacuum Technology France - ATP User’s Manual...
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Recommended primary pump 2063 C2 or ADP81 Exhaust flange ISO-KF DN 40 Purge flange ISO-KF DN 16 Max N flux with 2063CP+ SCCM * The two maximum pressures cannot occur at the same time Alcatel Vacuum Technology France - ATP User’s Manual...
Customer mains circuit breaker rating 10 A Dimensions ACT 200T 91.4 PREVIOUS FAULT START ENTER STAND BY STOP ACT 200T Ø 3 ACT 600T 198.1 PREVIOUS ENTER FAULT START STOP STATUS STAND BY Ø3 ACT 600T Alcatel Vacuum Technology France - ATP User’s Manual...
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Customer mains circuit breaker rating 16 A Dimensions ACT 1000T 109.5 54.75 PREVIOUS PREVIOUS ENTER ENTER FAULT FAULT START START STOP STOP STATUS STATUS STAND BY STAND BY ACT 1000 T ACT 1000 T Alcatel Vacuum Technology France - ATP User’s Manual...
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Entrée secteur Mains Pump Liaison pompe link 40.64 Power supplying of Nominal voltage: 115/230 V - 48/63 Hz ACT 200 T Brick Maximum current: 5.8 A / 3 A Maximum power: 100 W Alcatel Vacuum Technology France - ATP User’s Manual...
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+ 72 V / 1.4 A ± 1 V + 15 V / 0.25 A ± 100 mV + 5 V / 0.4 + 50 mV / - 100 mV Functions of these integrable controllers (see B 130). Alcatel Vacuum Technology France - ATP User’s Manual...
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Fusibles T250/6.3A (5x20) T250V/6.3A (5x20) ON/OFF Marche/Arrêt Power supplying of Nominal voltage: 115/230 V - 48/63 Hz ACT 600 T Brick Maximum current: 5.8 A / 3 A Maximum power: 300 W Alcatel Vacuum Technology France - ATP User’s Manual...
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+ 72 V / 4 A ± 1 V + 15 V / 0.25 A ± 100 mV + 5 V / 0.4 A + 50 mV / - 100 mV Functions of these integrable controllers (see B 130). Alcatel Vacuum Technology France - ATP User’s Manual...
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Secure the power line with an external time-delay fuse depending on the power supply: 1 A for 100 / 115 V 0.5 A for 200 / 220 / 240 V Functions of these integrable controllers (see B 140). Alcatel Vacuum Technology France - ATP User’s Manual...
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Board and Brick ....B 130 Functions of integrable controller B 140 type OEM Board ..... Alcatel Vacuum Technology France- ATP User’s Manual...
EMC (electromagnetic compatibility) performance and the safety of the product. ALCATEL declines any responsibility for such operations. Alcatel Vacuum Technology France - ATP User’s Manual...
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(single-phase motors, equipment with mains filter, frequency converter, monitoring unit, etc.). • When handling the equipment, use the devices provided for this purpose (hoisting rings, handle, etc.). Alcatel Vacuum Technology France - ATP User’s Manual...
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• The leaktightness of the products is guaranteed when they leave the factory for normal operating conditions. It is the user's responsibility to maintain the level of leaktightness particularly when pumping dangerous gases. Alcatel Vacuum Technology France - ATP User’s Manual...
For this, use the rotary flange attachment holes. If the intake flange is attached with grips, use: - at least 3 grips for secondary pump ≤ 150 l/s; - at least 6 grips for secondary pump > 150 l/s. Alcatel Vacuum Technology France - ATP User’s Manual...
- Dust < 1µm guarantees a flow rate of - Oil < 0.1ppm 50 SCCM. - Absolute pressure of 1 to 1.3 bar. * Different connection accessories can be found in the ALCATEL catalog. Alcatel Vacuum Technology France - ATP User’s Manual...
(int. diam. 4 mm - ext. diam. 6 mm) (supplied by customer). The water flow rate is 0.2 to 1 l/min for water at 15°C at an ambient temperature of 25°C. Alcatel Vacuum Technology France - ATP User’s Manual...
250 V Connect the controller to the Connect pump the controller to using the mains using the cable the cable supplied. Connect the fan ordered. (Mains with earth (ATP air cooled) connection) Alcatel Vacuum Technology France - ATP User’s Manual...
Start/Stop 50 mA nominal or reduced speed (depending on set 37 - 38 parameters). The opening of an external wired Sub D 44 Pts contact allows pump stopping. ACT female con. Alcatel Vacuum Technology France - ATP User’s Manual...
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(speed, temperature, etc.) This data can be used to plot curves. 44 - 43 Used to monitor the selected parameter in the “Set Analog output“ menu (see B 70). Alcatel Vacuum Technology France - ATP User’s Manual...
Access the PREVIOUS the various menus parameter programming. DISPLAY SETUP RUNNING IN Select a running-in Display the monitored parameters. cycle; List the faults and the Start the cycle. alerts. Alcatel Vacuum Technology France - ATP User’s Manual...
M=2 (1000 to 45000 h) (3 times the maintenance time) (see E 80) Ball bearings life time counter 0 to 50000 hours TIME BEARING Modify the access code 0 to 65535 NEW CODING Alcatel Vacuum Technology France - ATP User’s Manual...
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0 to 255 Number of controller in a ADDRESS multiple link ... . 0 to 255 Return to Temperature menu folio 2 Alcatel Vacuum Technology France - ATP User’s Manual...
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Number of controller in a 0 to 255 sequence in the case of the multiple link ... . Return to Temperature menu folio 2 Alcatel Vacuum Technology France - ATP User’s Manual...
REMOTE CONTROL Connect the terminal block venting valve Connect (see B 90). accessory the controller to the mains (see B 90) using the cable supplied. (Mains with earth connection) Alcatel Vacuum Technology France - ATP User’s Manual...
When the contact is closed, the reduced speed STANDBY mode rotation mode is selected. 7 - 8 0 -10 V analog output: Analog output Used to monitor the selected parameter (see ANALOG OUT menus). 9 - 10 Alcatel Vacuum Technology France - ATP User’s Manual...
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The contact is open if a fault appears and the motor is stopped. The contact is closed when the "START" control is Start 19 - 20 activated. The contact can used to control a primary shut-off valve. Alcatel Vacuum Technology France - ATP User’s Manual...
Enter the sub-menus by pressing for the application using Access PREVIOUS the various menus. the parameter programming (see folio 2). DISPLAY PARAMETERS Display and/or select the parameters to be monitored (see folio 4). Alcatel Vacuum Technology France - ATP User’s Manual...
Modify the air inlet valve 0 to 59mn 59S OPEN opening time Change to storage mode STOCK ON / OFF (the timer is blocked). * At power-up, the storage mode disappears automatically. Alcatel Vacuum Technology France - ATP User’s Manual...
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1 to127 character (comma) Authorizes transmission at pre-set DATA LOG START ON or OFF ENTER intervals on the serial link DELAY 0 to 240mn 59 s Return to AN.OUT menu folio 2 PREVIOUS Alcatel Vacuum Technology France - ATP User’s Manual...
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The motor current consumption CURRENT Θ1 PUMP The temperature of the pump (°C) TEMP Θ CONV of the controller (°C) of the bearings (hours) The operating time SERVICE BEARINGS of the controller (hours) CONTROLLER Alcatel Vacuum Technology France - ATP User’s Manual...
RS485 serial link connection: Connect terminals 7 and 8 when the controller is at the end of the line. See B 120 for the command and message reception syntax. Alcatel Vacuum Technology France - ATP User’s Manual...
This command is used to brake the motor electrically, which is particulary effective at high speed. It is currently only available for the variable drive unit of the ACT 200T Board or ACT 200T cabinet. 1/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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At the end of the program, the pump maintenance parameters are updated and the «maintenance requested» alert can be cleared. Program 2 is used after regreasing (ATP series only), or after prolonged storage (ATH 20/40 only). 2/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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RS link, at the rate defined by the DLI command. See also: DLI, LNG, SEP, SHT Note: any new characters arriving on the serial port (RS 232) will cancel the automatic DataLogger transmission. 3/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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#adr, VS..- Vx.zz for Alcatel pump type» Returns the type of Variable drive Supervisor, the software version (x), the software edition (zz), and the type of pump for which this variable drive is set up. 4/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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Allows the parameters returned by the DLR, LEV and SPD commands to be identified with sub-strings. Also generates the «CIT>» prompt each time a <CR> character is See also: SHT received. 5/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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= 1 : with Result #adr,ok See also: SEL Comment: The choice of the temperature unit affects the results of the DLR and STA strings and the display (if cabinet fitted). 6/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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Resets the stand-by speed to its last stored value, and allows it to be modified if an «RPM» command is sent. See also: NSP, RPM This configuration is automatically stored in user memory. 7/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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Allows the user to select the character which separates the parameters returned by the DLR, STA and LEV commands. Default value: comma «,» ascii code = 044 If ok, the selected value is automatically stored in user memory. 8/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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The strings sent following DLR, LEV and SPD commands will now be sent without the parameter identification See also: LNG sub-strings (e.g; without the units). Returns the current speed Syntax #adrSPD<CR>[<LF>] Result #adr,nnnnn See also: LNG, SHT #adr,nnnnn rpm 9/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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Defines the operating state of the turbomolecular pump Syntax #adrTMPON<CR>[<LF>] start pump rotation #adrTMPOFF<CR>[<LF>] stop pump Result #adr,ok or #adr,Err3 if the pump is already in the state requested (context error) 10/10 Alcatel Vacuum Technology France - ATP User’s Manual...
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The potentiometer R15 (See folio 4) has to be set to a position such as not to exceed the 1/5 of its full excursion to allow the speed programming from the serial link. Alcatel Vacuum Technology France - ATP User’s Manual...
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A fault occurs. Lit : Faulty pump. (See folio 4) Fault Flashing : Alert is signalled. Standby mode is Lit : Standby mode is selected. Yellow Stand-by selected. Alcatel Vacuum Technology France - ATP User’s Manual...
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This output allows to monitor the evolution of some pump parameters (Speed, température…). The output parameter selection is done through the RS 232 (See B120). The speed, the current, the temperatures are available on this output ( Factory configuration «Speed»). Alcatel Vacuum Technology France - ATP User’s Manual...
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(See B120, command STA). Note: Alcatel can provide upon request, a communication software which allows pump control and monitoring using a micro-computer (see C 61). Refer to Diagnosis and Troubleshooting of the manual. Alcatel Vacuum Technology France - ATP User’s Manual...
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Overloading Pumping stop * Pump rotation speed in rpm. ** During the pump or converter cooling, the cycles 2,3 (or 5) will be happened again periodically until the user remedies the overheating. Alcatel Vacuum Technology France - ATP User’s Manual...
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A4-A5 terminals allows to 250 V 1 A max. Outer control switch 250 V - 1 A max. * P2 soldering side view; B2 and A1 in black are female pins, others are male pins. Alcatel Vacuum Technology France - ATP User’s Manual...
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The faults are indicated by red light indicator which signals: - controller temperature increasing; - pump temperature increasing; - incorrect connection between pump and PC Board. When it is “ON”, the motor is not supplied and the pump doesn’t run. Alcatel Vacuum Technology France - ATP User’s Manual...
> 70°C). Avoid moving or causing a shock on a pump in operation. There is a risk of seizing if the pump rotates in an axis perpendicular to its axis of rotation. Alcatel Vacuum Technology France - ATP User’s Manual...
- start up the ATP, when the pressure in the chamber is ≤ 1 mbar. Stop: - close E1; - stop the primary pump; - stop the ATP; - stop the cooling system. Alcatel Vacuum Technology France - ATP User’s Manual...
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- open E2. The pressure in the chamber is ≤ 1mbar: the valves E2 and E3 are closed, the purge and water - close E2; circuits are operating. - open E1; - open E3. Alcatel Vacuum Technology France - ATP User’s Manual...
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ATP operation: Dome Dome can be baked. In this case, the temperature on the Inlet flange pump inlet flange T < 120 °C must be monitored: T < 120°C. Bake-out collar Exhaust Alcatel Vacuum Technology France - ATP User’s Manual...
(see B 70 or B 100). Stop the pump by The rotation speed monitoring indicator lights go off. pressing The pump motor is no longer powered, the pump STOP decelerates. Alcatel Vacuum Technology France - ATP User’s Manual...
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Simply program a time other than zero in the "SET START DELAY" menu. When START is pressed, the backing pump is started up and the ATP is controlled after the delay. Alcatel Vacuum Technology France - ATP User’s Manual...
• alert title ENTER Bearing data STATUS FAULT MAINTENANCE : • operating time passed WARNING BEARINGS 450H/5000H BEARINGS • maximum number of hours authorized before regreasing or replacing the bearings ENTER Time passed Alcatel Vacuum Technology France - ATP User’s Manual...
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This contact can be used to control the roughing pump (see wiring example, following page). Note: In "REMOTE" mode, after an external fault, the pump must be set to the "STOP" status before starting up again. Alcatel Vacuum Technology France - ATP User’s Manual...
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C 50 ACT 200 T and ACT 600 T "Remote Control" connector "Ext. safety" input operation Wiring example to control a roughing pump Alcatel Vacuum Technology France - ATP User’s Manual...
Communication software is compatible with Windows 3.11, 95 et Windows NT (™ Microsoft). It require 2 Mo RAM. Communication ports 1 to 4 must be available. This application is available on CDRom or Floppy disk 3”1/2. Consult us. Alcatel Vacuum Technology France - ATP User’s Manual...
Maintenance frequency....ATP 900 Maintenance frequency ... D 40 Alcatel Vacuum Technology France- ATP User’s Manual...
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D 10 Diagnosis and troubleshooting ACT 200 T and ACT 600 T Default type: "Warning" Wxx The "FAULT" signal flashes; If the buzzer is selected "ON", it is activated; The controller doesn’t stop the pump. "Fault" Dxx The "FAULT" signal lights on; If the buzzer is selected "ON", it is activated;...
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D 10 Diagnosis and troubleshooting ACT 200 T and ACT 600 T INCIDENT CAUSE CONSEQUENCE REMEDY WO1 : The authorized limit for • Regrease the pump and GREASING ball bearing maintenance initialize the maintenance counter (see E 80). time has been reached. (M=0 or M=1) WO2 : Pump maintenance time...
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D 10 Diagnosis and troubleshooting ACT 200 T and ACT 600 T INCIDENT CAUSE CONSEQUENCE REMEDY D01 : The external security The controller stops the • Test the external safety devices EXT SAFETY contact on the REMOTE motor. The pump can’t (contact 31 - 32);...
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D 20 Diagnosis and troubleshooting ACT 1000 T When a defect The "FAULT" indicator lights, the air inlet valve and/or the "FAULT" contact on the "Remote Control" connector appears are activated. In the following table, we use the signs: Relay contact open; Relay contact closed;...
D 20 Diagnosis and troubleshooting ACT 1000 T INCIDENT CAUSE CONSEQUENCE REMEDY D05 : • Motor overcurrent or The controller stops • Check the cable connection. OVERCURRENT hall sensors default. the motor. • Call the Alcatel Customer OR SENSOR • Motor out of order. Valves are affected Service.
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D 20 Diagnosis and troubleshooting ACT 1000 T INCIDENT CAUSE CONSEQUENCE REMEDY D27 : • Converter memory The controller supplies • Access the DATE menu and DATE AND TIME problem. power to the pump update the new date. • STOCK Parameter but the display is •...
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D 20 Diagnosis and troubleshooting ACT 1000 T INCIDENT CAUSE CONSEQUENCE REMEDY The controller is help • Call the ALCATEL Customer When the controller is ACT 1000 T V2.X ------------- Service. started up, the pump PUMP MEMORY FAULT cannot be identified. The controller is •...
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D 30 ATP 80, ATP 100, ATP 150, ATP 400 Maintenance frequency Intervals for relubrication and the ball bearings replacement depend on the type of process used. Housing temperature ATP 80 ATP 150 ATP 100 ATP 400 measuring point Use of the pump In continuous operation, at ultimate pressure, no process.
D 40 ATP 900 Maintenance frequency Intervals for relubrication and the ball bearings replacement depend on the type of process used. Housing temperature ATP 900 measuring point Use of the pump In continuous operation, at ultimate pressure, no process. In cycle less than 1 hour, at maximum inlet pressure, no process.
ACT 1000 T controllers ....* These chapters are included into the ball bearing replacement manual delivered with the specific tool. Alcatel Vacuum Technology France- ATP User’s Manual...
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- to ventilate the room well and disassemble the equipment under a fume hood. After a complete maintenance operation, it is recommended to perform a helium leaktightness test. Similarly, follow all the safety instructions concerning start-up. Alcatel Vacuum Technology France - ATP User’s Manual...
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(red and black) used to proportion the grease accurately for each pump bearing. INLET Lubrication of bearing on the pumping cell side: black jumper. Lubrication of bearing opposite the pumping cell side: red jumper. Alcatel Vacuum Technology France - ATP User’s Manual...
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Remove the syringe. Reassemble the adjustment sleeve (taking care with the direction), the spring and the end cap with its o-ring. The relubrication operation is complete. Execute the pump running-in: see E 70. Alcatel Vacuum Technology France - ATP User’s Manual...
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(red and black) used to proportion the grease accurately for each pump bearing. INLET Lubrication of bearing on the pumping cell side: black jumper. Lubrication of bearing opposite the pumping cell side: red jumper. Alcatel Vacuum Technology France - ATP User’s Manual...
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Remove the syringe and reassemble the lubricating plug equipped with its new o-ring. The relubrication operation is complete. Execute the pump running-in: see E 70 for ATP 150 and ATP 400, and see E 90 for ATP 900. Alcatel Vacuum Technology France - ATP User’s Manual...
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A phase is made of a chain of identical cycles. Test at pre-defined rotation speed reached Pre-defined rotation speed Cycle diagram START STOP During the running-in, cycle and phase counters are decremented to display PROG:1 PH:0 CYCLE:0 The running-in is ended. Alcatel Vacuum Technology France - ATP User’s Manual...
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DISPLAY SETUP RUNNING IN screen: PREVIOUS Number of hour Running-in speed which 5010H 12000RPM alternates depending on of operation RUNNING IN… the sequences Current message RUNNING Alcatel Vacuum Technology France - ATP User’s Manual...
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If a power failure occurs The controller displays: during running-in 5600H ORPM READY TO START ! and the Standby indicator light is lit on. The running-in operation has been stopped and it must be started again. Alcatel Vacuum Technology France - ATP User’s Manual...
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*The maintenance frequency for regreasing or ball bearing replacement could be modified along the life time of the bearings: it could be justified by a process evolution, or the user’s know-how. **In all the cases, wait for the display of running-in «END». Alcatel Vacuum Technology France - ATP User’s Manual...
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However, it is possible to ENTER change the frequency by pressing on MAINTENANCE : LIMIT 10000 «W01 » message erasing and PREVIOUS «Fault» light extinction. DISPLAY SETUP RUNNING IN PREVIOUS 5000H 0RPM READY TO START! Alcatel Vacuum Technology France - ATP User’s Manual...
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Start the running-in program N°1 and wait for the display of Running-in «END» TIME BEARINGS counter is automatically reset to «0» after program 1 running-in. » message erasing and «Fault» light extinction. « Alcatel Vacuum Technology France - ATP User’s Manual...
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TIME BEARINGS ACTUAL : 45000 ENTER TIME BEARINGS Reset of the counter. ACTUAL : 45000 TIME BEARINGS ACTUAL : to validate. ENTER TIME BEARINGS ACTUAL : PREVIOUS Alcatel Vacuum Technology France - ATP User’s Manual...
16500 RPM and leave running for 30mn to 16500 RPM 4th phase : 1 cycle START/STOP to 23000 RPM and leave running for 30mn to 23000 RPM STANDBY menu allows speed adjustment. Alcatel Vacuum Technology France - ATP User’s Manual...
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16500 RPM and leave running for 5h to 16500 RPM 4th phase : 1 cycle START/STOP to 23000 RPM and leave running for 3h to 23000 RPM then for1h to 27000 RPM Alcatel Vacuum Technology France - ATP User’s Manual...
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*The maintenance frequency for regreasing or ball bearing replacement could be modified along the life time of the bearings: it could be justified by a process evolution, or the user’s know-how. Alcatel Vacuum Technology France - ATP User’s Manual...
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BEARING : 5000H ------------- for frequency maintenance MAINT : LIMIT : 5000 (i.e. 5000h) ENTER BEARING : 5000H ------------- MAINT : LIMIT : 10000 STATUS » message erasing and « «Fault» light extinction. Alcatel Vacuum Technology France - ATP User’s Manual...
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Reset of the bearing coun- BEARING : 15000H ------------- ter. MAINT : LIMIT : 5000 ENTER BEARING : ------------- MAINT : LIMIT : 5000 STATUS » message erasing and « «Fault» light extinction. Alcatel Vacuum Technology France - ATP User’s Manual...
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Chapter F ATP User’s Manual Maintenance components Maintenance parts..... F 10 Alcatel Vacuum Technology France- ATP User’s Manual...
ATP 900 062992 2 - Tool kit It enables the user to replace bearings easily. It includes the ball bearing replacement manual. Pump type P.N. ATP 80/100 101930 ATP 150 ATP 400/900 Alcatel Vacuum Technology France - ATP User’s Manual...
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First figure 2: For the bearing on the pumping cell side, the choice of kit is reference 066672; Second figure 3: For the bearing on the side opposite the cell, the choice of kit is reference 066673. Alcatel Vacuum Technology France - ATP User’s Manual...
G 10 Pumping curves Pumping speed versus inlet pressure Pumping Inlet pressure (Pa) speed (l/s) 1000 Gas : N ATP900 Upper limits for continuous operation (Water cooled pump). ATP400 ATP150 ATP100 ATP80 Inlet pressure (mbar) Alcatel - High Vacuum Technology - ATP User’s Manual...
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G 10 Pumping curves Pumping speed versus inlet pressure Pumping Inlet pressure (Pa) speed (l/s) 1000 ATP900 C Gas : N Upper limits for continuous operation (Water cooled pump). ATP400 C ATP150 C ATP100 C ATP80 C Inlet pressure (mbar) Alcatel - High Vacuum Technology - ATP User’s Manual...
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G 10 Pumping curves Pumping speed versus inlet pressure Pumping Inlet pressure (Pa) speed (l/s) 1000 Gas : N ATP900 HPC Ar/SF6 ATP400 HPC Upper limits for continuous operation Ar/SF6 Inlet pressure (mbar) Alcatel - High Vacuum Technology - ATP User’s Manual...
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G 10 Pumping curves Flow rate versus inlet pressure Flow rate sccm Inlet pressure (Pa) ATP900 HPC Gas : N ATP400 HPC Upper limits for continuous operation Inlet pressure (mbar) Alcatel - High Vacuum Technology - ATP User’s Manual...
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