Alcatel Vacuum Technology Adixen ATH 1300 MT Manuals

Manuals and User Guides for Alcatel Vacuum Technology Adixen ATH 1300 MT. We have 1 Alcatel Vacuum Technology Adixen ATH 1300 MT manual available for free PDF download: User Manual

Alcatel Vacuum Technology Adixen ATH 1300 MT User Manual

Alcatel Vacuum Technology Adixen ATH 1300 MT User Manual (123 pages)

Maglev hybrid turbomolecular pumps

Brand: Alcatel Vacuum Technology | Category: Water Pump | Size: 5 MB

Table of Contents

Advantages
3
Applications
3
Other Applications
3
Maglev Hybrid Turbomolecular Pumps
4
Table of Contents
5
1 Magnetically Levitated Hybrid Turbo Pump
7
Introduction to the ATH 1300 M/MT - 1600 M/MT and Associated ACT Controller
7
The Pump Operating Principle
9
- 5 Actives Axis
  10
- Automatic Balancing
  11
- Battery Free
  11
- No Maintenance
  11
- The Back-Up Bearings
  11
- The Hybrid-Turbo Pump in an Installation
  12
Pump Overview
13
- The Built-In Heater Band
  13
- Variation of the Pump Rotational Speed
  14
ACT 1300 M Controller
15
- Compact and Functional
  15
- The Front Panel of the Unit
  15
- Isolation Valve at Inlet Pump
  17
- Purge Flow Reduction Device
  17
- Screen Filter
  17
The Accessories
17
- Connection Cable
  18
- Controller Accessories
  18
- Power Line Cable
  18
- Thermostatic Cable
  18
- The Performances of the Pumps
  19
The Technical Characteristics
19
- Controller Characteristics
  20
- Controller Dimensions
  20
- Model Characteristics
  20
- Pump Dimensions
  21
- Air Inlet Valve
  23
- Water Valve Dimensions
  23
Certificate of Compliance SEMI S2-93 a
25
Safety Instructions
27
Unpacking and Storage
33
- Controller Storage
  34
- Pump Storage
  34
- The Controller
  34
- The Pump
  34
- Installations Specifications
  35
- Maglev Pump Connection Instructions
  35
Pump Connections to an Installation
35
- Axial Loads (A)
  36
- Bending Moment (B)
  36
- Torque (C)
  36
- Worst Case Turbo Pump Crash Scenario Definitions
  36
- The Pump Can Operate in any Position
  40
Inlet and Exhaust Connections
41
Characteristics of Filtered Dry Nitrogen Supply
47
Nitrogen Purge Device Connection
47
Water Cooling Connection
51
Heating Band Connection
53
Heating Band Temperature
54
Electrical Connections
55
RS 232 or RS 485 Serial Link Wiring
71
Safety Instructions
81
Controller Start-Up
83
Display Initialization
83
Configuring the Controller for the Application
85
- Configuring the ACT Controller for the Application
  86
- Serial Link Setting
  86
Controlling the Pump Using the Controller Front Panel C
89
- Red Lit
  89
- Rotation Indicator Lights
  89
- Yellow Lit
  89
Local and Remote Mode Operation

91
- Pumping Cycle from Chamber at Atmospheric Pressure
  91
- Pumping Start
  91
- Pumping Stop
  92
- No Air Inlet Valve Connected
  92
- Close the Valve V3
  92
- Immediate Restarts
  93
- Event of a Power Cut
  93
- Short Power Cuts
  93
- Remote Mode Operation
  94
- «External Safety» Contact Operation
  95
- «INH» Inhibit Mode Operation
  97
- “INH” Mode Desable
  97
- “INH” Mode Valid
  97
- Safety Instructions
  99
  - Back-Up Bearings
    100
  - The Bearing Counter
    100
- Diagnosis and Troubleshooting
  101
  - Default Type
    101
  - The Screen Is Blocked
    101
  - Defaults Identification
    102
  - When a Defect Appears
    102
  - Several Defects Appear
    105
  - Default Is Not Indicated by the Controller
    106
- Shipping Procedure for Contaminated Pumps
  109
  - Exhaust Port
    109
  - Inlet Port
    109
  - Purge Port
    109
  - General Sweeping
    110
  - Purge / Inlet Sweeping
    110
  - Pressurize the Pump
    111
- Spare Parts - Instructions of Use
  113
- First Level Maintenance Parts
  115
  - Fuses for Controllers
    115
  - O-Ring
    115
  - Water Valve
    115
  - Pumping Curves
    117
  - Pumping Speed Versus Inlet Pressure
    117
  - Flow Rate Versus Inlet Pressure
    118
Appendix

118

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