Alcatel Vacuum Technology adixen ATH 2300 M User Manual
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Alcatel Vacuum Technology adixen ATH 2300 M User Manual

Maglev hybrid turbomolecular pump
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ATH 2300 M/MT
MAGLEV HYBRID TURBOMOLECULAR PUMP
User's Manual

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Summary of Contents for Alcatel Vacuum Technology adixen ATH 2300 M

  • Page 1 ATH 2300 M/MT MAGLEV HYBRID TURBOMOLECULAR PUMP User’s Manual...
  • Page 2 Alcatel Vacuum Technology, as part of the Alcatel Group, has been supplying vacuum pumps, leak detection systems, vacuum measurement and micro machining systems for several years. Thanks to its complete range of products, the company has become an essential player in multiple applications : instrumentation, Research &...
  • Page 3 - High MTBF - Minimum size, volume and weight - Smart and compact electronic controller - Reliability - R efer to the controller user's manual to use these pumps ATH 2300M/MT Maintenance free - Battery free - Easy integration. Alcatel Vacuum Technology France - User’s Manual ATH 2300 M/MT...
  • Page 4 All rights reserved, including copying this document in whole or any part without prior written authorization from Alcatel Vacuum Technology France. Specifications and information are subject to change without notice by Alcatel Vacuum Technology France. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 5: General Contents

    Indicates a potentially hazardous situation which, if not avoided, could result in moderate or minor injury. It may also be used to alert against unsafe practices. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 6 Indicates a potentially hazardous situation which, if not avoided, could result in death or severe injury. Indicates an imminently hazardous situation that, if not avoided, will result in death or severe injury (extreme situations). Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 7 - The built-in heater band - The back-up bearings - Variation of the pump rotational speed A 400 Pump technical characteristics A 510 The accessories of the pump A 515 Pump accessory dimensions Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 8 Temperature regulated by the controller, or by the customer device Controllers The ATH 2300 M/MT pumps work with the OBC 2300 M controller and with the Mag Power controller. (refer to the User’s Manual User’s Manual ATH 2300 M/MT Alcatel Vacuum Technology France –...
  • Page 9 Electronics Bearing Position Stator detector Position of Reference Power Correction Rotor amplifiers Electro- magnet Position return Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 10 Therefore, there is a total absence of vibration. Rotor geometric axis Stator geometric axis Rotor inertia axis Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 11 1.5 mbar. Inlet Rotor Stator Dry back-up bearings Molecular drag Motor Exhaust Magnetic levitated bearings purge* Cooling * The gas purge provides excellent protection for corrosive applications. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 12 75 °C, which is sufficient to prevent the condensation effect. This device is thermally controlled by the controller, or by the customer’s external regulator. The MT version is delivered with its water valve. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 13 - maximum speed preselected at factory. For an inlet pressure ≤ 10 mbar, the pump rotation speed can be selected between a minimum speed and a maximum speed specific for each pump ( A 400). Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 14 Water temperature °C 15 < T < 25 Maximum ambient temperature °C Weight Recommended forepump (Adixen) ADP / ADS ** The two maximum pressures cannot occur at the same time. Alcatel Vacuum Technology France – User’s manual – ATH 2300M/MT...
  • Page 15 : Water inlet and outlet 1/4 NPT FEMALE h : Electrical power supply DN 200 ISO-F 276.5 366.6 369.5 402.5 DN 200 CF-F 276.5 366.6 369.5 402.5 Dimensions in mm Alcatel Vacuum Technology - User’s Manual ATH 2300 M/MT...
  • Page 16 DN 250 ISO-F 232.5 322.6 325.5 358.5 DN 250 CF-F 276.5 366.6 369.5 402.5 5.65 DN 200 ISO-F 276.5 366.6 369.5 402.5 DN 200 CF-F 276.5 366.6 369.5 402.5 Dimensions in mm Alcatel Vacuum Technology - User’s Manual ATH 2300 M/MT...
  • Page 17 The water valve is used to stop Water valve P.N. the water flow rate. 24 VDC 108668 The water valve is connected to the controller with the thermostatic cable. A 500 in the controller User’s Manual) Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 18 A462403-010 3,5 m A462403-035 A462403-050 10 m A462403-100 20 m A459362-200 An entire range of connection accessories is available in the manufacturer’s catalog (clamping ring, centering ring, etc.). Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 19: Accessory Dimensions

    (50 SCCM) mm (inch) Plug coil Plug coil 22 (0.86) Can rotate rotate Pump connection 83.3 (3.28) 30 (1.18) 63 (2.48) Pump connection 54 (2.13) 1/8" NPT female Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 20 - Valve with purge device (50 sccm) - Air inlet valve with purge device (50 sccm) B 340 Water cooling connection - Characteristics of water cooling B 401 Typical electrical wiring diagram Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 21: Safety Instructions For Installation

    3 m from the product inlet. • Magnetic field level: the level for the static fields measured at the exterior of the pump is a maximum of 0.2 mT. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 22 External inputs (contact or voltage) can be used to stop the turbomolecular pump in case of roughing pump power failure (see External fault on B 430 on controller user’s manual). Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 23 (capable of detecting at 25% of the LEL) that will stop chemical supply to the pump when gas is detected at 25% of LEL for that flammable material. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 24 Located on the pump housing, this label warns the user against possible risk of injury due to any hand contacts with hot surface. It demands to use protective gloves before any intervention is performed. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 25 Pump connection to the installation : It is strongly recommended to secure the maglev turbopump installation to prevent any safety hazard to the user in CAUTION WARNING standard operating conditions (Refer to B 300). Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 26 * The packaging depends on the configuration of the pump. It also contains other cardboard boxes for the accessories like: screen filter, air inlet valve, purge device, high temperature sticker, electric cable... Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 27: Pump Storage

    ASA 6’’, ISO or CF-F flange blanking (depends on the model). Exhaust Blanked with a DN 40 ISO-KF protector. Connection for air inlet Blanked with a DN 16 ISO-KF valve and nitrogen device protector. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 28: Pump Connections To An Installation

    • the quality and the number of bolts. • No reducing adaptator or bellows should be installed between pump inlet flange and the chamber. The pump can operate in any position Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 29 The constructor declines any responsibility if the pump installation is not designed in accordance with these installation specifications. Installations specifications Chamber ATHM Equipment Frame Pump connection Respect the items 1, 2 and 3 pump connection instructions. instructions Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 30 Pump Loads transmitted to the system (item 1) Rotor Loads: Pump fixed to system: valve Bending moment (b) Pendulum plate Front view Axial load (a) Pump Torque (c) Top view Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 31 161500 161500 355000 ** Inlet flange DN250 ISO-F without ring: only use special bolts with washer delivered by for this type of installation (12 bolts and washer kit P/N 110034). Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 32 (6 x M10 threaded holes are provided (Option) on this purpose). In this case, contact the manufacturer for calculation support. Chamber ATHM Bracket Equipment Frame Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 33: Vacuum Connections

    Position the filter (2) into the inlet housing groove (1), bend side inlet flange opposite to the rotor. Position the ring (3) and press it manually into the groove bottom all over its circumference. Inlet Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 34 Connect this valve V1 near the pump exhaust as possible using connecting accessories (Refer to manufacturer’s catalog). Connect the valve to the primary pumping circuit see typical connection diagram ( B 400 of the controller’s manual). Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 35 We provide to monitor the purge flow to warranty a permanent gas flushing for maglev back-up bearing protection. * Different connection accessories can be found in the manufacturer’s catalog. * Different connection accessories can be found in the manufacturer’s catalog. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 36 Air filtered or In this case, the continous purge flow can’t be stopped. On the purge 1/8 NPT female port can be connected a dust filter or a nitrogen purge. ATHM Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 37: Water Cooling Connection

    (13 mm) during the water line connection (pipe equipped with connector), this to avoid valve damage. Do not mount water fittings above electrical components in case of leak at water fitting connection. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 38: Typical Connections

    ����� ����� ������������� �� ���� �� ����� �� � � ����� ��������� ����������� ��������� ���gh�ng (���� ���� ��d������) �������������� ����� �� �� ������������ ���������� �������������������������������������������������� ����ng�d��g����(�������) ������ ����������������������������� O������������������������������������������� �y��h�������������� Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 39: Operation

    Operation ATH 2300 M/MT User’s Manual Detailed contents C 100 Safety instructions for product use Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 40 Refer to the controller user’s manual to monitor the pump ( chapter C). Check the pump operating on the controller display. Refer to the controller user’s manual if a fault appears ( D 200). Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 41: Maintenance

    Maintenance ATH 2300 M/MT User’s Manual Detailed contents D 100 Safety instructions for product maintenance Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 42 Always wear gloves, protective glasses and a breathing mask. Chemical supplies coming from the tool, as well as the water and the nitrogen need also to be locked out / tagged out. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 43 W 20 : BEARINGS (or W19 on MAGPOWER) The internal memory of the controller informs the operator when the bearings require maintenance by displaying: D 24 : BEAR. CHANGED (or D20 on MAGPOWER) Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 44: Maintenance Instructions

    E 100 Shipping procedure for contaminated pumps - Inlet port - Exhaust port - Purge port - Required accessories on purge port to maintain the pressure - Rough decontamination procedure Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 45: Shipping Procedure For Contaminated Pumps

    - Centering ring with DN 16. seal - Seal P/N 076705 P/N 068193 - Fitting 1/4 VCR female - DN 16. clamping ring P/N 108500 P/N 083333 * Standard connection accessories available in the manufacturer’s catalog. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 46: Required Accessories

    Fit the DN 40 blank flange on the pump exhaust port. sweeping 10’ Sweep with dry nitrogen** for 10 minutes. Stop the nitrogen flow. ** Characteristics of dry nitrogen: B 330. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 47 Pressurize the Blank the inlet port. pump Pressurize the pump with dry nitrogen** to an absolute pressure of 1.1 bar using the injector. ** Characteristics of dry nitrogen: B 330. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 48: Maintenance Components

    ATH 2300 M/MT User’s Manual Detailed contents F 000 Spare parts - Instructions of use - Replacement of parts and use of non genuine parts F 200 First level maintenance parts Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 49: Replacement Of Parts

    «imitations», in the misappropriation and pirating of intellectual property performed by some dishonest operators. The manufacturer supplies maintenance components, spare parts or kits to perform the maintenance of its products ( Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...
  • Page 50 Part Num. Coil 12 V DC 106077 Electrovalve 12 V DC 110086 Description Coil 24 V 108677 Electrovalve 24 V DC 108668 ** piloted only by the OBC controller. Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT T...
  • Page 51 Appendix ATH 2300 M/MT User’s Manual Detailed contents G 010 Pumping curves G 200 Safety Questionnaire Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT...

  • Page 52: Pumping Curves

    G 010 Pumping curves ATH 2300 M Pumping Speed Curve pumping speed -l/s Alcatel Vacuum Technology France - User’s Manual ATH 2300 M/MT...
  • Page 53 G 010 Pumping curves ATH 2300 M Flow Curve flow rate -sccm- Alcatel Vacuum Technology France - User’s Manual ATH 2300 M/MT...
  • Page 54 In compliance with European Community’s L360 directives, French labor code L231 - R231 and Federal OSHA Safety Standard 1910-1200, Alcatel Vacuum Technology requires this form to be completed to preclude the potential health risk to its service personnel that can occur when receiving, disassembling, or repairing potentially contaminated products.
  • Page 55 Stamp / Seal Stamp / Seal ALCATEL Vacuum Technology France – 98, avenue de Brogny – B.P . 2069 – 74009 ANNECY CEDEX Tél. (33) 4 50 65 77 77 – Fax (33) 4 50 65 75 77 Web site: www.adixen.com...
  • Page 56 Tel. (1) 781 331 4200 Fax. (1) 781 331 4230 Alcatel Vacuum Technology France - 98, avenue de Brogny - BP 2069 - 74009 Annecy cedex - FRANCE Tel. (33) 4 50 65 77 77 - Fax. (33) 4 50 65 77 89...

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