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S
YMPTOM
Critical failure
Turbomolecular
pump failure
Turbomolecular
pump speed
Alcatel Vacuum Technology France - ASM 182 TD+ - ASM 192 T2D+ User's Manual
Turbomolecular pump (ATP 100)
O
RIGIN
CONFIRMATION
Chap. C
"Error/information indicator and display"
Turbomolecular pump
overheating
Turbomolecular pump
Mechanical hard spot
(does not spin freely by hand)
Switch is in running-in
The exhaust pressure of
the turbomolecular pump
is not correct (≤ 5 mbar)
on lines, valves, pump or cell
Greasing of the ball
bearings turbomolecular
pump to be performed
/ D
IAGNOSTIC
NO
P0326
NO
NO
Leaks
NO
D 51
R
EMEDY
Check the connections:
unplug and plug the cables
on the P0326 board and
the pump.
Contact customer service.
Check the dry pump.
Check the tightness of the
canalisations, valves, pumps
and cell. (alcohol test or use
of another detector).
Regrease the ball bearings
molecular pump according to
E 45.
1/2
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Summary of Contents for Alcatel Vacuum Technology ATP 100
- Page 1 (alcohol test or use of another detector). Regrease the ball bearings Greasing of the ball molecular pump according to bearings turbomolecular E 45. pump to be performed Alcatel Vacuum Technology France - ASM 182 TD+ - ASM 192 T2D+ User’s Manual...
- Page 2 (continued) Check the Contact customer service. Turbomolecular pump is not connected with turbomolecular molecular pump controller pump connector board P0326 Alcatel Vacuum Technology France - ASM 182 TD+ - ASM 192 T2D+ User’s Manual...
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