Related Manuals for Pfeiffer Vacuum FullRange PTR 91
Summary of Contents for Pfeiffer Vacuum FullRange PTR 91
- Page 1 ERATING I INSTRUCT TIONS Tr r anslation of the original instruc ctions R 91 FullRan ge® Gauge...
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Page 2: Product Identification
Product Ide entification In all communi cations with Pfeiff fer Vacuum, pleas se specify the information giv ven on the product t nameplate. For c convenient reference copy y that information into the space pro ovided below. Validity This document t applies to produc cts with part numb bers:... -
Page 3: Intended Use
Over the whole measurement range, the measuring signal is output as a logarithm of the pressure. Scope of Delivery 1× gauge 1× pin for adjusting settings via buttons 1× Operating Instructions German 1× Operating Instructions English Trademark ® FullRange Pfeiffer Vacuum GmbH BG 5041 BEN / B (2016-07) -
Page 4: Table Of Contents
Contents Product Identification Validity Intended Use Functional Principle Scope of Delivery Trademark Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technische Daten 2.1 Output Signal vs. Pressure 2.2 Gas Type Dependence PTR 91 Installation 3.1 Vacuum Connection 3.2 Power Connection... - Page 5 Disposal Options Accessories Spare Parts 11.1 Ignition Aid 11.2 Ionization chamber 11.3 Measuring Chamber Cpl. (Spare Sensor) ETL Certification EU Declaration of Conformity For cross-references within this document, the symbol (→ XY) is used. BG 5041 BEN / B (2016-07)
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Page 6: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Consultation of operating manual required (symbol printed on the product nameplate) Notice <…>... -
Page 7: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 8: Technische Daten
Technical Data Measurement range (air, N 1×10 … 1000 mbar Accuracy (N 1×10 … 100 mbar 30% of reading 100 … 1000 mbar 50% of reading Repeatability (N 1×10 … 100 mbar 5% of reading Gas type dependence → 13 Voltage range (analog output) 0 …... - Page 9 Supply common – signal conducted separately; common differential measurement is recommended Pfeiffer Vacuum controllers fulfill this requirement. The minimum voltage of the power supply unit must be increased proportionally to the length of the sensor cable. BG 5041 BEN / B (2016-07)
- Page 10 Materials exposed to vacuum Vacuum connection stainless steel (1.4435) Measuring chamber stainless steel (1.4435) Pirani filament Feedthrough Isolation glass, ceramic (Al Ring stainless steel (1.4435) Anode molybdenum Ni alloy Ionization chamber stainless steel (1.4301, 1.4016) Ignition aid stainless steel (1.4310) Internal volume DN 25 ISO-KF 19.9 cm...
- Page 11 Dimensions [ [mm] Weight DN 25 ISO- <280 g DN 40 ISO- <320 g DN 40 CF-F <570 g BG 504 4 1 BEN / B (2016-0...
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Page 12: Output Signal Vs. Pressure
Output Signal vs. Pressure Pressure p 1E+04 mbar 1E+02 torr 1E+00 1E–02 1E–04 1E–06 1E–08 1E–09 0.0 0.5 10.5 1.217 1.397 Measurement signal U [V] 1.667U-d p = 10 ⇔ U = c + 0.6 log p valid in the range 1×10 mbar <... -
Page 13: Gas Type Dependence Ptr
Gas Type Dependence PTR 91 Indication range from 10 … 10 mbar (Pirani-only operation) Indicated pressure (gauge calibrated for air) p [mbar] Indication range above 10 mbar Freon 12 –1 Water vapor –2 –3 –2 –1 4 6 8 4 6 8 4 6 8 4 6 8 [mbar]... - Page 14 Indication range 10 … 0.1 mbar Indicated pressure (gauge calibrated for air) p (mbar) –1 Indication range ... 10 mbar –2 –3 –4 –5 –6 –6 –5 –4 –3 –2 –1 4 6 8 (mbar) Indication range below 10 mbar In the range below 10 the pressure indication is linear.
- Page 15 where: Gas type Air (N , CO) These conversion factors are average values. A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer. BG 5041 BEN / B (2016-07)
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Page 16: Installation
Installation Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. - Page 17 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 18 Mount the gaug ge so that no vibra ations occur. Vibr ations at the gauge cause a a deviation of the m measured values. The gauge ma y be mounted in a any orientation. To o keep conden- sates and parti icles from getting into the measurin g chamber pre-...
- Page 19 When making a CF flang ge connection, it m may be ad- vantag geous to temporar rily remove the ele ectronics unit. Keep t the protective lid. WARNIN ARNING: electric arcing elium may cause e electric arcing with h detrimental fects on the electr ronics of the produ uct.
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Page 20: Power Connection
• Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤18 V (overvoltage protection). Pfeiffer Vacuum controllers fulfill these requirements. BG 5041 BEN / B (2016-07) - Page 21 If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. Electrical connection Pin 1 Supply (14.5 … 30 V (dc)) Pin 2 Supply common GND Pin 3 Signal output (measuring signal) Pin 4 Gauge identification Pin 5 Signal common...
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Page 22: Operation
Operation Status Indi ication Meani <ST> < HV-ST> No sup pply voltage lit solid Supply y voltage = ok, green no high h voltage in the mea asuring chamb lit solid blinking Supply y voltage = ok, yellow green pressu re in the cold catho ode range, cold cathod... -
Page 23: Put Gauge Into Operation
, CO and N . For other gases, it has to be corrected (→ 13). If the gauge is operated with a Pfeiffer Vacuum controller, a calibration factor for correction of the actual reading can be applied (→ of the corresponding controller). -
Page 24: Ignition Delay
Ignition Delay An ignition delay occurs when cold cathode gauges are switched on. The delay time increases at low pressures and for clean, degassed gauges it is typically: 1×10 … 1×10 mbar < 1 second 1×10 … 1×10 mbar <20 seconds 5×10 …... - Page 25 Gauge contamination is influenced by the process media used as well as any existing or new contaminants and their respective partial pressures. Continuous operation in the range of mbar ... 10 mbar can cause severe contamination as well as reduced up-time. Contamination of the gauge generally causes a deviation of the measured values: •...
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Page 26: Deinstallation
Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vac- uum component. - Page 27 Remove g gauge from the va acuum system and d install the protective e lid. When deinstalling the CF flange con nnection, it may be advantageous t to temporarily rem move the elec- ronics unit (→ 1 19). BG 504 4 1 BEN / B (2016-0...
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Page 28: Maintenance, Repair
(e.g. ionization chamber, ignition aid, Pirani filament), are not covered by the warranty. Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. - Page 29 Put the g auge into operatio on and operate it a at atmospheric pressure for at least 10 min nutes. Press the e <ADJ> button wi ith a pin (max. ø1 .1 mm) and the ATM adju ustment is carried out: The Pirani se ensor is ad- tion ≈5 s).
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Page 30: Cleaning The Gauge / Replacing Parts
Cleaning the Gauge / Replacing Parts In case of severe contamination or defective (e.g. Pirani filament rupture), replace the complete measuring chamber (Spare Parts → 42). DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. -
Page 31: Troubleshooting (Measuring Chamber)
DANGER DANGER: cleaning agents Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling and dis- posing of cleaning agents. Consider possible reactions with the product materials (→ 10). Precondition Gauge deinstalled. - Page 32 Unfasten the hexagon sock ket set screw (4) a and remove the complete e measuring cham ber (3) from the e electronics unit (5). Remove t the retaining ring (1) as well as the ionization chamber (2) from the meas suring chamber (3 ...
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Page 33: Replacing Ionization Chamber And Ignition Aid
Using an ohmmeter, make following measur rements on the contact p pins. Measurem ment Possible cause between pins 1 + 4 39.5 … 40.5 5 Ω Values Pirani filament (at 20 °C outside of rupture the range 1 + 2 1000 …... - Page 34 We recom mmend to rub the inside walls of the e measuring chamber up to the groove f for the retaining ri ng to a bright finish usin ng a polishing clot • The sealing su urfaces must only be worked con- centrically.
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Page 35: Replacing Measuring Chamber
Carefully slide the measuri ing chamber cpl. ( (3) (clean or new) into o the electronics un nit (5) until the me echanical stop is reache Pins aligned stra aight. Fasten th he measuring cham mber (3) by mean s of the hexagon socket set screw... - Page 36 Set the ca alibration value of f the spare sensor r with the <CAL> sw witch on the electr ronics unit (5). Carefully slide the measuri ing chamber cpl. ( (3) into the electronic cs unit (5) until the e mechanical stop p is reached.
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Page 37: Troubleshooting
Fasten the measuring chamber (3) by means of the hexagon socket set screw (4). Perform an ATM and HV adjustment of the Pirani mea- suring circuit via the <ADJ> button (→ 28). We recommend to perform a leak test (leak rate <1×10 mbar l/s) and a function test of the gauge on the leak detector. - Page 38 BG 5041 BEN / B (2016-07)
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Page 39: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to Pfeiffer Vacuum should pre- ferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination Form under www.pfeiffer-vacuum.com... -
Page 40: Disposal
Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment... -
Page 41: Options
Options Ordering No. Seal with centering ring and fine filter 4 µm, DN 25 ISO-KF (stainless steel /FPM) PT 120 036 -T Seal with centering ring and fine filter 20 µm, DN 25 ISO-KF (stainless steel /FPM) PF 117 225 -T Accessories Ordering No. -
Page 42: Spare Parts
Spare Parts When ordering spare parts, always indicate: • all information on the product nameplate • description and ordering number 11.1 Ignition Aid Ordering No. Ignition aid (set of 10 pieces) BN 845 995 -T 11.2 Ionization chamber Ordering No. Ionization chamber stainless steel PT 120 312 -T BG 5041 BEN / B... -
Page 43: Measuring Chamber Cpl. (Spare Sensor)
11.3 Measuring Chamber Cp pl. (Spare Sen nsor) The measuring g chamber cpl. is p pre-assembled. Ordering No. PT T03 148 310 PT 120 302 -T DN 25 I ISO-KF PT T03 158 310 PT 120 306 -T DN 40 I ISO-KF PT T03 3 358 310... -
Page 44: Etl Certification
ETL Certification RECOGNIZED ETL LISTED COMPONENT The product PTR 91 • conforms to the UL Standard UL 61010-1 • is certified to the CAN/CSA Standard C22.2 No. 61010-1-12 3103457 BG 5041 BEN / B (2016-07) -
Page 45: Eu Declaration Of Conformity
EU Declaration of Conformity We, Pfeiffer Vacuum, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. - Page 46 Notes BG 5041 BEN / B (2016-07)
- Page 47 Notes BG 5041 BEN / B (2016-07)
- Page 48 VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio.
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