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7
System accuracy
15
10
5
0
-5
-10
-15
The repeatability amounts to +/- 0.1 μm unidirectionally and +/- 0.2 μm bidirectionally.
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The system accuracy consists of the long-wave deviation (linearity of the dimen-
sional scale) and the short-wave deviation (e.g. interpolation accuracy) of the
scanning system (sensor and interface module). The accuracy values refer to a
room temperature of 20° C (68° F).
Long-wave deviation
The linearity of the dimensional scale refers to the entire rail length (maximum
1 metre). At this length, the deviation of the dimensional scale is always less than
+/- 10 µm at an ideal scale.
Within 40 mm, the deviation of the dimensional scale is always less than +/- 4 µm
at an ideal scale.
Short-wave deviation
All incremental distance measuring systems are influenced by the effects of
periodic deviation. This periodic deviation, also called short-wave deviation, occurs
due to small deviations in the sensor system or electrical signal processing. This
means that the sine and cosine signals deviate from the mathematically exact form.
If periodic deviations only occur during digitization and calculation of position, then
we talk about an interpolation error.
The short-wave deviation of MINISCALE PLUS is always within a range
of +/- 0.6µm.
Maximum positive and negative long-wave deviation (-/+ 10µm)
Absolute real deviation of the dimensional scale
Maximum positive and negative short-wave deviation of the sensor system
Measure length [mm]
25
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