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entegris Manuals
Industrial Equipment
A192-81M-0215
Installation and use manual
entegris A192-81M-0215 Installation And Use Manual
200 mm wafer carrier
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Table of Contents
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Table of Contents
Overview
Table of Contents
General Terminology and Definitions
Definitions
Wafer Plane
Specification Purpose
Benefits
General Definitions
Specification Description
Specification Values
Use with Automated Equipment
Four Point Contact
Contact Location
Benefits of Four Point Contact
Equipment Interface
Wafer Carriers Included and Exceptions
Recommended Contact Points
General Interface Information
Print Based Interface Design
Interface Points: Wafers Horizontal
General Recommendations
Sample Interface Plate
Contact Area a
Contact Area B
Contact Area C
Interface Points: Wafers Vertical
General Recommendations
Sample Interface Plate
Contact Area a
Contact Areas B and C
Interface Points: Robotic Handling
General Recommendations
Robotic Handling Features
Endwall Flanges
H" Bar End Flanges
Endwall Handle
Top Flanges
Material Information
Material Properties and Equipment Interface
Static Protection
Moisture Absorption
Applications
Wafer Transport Carriers
Process Wafer Carriers
Detailed Material Properties
For more Information
Terms and Conditions
Product Warranties
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1
Table of Contents
2
Overview
3
Definitions
4
Specification Purpose
5
Specification Description
6
Specification Values
7
Detailed Material Properties
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CRITICAL MATERIALS HANDLING
200 MM WAFER CARRIER
INTERFACE MANUAL
Installation and use manual
Datum A
B3
D1
B2
D3b
B
B
D3a
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This manual is also suitable for:
A192-80m-0215
A192-82m-0215
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A198-80mb-47c02
Pa192-80m series
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Pa195-80m series
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