Related Manuals for entegris AERONEX H Series
Summary of Contents for entegris AERONEX H Series
- Page 1 AERONEX® H SERIES GAS PURIFICATION SYSTEM Continuous ultrapure H gas at a low cost of ownership...
- Page 2 • The system is designed for easy field mainte- cost of ownership. The system offers improved nance and upgrades safety by placing all purifiers in a single location • Available worldwide through Entegris’ global and, because the purifiers are regenerable, there infrastructure are no environmental concerns.
- Page 3 System Process and Instrumentation Diagram Models PGPS4H, EGPS4H, EGPS8H Regen vent Rotameter Moisture Sensor Purifier A Optional Process out Process in Purifier B (optional) Model EGPS12H Regen vent Regen input Rotameter Moisture Sensor Purifier A Optional Process in Process out Purifier B (optional)
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Page 4: Safety Features
AERONEX® H SERIES GAS PURIFICATION SYSTEM Safety Features Feature Description PGPS4 EGPS4 EGPS8 EGPS12 Circuit breaker Provides additional electrical protection to the system and includes a lock-out/tag-out. Over temperature Monitored via thermocouple. Heaters sized to prevent runaway rise condition conditions. As a secondary precautionary device, a high- temperature hardware interlock is included on the EGPS4. -
Page 5: Product Specifications
Product Specifications Model PGPS4 EGPS4 EGPS8 EGPS12 Gases purified Media type Inorganic Contaminants removed O, CO, CO and nonmethane hydrocarbons Outlet purity <1 part-per-billion (ppb)* Operating pressure range 515–1825 kPa (60–250 PSIG) 1136 kPa (60–150 PSIG) Pressure drop <15 PSI @ 120 PSIG inlet and max rated flow <17 PSI @ 90 PSIG and max rated flow Maximum flow rate... - Page 6 AERONEX® H SERIES GAS PURIFICATION SYSTEM Model PGPS4 Dimensional Information Front view Side view Top view 711 mm (28.0″) 381 mm (15.00″) 264 mm (10.40″) System Connections Communications port For user interface via PC LED indicators For main power, bed on line, bed regen, heaters and alarms Start Used to begin system operations and to clear alarms A/C terminal block...
- Page 7 Model EGPS4 Dimensional Information Side view Front view 342 mm (13.46″) 76 mm (3.0″) Top view 813 mm (32.0″) 305 mm (12.0″) 457 mm (18.0″) System Connections Audible alarm Audible warning informs of alarm condition Start Used to begin system operations and to clear alarms When activated, power is removed from the cabinet.
- Page 8 AERONEX® H SERIES GAS PURIFICATION SYSTEM Model EGPS8 Dimensional Information Side view Front view 416 mm (16.38″) 1421 mm (55.94″) Top view 572 mm (22.50″) 379 mm (14.92″) System Connections Touch screen For system status and interface Audible alarm Audible warning informs of alarm condition Start Used to begin system operations and to clear alarms When activated, power is removed from the cabinet.
- Page 9 Model EGPS12 Dimensional Information Front view Side view 102 mm (4.03″) 1831 mm (72.08″) Top view 10 1 1 13 14 622 mm (24.50″) 454 mm (17.88″) System Connections Touch screen For system status and interface Audible alarm Audible warning informs of alarm condition Start Used to begin system operations and to clear alarms When activated, power is removed from the cabinet.
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Page 10: Ordering Information
AERONEX® H SERIES GAS PURIFICATION SYSTEM Options Letter Available Options (Designator) PGPS4 EGPS4 EGPS8 EGPS12 Automatic bypass manifold Manual bypass manifold Moisture indicator Ordering Information Part Number PGPS4 EGPS4 EGPS8 EGPS12 Panel-mounted model for OEM Use with applications Use with applications Use with applications use and applications requiring requiring a flow rate... - Page 11 For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select “Regional Customer Service Centers” for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris’ “Terms and Conditions of Sale.”...
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