entegris PA192-80MN Series Manuals

Manuals and User Guides for entegris PA192-80MN Series. We have 1 entegris PA192-80MN Series manual available for free PDF download: Installation And Use Manual

entegris PA192-80MN Series Installation And Use Manual

entegris PA192-80MN Series Installation And Use Manual (15 pages)

200 mm wafer carrier

Brand: entegris | Category: Industrial Equipment | Size: 1 MB

Table of Contents

Overview

2
- Table of Contents
  2
General Terminology and Definitions

3
- Definitions
  4
Wafer Plane

5
- Specification Purpose
  5
- Benefits
  5
- General Definitions
  5
- Specification Description
  6
- Specification Values
  6
- Use with Automated Equipment
  6
Four Point Contact

7
General Interface Information

8
- Print Based Interface Design
  8
Interface Points: Wafers Horizontal

8
- General Recommendations
  8
- Sample Interface Plate
  8
- Contact Area a
  9
- Contact Area B
  9
- Contact Area C
  9
Interface Points: Wafers Vertical

10
- General Recommendations
  10
- Sample Interface Plate
  10
- Contact Area a
  10
- Contact Areas B and C
  11
Interface Points: Robotic Handling

11
- General Recommendations
  11
- Robotic Handling Features
  11
- Endwall Flanges
  11
- H" Bar End Flanges
  12
- Endwall Handle
  12
- Top Flanges
  12
Material Information

13
- Material Properties and Equipment Interface
  13
- Static Protection
  13
- Moisture Absorption
  13
- Applications
  13
- Wafer Transport Carriers
  13
- Process Wafer Carriers
  14
Detailed Material Properties

14
For more Information

15
Terms and Conditions

15
Product Warranties

15

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