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Related Manuals for entegris SB300 FOSB
Summary of Contents for entegris SB300 FOSB
- Page 1 ADVANCED MATERIALS HANDLING MANUAL SB300 FOSB for 300 mm Wafers User manual...
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Page 2: Table Of Contents
SB300 FOSB FOR 300 MM WAFERS TABLE OF CONTENTS — Introduction ..............2 Standards ..............7 SEMI ® SEMI E62 ................7 Features ................2 SEMI M31-0999 ............. 7 Terminology ..............2 SEMI E106 ................ 8 FIMS Compatibility ............2 SEMI E47.1 ................ -
Page 3: Introduction
SB300 FOSB FOR 300 MM WAFERS INTRODUCTION SECURE WAFER PROTECTION — • Automated operation minimizes potential The SB300 front opening shipping box (FOSB) is an contamination from human interaction innovative 300 mm shipper that offers the benefits • Wafer plane accuracy of manual and front-opening interface mechanical •... -
Page 4: Components And Materials
SB300 FOSB FOR 300 MM WAFERS COMPONENTS AND MATERIALS — DOOR Number Component Material Quantity Wafer cushion Polycarbonate (PC) Gasket Thermoplastic elastomer Corner guides Catalogue (POM) Door housing Polycarbonate (PC) Lift arms PTFE-filled polycarbonate (white) Latch arms Acetal (POM) Latch cams... -
Page 5: Shell
Component Material STANDARD TWO-PACK Shell housing Polycarbonate (PC) The SB300 FOSB standard package for delivery from our factory to the customer with unattached accesso- Rear retainer Polybutylene terephthalate (PBT) ries is shown in Figure 3. All parts are single bagged. -
Page 6: Assembly Instructions
2. Place the side handle so both the snap detail and the leading tab of the handle are under the shell support loops. 3. While supporting the front of the SB300 FOSB, push the handle further into the shell support loops until the snap detail has locked into position. -
Page 7: Datum Orientation
SB300 FOSB FOR 300 MM WAFERS DATUM ORIENTATION — HORIZONTAL DATUM The horizontal datum is located near the bottom of Left to right Front to back the carrier (Figure 6). Frame location for the purpose –Y –X of automated transfer in and out of the cassette is defined in the Z direction relative to this datum. -
Page 8: Semi Standards
Datum Orientation Relative to an SB300 FOSB Since the force required to attach the door to the The base of the SB300 FOSB is located slightly above shell is greater than the door closure force designated the horizontal datum (Figure 10). The bilateral datum by SEMI E62, the SB300 FOSB is designated as “FIMS-... -
Page 9: Semi E106
SB300 FOSB FOR 300 MM WAFERS SEMI E106 SPECIFICATIONS — Provisional Overview Guide for Physical Interfaces • Wafer size: 300 mm (11.81") diameter and Carriers for 300 mm Wafers • Wafer capacity: 25 SEMI E106 describes the complex interdependen- cies among SEMI standards for 300 mm physical •... -
Page 10: Equipment Interface
SB300 FOSB FOR 300 MM WAFERS EQUIPMENT INTERFACE — The SB300 FOSB provides interoperability across a variety of equipment. This section provides an overview of one of the most common interfaces – Door a load port – and then discusses the door interface... -
Page 11: Door Interface Points
SB300 FOSB FOR 300 MM WAFERS DOOR INTERFACE POINTS BOTTOM INTERFACE POINTS Registration Hole and Slot Kinematic Coupling The registration hole and slot are used to properly The kinematic coupling is used to precisely locate locate the door. Registration pins on load ports the FOSB on equipment. - Page 12 SB300 FOSB FOR 300 MM WAFERS Recommendations FEOL and BEOL Pads The primary hold down is for use in applications FEOL (front end of line) and BEOL (back end of line) where the FOSB advances forward to engage the pads are used to prevent FEOL pods from being feature.
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Page 13: General Use Instructions
D-ring handles are used for manually disengaging the and latch closed using the same procedure. door latches and for door retention. The D-ring It is possible to assemble the SB300 FOSB when handles also incorporate automated key slots for seated on a horizontal kinematic coupling plate. -
Page 14: Limited Warranty
• Thoroughly inspect the FOSB for damage or excess wear prior to reuse LIMITED WARRANTY Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal &...
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