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entegris SemiChem APMi 200 Installation And Operating Manual

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ADVANCED MATERIALS HANDLING
|
MANUAL
SemiChem APMi 200
Installation and operating manual for model 009350

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Summary of Contents for entegris SemiChem APMi 200

  • Page 1 ADVANCED MATERIALS HANDLING MANUAL SemiChem APMi 200 Installation and operating manual for model 009350...

  • Page 2: Table Of Contents

    3.3 Required Utilities ............. 12 4.5.3.3 Burette Operational Test ... 31 3.4 Receipt and Unpacking ......... 13 4.5.3.4 Burette Visual Indicators ... 31 3.5 Mounting the SemiChem APMi 200 ....14 4.5.4 Sensor Troubleshooting ......34 Installation and Operating Manual | Entegris, Inc.
  • Page 3 7.1.2 Monthly Maintenance ........45 7.1.3 Quarterly Maintenance ......45 7.1.4 Annual Maintenance ........45 7.1.5 Bi-Annual Maintenance ......45 7.2 Replacing the Burette O-Rings ......45 7.3 Replacing the Jacketed Style Burette O-Ring............46 7.4 SemiChem APMi 200 Start-Up Kit .......48 Installation and Operating Manual | Entegris, Inc.

  • Page 4: Section 1: Introduction

    When immediately apparent, variations that can Entegris. Use only the most current revision of this negatively affect product quality can be quickly cor- manual. The information in Entegris' published...

  • Page 5: Process And Instrumentation Diagrams

    SEMICHEM APMi 200 1.2.1 Process and Instrumentation Diagrams BURETTE 2 IS OPTIONAL Reagent: Customer Provided Reagent: Customer Provided ¾ GPM FLOW RESTRICTOR Installation and Operating Manual | Entegris, Inc.
  • Page 6 AV09 AV10 1/2" FNPT AV11 AV12 AV13 AV14 EV01 Burette 1 mini 3/2 EV02 Burette 2 mini 3/2 EV03 EV04 NV01 Needle valve LLSA Cell a level sensor No drip end (tear drop) Installation and Operating Manual | Entegris, Inc.

  • Page 7: Section 2: Safety

    MSDS’s for the reagents used within the SemiChem This section highlights key safety and ergonomic APMi 200 can be provided upon request. In most cases, issues related to using the SemiChem APMi 200. chemicals contained within the processing tools Matters addressed include risk analysis, chemical themselves are available with the end user’s EHS...

  • Page 8: Process Compatibility

    200 will present some level of hazard. It is the responsibility of the end user to investigate The SemiChem APMi 200 contains type 3. Other areas of and use all appropriate precautions while the SemiChem APMi 200 may contain type 3 hot work.

  • Page 9: Flammability

    – Chemical exposure due to broken glass burettes still be present in the SemiChem APMi 200. – Chemical exposures due to maintenance activities 5. Isolated lines and inactive burettes will not allow –...

  • Page 10: Chemical Locations

    2.16 SPILL PREVENTION prevent exposure to hazardous chemicals. Also, when performing maintenance on the reaction vessel or Spill prevention features of the SemiChem APMi 200 sensor, be sure to flush the reaction vessel with DI include the leak detector interlocks and depressuriza-...

  • Page 11: Environmental Issues And Waste Treatment

    The the waste collect system connected to the associated SemiChem APMi 200's volume is more than 110% of process tool. This will allow for the collection of the the reagent container volumes.

  • Page 12: Section 3: Installation

    EMI/RF 3.3 REQUIRED UTILITIES interferences, and access to the system by fab Prior to delivery, your SemiChem APMi 200 has been personnel all need to be carefully considered. fully tested on simulated chemistry. After tests were...

  • Page 13: Receipt And Unpacking

    Entegris be liable for delays in replacement or repair of product. To ensure safe arrival of your SemiChem APMi 200, specially-constructed packaging has been developed. Open the top of the packaging and you will find a gray plastic container containing your start-up kit.

  • Page 14: Mounting The Semichem Apmi 200

    3.7.1 Inputs and Outputs 3.5 MOUNTING THE SEMICHEM APMi 200 3.7.1.1 ETHERNET The SemiChem APMi 200 is designed to be integrated The SemiChem APMi 200 uses a standard 10/100 Ethernet into a host tool or wall mounted, but MUST be secured cable, or category 5 connection.

  • Page 15: Section 4: Unit/System Operation

    This screen serves to The [HELP] screen is where the user can find electronic display the status of the SemiChem APMi 200 in terms versions of the user’s guide, start-up procedures, and of latest results, current operation, current analysis spare parts information.
  • Page 16 (bit) AV02 (bit) Trugger (bit) AV03 (bit) (bit) Exhaust (bit) AV04 Leak (bit) AV05 (bit) Door (bit) AV06 (bit) (bit) AV07 (bit) Override (bit) AV08 (bit) AV09 (bit) AV10 (bit) Service screens. Done Installation and Operating Manual | Entegris, Inc.
  • Page 17 Corresponding 3/2 valve Bur_high 1 – 4 Selects burette with high value reagent Volume_high User Volume of high reagent Valve_high 1 – 4 Corresponding 3/2 valve dwell User "Residence time of low and high reagents Installation and Operating Manual | Entegris, Inc.
  • Page 18 Min inc. User Minimum allowed injection volume Max inc. User Maximum allowed injection volume Formula normal Simple end point calculation Units User Labels output offset User Subtracts set volume of reagent Installation and Operating Manual | Entegris, Inc.
  • Page 19 Amount of time for sensor to stabilize for each calibration point Foto_ Measure cell A or B Selects which cell Channel_id 1 – 8 Selects which displayed output Sensor_ch 1 – 4 Selects which sensor input Installation and Operating Manual | Entegris, Inc.

  • Page 20: Main Screen

    3. Menus: allows users to access further features of the SemiChem APMi 200. Maintenance passkey allows access to the diagnostic 4. Status: shows the status of the SemiChem APMi 200. screen within the service menu, giving the user the ability to activate the outputs. The maintenance 5.

  • Page 21: Settings

    "Set As Main." This then becomes the Calibration/Trigger/Calc Factors: Used to calibrate SemiChem APMi 200's default recipe. the SemiChem APMi 200 to the process and set up triggering of the SemiChem APMi 200 via local mode, Recipes can also be imported from the USB port.

  • Page 22: Calibration

    SEMICHEM APMi 200 4.2.4 Calibration 4.2.5 Diagnostics For the SemiChem APMi 200 to perform precise and The [DIAGNOSTICS] function allows the users to accurate measurements, the sensors must be cali- monitor the inputs of the SemiChem APMi 200 and brated on occasion. Depending on the application, manually trigger the outputs.

  • Page 23: Errors And Analysis Troubleshooting

    E64 Cell B Measuring cell level sensor time out. Transfer water may not be working properly. Reagent #1 Reagent less than 10% volume. Reagent low level sensor activated. Refill (through #4) reagent bottle(s). Installation and Operating Manual | Entegris, Inc.

  • Page 24: Analysis Curves For Troubleshooting

    This would be shown as a lower than expected result. the user’s application. The possible causes are, 1. the process itself has a lower concentration and the SemiChem APMi 200 mV/pH reports the correct result, 2. possible air bubble in the Titration sample causing a lower than expected value, 3.
  • Page 25 The possible causes are, 1. the process itself has a disconnected sensor, 3. incorrect sensor, 4. electrode higher concentration and the SemiChem APMi 200 not immersed in the sample, 5. low electrolyte in reports the correct result, 2. possible air bubbles in the the sensor.

  • Page 26: Standard Addition Analysis (Ise's)

    Example 6 shows a sensor response above the programmed end point. The user would not see this because the SemiChem APMi 200 will abort the analysis and report an error code 1 or 2. A possible cause is the cell did not drain and flush properly.

  • Page 27: Hardware Troubleshooting

    These troubleshooting steps have been designed with fully trained, qualified, and experienced personnel in mind. Working with the SemiChem APMi 200 at the level these procedures require may lead to exposure to chemical, electrical, or mechanical hazards.
  • Page 28 4.5.1 System Shutdown and Decon Procedures The following is a brief description of the electrical Prior to any work on the SemiChem APMi 200, the systems within the SemiChem APMi 200. system should be properly shut down and all energies to be isolated and depressurized.

  • Page 29: System Shutdown And Decon Procedures

    5. Press "Run Now." The selected burette will cycle up and down three times. For each burette, the 1. The SemiChem APMi 200 has no built in provisions burette glass will be about 50% full. Remove the to fully flush sample valve AV01 (or AV02 if equipped).
  • Page 30 EV02 – BUR 2 EV03 – BUR3 EV04 – BUR 4 Cell A LLS Cell B LLS Cell A Mixer SemiChem APMi 200 electrical block diagram SYMPTOM POSSIBLE CAUSE CHECK AND CORRECTIVE ACTION No power at start-up • Analyzer not •...

  • Page 31: Burette System Troubleshooting

    Each burette system has a photometric sensor with a red LED indicating power. Each of the mini 3/2 electric valves have a red LED when activated. The MOTOR PCB has flashing LEDs indicating power and communications. Installation and Operating Manual | Entegris, Inc.
  • Page 32 • If the piston moves freely, replace O-ring as outlined in Section 7.2, Replacing the Burette O-rings. • Replace glass, if problem persists, replace the burette glass. • If the problem persists, contact Entegris. Burette does not fill with • Reagent bottle is •...
  • Page 33 • Check the reagent bottle for evidence of reagent degassing. For example, gas bubbles collecting on the sidewalls of the • Tube end suspended reagent bottle. If present, contact Entegris for advice on over reagent level suitable reagents. in bottle.

  • Page 34: Sensor Troubleshooting

    (in this case the SemiChem APMi 200), and the sample to be measured. Without any of these components, the sensing circuit will show an open circuit.

  • Page 35: Section 5: Options

    The data can be exported via the USB port. Simply insert a USB flash drive into the SemiChem APMi 200's USB drive. In addition to analysis data, the SemiChem APMi 200 can also export the systems logs. These are useful when troubleshooting suspect results.

  • Page 36: Customer Interface

    5.2 CUSTOMER INTERFACE 5.2.2.1 PLC HANDSHAKING PROCEDURE WITHOUT RECIPE SELECT The SemiChem APMi 200 has been designed to fit The following sequence is used with the user’s PLC within numerous process control environments. The to control the SemiChem APMi 200 without the system has a variety of outputs available, such as recipe select feature.

  • Page 37: Rs232 Communications

    Customer closes relay combination 5.2.3.3 ETHERNET NETWORKING according to desired recipe. Customer initiates a measurement by The SemiChem APMi 200 has the ability to be net- closing “START” relay. worked through its Ethernet port. However, because SemiChem APMi 200 begins analysis using the Ethernet port allows the SemiChem APMi 200 to default recipe, opens “READY”...

  • Page 38: Section 6: System Diagrams And Mechanical Drawings

    SEMICHEM APMi 200 SECTION 6: SYSTEM DIAGRAMS AND MECHANICAL DRAWINGS — 6.1 ILLUSTRATED PARTS GUIDE P/N 008321 Touchscreen P/N 000636 Connector mixer motor P/N 000509 Mixer motor Installation and Operating Manual | Entegris, Inc.
  • Page 39 P/N 005306 P/N 005111 PCB, reagent board Switch, 5-port ⁄ P/N 005308 PCB, main controller board P/N 005307 PCB, motor board P/N 008231-004 Manifold, 4-position 24 VDC, assembly P/N 009351-012 Clear splash cover Installation and Operating Manual | Entegris, Inc.

  • Page 40: Facility Drawing

    ⁄ ” flare, 0.5 liter/min, less than 30 psi ⁄ ” FNPT 38.1 mm (1.50") 63.5 mm (2.50") process drain 330.0 mm (13.00") Clear eye shield hidden for clarity 812.3 mm 779.5 mm (31.98") (30.69") Installation and Operating Manual | Entegris, Inc.
  • Page 41 RS232 DB9 female CDA purge ⁄ ” tube 24 VDC volume/CFM supplied by Supplied by customer customer Power on/o switch CDA supply 60 – 85 psi Analog Ethernet ⁄ ” tube outputs Installation and Operating Manual | Entegris, Inc.

  • Page 42: Wiring Diagram

    SEMICHEM APMi 200 6.3 WIRING DIAGRAM Installation and Operating Manual | Entegris, Inc.

  • Page 43: Relay Contacts

    4-20mA 1 DACOUT-2 Relay 7 RELOUT1-5 4-20mA 2 DACOUT-3 Relay 7 RELOUT1-6 4-20mA 2 DACOUT-4 4-20mA 3 DACOUT-5 Relay 8 RELOUT1-7 4-20mA 3 DACOUT-6 Relay 8 RELOUT1-8 4-20mA 4 DACOUT-7 4-20mA 4 DACOUT-8 Installation and Operating Manual | Entegris, Inc.
  • Page 44 SEMICHEM APMi 200 Installation and Operating Manual | Entegris, Inc.

  • Page 45: Section 7: Maintenance

    2. Replace the jacketed style burette O-rings features of the SemiChem APMi 200 or the (if equipped). Refer to heading 7.3, Replacing process tool. This may cause your process to be the Jacketed Style Burette O-rings.

  • Page 46: Replacing The Jacketed Style Burette O-Ring

    SemiChem APMi 200. The procedure for replacing a burette O-ring is To replace the analyzer’s O-rings you will need: as follows: •...
  • Page 47 6. Using your fingers, carefully pull off the existing and the cell will be flushed with DI water. O-ring. It may require some exertion to remove. Be sure to dispose of this O-ring as chemical- contaminated waste. Installation and Operating Manual | Entegris, Inc.

  • Page 48: Semichem Apmi 200 Start-Up Kit

    SEMICHEM APMi 200 7.4 SEMICHEM APMi 200 START-UP KIT Line item Part number Description Quantity 000263 Nut, flangeless, 1/4” – 28, PVDF 000264 Ferrule, flangeless, 1/8” 010388 Nut, flangeless, 1/4” – 28, PEEK ™ 010387 Ferrule, flangeless, 1/8”, Tefzel ®...

  • Page 49: Limited Warranty

    LIMITED WARRANTY Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any failure in the case of customers using unapproved foreign components.

This manual is also suitable for:

009350

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