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- Page 1 ADVANCED MATERIALS HANDLING MANUAL NOWPak Liner-Based Canister System ® User manual...
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Page 2: Table Of Contents
NOWPAK LINER-BASED CANISTER SYSTEM TABLE OF CONTENTS — Section 1: Overview ............3 Section 6: Refurbishing and Filling the Canisters ..10 Safety Information ............3 Empty Canister Disassembly and Liner Removal ..............10 System Information ............3 Inserting Two-Dimensional Replacement Canister System Components ........ -
Page 3: Section 1: Overview
This section is for use by chemical suppliers who This user guide is intended for use by personnel who fill new canisters with chemicals and who receive will install, use, maintain and repair the NOWPak ® empty canisters from end users for refurbishment liner-based canister system. -
Page 4: Technical Support
For technical support, contact Entegris at +1 800 394 4084. Please have the complete model number, chemical, and application information ready when calling. Figure 1. NOWPak liner-based canister system. SECTION 3: SYSTEM INFORMATION — The liner-based canister system consists of a reusable stainless-steel outer shell and a single-use inner liner filled with a desired chemical. -
Page 5: Section 4: Canister System Components
This section of the guide provides a description of the that can be purchased for use with the canister system. main components used in the NOWPak liner-based canister system. LINER-BASED CANISTERS A complete liner-based canister system, Figure 2,... -
Page 6: Retainers
NOWPAK LINER-BASED CANISTER SYSTEM FITMENT ADAPTERS Please contact Entegris for application-specific information and liner compatibility. 200-liter canisters require a fitment adapter, Figure 5, to be inserted inside the retainer. The fitment adapter reduces the larger 200-liter fitment opening to the size needed for diptube insertion. -
Page 7: Replacement Breakseals
NOWPAK LINER-BASED CANISTER SYSTEM REPLACEMENT BREAKSEALS the canister, and the closure cap is hand-tightened onto the base. Breakseal technology, Figure 7, separates the chemical from the environment to ensure absolute chemical The following two-piece closures are available for use integrity during transport of filled canisters. When the... -
Page 8: One-Piece Closure
• ND-ED (MaxMT system) ™ Holes in the upper connector body Refer to the relevant Entegris user guide or data sheet for the tubing to pass through. These holes prevent the fitting from being for specifications and for detailed user and maintenance turned by the tubing. -
Page 9: Nd-Ld Dispense Connectors
Figure 12. ND-ED MaxMT dispense connectors (installed on 19-liter being used. canisters) and control box. Refer to the ND-LD data sheets or contact Entegris for model numbers and detailed user information on these dispense connectors. SECTION 5: HANDLING THE CANISTERS —... -
Page 10: Moving The Canisters
Some chemical will remain on these the contained chemical and the staging conditions. when they are removed from the canister. Entegris recommends placing the used diptube into a Please contact the chemical supplier for appropriate sealable bag. - Page 11 NOWPAK LINER-BASED CANISTER SYSTEM 4. (200-liter canister only) Remove the fitment adapter WARNING: Some chemical may remain on from inside the canister neck, Figure 4, page 6. Use component parts. Follow all chemical safety procedures and wear chemical splash goggles either of these methods: and other appropriate PPE.
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Page 12: Inserting Two-Dimensional Replacement Liners Into The Canister
Do not unfold the liner. The folds in the liner are unless the liner integrity has been compromised. specifically designed to enable proper inflation of Entegris does not prescribe cleaning procedures for the liner. The folds create a small amount of back reusable components, and cleaning procedures depend... -
Page 13: Inserting Three-Dimensional Conformal Liners Into The Canister
NOWPAK LINER-BASED CANISTER SYSTEM NOTE: Be sure the liner is not rotated or becomes twisted All liner material should be below the base of as it is inserted into the canister. Those conditions can the fitment. result in improper inflation. - Page 14 NOWPAK LINER-BASED CANISTER SYSTEM 1. Select a new, properly sized, pre folded liner. NOTE: Be sure the liner is not rotated or becomes twisted as it is inserted into the canister. Those conditions can NOTE: See Appendix B: Canister Compatibility Matrix, result in improper inflation.
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Page 15: Inflating A Liner Inside A Canister
Figure 27. Bag inflation fixture (NF-01-FR shown). Tools Required (see Required Tools, page 28) NOTE: The use of bag inflation fixtures not manufactured by or approved by Entegris may cause inflation problems. Canister neck Item Entegris is not responsible for inflation problems that result... - Page 16 Table 1, The use of any manual inflation fixture not may damage the liner during inflation and should be manufactured by or approved by Entegris may avoided. cause inflation problems that result from the use of an unapproved manual inflation fixture.
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Page 17: Canister Filling And Diptube Insertion
NOWPAK LINER-BASED CANISTER SYSTEM 5. (200-liter canister only.) Place a fitment adapter into NOTE: Removing a previously inflated liner from the canister may damage the liner and may compromise the 2 inch liner fitment, Figure 29. its performance. 6. Connect the manual inflation fixture to a canister... -
Page 18: Capping A Filled Canister
WARNING: Pressing the diptube into the liner fitment creates a safety hazard. Torque NA-10 DA-06 adapter tool NOTE: New diptube assemblies from Entegris are pre cleaned and ready for use. No further cleaning Breakseal NA-23 NA-23 is required prior to the initial use. -
Page 19: One-Piece Closures
NOWPAK LINER-BASED CANISTER SYSTEM 2. Install a new breakseal into the closure base, Figure 32. a. Place the closure base upside down on an appropriate work surface. b. Insert a new breakseal into the closure base, gasket side down. c. Press the breakseal into place using the breakseal insertion tool (NA-23). -
Page 20: Canister Assembly Overview
NOWPAK LINER-BASED CANISTER SYSTEM 2. Place the closure directly onto the canister neck. Torque the closure clockwise onto the canister to the specified value using the appropriate torque wrench and adapter. Closure Canister size Closure base torque NC-W2 20-liter 9.0-9.6 N•m (80-85 in•lbs) Figure 37. -
Page 21: Section 7: Canister System Maintenance
NOTE: New diptube assemblies purchased from Entegris are pre cleaned in a cleanroom environment and do not use. Entegris is not responsible for damage resulting require additional cleaning prior to use. from using diptubes that have been improperly cleaned or are damaged or worn out. - Page 22 NOWPAK LINER-BASED CANISTER SYSTEM FEP Reusable Diptube – Replacement O-ring Part Numbers DIPTUBE PART NUMBER SIZE O-RING PART NUMBER O-RING MATERIAL NDT-T4 NA-24 (Qty 50) EPDM NDT-T5 10 L NA-24-1000 (Qty 1,000) NDT-T9 18 L NDT-T8 19 L NDT-T7 20 L...
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Page 23: Closure Maintenance
NOWPAK LINER-BASED CANISTER SYSTEM CLOSURE MAINTENANCE Normal maintenance for two-piece closures consists a canister is changed out. The O-ring surface can of cleaning the closure cap and base and replacing deteriorate over time. If an O-ring appears worn or O-rings and compression ring as needed, Figure 40. -
Page 24: Dispense Connector Maintenance
Figure 41. Removing dispense connector O-rings (ND-CD shown). NOTE: For maintenance procedures to be performed on the dispense connector, including O-ring replacement, refer to the Entegris user guide for the type of dispense Compression ring connector being used (ND-CD, ND-LD, or MaxMT). -
Page 25: O-Ring Handling Guidelines
1. Connect one end of the inert gas supply line tubing vary depending on the type of dispense connector used. (typically a translucent, inert plastic such as PFA) to Refer to the appropriate Entegris user guide or data sheet a filtered and regulated gas source. for detailed user instructions. -
Page 26: Connecting The Dispense Connector To A Canister
NOWPAK LINER-BASED CANISTER SYSTEM Connecting the Dispense Connector to a Canister Do not overtighten. If the closure or canister threads are damaged or cross-threaded, liquid To use a filled canister, the end user installs one of the dispense may be affected. -
Page 27: Changing Out Empty Canisters
NOWPAK LINER-BASED CANISTER SYSTEM NOTE: If dispense is interrupted or discontinued for an 7. Perform any required maintenance on the extended period, Entegris recommends reducing the inert dispense connector. gas pressure inside the canister to minimize permeation of 8. Install the closure or closure cap onto the empty the headspace gas into the chemical. -
Page 28: Appendix A: Required Tools
NOWPAK LINER-BASED CANISTER SYSTEM APPENDIX A: REQUIRED TOOLS — Entegris provides the following specialized tools for filling, operation, and maintenance of the liner-based canister system. Contact Entegris at +1 978 436 6500 to order these tools. TOOL PART NUMBER Torque wrench NA-18 (4- to 40-liter) (1/2”... - Page 29 NOWPAK LINER-BASED CANISTER SYSTEM Liner removal tool NA-06 (4- to 40-liter) DA-04 (200-liter) Liner insertion tool NA-60 (4- to 40-liter) NA-60-200 (200-liter) Breakseal insertion tool NA-23 O-ring removal NA-27 tool kit Manual inflation fixture NA-41 (20-liter with one-piece closure) NA-41-200-2 (200-liter)
- Page 30 NOWPAK LINER-BASED CANISTER SYSTEM Automated bag NF-01-FR inflation fixture (BIF) (4- to 20-liter) Optional booster NA-107 locating plate for NF-01-FR (adjusts height for 4-liter canister liner inflation) Optional locating NA-135 plate (for 10- and 18-liter canister) Automated bag NF-40-FR inflation fixture (BIF) (40-liter) User Manual | Entegris, Inc.
- Page 31 NOWPAK LINER-BASED CANISTER SYSTEM Automated bag inflation NF-180/200-FR fixture (BIF) (200-liter) User Manual | Entegris, Inc.
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Page 32: Appendix B: Canister Compatibility Matrix
Not all possible configurations are shown. Contact Entegris for additional configuration options. IMPORTANT: The user must ensure that the selected liner is properly sized for the canister being used. Entegris does not recommend using any diptube or liner designed or provided by anyone other than Entegris. - Page 33 NOWPAK LINER-BASED CANISTER SYSTEM Closure Diptube Dispense Capacity Canister Liner Closure O-ring type Diptube O-ring type connector 19-liters NO-08-63 NL-020-T420A-1 NC-04 EPDM NDT-T8 EPDM ND-CD-SXXX- NO-08A-63 NL-020-T650A-1 NC-04-2 FEP- NDT-T8-C Chemraz NL-019-N500A-1-KA encapsulated NDT-P8 EPDM ND-ED-S-2 NL-019-N500C-1-KA silicone NDT-P8-C Chemraz...
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Page 34: Appendix C: Ordering Guide
Visit www.entegris.com for ordering information for the NOWPak liner-based canister system components. To order accessories and spare parts, contact Entegris at +1 978 436 6500. LIMITED WARRANTY Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal &...
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