Sigma SQM-160 User Manual page 35

Deposition rate/thickness monitor
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D. Declaration of Conformity
Manufacturer's Name:
Manufacturer's Address: 1318 Duff Drive
declares that the product:
Product Name:
Product Model:
Product Options: All Options
conforms to the following Product Specifications:
Safety:
EMC:
Supplementary Information: This product complies with the requirements of the Low
Voltage Directive 73 / 23 / EEC and the EMC Directive 89 / 336 / EEC (inclusive 93 / 68
/ EEC) and carries the "CE" mark accordingly.
Fort Collins, Colorado
Sigma Instruments
Fort Collins, CO 80524 USA
Rate/Thickness Monitor
SQM-160
IEC
CSA
UL
CISPR
IEC
IEC
IEC
April 2000
Gary L. Halcomb
President
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