Summary of Contents for Sigma SQM-160
- Page 1 SQM-160 Rate/Thickness Monitor User’s Guide Version 2.0 © Copyright Sigma Instruments, Inc. 2000 Sigma instruments...
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Page 2: Safety Information
Read this manual before installing, operating, or servicing this equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained. -
Page 3: Warranty Information
1 year from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, Sigma Instruments will, at its option, either repair or replace products that prove to be defective. -
Page 4: Table Of Contents
Table of Contents Chapter 1 Quick Start 1.0 Introduction ...1-1 1.1 Installation...1-4 1.2 Front Panel...1-1 1.3 Rear Panel...1-2 1.4 System Connections ...1-3 1.5 Film Setup ...1-5 1.6 Depositing a Film ...1-6 Chapter 2 Operation 2.0 Introduction...2-1 2.1 Menu Selection...2-1 2.2 Film Parameters Setup...2-2 2.3 System Parameters Setup ...2-4 2.4 Sensor Selection ...2-7 2.5 Sensor Min/Max Frequency...2-8... - Page 5 Chapter 5 Maintenance 5.0 Introduction...5-1 5.1 Fuse Replacement ...5-1 Appendix A. Material Parameters B. Specifications C. I/O Connections D. Declaration of Conformity...
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Page 6: Chapter 1 Quick Start
BNC cable form the Rate or Thickness connector to your chart recorder. Move the rear panel power switch to the On (|) position. The SQM-160 will briefly display its software version, then go to normal operating mode. : The SQM-160 is shipped with a ½ A Fuse for use... -
Page 7: Front Panel
Crystal Status LEDs Thickness kA Crystal Status Time SP Time Thk SP Next F i n a l T h k SQM-160 S i g m a instruments Rate/Thickness Monitor Setpoint LEDs Front Panel Controls Quick Start Control Knob P r e v... -
Page 8: Rear Panel
Relay I/O Line Fuse Fuse 1/2 A SB at 120VAC Fuse 1/4 A SB at 240VAC Model No. SQM-160 Ser No. 80901 Rear Panel Connections : Select 115V for 90-120VAC, 230V for 180-240VAC. : Replace line fuse only with a fuse of the specified... -
Page 9: System Connections
Contains the electronics to operate the quartz crystal. Total cable length to the crystal should be under 40”. 10’ BNC Cable Connects the oscillator to the SQM-160. Lengths up to 100’ are acceptable. Ground Wire A wire, typically braided, that connects the vacuum system to the SQM160 ground terminal. -
Page 10: Film Setup
Chapter 1 1.5 Film Setup This section will help you setup the SQM-160 to measure a film. Refer to Chapter 2 for detailed film programming instructions. Note: User actions with front panel controls are indicated by a Box. Results shown on displays, are indicated by a Dashed Box. -
Page 11: Depositing A Film
Chapter 1 1.6 Depositing a Film If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the procedure below to begin deposition. Verify Sensor Verify that the Crystal Status LED for the measuring sensor is Operation lit, and not flashing. -
Page 12: Chapter 2 Operation
The System Parameters Menu sets values that remain constant for all films. Note: If Crystal Life is shown on the SQM-160 displays, press the Xtal Life switch to return the displays to rate/thickness or frequency display. -
Page 13: Film Parameters Setup
Chapter 2 2.2 Film Parameters Setup The Film Parameters Menu programs the SQM-160 for the materials that will be deposited as thin films. Nine films can be stored, but only one film is active at any time. To program film parameters: 1. - Page 14 Chapter 2 The diagram and table below detail the parameters available in the Film Parameters Menu: Film Selection Film1 Program Film9 Display Description DENSITY Density of the material being deposited. TOOLING Overall tooling Factor for this film. See the Sensor Tooling section of this chapter for information on setting tooling values.
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Page 15: System Parameters Setup
Operation 2.3 System Parameters Setup The System Parameters Menu sets values that pertain to the overall functioning of the SQM-160, and to your vacuum system’s setup. System parameters are constant for all films. 1. Press Program to enter program mode. - Page 16 Chapter 2 System Parameters Menu Program Prev Display Description TIMEBASE Time required to take a single measurement SIM MODE Simulates sensors. FRQ DISP Toggles between Rate/Thickness and Frequency Displays RATE RES Display resolution of Rate RATEFILT Number of readings averaged for rate calculations BAUDRATE Serial Baud Rate to PC...
- Page 17 Chapter 2 Display Description xTOOLING Tooling value assigned to each sensor. See the Sensor Tooling section of this chapter for information on setting tooling values. FMIN/MAX Sub-Menu to select Crystal Frequency Limits FREQ MIN Minimum Crystal Frequency FREQ MAX Maximum Crystal Frequency The following System Parameters apply only if the optional Analog Output card is installed.
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Page 18: Sensor Selection
Chapter 2 2.4 Sensor Selection The SQM-160 comes standard with two sensor inputs. Four additional sensors are available by adding a Sensor Option Card. The sensors can each be assigned to a different film, or multiple sensors can be averaged for a single film. The averaging option provides more uniform coverage of the deposition area, and provides a backup sensor capability. -
Page 19: Sensor Min/Max Frequency
Both values are used to determine the % life that is displayed in Xtal Life mode. When the sensor frequency drops below the minimum, the SQM-160 indicates a sensor failure by blinking the Crystal Status display. Likewise, a sensor whose initial value exceeds the maximum will cause a blinking Crystal Status. -
Page 20: Sensor Tooling
Chapter 2 Operation 2.6 Sensor Tooling Sensor Tooling adjusts for the difference in deposition rate between the sensor and the substrate being coated. It is an empirically determined value that matches the sensor readings to your vacuum system. Substrate Substrate Tooling Tooling Over 100%... -
Page 21: Rate/Thickness Or Frequency Display
6. Press Program to exit the System Parameters Menu and return to normal mode. 2.8 Crystal Life Display The SQM-160 calculates the remaining crystal life based on the FMin/Max values set in the System Parameters Menu (see Section 2.5). To display the remaining crystal life for the sensors used by the currently active film: 1. -
Page 22: Front Panel
The Open and Closed LEDs light to indicate the Shutter relay status. 2.11 Simulate Mode In Simulate Mode, the SQM-160 simulates attached sensors. It is an easy way to become familiar with the SQM-160 front panel controls and programming. In Simulate Mode you can open/close the shutter to simulate deposition, zero readings, and display crystal life. -
Page 23: Chapter 3 Options
Chapter 3 3.0 Introduction The SQM-160 has two slots to accommodate option cards. The Option A slot holds a Four Sensor Card, which expands the SQM-160 inputs to a total of six quartz crystal sensors. The Option B Analog Output Card provides Rate and Thickness outputs for connection to strip chart recorders. -
Page 24: System Connections
Refer to Chapter 2, Sensor Selection, to assign Four Sensor Card sensors to a film. 3.3 Analog Output Card Once the Analog Output Card is installed, the SQM-160 System Parameters must be set to match the device that will be attached to the Rate or Thickness output. -
Page 25: Run Moncomm
Chapter 4 MonComm Software 4.0 Introduction Included with the SQM-160 is a Windows 95/98 program, MonComm. MonComm is used to setup instrument parameters, graph, and save instrument readings. 4.1 Installation 1. Insert installation Disk 1 into your computer’s A Drive. -
Page 26: Add And Delete Films
Chapter 4 4.3 Add and Delete Films To add a new film to the Films List: 1. Click the New Film button. 2. A film named NewFilm# will be added to the end of the films list. 3. Click on this film to highlight it. 4. -
Page 27: Download Films
To download the films in the Download List : Click on the Download Films button. The films in the Download List box will be placed in the SQM-160 as Films 1 - 9 . A “UnitFilm#” in the Download List box indicates that the film in that... -
Page 28: Graph Data
4.5 Graph Data The SQM-160 graphs are accessed by clicking the Graph button. Two graphs of data from the SQM-160 can be displayed. The first displays the average rate of all active channels versus time. The second graph displays each individual channel’s rate versus time. -
Page 29: Save Data
Chapter 4 MonComm Software To Adjust the Graph’s Scope: 1 Select the Configure menu followed by the Graph sub menu item to display the graphs configuration form. 2. Adjust the graph minimums and maximums as desired. The X and Y divisions determine the number of ticks between graph numerical markings... -
Page 30: Edit System Parameters
The system parameters are downloaded to the SQM-160 by clicking on the Update Parameters button. The parameters can be reloaded into the form from the SQM-160 by clicking the Refresh menu item. Return to the main display by clicking on the Exit menu item. -
Page 31: Fuse Replacement
The SQM-160 is shipped with a ½ A Fuse for use with 90–120 VAC. If your line voltage is 180–240 VAC, replace the fuse with the ¼A fuse included with your SQM-160. - Page 32 A. Material Parameters Material Density Aluminum 2.73 Aluminum Oxide 3.97 Antimony 6.66 Arsenic Barium Beryllium 1.87 Bismuth Bismuth Oxide 8.92 Boron 2.54 Cadmium 8.64 Cadmium Selenium 5.82 Cadmium Sulfide 4.83 Cadmium Teluridium 5.85 Calcium 1.55 Calcium Fluoride 3.18 Carbon Diamond 3.52 Carbon Graphite 2.25...
- Page 33 B. Specifications Measurement Number of Sensors Frequency Range Frequency Accuracy Frequency Resolution Rate Accuracy Rate Resolution Thickness Accuracy Thickness Resolution Measurement Filter Measurement Period Film Parameters Stored Films Density Tooling Z-Factor Final Thickness Thickness Setpoint Time Setpoint System Parameters Simulate Mode Frequency Mode Etch Mode Crystal Fail Minimum.
- Page 34 C. I/O Connections A 15-pin female D-sub connector is included with the instrument to connect digital I/O to the SQM-160 Relay I/O connector. The figure below shows the solder side pin assignments for the connector. Relays are rated for 125VAC or 30VDC, 2A maximum. Inputs can be activated either by connecting to a switch and shorting to Ground, or they can be driven by a TTL compatible signal.
- Page 35 Voltage Directive 73 / 23 / EEC and the EMC Directive 89 / 336 / EEC (inclusive 93 / 68 / EEC) and carries the “CE” mark accordingly. Fort Collins, Colorado Sigma Instruments Fort Collins, CO 80524 USA Rate/Thickness Monitor...