Sigma SQM-160 Manuals

Manuals and User Guides for Sigma SQM-160. We have 1 Sigma SQM-160 manual available for free PDF download: User Manual

Sigma SQM-160 User Manual

Sigma SQM-160 User Manual (35 pages)

Deposition Rate/Thickness Monitor

Brand: Sigma | Category: Monitor | Size: 0 MB

Table of Contents

Safety Information
2
Safety Symbols
2
Limitation of Warranty
3
Return Policy
3
Warranty Information
3
Table of Contents
4
Chapter 1 Quick Start

6
- Introduction
  6
- Installation
  6
- Front Panel
  7
- Rear Panel
  8
- System Connections
  9
- Film Setup
  10
- Depositing a Film
  11
Chapter 2 Operation

12
- Introduction
  12
- Menu Selection
  12
- Film Parameters Setup
  13
- System Parameters Setup
  15
- Sensor Selection
  18
- Sensor Min/Max Frequency
  19
- Sensor Tooling
  20
- Rate/Thickness or Frequency Display
  21
- Crystal Life Display
  21
- Front Panel
  22
- Zero Thickness
  22
- Shutter Operation
  22
- Simulate Mode
  22
Chapter 4 Moncomm Software

23
- Introduction
  23
- Installation
  23
  - System Connections
    24
  - Four Sensor Card
    24
  - Analog Output Card
    24
- Run Moncomm
  25
- Add and Delete Films
  26
- Download Films
  27
- Graph Data
  28
- Save Data
  29
- Edit System Parameters
  30
- Load Defaults
  30
  - Fuse Replacement
    31
  - Maintenance
    31
  - Material Parameters
    32
  - Specifications
    33
  - Declaration of Conformity
    35
Chapter 3 Options

23
- Four Sensor Card
  23

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