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SQC-122c
Sigma SQC-122c Manuals
Manuals and User Guides for Sigma SQC-122c. We have
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Sigma SQC-122c manual available for free PDF download: User Manual
Sigma SQC-122c User Manual (64 pages)
Thin Film Deposition Controller
Brand:
Sigma
| Category:
Controller
| Size: 0 MB
Table of Contents
Safety Information
2
Safety Symbols
2
Limitation of Warranty
3
Return Policy
3
Warranty Information
3
Table of Contents
4
Chapter 1 Quick Start
6
Introduction
6
Thin Film Process Overview
6
Front Panel
7
Rear Panel
8
System Connections
9
Installation
10
Process Setup
11
Depositing a Film
13
Chapter 2 Operation
15
Introduction
15
Definitions
15
Defining a Film
15
Defining a Process
19
Sensor Setup
21
Source Setup
24
Running a Process
25
Loop Tuning
29
Troubleshooting
31
Chapter 3 Menus
34
Introduction
34
Main Menu
38
Quick Setup Menu
38
Process Menus
40
Film Menus
44
System Parameters Menu
51
I/O Setup
54
Chapter 4 Options
57
Introduction
57
Options Cards
57
Full Rack Extender Installation
57
Material Parameters
58
Specifications
59
EC Declaration of Conformity
64
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